• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

バリウムシリサイド薄膜の高品質化による高効率Siベースタンデム型太陽電池の作製

Research Project

Project/Area Number 19J21372
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section国内
Review Section Basic Section 21050:Electric and electronic materials-related
Research InstitutionUniversity of Tsukuba

Principal Investigator

山下 雄大  筑波大学, 数理物質科学研究科, 特別研究員(DC1)

Project Period (FY) 2019-04-25 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥2,800,000 (Direct Cost: ¥2,800,000)
Fiscal Year 2021: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2020: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2019: ¥1,000,000 (Direct Cost: ¥1,000,000)
Keywordsシリサイド半導体 / 界面層 / 薄膜太陽電池 / ヘテロ接合 / 太陽電池 / バリウムシリサイド / デバイスシミュレーション / ヘテロ界面 / パッシベーション
Outline of Research at the Start

資源が豊富なBaとSiからなるシリサイド半導体BaSi2をトップセルとし、Siをボトムセルに用いた「BaSi2-pn/Si-pnタンデム型太陽電池」による、高い変換効率と低い材料コストを両立する民生用太陽電池(η>30%)の実証を目指している。本研究では、この要素技術である(1)欠陥密度の制御 (2)pn接合の急峻化 (3)デバイス構造設計 に焦点を当て、研究を遂行する。

Outline of Annual Research Achievements

昨年度までの研究では、BaSi2太陽電池の新規構造としてワイドギャップn型半導体とのヘテロ接合を検討し、ヘテロ界面におけるキャリアの再結合を防ぐ目的で、界面層の挿入を検討した。本年は引き続き、Zn1-xGexOy(ZGO)界面層に注目し、BaSi2との界面特性を調査した。
まず、ZGO薄膜をスパッタ法により堆積し、堆積温度が特性に与える影響を調査した。Zn組成は、基板温度が増加するにしたがって減少した。これは、Znの蒸気圧がGeに比べて大きく、堆積中および堆積後に、成膜された膜からZnが優先的に再蒸発したためであると考えられる。Ge組成から算出した電子親和力は3.2から2.9 eVまで変化した。これらの値は、BaSi2に対して小さなSpike型のバンドオフセットとなるため、再結合割合が小さいZGO/BaSi2ヘテロ界面を形成するのに適しているといえる。また、ZGO膜のバンドギャップは4-5 eVの範囲にあり、太陽光を透過するのに十分な大きさであった。以上より、50 °Cで成膜し、Ge組成が0.66のとき、界面層に最も適したバンドアライメントが得られることがわかった。
次に、ZGO/BaSi2積層構造を作製し、界面反応やパッシベーション効果について調査した。分光感度特性は、従来のパッシベーション膜であるa-Siを用いた試料と比較して、300-600 nmの短波長領域で分光感度が増加した。短波長領域におけるBaSi2の光吸収係数は非常に大きいため、ZGOキャップにより、表面の再結合が抑制されている可能性が高い。XPSによる調査の結果、ZGOキャップ時は、BaSi2最表面の酸化が抑制されることがわかった。以上の結果から、ZGOはBaSi2表面のパッシベーション層として機能し、同時にp-BaSi2層からZGO層を介した電子輸送を妨げないとわかった。

Research Progress Status

令和3年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

令和3年度が最終年度であるため、記入しない。

Report

(3 results)
  • 2021 Annual Research Report
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • Research Products

    (42 results)

All 2022 2021 2020 2019 Other

All Int'l Joint Research (1 results) Journal Article (20 results) (of which Int'l Joint Research: 5 results,  Peer Reviewed: 20 results) Presentation (21 results) (of which Int'l Joint Research: 15 results,  Invited: 1 results)

  • [Int'l Joint Research] デルフト工科大学(オランダ)

    • Related Report
      2019 Annual Research Report
  • [Journal Article] Zn1-xGexOy passivating interlayers for BaSi2 thin-film solar cells2022

