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Proposal of high-performance materials for artificial synapses via atomic-scale observations of resistive switching oxides

Research Project

Project/Area Number 19K04484
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 21050:Electric and electronic materials-related
Research InstitutionHokkaido University

Principal Investigator

Fukuchi Atsushi  北海道大学, 情報科学研究院, 助教 (00748890)

Co-Investigator(Kenkyū-buntansha) 有田 正志  北海道大学, 情報科学研究院, 准教授 (20222755)
高橋 庸夫  北海道大学, 情報科学研究院, 名誉教授 (90374610)
Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2021: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2020: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2019: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Keywordsメモリスタ / アモルファス酸化物 / 抵抗スイッチング / 走査型プローブ顕微鏡法 / 人工シナプス / 非線形伝導現象 / ニューロモルフィックデバイス / プローブ顕微鏡 / 抵抗変化型メモリ / 酸化タンタル / 酸化物薄膜 / シナプス素子 / 金属酸化物 / 薄膜 / 抵抗変化メモリ
Outline of Research at the Start

金属酸化物における電場印加による欠陥移動とそれに伴う電気抵抗変化を、脳型コンピューティングにおける人工シナプス素子の動作原理として応用する試みが近年盛んである。一方でこれらのシナプス型の抵抗変化現象では、その物理的な動作機構が明確化に至っておらず、実用化に向けた特性向上が困難な状況となっている。本研究課題では、各種の抵抗変化酸化物で原子レベルの平坦性を持つ超平坦薄膜を新たに開発し、シナプス型動作時における欠陥移動と電流分布変化をプローブ顕微鏡計測によって原子スケールで精密に評価する事で、シナプス型抵抗変化の物理機構を解明するとともに、実用に適する新規な人工シナプス材料の提案を目指す。

Outline of Final Research Achievements

To elucidate the underlying mechanisms of analog (continuous) resistive switching in amorphous metal oxides, which has gained attention as important principles of electronic synapses, atomically flat thin films of amorphous metal oxides were fabricated by the pulsed laser deposition method, and detailed probe microscopy analysis of analog resistive switching was conducted on the atomically flat surfaces. In the atomically flat amorphous TaOx films fabricated in this study, three distinct types of analog resistive switching phenomena (current-dependent set, voltage-dependent reset, and voltage-application-time-dependent switching), which have been reported in TaOx-based resistive switching devices, were directly observed by probe microscopy measurements, and the causal ion migration was visualized in angstrom scale. The observations revealed detailed pathways of the analog resistive switching in amorphous TaOx and material properties critical for analog type of switching operations.

Academic Significance and Societal Importance of the Research Achievements

人工シナプス素子をはじめとするニューロモルフィック素子の研究はここ数年において極めて活発化しており、その中でもアモルファス金属酸化物が示すアナログ型の抵抗変化現象は、チップ化への適性の高さなどから人工シナプス素子の原理として応用面で特に有望視され、盛んな研究が展開されている現象である。一方でアモルファス酸化物を用いた人工シナプス素子の近年の研究開発では、その物理機構が未解明であるために十分な特性制御性が得られないことが重大課題として指摘されていたが、本研究の成果はこの問題の解決に直接的に寄与するとともに、素子性能の向上を通じて今後のニューロモルフィック工学全般の進展の一助となる事が期待される。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Research-status Report
  • 2019 Research-status Report
  • Research Products

    (78 results)

All 2022 2021 2020 2019

All Journal Article (11 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 11 results,  Open Access: 2 results) Presentation (67 results) (of which Int'l Joint Research: 32 results,  Invited: 10 results)

  • [Journal Article] Nanoscale Probing of Field-Driven Ion Migration in TaO<sub>x </sub> for Neuromorphic Memristor Applications2021

    • Author(s)
      Tsurumaki-Fukuchi Atsushi、Katase Takayoshi、Ohta Hiromichi、Arita Masashi、Takahashi Yasuo
    • Journal Title

      ECS Transactions

      Volume: 104 Issue: 4 Pages: 93-101

    • DOI

      10.1149/10404.0093ecst

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Initial electrical properties of tantalum oxide resistive memories influenced by oxygen defect concentrations2021

    • Author(s)
      Li Yuanlin、Tsurumaki-Fukuchi Atsushi、Arita Masashi、Takahashi Yasuo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SC Pages: SCCE03-SCCE03

