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Developments of the forming techniques of hexagonal boron nitride films using tribo-chemical reactions

Research Project

Project/Area Number 19K04162
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 18040:Machine elements and tribology-related
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Murakami Takashi  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (40344098)

Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2021: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2020: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2019: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Keywordsトライボロジー / ホウ化物 / 高温 / 放電プラズマ焼結 / 窒化ホウ素
Outline of Research at the Start

近年火力発電用タービンのシール材、自動車のターボチャージャーの軸受等の用途で、高
温で低摩擦・低摩耗を示す摺動材料が求められている。本研究では、高温でホウ化物と窒化物を摺動させた時、摺動面に低摩擦の六方晶窒化ホウ素(h-BN)薄膜が形成される機構を利用して、室温~1000℃で摩擦係数0.05以下かつ比摩耗量10-7mm3/Nm以下を示す摺動材料を開発する。またこのh-BN薄膜形成機構を利用して、高純度のh-BN薄膜を得るための摺動条件を明らかにし、得られる高純度h-BN薄膜の発光特性、欠陥、不純物の評価を行い、最終的に深紫外線発光素子材料として利用できる薄膜製造条件を明らかにする。

Outline of Final Research Achievements

Nowadays, new materials showing low friction and low wear rates at high temperatures have been explored in the high-temperature mold and thermal power generation industries. Recently, we clarified that MoB, which is one of the hard and low wear materials, showed low friction when sliding against Si3N4 at temperatures between 800 degree C and 1000 degree C in air. We considered that this low friction was due to the formation of low friction h-BN and MoO3 films on the worn surfaces. In this study, we explored low friction and low wear materials in the temperature range of room temperature to 1000 degree C in air. Besides we explored the forming method of high purity h-BN film. We found that ReB2 specimens showed low friction at room temperature, 800 degree C and 1000 degree C when sliding against Si3N4 balls in air. Also we found that high purity h-BN film was obtained by holding the SiB6 and Si3N4 specimens in Si3N4 and B4C powders, respectively, at 1500 degree C in a vacuum.

Academic Significance and Societal Importance of the Research Achievements

従来より高温用金型や火力発電、自動車、航空機などの業界で大気中室温~1000℃で連続して低摩擦・低摩耗を示す材料が求められてきているが、現在のところそのような材料は開発されていない。また六方晶窒化ホウ素は半導体であるため、深紫外線発光素子材料等への応用も期待されているが、現在の製造方法である気相合成法は毒劇物を使用するため環境負荷が大きい欠点がある。本研究で得られた低摩擦・低摩耗材料や六方晶窒化ホウ素の作製方法がさらに発展し、工業的に利用されるようになれば、そのインパクトは非常に大きいのではと考えている。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Research-status Report
  • 2019 Research-status Report
  • Research Products

    (8 results)

All 2021 2020 Other

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (5 results) (of which Int'l Joint Research: 2 results,  Invited: 3 results) Remarks (1 results)

  • [Journal Article] High-Temperature Tribological Properties of ReB2-based ceramic/Si3N4 Sliding Pairs2021

    • Author(s)
      Takashi Murakami, Tsuguyori Ohana
    • Journal Title

      Materials Science Forum

      Volume: 1016 Pages: 978-983

    • DOI

      10.4028/www.scientific.net/msf.1016.978

    • Related Report
      2020 Research-status Report 2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Tribological Behaviors of B<sub>6</sub>O/Si<sub>3</sub>N<sub>4</sub> and B<sub>6</sub>O/Al<sub>2</sub>O<sub>3</sub> Sliding Pairs in Water2020

    • Author(s)
      Takashi Murakami, Atsushi Korenaga, Tsuguyori Ohana
    • Journal Title

      MATERIALS TRANSACTIONS

      Volume: 61 Issue: 3 Pages: 475-481

    • DOI

      10.2320/matertrans.MT-M2019253

    • NAID

      130007801640

    • ISSN
      1345-9678, 1347-5320
    • Year and Date
      2020-03-01
    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Presentation] 産総研の概要及び研究紹介2021

    • Author(s)
      村上敬
    • Organizer
      宇都宮高校首都圏研修
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] Friction and Wear Properties of Borides at High Temperatures2021

    • Author(s)
      村上敬
    • Organizer
      THERMEC' 2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Friction and Wear Properties of Borides at High Temperatures2021

    • Author(s)
      Takashi Murakami, Tsuguyori Ohana
    • Organizer
      THERMEC 2021
    • Related Report
      2020 Research-status Report 2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] ReB2基セラミックスの高温トライボロジー特性2020

    • Author(s)
      村上 敬
    • Organizer
      トライボロジー会議2020秋別府
    • Related Report
      2020 Research-status Report
  • [Presentation] ReB2基セラミックス/Si3N4摺動面の高温摩擦・摩耗特性2020

    • Author(s)
      村上 敬、大花 継頼
    • Organizer
      日本金属学会2020年春期大会
    • Related Report
      2019 Research-status Report
  • [Remarks] 特殊環境(高温、水中等)用摺動材料の開発

    • URL

      https://staff.aist.go.jp/murakami.t/

    • Related Report
      2021 Annual Research Report

URL: 

Published: 2019-04-18   Modified: 2023-01-30  

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