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Omni-directional Vibrating MEMS Energy Harvester with Shock Direction Conversion Mechanism by Magnetic Repulsive Force

Research Project

Project/Area Number 19K04533
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 21060:Electron device and electronic equipment-related
Research InstitutionUniversity of Hyogo

Principal Investigator

Fujita Takayuki  兵庫県立大学, 工学研究科, 准教授 (50336830)

Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2021: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2020: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2019: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywordsエナジーハーベスティング / MEMS / 磁性薄膜 / エナジーハーベスタ
Outline of Research at the Start

本研究では,MEMSと融合可能な独自のネオジム(NdFeB)スパッタ薄膜磁石を用いて磁気反発力による衝撃方向変換機構を考案し,面外方向(厚さ方向)の衝撃を,直交した面内方向衝撃に変換する低背エナジーハーベスタの実現(デバイスサイズ15 mm角 2 mm厚,面外方向への衝撃印加を面内変換で100マイクロW発電を目標)と,印加衝撃の方向を問わない無指向性振動型エナジーハーベスタの実現可能性を模索する。

Outline of Final Research Achievements

This study aims to realize a low-profile harvester that converts out-of-plane external vibrations into in-plane power generation vibrations and generates electricity by redirecting the unidirectional vibrations required for operation of a high-performance vibration-type MEMS energy harvester by a non-contact redirection mechanism using magnetic repulsive force. By optimizing the structure of the redirection mechanism, we will also explore the possibility of an omnidirectional vibration-type energy harvester that operates a unidirectional power generation device by omni-directional external vibration. This will dramatically increase the degree of freedom in the direction of vibration application and the location of installation of the vibrating energy harvester, thereby improving its performance and expanding its range of applications.

Academic Significance and Societal Importance of the Research Achievements

電力を完全に自給自足する省エネ技術のための超小型発電デバイスを,MEMS技術で実現する振動型エナジーハーベスタの研究が注目されている。一般にMEMSエナジーハーベスタは,高性能化のために平板状デバイスの内部でマス(おもり)が面内方向(長手方向)に振動することで発電するため,発電に必要な衝撃(加速度)の方向を面内方向に一致させる必要があり,デバイスの固定方法,設置方向や応用分野に大きな制限をもたらしていた。本研究では,独自の磁性体加工技術で振動方向を転換することにより,設置場所を選ばない振動型エナジーハーベスタの性能向上,応用範囲の拡大に取り組んだ。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Research-status Report
  • 2019 Research-status Report
  • Research Products

    (12 results)

All 2021 2020 2019

All Journal Article (2 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 2 results,  Open Access: 1 results) Presentation (8 results) (of which Int'l Joint Research: 3 results) Book (2 results)

  • [Journal Article] Variable load resistance by using CdS analog linear optical coupler for automated measurement of capacitive energy harvester2021

    • Author(s)
      Fujita Takayuki、Fujibe Kohei、Uchida Hiroki、Yamamoto Koki、Badel Adrien、Formosa Fabien、Kanda Kensuke、Maenaka Kazusuke
    • Journal Title

      Sensors and Actuators A: Physical

      Volume: 321 Pages: 112399-112399

    • DOI

      10.1016/j.sna.2020.112399

    • Related Report
      2021 Annual Research Report 2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Experimental Evaluation of Bipolar Surface Potential with Corona Charging for Electret Activation2020

    • Author(s)
      Yamamoto Koki、Fujita Takayuki、Badel Adrien、Formosa Fabien、Kanda Kensuke、Maenaka Kazusuke
    • Journal Title

      Sensors and Materials

      Volume: 32 Issue: 7 Pages: 2493

    • DOI

      10.18494/SAM.2020.2901

    • ISSN
      0914-4935, 2435-0869
    • Year and Date
      2020-07-31
    • Related Report
      2020 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Presentation] タイヤ固有振動で発電する圧電MEMSデバイス2021

    • Author(s)
      横田隆人,前中一介,神田健介,藤田孝之
    • Organizer
      第38回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] Si基板上における強磁性NdFeBと圧電PZTのヘテロ集積2021

    • Author(s)
      武田光平,七里愛,神田健介,藤田孝之,前中一介
    • Organizer
      第38回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] Resonant Drive of All-around Scanning MEMS Mirror with Piezoelectric Actuators2021

    • Author(s)
      Y. Kajiyama, Y. Hirata, Y. Shimakura, K. Kanda, T. Fujita, K. Maenaka
    • Organizer
      8th Int. Workshop PiezoMEMS
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 低寄生容量CdSフォトカプラによるリアルタイム負荷特性評価システム2021

    • Author(s)
      松本和馬、藤邊康平、藤田孝之、神田健介、前中一介
    • Organizer
      2021年第68回応用物理学会春季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] NdFeB 薄膜磁石の磁気反発力を用いた非接触 面外面内振動変向機構の基礎研究2019

    • Author(s)
      杉野 裕輝,福永 彬人,藤田 孝之,神田 健介,前中 一介
    • Organizer
      第36回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2019 Research-status Report
  • [Presentation] NdFeB 薄膜磁石と磁界による振動型ワイヤレス電力伝送の基礎的考察2019

    • Author(s)
      藤本 匠 ,福永 彬人,藤田 孝之,神田 健介,前中 一介
    • Organizer
      第36回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2019 Research-status Report
  • [Presentation] Start-up Acceleration Reduction of Electrostatic Vibration Energy Harvester with Narrow Air-gap Structure2019

    • Author(s)
      Hiroki Uchida, Koki Yamamoto, Takayuki Fujita, Adrien Badel,Fabien Formosa, Kensuke Kanda, Kazusuke Maenaka
    • Organizer
      The 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Variable Load Resistance by Using CdS Analog Linear Optical Coupler for Automated Measurement of Capacitive Energy Harvester2019

    • Author(s)
      Kohei Fujibe, Takayuki Fujita, Hiroki Uchida, Koki Yamamoto, Adrien Badel, Fabien Formosa, Kensuke Kanda, Kazusuke Maenaka
    • Organizer
      The 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Book] 環境発電ハンドブック 第2版2021

    • Author(s)
      鈴木 雄二、秋永 広幸、神野 伊策、篠原 真毅、竹内 敬治、八馬 弘邦、舟橋 良次、宮﨑 康次
    • Total Pages
      528
    • Publisher
      エヌ・ティー・エス
    • ISBN
      9784860437480
    • Related Report
      2021 Annual Research Report
  • [Book] Nanomagnetic Materials: Fabrication, Characterization and Application (Micro and Nano Technologies)2021

    • Author(s)
      Akinobu Yamaguchi (編集), Atsufumi Hirohata (編集), Bethanie Stadler (編集)
    • Total Pages
      812
    • Publisher
      Elsevier
    • Related Report
      2021 Annual Research Report

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Published: 2019-04-18   Modified: 2023-01-30  

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