Development of MEMS Self-Destruction Design Technology for Secure IoT Devices

• Project/Area Number: 19K05232
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 28050:Nano/micro-systems-related
• Research Institution: Ritsumeikan University (2020-2021); Tokyo Institute of Technology (2019)
• Principal Investigator: Yamane Daisuke 立命館大学, 理工学部, 准教授 (70634096)
• Project Period (FY): 2019-04-01 – 2022-03-31
• Project Status: Completed (Fiscal Year 2021)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2021: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000); Fiscal Year 2020: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000); Fiscal Year 2019: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
• Keywords: MEMS / 合金 / 可動配線 / 電解めっき / IoT / 自壊 / セキュア / 金合金 / ＭＥＭＳ / 疲労破壊 / 機械特性 / セキュアIoTデバイス / セキュリティ / ハードウェア

Outline of Research at the Start

本研究では，微小可動配線の振動疲労破壊モデルを構築し，マイクロ機械構造と電気回路の設計技術を用いて，小型IoT（Internet of Things）デバイスの自壊時限（使用寿命）をハードウェア構造のみ（破壊命令不要）で決定可能とします。例えば，環境埋込型IoTセンサの大量利用が予想される将来社会において，小型IoTデバイスのメンテナンスフリーかつ回収不要な自律的セキュリティ対策が必要です。しかしながら，現在では，ソフトウェアのセキュリティ強化手法が主に検討されています。そのため，ハードウェアの自律的なセキュリティ対策を実現する本研究手法は国内外で実施例がなく，世界に先駆けた研究です。

Outline of Final Research Achievements

The target Ni-based alloy micro-interconnections were fabricated by MEMS (micro-electro-mechanical systems) technology using electroplating. In addition, conditions for dry etching to remove the sacrificial layer were found to create movable structures of the alloy interconnections for self-destructive devices.
To construct equivalent circuit models of MEMS self-destructive devices, we created equivalent circuit models of movable electrodes in a SPICE-based circuit simulator.
Based on the findings of this study, a new device using plated metal micro-movable structures, an electrostatic MEMS vibration energy harvester without charging processes and its equivalent circuit model were developed.

Academic Significance and Societal Importance of the Research Achievements

学術的意義：本課題では、MEMS自壊素子について世界に先駆けて研究を着手した。研究期間内には、デバイス試作・設計環境構築、および、MEMS自壊素子に関する特許申請も行い、今後の研究展開の基盤技術を構築した。また、水平展開として、これまで未到であったMEMS環境振動発電素子と電子回路をワンチップ化の見通しを得た。
社会的意義：電解めっきを用いたMEMSデバイスと電子回路の集積化について、センサやアクチュエータに加えて発電素子も集積できる新たな応用技術の可能性を示すことができた。これは、小型センサの数が莫大に増加している昨今、小型無線IoTセンサの電源供給問題の解決に向けた技術進歩である。

Research Products

• [Journal Article] IoT電源への期待 環境振動発電素子の小型化・高出力化とEMC (2022)
  • Author(s): 山根大輔，田中有弥
  • Journal Title: 科学情報出版 月刊EMC Volume: -
• [Journal Article] 荷電処理不要の静電型ＭＥＭＳ振動発電素子 (2022)
  • Author(s): 山根大輔，田中有弥
  • Journal Title: 日本工業出版 クリーンエネルギー Volume: 31 Pages: 35-40
• [Journal Article] Effect of current density on micro-mechanical property of electrodeposited gold film evaluated by micro-compression (2022)
  • Author(s): Omura Taro、Chen Chun-Yi、Chang Tso-Fu Mark、Yamane Daisuke、Ito Hiroyuki、Machida Katsuyuki、Masu Kazuya、Sone Masato
  • Journal Title: Surface and Coatings Technology Volume: 436 Pages: 128315-128315
  • DOI: 10.1016/j.surfcoat.2022.128315
  • Peer Reviewed
• [Journal Article] Bandwidth Broadening of MEMS Vibration Energy Harvesters by Voltage-Boost Rectifier Circuit (2022)
  • Author(s): Yukiya Tohyama, Hiroaki Honma, Hiroshi Toshiyoshi, and Daisuke Yamane
  • Journal Title: Sensors and Materials Volume: -
  • Peer Reviewed / Open Access
• [Journal Article] Energy Harvesting from Non-Stationary Vibrations Using a Low-Threshold Voltage-Boost Rectifier Circuit (2021)