    • DOI

      10.35848/1347-4065/abec5e

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Charge-offset stability of single-electron devices based on single-layered Fe nanodot array2021

    • Author(s)
      Gyakushi Takayuki、Asai Yuki、Honjo Shusaku、Tsurumaki-Fukuchi Atsushi、Arita Masashi、Takahashi Yasuo
    • Journal Title

      AIP Advances

      Volume: 11 Issue: 3 Pages: 035230-035230

    • DOI

      10.1063/5.0040241

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Stable and Tunable Current-Induced Phase Transition in Epitaxial Thin Films of Ca2RuO42020

    • Author(s)
      Tsurumaki-Fukuchi Atsushi、Tsubaki Keiji、Katase Takayoshi、Kamiya Toshio、Arita Masashi、Takahashi Yasuo
    • Journal Title

      ACS Applied Materials & Interfaces

      Volume: 12 Issue: 25 Pages: 28368-28374

    • DOI

      10.1021/acsami.0c05181

    • Related Report
      2020 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Periodic Coulomb blockade oscillations observed in single-layered Fe nanodot array2020

    • Author(s)
      Gyakushi Takayuki、Asai Yuki、Tsurumaki-Fukuchi Atsushi、Arita Masashi、Takahashi Yasuo
    • Journal Title

      Thin Solid Films

      Volume: 704 Pages: 138012-138012

    • DOI

      10.1016/j.tsf.2020.138012

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Filamentary switching of ReRAM investigated by in-situ TEM2020

    • Author(s)
      Arita Masashi、Tsurumaki-Fukuchi Atsushi、Takahashi Yasuo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SG Pages: SG0803-SG0803

    • DOI

      10.35848/1347-4065/ab709d

    • NAID

      120007000861

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Initialization process of Cu-based WOx conductive bridge RAM investigated via in situ transmission electron microscopy2020

    • Author(s)
      Muto Satoshi、Sakai Shinya、Tsurumaki-Fukuchi Atsushi、Arita Masashi、Takahashi Yasuo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SI Pages: SIIE01-SIIE01

    • DOI

      10.35848/1347-4065/ab79eb

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Initial states and analogue switching behaviors of two major tantalum oxide resistive memories2020

    • Author(s)
      Li Yuanlin、Tsurumaki-Fukuchi Atsushi、Arita Masashi、Morie Takashi、Takahashi Yasuo
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: 4 Pages: 044004-044004

    • DOI

      10.35848/1347-4065/ab8022

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Tunnel magnetocapacitance in Fe/MgF2 single nanogranular layered films2020

    • Author(s)
      Msiska Robin、Honjo Shusaku、Asai Yuki、Arita Masashi、Tsurumaki-Fukuchi Atsushi、Takahashi Yasuo、Hoshino Norihisa、Akutagawa Tomoyuki、Kitakami Osamu、Fujioka Masaya、Nishii Junji、Kaiju Hideo
    • Journal Title

      Applied Physics Letters

      Volume: 116 Issue: 8 Pages: 082401-082401

    • DOI

      10.1063/1.5139702

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Characteristics of Si Single-Electron Transistor under Illumination2019

    • Author(s)
      Takahashi Yasuo、Sinohara Michito、Arita Masashi、Tsurumaki-Fukuchi Atsushi、Fujiwara Akira、Ono Yukinori、Nishiguchi Katsuhiko、Inokawa Hiroshi
    • Journal Title

      ECS Transactions

      Volume: 92 Issue: 4 Pages: 47-56

    • DOI

      10.1149/09204.0047ecst

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Controlled Current Transport in Pt/Nb:SrTiO3 Junctions via Insertion of Uniform Thin Layers of TaOx2019

    • Author(s)
      Atsushi Tsurumaki-Fukuchi, Yusuke Tsuta, Masashi Arita, and Yasuo Takahashi
    • Journal Title

      Physica Status Solidi (RRL) - Rapid Research Letters

      Volume: 13 Issue: 7 Pages: 1900136-1900136

    • DOI

      10.1002/pssr.201900136

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Presentation] 金属マルチドット単電子デバイスの電気特性のデバイスサイズ依存性2022

