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Systematization of Non-Charging Exposure Conditions in Electron Beam Lithography

Research Project

Project/Area Number 19K04519
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 21060:Electron device and electronic equipment-related
Research InstitutionOsaka Institute of Technology

Principal Investigator

KOTERA MASATOSHI  大阪工業大学, 工学部, 教授 (40170279)

Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2021: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2020: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2019: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Keywords電子ビームリソグラフィ / レジスト帯電現象の解析 / 静電気力顕微鏡 / 電子ビーム誘起導電現象 / 無帯電条件 / フォギング電子 / フォギング電子解析 / 静電気力顕微鏡法 / マルチスケール分析 / 帯電現象の解析 / 無帯電露光条件 / フォギング電子空間分布測定 / フォギング電子軌道追跡
Outline of Research at the Start

高い計算能力を持つLSI製造に向け、今後さらなる高い位置精度が要求される電子ビームリソグラフィ-技術において難題とされてきた被露光試料の帯電現象について、我々が試料表面電位測定技術ならびに帯電プロセスのシミュレーション技術を有していることに基づき、その現象を抑える条件を体系化する。本研究の遂行によって電子ビームと物質の様々な相互作用の関与を定量的に解明できるようになると期待できる。

Outline of Final Research Achievements

We introduced an electrostatic force microscope that we originally developed into the existing scanning electron microscope and measured the resist surface potential immediately after electron beam exposure. We found that there are two exposure conditions under which the resist surface potential becomes charge-free when the electron beam acceleration voltage is 30 kV, and proposed the mechanism of positive charge and negative charge, and confirmed its validity. In order to systematize the charge-free exposure conditions, we varied the acceleration voltage from 0.5 kV to 30 kV and investigated the dependence of the surface potential on the exposure dose. On the other hand, since it takes a long time to measure the surface potential for a series of exposures for a single acceleration voltage, we developed a program to predict the surface potential for arbitrary acceleration voltages by deep learning.

Academic Significance and Societal Importance of the Research Achievements

最先端LSIを製造するにはSi基板表面の超微細加工技術が重要であり、その加工パターン原版となるフォトマスクを高精細にパターンニングすることが必須である。このための電子ビームリソグラフィ技術では、電気絶縁性の高いレジストが帯電して描画パターンが歪む現象を避けなければならない。我々はフォトマスクの電子ビームリソグラフィで帯電しない条件を発見した。本研究ではこの無帯電となる条件を体系化して広範囲露光条件で帯電の影響を受けないリソグラフィを実現しようとしている。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Research-status Report
  • 2019 Research-status Report
  • Research Products

    (32 results)

All 2021 2020 2019

All Journal Article (3 results) (of which Peer Reviewed: 2 results,  Open Access: 1 results) Presentation (28 results) (of which Int'l Joint Research: 17 results,  Invited: 4 results) Book (1 results)

  • [Journal Article] Investigation of non-charging exposure conditions for insulating resist films in electron beam lithography2021

    • Author(s)
      Kubo Kento、Kojima Kentaro、Kono Yoshinobu、Kotera Masatoshi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SC Pages: SCCB02-SCCB02

    • DOI

      10.35848/1347-4065/abf46a

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Non-charging Conditions of Insulating Film under Electron Beam Irradiation2020

    • Author(s)
      Hideya Mizuno, Kento Kubo, Kentaro Kojima, Masatoshi Kotera
    • Journal Title

      e-Journal of Surface Science and Nanotechnology

      Volume: 18 Issue: 0 Pages: 106-109

    • DOI

      10.1380/ejssnt.2020.106

    • NAID

      130007813455

    • ISSN
      1348-0391
    • Year and Date
      2020-03-21
    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] 電子ビーム照射を受けた導体上レジスト薄膜の帯電現象の解析2020