  • Author(s): Tohyama Yukiya、Honma Hiroaki、Sekiya Hidehiko、Toshiyoshi Hiroshi、Yamane Daisuke
  • Journal Title: IEEJ Transactions on Sensors and Micromachines Volume: 141 Issue: 7 Pages: 228-232
  • DOI: 10.1541/ieejsmas.141.228
  • NAID: 130008060170
  • ISSN: 1341-8939, 1347-5525
  • Year and Date: 2021-07-01
  • Peer Reviewed
• [Journal Article] MEMS post-processed self-assembled electret for vibratory energy harvesters (2021)
  • Author(s): Yamane Daisuke、Kayaguchi Hideyuki、Kawashima Kosuke、Ishii Hisao、Tanaka Yuya
  • Journal Title: Applied Physics Letters Volume: 119 Issue: 25 Pages: 254102-254102
  • DOI: 10.1063/5.0072596
  • Peer Reviewed
• [Journal Article] Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency (2021)
  • Author(s): Watanabe Hitomi、Chang Tso-Fu Mark、Schneider Michael、Schmid Ulrich、Chen Chun-Yi、Iida Shinichi、Yamane Daisuke、Ito Hiroyuki、Machida Katsuyuki、Masu Kazuya、Sone Masato
  • Journal Title: Electrochem Volume: 2 Issue: 2 Pages: 216-223
  • DOI: 10.3390/electrochem2020015
  • Peer Reviewed / Open Access
• [Journal Article] Electrodeposition of Ni-Co Alloys and Their Mechanical Properties by Micro-Vickers Hardness Test (2020)
  • Author(s): Jiang Yiming、Chen Chun-Yi、Chang Tso-Fu Mark、Luo Xun、Yamane Daisuke、Sone Masato
  • Journal Title: Electrochem Volume: 2 Issue: 1 Pages: 1-9
  • DOI: 10.3390/electrochem2010001
  • Peer Reviewed / Open Access
• [Journal Article] Co-Electrodeposition of Au?TiO2 Nanocomposite and the Micro-Mechanical Properties (2020)
  • Author(s): Chien Yu-An、Chang Tso-Fu Mark、Chen Chun-Yi、Yamane Daisuke、Ito Hiroyuki、Machida Katsuyuki、Masu Kazuya、Sone Masato
  • Journal Title: Electrochem Volume: 1 Issue: 4 Pages: 388-393
  • DOI: 10.3390/electrochem1040025
  • Peer Reviewed / Open Access
• [Journal Article] Sample geometry effect on mechanical property of gold micro-cantilevers by micro-bending test (2020)
  • Author(s): Suzuki Kosuke、Chang Tso-Fu Mark、Hashigata Ken、Asano Keisuke、Chen Chun-Yi、Nagoshi Takashi、Yamane Daisuke、Ito Hiroyuki、Machida Katsuyuki、Masu Kazuya、Sone Masato
  • Journal Title: MRS Communications Volume: 10 Issue: 3 Pages: 434-438
  • DOI: 10.1557/mrc.2020.38
  • Peer Reviewed
• [Journal Article] (Invited) CMOS-MEMS Based Microgravity Sensor and Its Application (2020)
  • Author(s): Masu Kazuya、Machida Katsuyuki、Yamane Daisuke、Ito Hiroyuki、Ishihara Noboru、Chang Tso-Fu Mark、Sone Masato、Shigeyama Ryo、Ogata Taiki、Miyake Yoshihiro
  • Journal Title: ECS Transactions Volume: 97 Issue: 5 Pages: 91-108
  • DOI: 10.1149/09705.0091ecst
  • Peer Reviewed
• [Journal Article] Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers (2020)
  • Author(s): Nitta Kyotaro、Chang Tso-Fu Mark、Tang Haochun、Chen Chun-Yi、Iida Shinichi、Yamane Daisuke、Machida Katsuyuki、Ito Hiroyuki、Masu Kazuya、Sone Masato
  • Journal Title: Journal of The Electrochemical Society Volume: 167 Issue: 8 Pages: 082503-082503
  • DOI: 10.1149/1945-7111/ab8805
  • Peer Reviewed
• [Journal Article] A MEMS Accelerometer for Sub-mG Sensing (2019)
  • Author(s): Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu
  • Journal Title: Sensors and Materials Volume: 31 Issue: 9 Pages: 2883
  • DOI: 10.18494/SAM.2019.2122
  • ISSN: 0914-4935, 2435-0869
  • Year and Date: 2019-09-20
  • Peer Reviewed / Open Access
• [Journal Article] Nanoscale Hierarchical Structure of Twins in Nanograins Embedded with Twins and the Strengthening Effect (2019)