    • Author(s)
      瘧師 貴幸, 天野 郁馬, 福地 厚, 有田 正志, 高橋 庸夫
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Cu系抵抗変化メモリへの電圧印加に伴うCuの移動2022

    • Author(s)
      中島 励, 久保 玲央, 福地 厚, 有田 正志
    • Organizer
      第57回応用物理学会北海道支部学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 金属ナノドットアレイデバイスにおける電気特性のアレイサイズ依存性2022

    • Author(s)
      瘧師 貴幸, 天野 郁馬, 福地 厚, 有田 正志, 高橋 庸夫
    • Organizer
      第57回応用物理学会北海道支部学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Two-Step Current-Induced Transition in Ca2RuO4 Thin Films Observed in the Time-Resolved Resistive Switching Characteristics2021

    • Author(s)
      Keiji Tsubaki, Atsushi Tsurumaki-Fukuchi, Yasuo Takahashi, Takayoshi Katase, Toshio Kamiya, Masashi Arita
    • Organizer
      Material Research Meeting 2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Probe Microscopy Analysis of Defect-Driven Analog Memory Functions of TaOx for Neuromorphic Computing2021

    • Author(s)
      Atsushi Tsurumaki-Fukuchi, Takayoshi Katase, Hiromichi Ohta, Masashi Arita, Yasuo Takahashi
    • Organizer
      Material Research Meeting 2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Cu Movement in MoOx/Al2O3 Double Layer CBRAM Studied by In‐situ TEM2021

    • Author(s)
      M. Arita, R. Ishikawa, A. Tsurumaki-Fukuchi, Y. Takahashi
    • Organizer
      MEMRISYS 2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] In Situ TEM of Unipolar‐Like CBRAM Operation2021

    • Author(s)
      S. Muto, N. Fujita, T. Nakajima, A. Tsurumaki-Fukuchi, M. Arita, Y. Takahashi
    • Organizer
      MEMRISYS 2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Nanoscale Probing of Field-Driven Ion Migration in TaOx for Neuromorphic Memristor Applications2021

    • Author(s)
      A. Tsurumaki-Fukuchi, T. Katase, H. Ohta, M. Arita, Y. Takahashi
    • Organizer
      240th ECS Meeting
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] ReRAM スイッチのその場TEM 観察による動作機構解明2021

    • Author(s)
      有田 正志, 福地 厚, 高橋 庸夫
    • Organizer
      日本学術振興会 R025 先進薄膜表面機能創成委員会 第6 回研究会
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] 2次元磁気グラニュラーの光インピーダンス特性2021

    • Author(s)
      山内 一弘, 本庄 周作, 浅井 佑基, 有田 正志, 福地 厚, 高橋 庸夫, 海住 英生
    • Organizer
      日本物理学会2021年秋季大会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Ca2RuO4薄膜における非線形伝導現象の高速化と不連続転移の観測2021

    • Author(s)
      福地 厚, 椿 啓司, 高橋 庸夫, 片瀬 貴義, 神谷 利夫, 有田 正志
    • Organizer
      日本物理学会2021年秋季大会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 熱酸化およびスパッタ製膜SiO2上に形成したFeナノドットアレイの単電子特性2021

    • Author(s)
      天野 郁馬, 瘧師 貴幸, 谷澤 涼太, 福地 厚, 有田 正志, 高橋 庸夫
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Ca2RuO4エピタキシャル薄膜における電流誘起非線形伝導現象の高速化2021

    • Author(s)
      椿 啓司, 福地 厚, 高橋 庸夫, 片瀬 貴義, 神谷 利夫, 有田 正志
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 原子平坦アモルファス薄膜を用いたTaOxのアナログメモリ動作過程の直接観察2021

    • Author(s)
      福地 厚, 片瀬 貴義, 太田 裕道, 有田 正志, 高橋 庸夫
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Non-Uniform Gate-Capacitance Distribution in Fe Nanodot Array Based Double-Gate Single-Electron Devices Due to Geometrical Structure of the Dots2021

    • Author(s)
      Takayuki Gyakushi, Yuki Asai, Beommo Byun, Ikuma Amano, Atsushi Tsurumaki-Fukuchi, Masashi Arita, Yasuo Takahashi
    • Organizer
      2021 International Conference on Solid State Devices and Materials
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fast and Reliable Resistance Switching in Ca2RuO4 Thin Films Driven by the Current-Induced Phase Transition2021