    • Author(s)
      小寺正敏
    • Journal Title

      荷電粒子ビームの工業への応用第132委員会第第242回研究会資料

      Volume: 2A-1478 Pages: 15-22

    • Related Report
      2020 Research-status Report
  • [Presentation] Effect of Time Variation on Charging Phenomenon and Exposure Dose Dependency of Surface potential2021

    • Author(s)
      Yoshinobu Kono, Kentaro Kojima, Kento Kubo and Masatoshi Kotera
    • Organizer
      Photomask Japan 2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 電子ビーム照射を受けた導体上レジスト薄膜の帯電現象の解析2021

    • Author(s)
      小寺正敏
    • Organizer
      応用物理学会次世代リソグラフィ(NGL)技術研究会
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] Investigation of Non-Charging Exposure Conditions for Insulating ResistFilms in Electron Beam Lithography2021

    • Author(s)
      Kentaro Kojima, Kento Kubo, Yoshinobu Kono and Masatoshi Kotera
    • Organizer
      The 64th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Analysis of resist charging in electron beam lithography2021

    • Author(s)
      Yoshinobu Kono, Kentaro Kojima and Masatoshi Kotera
    • Organizer
      Micro and Nano Engineering Conference 2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 電子ビームリソグラフィにおけるレジスト帯電の分析2021

    • Author(s)
      河野 由伸,小島 健太郎,小寺 正敏
    • Organizer
      第82回応用物理学会周期学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 電子ビームリソグラフィにおけるレジスト無帯電の露光条件探索2021

    • Author(s)
      小島 健太郎、久保 建統、河野 由伸、小寺 正敏
    • Organizer
      2021年第68回応用物理学会春季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 電子ビームリソグラフィにおける無帯電条件について2021

    • Author(s)
      小寺正敏
    • Organizer
      2020 年度日本顕微鏡学会SEM の物理学分科会討論会
    • Related Report
      2020 Research-status Report
  • [Presentation] Investigation of non-charging exposure conditions for insulating resist films in electron beam lithography2020

    • Author(s)
      Kento Kubo, Kentaro Kojima Yoshinobu Kono and Masatoshi Kotera
    • Organizer
      33rd International Microprocesses and Nanotechnology Conference
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Potential distribution on the resist surface after electron beam irradiation with respect to resist thickness and elapsed time2020

    • Author(s)
      Kentaro Kojima, Kento Kubo, Yoshinobu Kono and Masatoshi Kotera
    • Organizer
      33rd International Microprocesses and Nanotechnology Conference
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] 電子ビームリソグラフィにおけるレジストの無帯電露光条件2020

    • Author(s)
      小寺正敏、水野秀哉、久保建統、小島健太郎
    • Organizer
      2020年度実用表面分析講演会
    • Related Report
      2020 Research-status Report
    • Invited
  • [Presentation] 電子ビーム照射を受けた導体上レジスト薄膜の帯電現象の解析2020

    • Author(s)
      小寺 正敏
    • Organizer
      荷電粒子ビームの工業への応用第132委員会第第242回研究会
    • Related Report
      2020 Research-status Report
  • [Presentation] Investigation of Non-Charging Exposure Condition in Electron Beam Lithography2019

    • Author(s)
      Kento Kubo, Hideya Mizuno and Masatoshi Kotera
    • Organizer
      Photomask Japan 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Measurement Of Scattered Electron Current Distribution In Scanning Electron Microscope2019

    • Author(s)
      Kentaro Morimoto, Yuka Ito, Masatoshi Kotera
    • Organizer
      Microscience Microscopy Congress 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Simulation Of Electron Trajectories In Scanning Electron Microscope Specimen Chamber2019

    • Author(s)
      Yuka Ito, Kentaro Morimoto, Masatoshi Kotera
    • Organizer
      Microscience Microscopy Congress 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Investigation Of Non-Charging Exposure Condition In Electron Beam Lithography2019

    • Author(s)
      Kento Kubo, Hideya Mizuno and Masatoshi Kotera
    • Organizer
      Microscience Microscopy Congress 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Non-Charging Exposure Condition of Insulating Resist in Electron Beam Lithography2019