    • Author(s)
      Yamashita Yudai、Takayanagi Kaori、Gotoh Kazuhiro、Toko Kaoru、Usami Noritaka、Suemasu Takashi
    • Journal Title

      ACS Applied Materials & Interfaces

      Volume: 14 Issue: 11 Pages: 13828-13835

    • DOI

      10.1021/acsami.1c23070

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-temperature post-annealing effect on the surface morphology and photoresponse and electrical properties of B-doped BaSi2 films grown by molecular beam epitaxy under various Ba-to-Si deposition rate ratios2022

    • Author(s)
      Narita Shunsuke、Yamashita Yudai、Aonuki Sho、Saitoh Noriyuki、Toko Kaoru、Suemasu Takashi
    • Journal Title

      Journal of Crystal Growth

      Volume: 578 Pages: 126429-126429

    • DOI

      10.1016/j.jcrysgro.2021.126429

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth conditions for high-photoresponsivity randomly oriented polycrystalline BaSi2 films by radio-frequency sputtering: Comparison with BaSi2 epitaxial films2022

    • Author(s)
      Koitabashi Ryota、Kido Kazuki、Hasebe Hayato、Yamashita Yudai、Toko Kaoru、Mesuda Masami、Suemasu Takashi
    • Journal Title

      Applied Physics Express

      Volume: 15 Issue: 2 Pages: 025502-025502

    • DOI

      10.35848/1882-0786/ac4676

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Solar cells based on n+-AZO/p-BaSi2 heterojunction: Advanced opto-electrical modelling and experimental demonstration2021

    • Author(s)
      Yamashita Yudai、Ruiz Tobon Carlos Mario、Santbergen Rudi、Zeman Miro、Isabella Olindo、Suemasu Takashi
    • Journal Title

      Solar Energy Materials and Solar Cells

      Volume: 230 Pages: 111181-11

    • DOI

      10.1016/j.solmat.2021.111181

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Solar cell operation of sputter-deposited n-BaSi2/p-Si heterojunction diodes and characterization of defects by deep-level transient spectroscopy2021

    • Author(s)
      Taira Nemoto, Sho Aonuki, Ryota Koitabashi, Yudai Yamashita, Masami Mesuda, Kaoru Toko and Takashi Suemasu
    • Journal Title

      Applied Physics Express

      Volume: 14 Issue: 5 Pages: 051010-051010

    • DOI

      10.35848/1882-0786/abfb87

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low thermal conductivity of complex thermoelectric barium silicide film epitaxially grown on Si2021

    • Author(s)
      Ishibe Takafumi、Chikada Jinichiro、Terada Tsukasa、Komatsubara Yuki、Kitaura Reona、Yachi Suguru、Yamashita Yudai、Sato Takuma、Suemasu Takashi、Nakamura Yoshiaki
    • Journal Title

      Applied Physics Letters

      Volume: 119 Issue: 14 Pages: 141603-141603

    • DOI

      10.1063/5.0063531

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of high-photoresponsivity BaSi2 films on glass substrate by radio-frequency sputtering for solar cell applications2021

    • Author(s)
      Ryota Koitabashi, Taira Nemoto, Yudai Yamashita, Masami Mesuda, Kaoru Toko, Takashi Suemasu
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 54 Issue: 13 Pages: 135106-135106

    • DOI

      10.1088/1361-6463/abd434

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of post-annealing on the significant photoresponsivity enhancement of BaSi2 epitaxial films on Si(111)2021

    • Author(s)
      Yurika Haku, Sho Aonuki, Yudai Yamashita, Kaoru Toko, Takashi Suemasu
    • Journal Title

      Applied Physics Express

      Volume: 14 Issue: 2 Pages: 021003-021003

    • DOI

      10.35848/1882-0786/abdc9f

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mechanisms of carrier lifetime enhancement and conductivity-type switching on hydrogen-incorporated arsenic-doped BaSi22021