    • Author(s)
      Keiji Tsubaki, Atsushi Tsurumaki-Fukuchi, Yasuo Takahashi, Takayoshi Katase, Toshio Kamiya, Masashi Arita
    • Organizer
      2021 International Conference on Solid State Devices and Materials
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Probe Microscopy Analysis of Neuromorphic Resistive Memory Functions of Amorphous Oxide Semiconductors2021

    • Author(s)
      A. Tsurumaki-Fukuchi, T. Katase, H. Ohta, M. Arita, Y. Takahashi
    • Organizer
      12th International Conference on the Science and Technology for Advanced Ceramics
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Pristine Characteristics of Ta-O Resistive Memories Stacked with Various Scavenging Electrodes2021

    • Author(s)
      M. Arita, Y. Li, A. Tsurumaki-Fukuchi, Y. Takahashi
    • Organizer
      12th International Conference on the Science and Technology for Advanced Ceramics
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Current-Driven Metal-Insulator Transition Observed in Epitaxial Thin Films of the Mott Semiconductor Ca2RuO42021

    • Author(s)
      K. Tsubaki, T. Ishida, Y. Takahashi, T. Katase, T. Kamiya, A. Tsurumaki-Fukuchi, M. Arita
    • Organizer
      12th International Conference on the Science and Technology for Advanced Ceramics
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Charge-Offset Stability of Fe Nanodot Device Embedded in an Insulating MgF22021

    • Author(s)
      T. Gyakushi, Y. Asai, S. Honjo, A. Tsurumaki-Fukuchi, M. Arita, Y. Takahashi
    • Organizer
      12th International Conference on the Science and Technology for Advanced Ceramics
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 異なるSiO2下地層上に形成したナノドットアレイの電気特性比較2021

    • Author(s)
      谷澤 涼太, 天野 郁馬, 瘧師 貴幸, 福地 厚, 有田 正志, 高橋 庸夫
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 単層Feナノドットアレイ単電子デバイスのオフセットチャージ安定性2021

    • Author(s)
      瘧師 貴幸, 浅井 佑基, 本庄 周作, 福地 厚, 有田 正志, 高橋 庸夫
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] Ca2RuO4薄膜における電流誘起抵抗転移のRu欠損量依存性2021

    • Author(s)
      福地 厚, 椿 啓司, 石田 典輝, 片瀬 貴義, 神谷 利夫, 有田 正志, 高橋 庸夫
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 二層型MoOx/Al2O3 CBRAM中のCu移動のTEMその場観察2021

    • Author(s)
      有田 正志, 石川 竜介, 福地 厚, 高橋 庸夫
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] Solid-Phase Epitaxial Growth of Ca2RuO4 Thin Films with Current-Induced Metal-Insulator Transition2021

    • Author(s)
      Keiji Tsubaki, Tenki Ishida, Yasuo Takahashi, Takayoshi Katase, Toshio Kamiya, Atsushi Tsurumaki-Fukuchi, and Masashi Arita
    • Organizer
      The 8th Asian Conference on Crystal Growth and Crystal Technology (CGCT-8)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Feナノドットアレイの電気伝導特性の下地層依存性2021

    • Author(s)
      谷澤 涼太, 天野 郁馬, 瘧師 貴幸, 福地 厚, 有田 正志, 高橋 庸夫
    • Organizer
      第56回応用物理学会北海道支部学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] Ca2RuO4エピタキシャル薄膜が示す電流誘起絶縁体-金属転移とその抵抗変化特性2020

    • Author(s)
      福地 厚, 椿 啓司, 石田 典輝, 片瀬 貴義, 神谷 利夫, 高橋 庸夫, 有田 正志
    • Organizer
      第40 回電子材料研究討論会
    • Related Report
      2020 Research-status Report
  • [Presentation] Current-Induced Insulator-to-Metal Transition of Ca2RuO4 Thin Films Observed in Local Electrical Measurements2020

    • Author(s)
      K. Tsubaki, T. Ishida, Y. Takahashi, T. Katase, T. Kamiya, A. Tsurumaki-Fukuchi, and M. Arita
    • Organizer
      The 33rd International Microprocesses and Nanotechnology Conference (MNC2020)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Dependence of Transport Characteristics of Fe Nanodot Array on the Underlayer Surface2020