  • Author(s): Haochun Tang, Tso-Fu Mark Chang, Yaw-Wang Chai, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Journal Title: Metals Volume: 9 Issue: 9 Pages: 987-987
  • DOI: 10.3390/met9090987
  • Peer Reviewed / Open Access
• [Journal Article] High Strength Electrodeposited Au-Cu Alloys Evaluated by Bending Test toward Movable Micro-Components (2019)
  • Author(s): Keisuke Asano, Tso-Fu Mark Chang, Haochun Tang, Takashi Nagoshi, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Journal Title: ECS Journal of Solid State Science and Technology Volume: 8 Issue: 8 Pages: 412-415
  • DOI: 10.1149/2.0151908jss
  • Peer Reviewed
• [Journal Article] Cu-Alloying Effect on Structure Stability of Electrodeposited Gold-Based Micro-Cantilever Evaluated by Long-Term Vibration Test (2019)
  • Author(s): Kyotaro Nitta, Tso-Fu Mark Chang, Koichiro Tachibana, Hao-chun Tang, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Journal Title: Microelectronic Engineering Volume: 215 Pages: 111001-111001
  • DOI: 10.1016/j.mee.2019.111001
  • Peer Reviewed
• [Journal Article] Five-fold sensitivity enhancement in a capacitive tactile sensor by reducing material and structural rigidity (2019)
  • Author(s): Yu-Hong Gao, Yu-Hao Jen, Rongshun Chen, Daisuke Yamane, Cheng-Yao Lo
  • Journal Title: Sensors & Actuators: A. Physical Volume: 293 Pages: 167-177
  • DOI: 10.1016/j.sna.2019.04.043
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices (2019)
  • Author(s): Ken Hashigata, Haochun Tang, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Journal Title: Microelectronic Engineering Volume: 213 Pages: 13-17
  • DOI: 10.1016/j.mee.2019.04.008
  • Peer Reviewed
• [Presentation] 自己組織化エレクトレットを用いたMEMS振動発電素子の検討 (2022)
  • Author(s): 杉本 澪貴, 川島 康介, 栢口 英之, 石井 久夫, 田中 有弥, 山根 大輔
  • Organizer: 第69回応用物理学会春季学術講演会
• [Presentation] 電気二重層エレクトレットを用いた非接触型面外振動発電の検討 (2022)
  • Author(s): 野田 圭吾, 田村 健太郎, 三輪 一元, 小野 新平, 山根 大輔
  • Organizer: 第69回応用物理学会春季学術講演会
• [Presentation] MEMSデバイスへの応用に向けた金ニッケル合金の微小機械的特性の評価 (2022)
  • Author(s): 秋山 拓海，簡 佑安，陳 君怡，Tso Fu Mark Chang，山根 大輔，伊藤 浩之，町田 克之，三宅 美博，曽根 正人
  • Organizer: 第69回応用物理学会春季学術講演会
• [Presentation] 金めっき材料における機械的特性の電流密度依存性 (2022)
  • Author(s): 大村 太郎，Chun-Yi Chen，Tso Fu Mark Chang，山根 大輔，伊藤 浩之，町田 克之，三宅 美博，曽根 正人
  • Organizer: 第69回応用物理学会春季学術講演会
• [Presentation] 電気回路シミュレータを用いたSAE-MEMSエナジーハーベスタ解析環境の検討 (2022)
  • Author(s): 永縄 卓大，川島 康介，栢口 英之，石井 久夫，田中 有弥，山根 大輔
  • Organizer: 応用物理学会集積化MEMS技術研究会 第12回集積化MEMS技術研究ワークショップ
• [Presentation] Demonstration of Non-Contact Type Vibrational Energy Harvester with Electric Double Layer Electrets (2021)
  • Author(s): Kentaro Tamura, Keigo Nota, Kazumoto Miwa, Shimpei Ono, and Daisuke Yamane
  • Organizer: The 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS2021)
  • Int'l Joint Research
• [Presentation] Micro-Mechanical Characterization of Electrodeposited Ni-Co Alloys toward Design of MEMS Components (2021)
  • Author(s): Yiming Jiang, Chun-Yi Chen, Tso-Fu Mark Chang, Xun Luo, Daisuke Yamane, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, and Masato Sone
  • Organizer: Micro and Nano Engineering Conference 2021 (MNE2021)
  • Int'l Joint Research
• [Presentation] Micro-Mechanical Property Evaluation of Gold-Nickel Alloys toward Design of MEMS Components (2021)
  • Author(s): Takumi Akiyama, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, and Masato Sone