    • Author(s)
      Sho Aonuki, Zhihao Xu, Yudai Yamashita, Kazuhiro Gotoh, Kaoru Toko, Noritaka Usami, Andrew B. Filonov, Siarhei A. Nikitsiuk, Dmitri B. Migas, Denis A. Shohonov, Takashi Suemasu
    • Journal Title

      Thin Solid Films

      Volume: 724 Pages: 138629-138629

    • DOI

      10.1016/j.tsf.2021.138629

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Significant enhancement of photoresponsivity in As-doped n-BaSi2 epitaxial films by atomic hydrogen passivation2020

    • Author(s)
      Sho Aonuki, Yudai Yamashita, Takuma Sato, Zhihao Xu, Kazuhiro Gotoh , Kaoru Toko , Yoshikazu Terai, Noritaka Usami, and Takashi Suemasu
    • Journal Title

      Applied Physics Express

      Volume: 13 Issue: 5 Pages: 051001-051001

    • DOI

      10.35848/1882-0786/ab8725

    • NAID

      120007127620

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Atomic hydrogen passivation for photoresponsivity enhancement of boron-doped p-BaSi2 films and performance improvement of boron-doped p-BaSi2/n-Si heterojunction solar cells2020

    • Author(s)
      Zhihao Xu, Takuma Sato, Louise Benincasa, Yudai Yamashita, Tianguo Deng, Kazuhiro Gotoh, Kaoru Toko, Noritaka Usami, Andrew B. Filonov, Dmitri B. Migas, Denis A. Shohonov, Takashi Suemasu
    • Journal Title

      Journal of Applied Physics

      Volume: 127 Issue: 23 Pages: 233104-233104

    • DOI

      10.1063/5.0005763

    • NAID

      120007168368

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Effects of molecular beam epitaxy growth conditions on grain size and lattice strain in a-axis-oriented BaSi2 films2020

    • Author(s)
      Yamashita Yudai、Sato Takuma、Toko Kaoru、Suemasu Takashi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SF Pages: SFFA09-SFFA09

    • DOI

      10.35848/1347-4065/ab6b7a

    • NAID

      120007127600

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Modeling the effects of defect parameters on the performance of a p-BaSi2/n-Si heterojunction solar cell2020

    • Author(s)
      Deng Tianguo、Xu Zhihao、Yamashita Yudai、Sato Takuma、Toko Kaoru、Suemasu Takashi
    • Journal Title

      Solar Energy Materials and Solar Cells

      Volume: 205 Pages: 110244-110244

    • DOI

      10.1016/j.solmat.2019.110244

    • NAID

      120007132681

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of As-doped n-type BaSi<sub>2</sub> epitaxial films grown by molecular beam epitaxy2020

    • Author(s)
      Aonuki Sho、Yamashita Yudai、TOKO Kaoru、SUEMASU Takashi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SF Pages: SFFA01-SFFA01

    • DOI

      10.7567/1347-4065/ab5b7a

    • NAID

      120007127611

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Influence of Ba-to-Si deposition rate ratios on the electrical and optical properties of B-doped BaSi<sub>2</sub> epitaxial films2020

    • Author(s)
      Sugiyama Shu、Yamashita Yudai、TOKO Kaoru、SUEMASU Takashi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SF Pages: SFFA04-SFFA04

    • DOI

      10.7567/1347-4065/ab65ae

    • NAID

      120007127606

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of sputtering pressure and temperature of ITO electrodes on the performance of p-BaSi2/n-Si heterojunction solar cells2020

    • Author(s)
      Sugiyama Ryota、Yamashita Yudai、Toko Kaoru、Suemasu Takashi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SF Pages: SFFA07-SFFA07

    • DOI

      10.35848/1347-4065/ab70a8

    • NAID

      120007127603

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Simple way of finding Ba to Si deposition rate ratios for high photoresponsivity in BaSi2 films by Raman spectroscopy2019

    • Author(s)
      Yamashita Yudai、Takahara Yuuki、Sato Takuma、Toko Kaoru、Uedono Akira、Suemasu Takashi
    • Journal Title