    • Author(s)
      I. Amano, T. Gyakushi, A. Tsurumaki-Fukuchi, M. Arita, and Y. Takahashi
    • Organizer
      The 33rd International Microprocesses and Nanotechnology Conference (MNC2020)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Combinations of Electrode and Intrinsic Oxygen Vacancy Concentration for Resistive Switching in Tantalum Oxide2020

    • Author(s)
      Y. Li, A. Tsurumaki-Fukuchi, M. Arita and Y. Takahashi
    • Organizer
      The 33rd International Microprocesses and Nanotechnology Conference (MNC2020)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Ca2RuO4エピタキシャル薄膜における非線形伝導現象2020

    • Author(s)
      福地 厚, 椿 啓司, 石田 典輝, 高橋 庸夫, 片瀬 貴義, 神谷 利夫, 有田 正志
    • Organizer
      日本物理学会 2020年秋季大会
    • Related Report
      2020 Research-status Report
  • [Presentation] デジタル型/アナログ型抵抗変化特性を示すCBRAMのその場構造解析2020

    • Author(s)
      武藤 恵, 中島 励, 福地 厚, 有田 正志, 高橋 庸夫
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] マルチドット単電子デバイスにおけるドットの三次元構造によるゲート容量の不均一化2020

    • Author(s)
      瘧師 貴幸, 浅井 佑基, 卞 範模, 天野 郁馬, 福地 厚, 有田 正志, 高橋 庸夫
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 電流誘起型金属絶縁体転移物質Ca2RuO4薄膜が示す高い安定性を持った抵抗スイッチング動作2020

    • Author(s)
      椿 啓司, 石田 典輝, 福地 厚, 片瀬 貴義, 神谷 利夫, 有田 正志, 高橋 庸夫
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] Failure and Recovery of Double-Layer CBRAM Studied by In-Situ TEM2020

    • Author(s)
      S. Muto, T. Nakajima, A. Tsurumaki-Fukuchi, M. Arita, and Y. Takahashi
    • Organizer
      2020 International Conference on Solid State Devices and Materials (SSDM2020)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Double-Gate Single-Electron Devices Formed by Single-Layered Fe Nanodot Array2020

    • Author(s)
      T. Gyakushi, Y. Asai, B. Byun, I. Amano, A. Tsurumaki-Fukuchi, M. Arita, and Y. Takahashi
    • Organizer
      2020 Silicon Nanoelectronics Workshop
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Ca2RuO4薄膜における電流/電場誘起金属絶縁体転移の観測2020

    • Author(s)
      福地 厚, 椿 啓司, 石田 典輝, 有田 正志, 片瀬 貴義, 神谷 利夫, 高橋 庸夫
    • Organizer
      日本物理学会第75回年次大会
    • Related Report
      2019 Research-status Report
  • [Presentation] 電流誘起金属絶縁体転移を示すCa2RuO4薄膜の電流-電圧特性の評価2020

    • Author(s)
      椿 啓司, 福地 厚, 石田 典輝, 有田 正志, 片瀬 貴義, 神谷 利夫, 高橋 庸夫
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] 絶縁層へのCu導入がCBRAMに与える影響のTEM内評価2020

    • Author(s)
      武藤 恵, 中島 励, 藤田 順, 福地 厚, 有田 正志, 高橋 庸夫
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Feナノドットアレイを用いたダブルゲート単電子デバイスの作製と評価2020

    • Author(s)
      瘧師 貴幸, 浅井 佑基, 卞 範模, 天野 郁馬, 福地 厚, 有田 正志, 高橋 庸夫
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Feナノドットアレイの電気伝導特性の下地層依存2020

    • Author(s)
      天野 郁馬, 瘧師 貴幸, 福地 厚, 有田 正志, 高橋 庸夫
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] VCMとECMに基づいたTa2O5-δ抵抗変化型メモリの初期特性と多値動作2020

    • Author(s)
      李 遠霖, 福地 厚, 有田 正志, 高橋 庸夫, 森江 隆
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] ゲート電圧とSetパルス電圧により制御したMOSFET付TaOx系ReRAMのアナログ動作2020