  • Organizer: Micro and Nano Engineering Conference 2021 (MNE2021)
  • Int'l Joint Research
• [Presentation] Effect of Current Density on Mechanical Properties of Electrodeposited Gold Evaluated by Micro-Compression Test (2021)
  • Author(s): Taro Omura, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, and Masato Sone
  • Organizer: Micro and Nano Engineering Conference 2021 (MNE2021)
  • Int'l Joint Research
• [Presentation] Mechanical Property of Gold Micro-Cantilevers for Application in Microelectronics and the Sample Geometry Effect (2021)
  • Author(s): Kazuya Fujita, Kosuke Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, and Masato Sone
  • Organizer: Micro and Nano Engineering Conference 2021 (MNE2021)
  • Int'l Joint Research
• [Presentation] 金単結晶微小カンチレバーの機械的特性とサンプル形状効果 (2021)
  • Author(s): 藤田 一矢, 鈴木 康介, Chun-Yi Chen, Tso-Fu Mark Chang, 伊藤 浩之, 山根 大輔, 町田 克之, 益 一哉, 曽根 正人
  • Organizer: 第82回応用物理学会秋季学術講演会
• [Presentation] 面内振動型Au-MEMS素子のばね構造の検討 (2021)
  • Author(s): 端山 航平, 川島 康介, 澤田 宗興, 田村 健太郎, 山根 大輔
  • Organizer: 第68回応用物理学会春季学術講演会
• [Presentation] 集積化MEMS振動発電素子に関する研究 (2021)
  • Author(s): 山根 大輔
  • Organizer: 電気学会 センサ・マイクロマシン部門 マイクロマシン・センサシステム／バイオ・マイクロシステム合同研究会
  • Invited
• [Presentation] 医用MEMSデバイス応用に向けた 微小貴金属めっき材料の機械的特性評価 (2021)
  • Author(s): 曽根 正人, Tso-Fu Mark Chang, 名越貴志, 町田 克之, 山根 大輔, 伊藤浩之, 益 一哉
  • Organizer: 日本金属学会 2021年春季講演大会
  • Invited
• [Presentation] A 100-nG/√Hz-Level Single Au Proof-Mass 3-axis MEMS Accelerometer with Pillar-Shaped Electrodes (2020)
  • Author(s): Takashi Ichikawa, Ken Atsumi, Tatsuya Koga, Daisuke Yamane, Shin-ichi Iida, Hiroyuki Ito, Noboru Ishihara, Katsuyuki Machida, and Kazuya Masu
  • Organizer: Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2020)
  • Int'l Joint Research
• [Presentation] Electrodeposition of Au-Cu Alloys and the Micro-Mechanical Properties (2020)
  • Author(s): Tso-Fu Mark Chang, Hao-Chun Tang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 237th ECS Meeting with the 18th International Meeting on Chemical Sensors (IMCS 2020)
  • Int'l Joint Research
• [Presentation] 外付エレクトレット型MEMSエナジーハーベスタの小型化の検討 (2020)
  • Author(s): 川島 康介, 澤田 宗興, 田村 健太郎, 端山 航平, 山根 大輔
  • Organizer: 令和２年電気学会センサ・マイクロマシン部門総合研究会
• [Presentation] Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Gold Evaluated By Micro-Bending Test (2020)
  • Author(s): Kosuke Suzuki, Yu-An Chien, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu and Masato Sone
  • Organizer: PRiME 2020 (ECS, ECSJ, & KECS Joint Meeting)
  • Int'l Joint Research
• [Presentation] A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing (2020)
  • Author(s): Tatsuya Koga, Takashi Ichikawa, Daisuke Yamane, Shinichi Iida, Noboru Ishihara, Hiroyuki Ito, Katsuyuki Machida, and Kazuya Masu
  • Organizer: The 7th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2020)
  • Int'l Joint Research
• [Presentation] Electrodeposited High Strength Au-TiO2 Nano Composite Film for MEMS Devices (2020)
  • Author(s): Yu-an Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 第67回応用物理学会春季学術講演会
• [Presentation] Au-Pd合金膜の電気メッキとその機械的特性 (2020)
  • Author(s): 入谷 友樹, 新田京太朗, Yu-An Chien, Tso-Fu Mark Chang, 山根 大輔, 伊藤 浩之, 町田 克之, 益 一哉, 曽根 正人
  • Organizer: 第67回応用物理学会春季学術講演会
• [Presentation] ピラー型電極を用いた単一錘3軸MEMS加速度センサの検討 (2020)
  • Author(s): 渥美 賢, 古賀 達也, 市川 崇志, 山根 大輔, 飯田 慎一, 伊藤 浩之, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 第67回応用物理学会春季学術講演会
