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Fabrication Method for Micro Systems by Using 3-Dimensional Compliant Mechanism

Research Project

Project/Area Number 19K04278
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 20010:Mechanics and mechatronics-related
Research InstitutionShibaura Institute of Technology

Principal Investigator

Nagasawa Sumito  芝浦工業大学, 工学部, 教授 (30400279)

Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2021: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2020: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2019: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywordsマイクロロボット / コンプライアント・メカニズム / MEMS / 折り紙構造 / 形状記憶合金アクチュエータ / 積層型静電容量角度センサ / ポリマーアクチュエータ / コンプライアント・ヒンジ / マイクロ・ロボット / 6脚マイクロ・ロボット / 形状記憶ポリマーアクチュエータ / マイクロシステム
Outline of Research at the Start

可動部分を有するマイクロシステムでは,部品が小さく組立てが難しいため,コンプライアント・メカニズム(柔軟なヒンジと硬い構造体の一体化メカニズム)が提案されている.2次元のコンプライアント・メカニズムは数式モデル化も容易で,MEMSの重要設計手法である.3次元では数式モデルの3Dプリンタによる報告だけで,MEMSプロセスでは実現されていない.
MEMSプロセスは高精度にセンサやアクチュエータを集積できるが,本質的には2次元の平面微細加工技術である.MEMSプロセスによる折り上げ構造体に,柔軟な素材による形状異方性を持つヒンジ部を埋め込み,3次元コンプライアント・メカニズムを実現する.

Outline of Final Research Achievements

In micro systems that have moving joints such as a micro robot, assembling parts is difficult. When assembling micro systems, grasping such small parts tightly, alignment them to correct position and direction are necessary. As a solution to this problem, a compliant mechanism that integrates soft deformed parts and hard structural parts has been proposed, and it makes the small parts assembling simple.
Using MEMS (Micro-Electro-Mechanical Systems) techniques, a three-dimensional compliant mechanism that can be used in a micro system was realized. A small 6-legged robot using this compliant mechanism was designed and evaluated.
During the research period, 4 peer-reviewed international papers were published and presentations in 9 international conferences and 10 domestic conferences were performed.

Academic Significance and Societal Importance of the Research Achievements

本研究成果の学術的意義はマイクロシステムの部品組立を簡単化するコンプライアント・メカニズムの設計手法とMEMSによる製造プロセスを確立したことである.センサやアクチュエータなどを含めた集積化も実施した.
本研究の製造プロセスでは,真空プロセスが不要でプロセス時間が短縮されるため,設計変更が容易である.例えば医療用マイクロシステムではカスタマイズの容易さ・迅速さは大きなメリットである.飲む胃カメラシステムやカテーテル手術用器具など,利用者の身体的特徴や必要な検査に応じて,筐体サイズや形状,センサやアクチュエータ,バッテリ容量等を最適設計でき,それがすぐに利用者の下に届く便利なシステムが期待できる.

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Research-status Report
  • 2019 Research-status Report
  • Research Products

    (24 results)

All 2022 2021 2020 2019

All Journal Article (5 results) (of which Peer Reviewed: 3 results) Presentation (19 results) (of which Int'l Joint Research: 9 results)

  • [Journal Article] SMA micro hand implemented in small robot for generating gestures2021

    • Author(s)
      Takumi Ishikawa, Sumito Nagasawa
    • Journal Title

      Intelligent Service Robotics

      Volume: Accepted Pages: 0-0

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Stacked electrostatic angle sensor implemented in micro robot leg joints2021

    • Author(s)
      Hara Tomoya、Asamura Kazuto、Nagata Yuya、Nagasawa Sumito
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SC Pages: SCCL08-SCCL08

    • DOI

      10.35848/1347-4065/abe5c0

    • Related Report
      2020 Research-status Report
  • [Journal Article] A micro hexapod robot for swarm applications assembled from a single FPC sheet2021

    • Author(s)
      Asamura Kazuto、Nagasawa Sumito
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SC Pages: SCCL03-SCCL03

    • DOI

      10.35848/1347-4065/abe689

    • Related Report
      2020 Research-status Report
  • [Journal Article] MEMS fabrication of compliant sheet for micro hexapod robots2020

    • Author(s)
      Asamura Kazuto、Nagasawa Sumito
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SI Pages: SIIL03-SIIL03

    • DOI

      10.35848/1347-4065/ab7439

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Vibrational communication system in ultrasonic frequency band2020

    • Author(s)
      Takasawa R.、Nagasawa S.
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SI Pages: SIIL05-SIIL05