    • Author(s)
      木村 大志, 李 遠霖, 福地 厚, 有田 正志, 遠藤 和彦, 森江 隆, 高橋 庸夫
    • Organizer
      第55回応用物理学会北海道支部学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Ta2O5ReRAMデバイスのパルスによる多値動作のばらつき評価2020

    • Author(s)
      有馬 克紀, 李 遠霖, 福地 厚, 有田 正志, 高橋 庸夫
    • Organizer
      第55回応用物理学会北海道支部学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] In-situ TEM観察に向けた平面型CBRAMの微小ギャップの制御2020

    • Author(s)
      藤田 順, 武藤 恵, 中島 励, 福地 厚, 有田 正志, 高橋 康夫
    • Organizer
      第55回応用物理学会北海道支部学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] SiO2上のFeナノドットアレイの電気伝導特性の表面依存2020

    • Author(s)
      天野 郁馬, 瘧師 貴幸, 福地 厚, 有田 正志, 高橋 庸夫
    • Organizer
      第55回応用物理学会北海道支部学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Metal-Insulator Transition in Ca2RuO4 Thin Films with a High Sensitivity to Electrical Stimuli2019

    • Author(s)
      Keiji Tsubaki, Atsushi Tsurumaki-Fukuchi, Takayoshi Katase, Toshio Kamiya, Masashi Arita, and Yasuo Takahashi
    • Organizer
      The 3rd Workshop on Functional Materials Science
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Systematic Control of Current Transport in Metal/Oxide Schottky Junctions Using Highly Uniform Layers of TaOx2019

    • Author(s)
      Atsushi FUKUCHI, Yusuke TSUTA, Masashi ARITA, and Yasuo TAKAHASHI
    • Organizer
      Materials Research Meeting 2019 (MRM2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 抵抗変化メモリデバイスのナノスケールTEMその場解析2019

    • Author(s)
      有田 正志, 福地 厚, 高橋 庸夫
    • Organizer
      日本セラミックス協会東北北海道支部 第 27 回北海道地区セミナー
    • Related Report
      2019 Research-status Report
    • Invited
  • [Presentation] Investigation of LSI Architecture and Analog Memory Devices for Brain-like Systems2019

    • Author(s)
      K. Yamashita, M. Harada, T. Morie, A. Tsurumaki-Fukuchi, M. Arita, Y. Takahashi, and S. Samukawa
    • Organizer
      The 16th International Conference on Flow Dynamics (ICFD2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Double-gate Single-electron Transistor Formed by Fe Nanodot Array2019

    • Author(s)
      T. Gyakushi, Y. Asai, A. Tsurumaki-Fukuchi, M. Arita, Y. Takahashi, and S. Samukawa
    • Organizer
      The 16th International Conference on Flow Dynamics (ICFD2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] In-situ TEM observation of Cu-WOX CBRAM during gradual resistance decrease for the initialization2019

    • Author(s)
      Satoshi Muto, Shinya Sakai, Atsushi Tsurumaki-Fukuchi, Masashi Arita, and Yasuo Takahashi
    • Organizer
      The 32nd International Microprocesses and Nanotechnology Conference (MNC2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Characteristics of Si Single-Electron Transistor under Illumination2019

    • Author(s)
      Y. Takahashi, M. Sinohara, M. Arita, A. Tsurumaki-Fukuchi, A. Fujiwara, Y. Ono, K. Nishiguchi, and H. Inokawa
    • Organizer
      The 236th ECS Meeting 2019年10月16日
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Observation of field-Induced resistive phase transition in Ca2RuO4 thin films2019

    • Author(s)
      Atsushi Tsurumaki-Fukuchi, Keiji Tsubaki, Takayoshi Katase, Toshio Kamiya, Masashi Arita, and Yasuo Takahashi
    • Organizer
      The 26th International Workshop on Oxide Electronics (iWOE26)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] AI 応用を念頭においた抵抗変化メモリ動作の TEM その場観察2019

    • Author(s)
      工藤 昌輝, 松村 晶, 宮崎 宣幸, 遠堂 敬史, 大多 亮, 有田 正志, 福地 厚, 高橋 庸夫
    • Organizer
      2019年度微細構造解析プラットフォームシンポジウム
    • Related Report
      2019 Research-status Report
    • Invited
  • [Presentation] 固相エピタキシャル成長Ca2RuO4薄膜における電流依存金属絶縁体転移の観測2019