• [Presentation] ピラー型電極による単一Au錘3軸MEMS加速度センサの感度均一化の検討 (2020)
  • Author(s): 市川 崇志, 渥美 賢, 古賀 達也, 山根 大輔, 飯田 慎一, 伊藤 浩之, 石原 昇, 町田 克之, 益 一哉
  • Organizer: 第67回応用物理学会春季学術講演会
• [Presentation] Micro-Mechanical Properties of Electrodeposited Au-TiO2 Composite Film (2019)
  • Author(s): Yu-An Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: MRS Fall Meeting 2019
  • Int'l Joint Research
• [Presentation] Electrodepostion of Au-Cu Alloy Micro-Cantilevers and the Young’s modulus by Resonance Frequency Method (2019)
  • Author(s): Kyotaro Nitta, Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone
  • Organizer: MRS Fall Meeting 2019
  • Int'l Joint Research
• [Presentation] Electroplating of Au-Pd Alloy Films and the Mechanical Properties (2019)
  • Author(s): Tomoki Iriya, Kyotaro Nitta, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: International Thin Films Conference (TACT 2019)
  • Int'l Joint Research
• [Presentation] High-Sensitivity Capacitive Tactile Sensor with Vertically Stacked Hollow Structures (2019)
  • Author(s): Cheng-Yao Lo, Daisuke Yamane
  • Organizer: The 4th International Symposium on Biomedical Engineering
  • Int'l Joint Research
• [Presentation] Extensive Sensitivity Enhancement in Stacked Capacitive Tactile Sensors (2019)
  • Author(s): Yu-Hao Jen, Chia-Tso Mo, Kean Aw, Daisuke Yamane, Cheng-Yao Lo
  • Organizer: IEEE Sensors 2019
  • Int'l Joint Research
• [Presentation] Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability (2019)
  • Author(s): Kyotaro Nitta, Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone
  • Organizer: IEEE Sensors 2019
  • Int'l Joint Research
• [Presentation] Shock Characteristics of MEMS Inertial Sensors Developed by Ti/Au Multi-Layer Metal Technology (2019)
  • Author(s): Takashi Ichikawa, Tatsuya Koga, Daisuke Yamane, Shinichi Iida, Noboru Ishihara, Hiroyuki Ito, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu
  • Organizer: 32nd International Microprocesses and Nanotechnology Conference (MNC2019)
  • Int'l Joint Research
• [Presentation] High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds (2019)
  • Author(s): Tatsuya Koga, Takashi Ichikawa, Naoto Tanaka, Taiki Ogata, Hiroki Ora, Daisuke Yamane, Noboru Ishihara, Hiroyuki Ito, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, Kazuya Masu
  • Organizer: IEEE Biomedical Circuits and Systems Conference 2019 (BioCAS2019)
  • Int'l Joint Research
• [Presentation] Sample Geometry Effect on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test (2019)
  • Author(s): Kosuke Suzuki, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 45th International Conference on Micro & Nano Engineering (MNE2019)
  • Int'l Joint Research
• [Presentation] Fabrication and Evaluation of Au-Cu Alloy 3D Structures toward MEMS Movable Components (2019)
  • Author(s): Kyotaro Nitta, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone
  • Organizer: 45th International Conference on Micro & Nano Engineering (MNE2019)
  • Int'l Joint Research
• [Presentation] Effects of Fixed End Structure on Temperature Dependence of Structure Stability of Ti/Au Micro-Cantilever toward MEMS Applications (2019)
  • Author(s): Hitomi Watanabe, Chun-Yi Chen, Tso-Fu Mark Chang, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 45th International Conference on Micro & Nano Engineering (MNE2019)
  • Int'l Joint Research