    • Author(s)
      Masatoshi Kotera, Kento Kubo and Hideya Mizuno
    • Organizer
      International Materials Research Congress 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Measurement of absorbed current for quantitative evaluation of scattered electrons in a scanning electron microscope2019

    • Author(s)
      Kentaro Morimoto, Yuka Ito, Masatoshi Kotera
    • Organizer
      Microscopy Congress 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Simulation of multiply scattered electron trajectories in scanning electron microscope specimen chamber2019

    • Author(s)
      Yuka Ito, Kentaro Morimoto, Masatoshi Kotera
    • Organizer
      Microscopy Congress 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Non-charging conditions of insulating film under electron beam irradiation2019

    • Author(s)
      Hideya Mizuno, Kento Kubo, Kentaro Kojima and Masatoshi Kotera
    • Organizer
      12th International Symposium on Atomic Level Characterizations for New Materials and Devices '19
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Observation of charging image of insulating film under electron beam irradiation2019

    • Author(s)
      Kento Kubo, Hideya Mizuno, Kentaro Kojima and Masatoshi Kotera
    • Organizer
      12th International Symposium on Atomic Level Characterizations for New Materials and Devices '19
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Non-Charging Exposure Conditions of Insulating Resist in Electron Beam Lithography2019

    • Author(s)
      Masatoshi Kotera, Kento Kubo, Kentaro Kojima, Hideya Mizuno
    • Organizer
      32nd International Microprocesses and Nanotechnology Conference 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Investigation of Non-Charging Exposure Condition in Electron Beam Lithography2019

    • Author(s)
      Hideya Mizuno, Kento Kubo, Kentaro Kojima, Masatoshi Kotera
    • Organizer
      32nd International Microprocesses and Nanotechnology Conference 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Measurement of absorbed current for quantitative evaluation of scattered electrons in a scanning electron microscope2019

    • Author(s)
      Kentaro Morimoto, Yuka Ito, Masatoshi Kotera
    • Organizer
      32nd International Microprocesses and Nanotechnology Conference 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 電子ビームリソグラフィにおけるレジスト無帯電の露光条件探索2019

    • Author(s)
      久保建統,水野秀哉,小寺正敏
    • Organizer
      NGL(次世代リソグラフィ)研究会ワークショップ
    • Related Report
      2019 Research-status Report
    • Invited
  • [Presentation] 電子ビームリソグラフィにおけるレジスト無帯電の露光条件探索2019

    • Author(s)
      水野秀哉,久保建統,小島健太郎, 小寺正敏
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] 走査電子顕微鏡における散乱電子の定量的評価のための吸収電流の測定2019

    • Author(s)
      森本 健太郎, 伊藤 優花, 小寺 正敏
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] 走査電子顕微鏡試料室における多重散乱電子軌道のシミュレーション2019

    • Author(s)
      伊藤 優花, 森本 健太郎, 小寺正敏
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] 低エネルギー電子の試料室内部での散乱2019

    • Author(s)
      小寺正敏
    • Organizer
      日本顕微鏡学会 SEMの物理学分科会討論会
    • Related Report
      2019 Research-status Report
  • [Book] 電子・イオンビーム ハンドブック第4版2021

    • Author(s)
      松井 真二、高岡 義寛、臼井 博明、谷口 淳、八坂 行人、高橋 由夫、桑原 真、糟谷 圭吾、豊田 紀章、千葉敦也、百田 佐多生、岡山重夫、近藤行人、森下茂幸、村田 英一、安田雅昭、小寺 正敏 、古澤 孝弘、園山 百代、揚村 寿英 他
    • Total Pages
      593
    • Publisher
      日刊工業新聞社
    • ISBN
      9784600006242
    • Related Report
      2020 Research-status Report

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Published: 2019-04-18   Modified: 2023-01-30  

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