    • DOI

      10.35848/1347-4065/ab80e0

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Presentation] ジェスチャ用マイクロ多指ハンドの小型ロボットへの実装と評価2022

    • Author(s)
      新田雄真, 長澤純人
    • Organizer
      日本機械学会関東学生会第61 回学生員卒業研究発表講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 自動組立のためのSMAを用いた任意角度の自動折り上げユニット2022

    • Author(s)
      冨永裕太, 長澤純人
    • Organizer
      日本機械学会関東学生会第61 回学生員卒業研究発表講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] LiDARを用いたMicro-HexapodへのSLAMの実装2022

    • Author(s)
      関拓, 長澤純人
    • Organizer
      日本機械学会関東学生会第61 回学生員卒業研究発表講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] MEMS3次元コンプライアントヒンジによるマイクロロボットフレーム2022

    • Author(s)
      金井貴勲, 長澤純人
    • Organizer
      日本機械学会関東支部 第28期総会・講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Micro-Hexapod Robot Having an Origami-like SU-8 Coated Rigid Frame2021

    • Author(s)
      K. Sugimoto, S. Nagasawa
    • Organizer
      International Microprocesses and Nanotechnology Conference (MNC 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sensor and Actuator Double Functional Component for Micro Robot Leg Joints2021

    • Author(s)
      T. Hara, S. Nagasawa
    • Organizer
      International Microprocesses and Nanotechnology Conference (MNC 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sequential Automatic Assembling Method for Microstructure Using Shape Memory Polymer Units2021

    • Author(s)
      K. Kojima, S. Nagasawa
    • Organizer
      International Microprocesses and Nanotechnology Conference (MNC 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Continuous Size Classification Device for Marine Microplastics by Pinched Flow Fractionation2021

    • Author(s)
      K. Shimomoto, S. Nagasawa
    • Organizer
      International Microprocesses and Nanotechnology Conference (MNC 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 画素ごとに光学設計したマイクロレンズアレイのdeep RIEによる製作2021

    • Author(s)
      空真奈花, 長澤純人
    • Organizer
      日本機械学会ロボティクス・メカトロニクス講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] マイクロコンピューターを搭載した構造物の形状記憶ポリマーユニットを用いた順序自動組立2021

    • Author(s)
      児島啓太, 長澤純人
    • Organizer
      日本機械学会ロボティクス・メカトロニクス講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Micro Hexapod Robot for Swarm Applications Assembled from One FPC Sheet2020

    • Author(s)
      K. Asamura, S. Nagasawa
    • Organizer
      33rd International Microprocesses and Nanotechnology Conference (MNC 2020)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Stacked Electrostatic Angle Sensor Implemented in Micro Robot Leg Joints2020

    • Author(s)
      T. Hara, Y. Nagata, S. Nagasawa
    • Organizer
      33rd International Microprocesses and Nanotechnology Conference (MNC 2020)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Electrostatic Actuator Driven by Commercial Type Wireless Power Supply2020

    • Author(s)
      T. Tsuchida, S. Nagasawa
    • Organizer
      33rd International Microprocesses and Nanotechnology Conference (MNC 2020)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] 形状記憶ポリマーユニットを用いた微細構造物の順序自動組立2020

    • Author(s)
      児島啓太, 長澤純人
    • Organizer
      日本機械学会関東学生会第60 回学生員卒業研究発表講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] コンプライアントヒンジのモデル化とマイクロロボットへの実装2020

    • Author(s)
      金井貴勲, 長澤純人
    • Organizer
      日本機械学会ロボティクス・メカトロニクス講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] SU-8 Fabrication Process for Micro Hexapod Robot with Wide Joint Ranges2019

    • Author(s)
      K. Asamura, S. Nagasawa
    • Organizer
      32nd International Microprocesses and Nanotechnology Conference (MNC 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Study on Vibrational Communication System in Ultrasonic Frequency Band2019

    • Author(s)
      R. Takasawa, S. Nagasawa
    • Organizer
      32nd International Microprocesses and Nanotechnology Conference (MNC 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 小型ロボット用SMAマイクロ多指ハンドによるジェスチャ生成2019

    • Author(s)
      石川拓実, 長澤純人
    • Organizer
      ロボティクス・メカトロニクス 講演会2019
    • Related Report
      2019 Research-status Report
  • [Presentation] 可動ヒートシンク冷却機構による速応答性SMAアクチュエータを用いた小型歩行ロボット2019

    • Author(s)
      淺村和人, 長澤純人
    • Organizer
      ロボティクス・メカトロニクス 講演会2019
    • Related Report
      2019 Research-status Report

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Published: 2019-04-18   Modified: 2023-01-30  

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