Multi-element spreading sensor array for electrical discrimination of complex VOCs
| Project/Area Number |
19J12232
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| Research Category |
Grant-in-Aid for JSPS Fellows
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| Allocation Type | Single-year Grants |
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| Section | 国内 |
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| Review Section |
Basic Section 21060:Electron device and electronic equipment-related
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| Research Institution | The University of Tokyo (2020)
Kyushu University (2019) |
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Principal Investigator |
ZENG Hao 東京大学, 大学院工学研究科, 特別研究員(PD)
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| Project Period (FY) |
2019-04-25 – 2021-03-31
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| Project Status |
Completed (Fiscal Year 2020)
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| Budget Amount *help |
¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 2020: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2019: ¥900,000 (Direct Cost: ¥900,000)
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| Keywords | thousand-bit sensors / crossbar array / exhaled breath / sensing |
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| Outline of Research at the Start |
(1) Fabrication of Multi-Element Metal Oxide Sensor Array: This sensor array based on multi-element composition spreading oxide sensing layer would greatly enhance the accuracy of complex molecular detection.
(2) Optimization of Material/Device Parameters:A distribution of chemical reactivity in the sensing layer is evaluated through measurements of sensor response to single species at each crossbar point.
(3) Electrical Discrimination of Complex VOCs: The evaluation system including optimized sensor array chip is built up to classify analyte gases.
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| Outline of Annual Research Achievements |
With the support from JSPS during two years, the Thousand-bit sensor array has been successfully fabricated, and great progress in exhaled breath performance has been observed with high accuracy with reliability.
In the fabrication process of the sensor array, we have noticed the structure design and the materials selection of the unit in a thousand-bit sensor array can gigantically alter the performance of the device. To avoid the drawback of conventional laser-lithography, we have proposed a two-layer photoresist-assisted method to improve the reproducibility of our device performance. To avoid the contact problem between the sensing element and electrode, we used metallic metal oxide instead of conventional Ti contact. We successfully avoid the thermal oxidization on contact via using metallic Antimony doped Tin Oxide as electrode, meanwhile, we also observed that the anomalous behavior of the interface between ITO electrode and SnO2 single crystalline structure, which indicated that not all metallic oxide is suitable as electrode to avoid thermal degradation.
In the sensing unit design, we comprehensively did literature survey based on metal oxide nanomaterials based gas sensors to maximize the merit of our device. With the guidance from our literature review, we observed the disparity in individual based on the resistance variation from our original system by measuring the exhaled breath. Moreover, we successfully distinguished people who has drunk or not.
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| Research Progress Status |
令和2年度が最終年度であるため、記入しない。
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| Strategy for Future Research Activity |
令和2年度が最終年度であるため、記入しない。
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Report
(2 results)
Research Products
(6 results)