    • Author(s)
      椿 啓司, 福地 厚, 片瀬 貴義, 神谷 利夫, 有田 正志, 高橋 庸夫
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Failure and Recovery of Double-Layer CBRAM Studied by In-Situ TEM2019

    • Author(s)
      M. Arita, R. Ishikawa, K. Arima, A. Tsurumaki-Fukuchi, Y. Takahashi, M. Kudo, and S. Matsumura
    • Organizer
      2019 International Conference on Solid State Devices and Materials (SSDM2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Nanofilaments in Ta-O ReRAM Bit Array Fabricated Using 40 nm CMOS Process2019

    • Author(s)
      M. Arita, A. T.-Fukuchi, Y. Takahashi, S. Muraoka, S. Ito, and S. Yoneda
    • Organizer
      2019 International Conference on Solid State Devices and Materials (SSDM2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Experimental and Theoretical Study on Tunnel Magnetocapacitance in Fe/MgF2 Nanogranular Films2019

    • Author(s)
      Robin MSISKA, Shusaku HONJO, Yuki ASAI, Masashi ARITA, Atsushi TSURUMAKI-FUKUCHI, Yasuo TAKAHASHI, Norihisa HOSHINO, Tomoyuki AKUTAGAWA, Osamu KITAKAMI, Masaya FUJIOKA, Junji NISHII, and Hideo KAIJU
    • Organizer
      The 6th Japan-Korea International Symposium on Materials Science and Technology 2019 (JKMST2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 電子デバイス評価のためのin-situ TEM試料の 作製と評価2019

    • Author(s)
      有馬 克紀, 石川 竜介, 福地 厚, 有田 正志, 高橋 庸夫, 工藤 昌輝, 松村 晶
    • Organizer
      日本顕微鏡学会第75回学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] In-situ TEM of CBRAM at Initial Decrease in Resistance2019

    • Author(s)
      S. Muto, S. Sakai, A. Tsurumaki-Fukuchi, M. Arita, and Y. Takahashi
    • Organizer
      The 6th International Symposium on Advanced Microscopy and Theoretical Calculations (AMTC6)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Switching Current of Ta2O5 Based Resistive Analog Memories2019

    • Author(s)
      Yuanlin Li, Atsushi Tsurumaki-Fukuchi, Masashi Arita, Yasuo Takahashi, and Takashi Morie
    • Organizer
      2019 Silicon Nanoelectronics Workshop (SNW-2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Fast and uniform interface reactions of tantalum oxide and their applications into memory devices2019

    • Author(s)
      A. Tsurumaki-Fukuchi, M. Arita, Y. Takahashi
    • Organizer
      The 2019 Collaborative Conference on Materials Research (CCMR2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Operation analysis of resistive switching of CBRAM using in-situ TEM2019

    • Author(s)
      Y. Takahashi, A. Tsurumaki-Fukuchi, and M. Arita
    • Organizer
      2019 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors (ULSIC vs. TFT 7)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] CuとTaを上部電極に用いたTa2O5-δ多値抵抗変化メモリの特性評価2019

    • Author(s)
      李 遠霖, 福地 厚, 有田 正志, 森江 隆, 高橋庸夫
    • Organizer
      電子情報通信学会電子デバイス研究
    • Related Report
      2019 Research-status Report
  • [Presentation] Nanoscale filaments in Ta-O resistive RAM bit array: microscopy analysis and switching property2019

    • Author(s)
      M. Arita, A. Tsurumaki-Fukuchi, Y. Takahashi, S. Muraoka, S. Ito, S. Yoneda
    • Organizer
      2019 IEEE 11th International Memory Workshop (IMW 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 40nm CMOS技術により作製したTa-O系抵抗変化メモリにおける導電フィラメント周辺の酸素分布2019

    • Author(s)
      有田 正志, 福地 厚, 高橋 庸夫, 村岡俊作, 伊藤 理, 米田 慎一
    • Organizer
      電子情報通信学会 集積回路研究会(ICD)
    • Related Report
      2019 Research-status Report
    • Invited

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Published: 2019-04-18   Modified: 2023-01-30  

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