      Applied Physics Express

      Volume: 12 Issue: 5 Pages: 055506-055506

    • DOI

      10.7567/1882-0786/ab14b9

    • NAID

      120007127924

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Three-step growth of highly photoresponsive BaSi2 light absorbing layers with uniform Ba to Si atomic ratios2019

    • Author(s)
      Yamashita Yudai、Sato Takuma、Saitoh Noriyuki、Yoshizawa Noriko、Toko Kaoru、Suemasu Takashi
    • Journal Title

      Journal of Applied Physics

      Volume: 126 Issue: 21 Pages: 215301-215301

    • DOI

      10.1063/1.5128690

    • NAID

      120007132684

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Investigation of native defects in BaSi2 epitaxial films by electron paramagnetic resonance2019

    • Author(s)
      Sato Takuma、Lombard Christian、Yamashita Yudai、Xu Zhihao、Benincasa Louise、Toko Kaoru、Gambarelli Serge、Suemasu Takashi
    • Journal Title

      Applied Physics Express

      Volume: 12 Issue: 6 Pages: 061005-061005

    • DOI

      10.7567/1882-0786/ab2062

    • NAID

      120007127923

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Correlation of native defects between epitaxial films and polycrystalline BaSi2 bulks based on photoluminescence spectra2019

    • Author(s)
      Sato Takuma、Yamashita Yudai、Xu Zhihao、Toko Kaoru、Gambarelli Serge、Imai Motoharu、Suemasu Takashi
    • Journal Title

      Applied Physics Express

      Volume: 12 Issue: 11 Pages: 111001-111001

    • DOI

      10.7567/1882-0786/ab476f

    • NAID

      120007127613

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] Formation of Zn1-xGexO thin films as interlayers for n+-AZO/p-BaSi2 heterojunction solar cells2021

    • Author(s)
      Yudai Yamashita、Kaoru Toko、Takashi Suemasu
    • Organizer
      Materials Research Meeting 2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputtering Zn1-xGexO thin films towards n+-AZO/p-BaSi2 heterojunction solar cells2021

    • Author(s)
      Yudai Yamashita、Kaoru Toko、Takashi Suemasu
    • Organizer
      31st International Photovoltaics Science and Engineering Conference (PVSEC-31)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Formation of n+-AZO/p-BaSi2 heterojunction solar cells with Zn1-xGexO interlayers2021

    • Author(s)
      Yudai Yamashita、Kaoru Toko、Olindo Isabella、Takashi Suemasu
    • Organizer
      2021 International Conferene on Solid State Devices and Materials (SSDM2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] n+-AZO/p-BaSi2薄膜太陽電池の高効率化に向けたZn1-xGexO界面層探索2021

    • Author(s)
      山下 雄大、都甲 薫、末益 崇
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] n+-AZO/p-BaSi2太陽電池におけるZn1-xGexOy界面層の堆積温度依存性2021

    • Author(s)
      山下 雄大、都甲 薫、末益 崇
    • Organizer
      第19回シリサイド系半導体・夏の学校
    • Related Report
      2021 Annual Research Report
  • [Presentation] n+-AZO/p-BaSi2太陽電池におけるZn1-xGexOバッファ層の検討2021

    • Author(s)
      山下 雄大, 北村 未歩,堀場 弘司, 都甲 薫, 末益 崇
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] First demonstration of n+-AZO/p-BaSi2 thin film solar cells2020

    • Author(s)
      Yudai Yamashita, Kaoru Toko, Takashi Suemasu
    • Organizer
      Fifth Asian School-Conference on Physics and Technology of Nanostructured Materials (ASCO-NANOMAT 2020)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optical 3D device simulation of BaSi2 thin film solar cells2020

    • Author(s)
      Yudai Yamashita, Rudi Santbergen, Carlos Mario Ruiz Tobon, Miro Zeman, Olindo Isabella, Takashi Suemasu
    • Organizer
      37th European PV Solar Energy Conference and Exhibition (37th EU-PVSEC)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 3D device simulation and first demonstration of BaSi2 thin film solar cells2020

