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Study on ultra-high electric field acceleration lens in a compact ion microbeam system

Research Project

Project/Area Number 19K12635
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 80040:Quantum beam science-related
Research InstitutionNational Institutes for Quantum Science and Technology

Principal Investigator

Ohkubo Takeru  国立研究開発法人量子科学技術研究開発機構, 高崎量子応用研究所 量子機能創製研究センター, 主幹研究員 (40446456)

Project Period (FY) 2019-04-01 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2021: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2020: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2019: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywordsナノビーム / マイクロビーム / イオン配列 / 微細加工 / 小型装置
Outline of Research at the Start

小型イオンマイクロビーム装置は、たくさんのイオンの粒を髪の毛の太さの100分の1以下という極細のビームとして発射することができる。このビームは材料を削ったり固めたりすることができるので、例えばパソコンやスマホの通信を向上させるために重要なとても小さくて細かい部品を作ることができる。まだ試作品なので、この研究でさらに開発を進め、近い将来の実用化を目指したい。

Outline of Final Research Achievements

Ion microbeams are a technology that enables the ultra-precise alignment of quantum bits required for quantum computers and the fabrication of new optical elements in optical communications by microfabrication. The overall concept of the research is to develop an ultra-precision ion array and microfabrication system using acceleration lenses that simultaneously accelerates and focuses the beam by electrostatic fields, and to investigate how small the beam diameter can be reduced.
In this study, we proceeded with the development of a lens system that can be adapted to a laser-cooled single ion source, which is the goal of the Laser-cooled Single Ion Source Project at the Quantum Materials and Applications Research Center, Takasaki Institute for Advanced Quantum Science, QST, and succeeded in designing a lens system that can irradiate with a precision of 4.5 nm using a two-stage acceleration lens with a magnification of 0.006.

Academic Significance and Societal Importance of the Research Achievements

本研究によって、QST高崎研独自の技術である加速レンズとイオン源を組み合わせた超高精度イオン配列・微細加工装置の空間分解能が数ナノメートル程度になる見通しが得られた。今後、更なる開発によってこの装置を実現することにより、現在は限られた研究機関等でしか行われていない量子ビット配列等の研究が全国の大学の実験室や工場等に広がっていくことが予想され、我が国の量子コンピュータや光通信の分野における競争力増大に資すると考えられる。

Report

(6 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Research-status Report
  • 2021 Research-status Report
  • 2020 Research-status Report
  • 2019 Research-status Report
  • Research Products

    (4 results)

All 2023 2021 2020

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Open Access: 1 results) Presentation (2 results) (of which Int'l Joint Research: 1 results)

  • [Journal Article] Design of an apertureless two-stage acceleration lens for a single-ion implantation system2023

    • Author(s)
      Ishii Y.、Ohkubo T.、Miyawaki N.、Yuri Y.、Onoda S.、Narumi K.、Saitoh Y.
    • Journal Title

      Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

      Volume: 541 Pages: 200-204

    • DOI

      10.1016/j.nimb.2023.05.021

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preliminary study: Measurement of ion beam energy spreads produced by a Penning ionization gauge-type ion source using electromagnets for a mega-electron volt compact ion microbeam system2020

    • Author(s)
      Ishii Y.、Ohkubo T.、Kashiwagi H.、Miyake Y.
    • Journal Title

      Review of Scientific Instruments

      Volume: 91 Issue: 4 Pages: 043304-043304

    • DOI

      10.1063/1.5132301

    • Related Report
      2020 Research-status Report
    • Peer Reviewed / Open Access
  • [Presentation] Analysis of Ion Beam Generated by a Duoplasmatron-type Ion Source for a Compact 100 keV Ion Microbeam System2021

    • Author(s)
      Yasuyuki Ishii and Takeru Ohkubo
    • Organizer
      IBA/PIXE & SIMS
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] 小型イオンマイクロビーム装置用のデュオプラズマトロン型イオン源のイオン種分析2021

    • Author(s)
      石井 保行、大久保 猛
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Research-status Report

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Published: 2019-04-18   Modified: 2025-01-30  

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