• [Presentation] Electrodeposition of TiO2 Nanoparticle Reinforced High Strength Au Film for MEMS Applications (2019)
  • Author(s): Yu-An Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: 45th International Conference on Micro & Nano Engineering (MNE2019)
  • Int'l Joint Research
• [Presentation] Mechanical properties of gold micro-cantilevers with different thickness evaluated by micro-bending test (2019)
  • Author(s): Kosuke Suzuki, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Takanshi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone
  • Organizer: The 2nd International Conference on Material Strength and Applied Mechanics (MSAM 2019)
  • Int'l Joint Research
• [Presentation] High Structure Stability Ti/Au Multiple Layer Micro-Cantilever and the Temperature Dependence (2019)
  • Author(s): Hitomi Watanabe, Takuma Suzuki, Chun-Yi Chen, Takanshi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone
  • Organizer: The 2nd International Conference on Material Strength and Applied Mechanics (MSAM 2019)
  • Int'l Joint Research
• [Presentation] Mechanical properties of electrodeposited gold-copper alloy by micro-compression test (2019)
  • Author(s): Masato Sone, Hao-Chun Tang, Masaharu Yoshiba, Chun-Yi Chen, Takanshi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu
  • Organizer: The 2nd International Conference on Material Strength and Applied Mechanics (MSAM 2019)
  • Int'l Joint Research
• [Presentation] Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers (2019)
  • Author(s): Ken Atsumi, Shota Otobe, Tatsuya Koga, Takashi Ichikawa, Daisuke Yamane, Shinichi Iida, Hiroyuki Ito, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu
  • Organizer: Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2019)
  • Int'l Joint Research
• [Presentation] 微弱筋音計測に向けた高分解能MEMS慣性センサモジュールの検討 (2019)
  • Author(s): 古賀 達也, 市川 崇志, 田中 直登, 緒方 大樹, 大良 宏樹, 山根 大輔, 石原 昇, 伊藤 浩之, 曽根 正人, 町田 克之, 三宅 美博, 益 一哉
  • Organizer: 第11回集積化MEMSシンポジウム
• [Presentation] 積層メタル技術で作製したMEMS加速度センサの衝撃特性評価 (2019)
  • Author(s): 市川 崇志, 古賀 達也, 山根 大輔, 飯田 慎一, 石原 昇, 伊藤 浩之, Chang Tso-Fu Mark, 曽根 正人, 町田 克之, 益 一哉
  • Organizer: 第11回集積化MEMSシンポジウム
• [Presentation] 3Dピラー型Au錘MEMS加速度センサ (2019)
  • Author(s): 市川 崇志, 乙部 翔太, 渥美 賢, 古賀 達也, 山根 大輔, 飯田 慎一, 伊藤 浩之, 石原 昇, 曽根 正人, 町田 克之, 益 一哉
  • Organizer: 第36回「センサ・マイクロマシンと応用システム」シンポジウム
• [Presentation] Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2) (2019)
  • Author(s): 市川 崇志, 乙部 翔太, 渥美 賢, 古賀 達也, 山根 大輔, 飯田 慎一, 伊藤 浩之, 石原 昇, 町田 克之, 曽根 正人, 益 一哉
  • Organizer: 第80回応用物理学会秋季学術講演会
• [Presentation] 3軸Au錘MEMS加速度センサにおける検出電極構造の検討 (2019)
  • Author(s): 市川 崇志, 新島 宏文, 古賀 達也, 山根 大輔, 飯田 慎一, 伊藤 浩之, 石原 昇, 曽根 正人, 町田 克之, 益 一哉
  • Organizer: 令和元年電気学会センサ・マイクロマシン部門総合研究会
• [Remarks] 研究室HP
  • URL: https://www.yamane.se.ritsumei.ac.jp/
• [Remarks] 立命館大学 研究者学術情報ＤＢ
  • URL: https://research-db.ritsumei.ac.jp/rithp/k03/resid/S001779
• [Remarks] Smart Micro Mechatro Systems Lab | 立命館大学 山根研究室
  • URL: http://www.yamane.se.ritsumei.ac.jp/
• [Patent(Industrial Property Rights)] 微細素子の製造方法及び微細素子 (2020)
  • Inventor(s): 山根 大輔，田中 有弥
  • Industrial Property Rights Holder: 山根 大輔，田中 有弥
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2020-132954
  • Filing Date: 2020
• [Patent(Industrial Property Rights)] 自壊素子が組み込まれたデバイス及び自壊素子の設計方法 (2020)
  • Inventor(s): 山根 大輔
  • Industrial Property Rights Holder: 山根 大輔
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2020-189992
  • Filing Date: 2020