    • Author(s)
      Yudai Yamashita, Rudi Santbergen, Carlos Mario Ruiz Tobon, Olindo Isabella, Takashi Suemasu
    • Organizer
      PRiME 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] First Operation of n+-AZO/p-BaSi2 Thin Film Solar Cells2020

    • Author(s)
      Yudai Yamashita, Kaoru Toko, Takashi Suemasu
    • Organizer
      The 30th International Photovoltaic Science and Engineering Conference (PVSEC-30)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 3D光学・電気シミュレーションによるn+-AZO/p-BaSi2ヘテロ接合太陽電池のデバイス設計および動作実証2020

    • Author(s)
      山下 雄大, Carlos M. Ruiz Tobon, Rudi Santbergen, Olindo Isabella, 都甲 薫, 末益 崇
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] n+-AZO/p-BaSi2ヘテロ接合太陽電池のデバイス設計および作製2020

    • Author(s)
      山下 雄大, Carlos M. Ruiz Tobon, Rudi Santbergen, Olindo Isabella, 末益 崇
    • Organizer
      第17回「次世代の太陽光発電」シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] 3D光学シミュレーションによるBaSi2薄膜太陽電池のデバイス設計2020

    • Author(s)
      山下雄大, Rudi Santbergen, Olindo Isabella, 都甲 薫, 末益 崇
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Characterization of Defect Levels in BaSi2 by DLTS and Significant Improvement of Photoresponsivity by Increasing Growth Temperature2019

    • Author(s)
      Y. Yamashita, T. Sato, K. Toko, T. Suemasu
    • Organizer
      MRS Spring Meeting and exhibit
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Epitaxial growth of BaSi2 light absorbers by molecular beam epitaxy and significant photoresponsivity enhancement by increased growth temperatures2019

    • Author(s)
      Y. Yamashita, K. Toko and T. Suemasu
    • Organizer
      Compound Semiconductor Week 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Marked Improvement of the photoresponsivity of BaSi2 light absorbers by increasing growth temperature and three-step growth method.2019

    • Author(s)
      Y. Yamashita, K. Kodama, K. Toko, and T. Suemasu
    • Organizer
      46th IEEE Photovoltaic Specialists Conference
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Molecular Beam Epitaxy of High-quality Undoped BaSi2 Light Absorbers using Threestep Growth Method2019

    • Author(s)
      Y. Yamashita, T. Sato, K. Toko, T. Suemasu
    • Organizer
      The 5th Asia-Pacific Conference on Semiconducting Silicides and Related Materials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Molecular beam epitaxy of BaSi2 light absorbers with smooth BaSi2/Si interface using three-step growth method2019

    • Author(s)
      Y. Yamashita, T. Sato, K. Toko and T. Suemasu
    • Organizer
      29th International Photovoltaic Science and Engineering Conference
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of As-doped n-type BaSi2 Films Grown by Molecular Beam Epitaxy2019

    • Author(s)
      S. Aonuki, Y. Yamashita, K. Toko and T. Suemasu
    • Organizer
      The 5th Asia-Pacific Conference on Semiconducting Silicides and Related Materials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electron paramagnetic resonance spectra of BaSi2 epitaxial films and bulk samples2019

    • Author(s)
      T. Sato, Y. Yamashita, Z. Xu, L. Benincasa, K. Toko, S. Gambarelli, T. Suemasu
    • Organizer
      The 5th Asia-Pacific Conference on Semiconducting Silicides and Related Materials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Influence of Ba to Si rate ratio on the properties of B-doped BaSi2 epitaxial films2019

    • Author(s)
      S. Sugiyama, Y. Kimura, Y. Yamashita, K. Toko, N. Usami, and T. Suemasu
    • Organizer
      The 5th Asia-Pacific Conference on Semiconducting Silicides and Related Materials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research

URL: 

Published: 2019-05-29   Modified: 2024-03-26  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi