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Novel terahertz NEMS bolometers by using two-dimensional nanomaterials

Research Project

Project/Area Number 19K15023
Research Category

Grant-in-Aid for Early-Career Scientists

Allocation TypeMulti-year Fund
Review Section Basic Section 21050:Electric and electronic materials-related
Research InstitutionTokyo University of Agriculture and Technology

Principal Investigator

Zhang Ya  東京農工大学, 工学(系)研究科(研究院), 准教授 (80779637)

Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2020: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2019: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Keywordsテラヘルツ / グラフェン / 2次元材料 / 光センサ / terahertz / thermal sensor / graphene / NEMS / NEMS resonator / 2D material / THz sensor / bolometer
Outline of Research at the Start

Terahertz (THz) electromagnetic spectrum draws wide attention for nondestructive and/or biocompatible sensing. In order to achieve the wide applications of THz sensing, we are developing an uncooled, highly-sensitive and fast THz bolometer by using NEMS resonators based on 2D nanomaterials. Owing to the extremely thin (< 1 nm) thickness of the 2D materials, the NEMS bolometer will have very high thermal sensitivity and extremely large operation bandwidth. The NEMS bolometer will greatly improve the THz measurements, and give a big step for the broad applications of THz technology.

Outline of Final Research Achievements

Two-dimensional materials such as graphene have a very small heat capacity and in-plane thermal conductance, and thus are very promising for realizing sensitive and fast terahertz thermal sensors. By using CVD-grown graphene, we have developed a photodetector with a suspended graphene layer and two different types of metal electrodes. When irradiated with the input light, the graphene film is heated up, and the Seebeck effect causes a voltage output between the two electrodes (Au-Al). We have found that when the input light power< 2mW, the photodetector gives a responsivity of ~90 V/W. Moreover, when the modulation frequency of the incident light is increased from 100 Hz to 1 kHz, there is no observable decrease in the optical response, indicating that the thermal time constant is very small. The result shows that the fabricated graphene photodetector will be useful for realizing sensitive and fast terahertz sensors.

Academic Significance and Societal Importance of the Research Achievements

テラヘルツ・赤外領域の分光・検出技術は、基礎科学、医学・薬学、製造業、安全・安心分野など様々な分野への応用として注目されている。このような技術を社会の様々な場面で広く応用展開していくためには、極低温への冷却を必要としない高感度・高速のテラヘルツ・赤外検出用ボロメータの開発が必要不可欠である。本研究では、新規な2次元ナノ材料を用いたボロメータの動作原理を検証し、2次元ナノ材料の超低熱容量・超低熱伝導のメリトを利用して超高速・高感度ボロメータの実現を可能にする。そのため、本研究はテラヘルツ・赤外光を利用する産業分野に寄与する。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Research-status Report
  • 2019 Research-status Report
  • Research Products

    (24 results)

All 2022 2021 2020 2019 Other

All Int'l Joint Research (1 results) Journal Article (9 results) (of which Int'l Joint Research: 4 results,  Peer Reviewed: 9 results,  Open Access: 2 results) Presentation (12 results) (of which Int'l Joint Research: 4 results,  Invited: 1 results) Remarks (2 results)

  • [Int'l Joint Research] 北京工業大学(中国)

    • Related Report
      2019 Research-status Report
  • [Journal Article] Thermal tuning of mechanical nonlinearity in GaAs doubly-clamped MEMS beam resonators2021

    • Author(s)
      Zhang Ya、Yoshioka Yuri、Iimori Mirai、Qiu Boqi、Liu Xin、Hirakawa Kazuhiko
    • Journal Title

      Applied Physics Letters

      Volume: 119 Issue: 16 Pages: 163503-163503

    • DOI

      10.1063/5.0065271

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Enhancing the thermal responsivity of microelectromechanical system beam resonators by preloading a critical buckling strain2021

    • Author(s)
      Qiu Boqi、Zhang Ya、Nagai Naomi、Hirakawa Kazuhiko
    • Journal Title

      Applied Physics Letters

      Volume: 119 Issue: 15 Pages: 153502-153502

    • DOI

      10.1063/5.0065800

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] GaAs-based microelectromechanical terahertz bolometers fabricated on high-resistivity Si substrates using wafer bonding technique2021

    • Author(s)
      Niu Tianye、Morais Natalia、Qiu Boqi、Nagai Naomi、Zhang Ya、Arakawa Yasuhiko、Hirakawa Kazuhiko
    • Journal Title

      Applied Physics Letters

      Volume: 119 Issue: 4 Pages: 041104-041104

    • DOI

      10.1063/5.0058260

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 1:1 internal mode coupling strength in GaAs doubly-clamped MEMS beam resonators with linear and nonlinear oscillations2020

    • Author(s)
      Zhang Ya、Yoshioka Yuri、Morohashi Isao、Liu Xin
    • Journal Title

      Applied Physics Express

      Volume: 14 Issue: 1 Pages: 014001-014001

    • DOI

      10.35848/1882-0786/abd198

    • Related Report
      2020 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Control of absorption properties of ultra-thin metal insulator metal metamaterial terahertz absorbers2020

    • Author(s)
      Niu Tianye、Qiu Boqi、Zhang Ya、Hirakawa Kazuhiko
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: 12 Pages: 120904-120904

    • DOI

      10.35848/1347-4065/abc925

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Effect of beam deflection on the thermal responsivity of GaAs-based doubly clamped microelectromechanical beam resonators2020

    • Author(s)
      Qiu Boqi、Zhang Ya、Akahane Kouichi、Nagai Naomi、Hirakawa Kazuhiko
    • Journal Title

      Applied Physics Letters

      Volume: 117 Issue: 20 Pages: 203503-203503

    • DOI

      10.1063/5.0029188

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Giant Enhancement in the Thermal Responsivity of Microelectromechanical Resonators by Internal Mode Coupling2020

    • Author(s)
      Zhang Ya、Kondo Ryoka、Qiu Boqi、Liu Xin、Hirakawa Kazuhiko
    • Journal Title

      Physical Review Applied

      Volume: 14 Issue: 1 Pages: 014019-014019

    • DOI

      10.1103/physrevapplied.14.014019

    • Related Report
      2020 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Rapid Scan THz Imaging Using MEMS Bolometers2020

    • Author(s)
      Morohashi Isao、Zhang Ya、Qiu Boqi、Irimajiri Yoshihisa、Sekine Norihiko、Hirakawa Kazuhiko、Hosako Iwao
    • Journal Title

      Journal of Infrared, Millimeter, and Terahertz Waves

      Volume: 41 Issue: 6 Pages: 675-684

    • DOI

      10.1007/s10762-020-00691-5

    • Related Report
      2020 Research-status Report 2019 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Giant enhancement in the thermal responsivity of microelectromechanical resonators by internal mode coupling2020

    • Author(s)
      Ya Zhang, Ryoka Kondo, Boqi Qiu, Xin Liu, Kazuhiko Hirakawa
    • Journal Title

      Physical Review Applied

      Volume: In production Pages: 1-17

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] Thermoelectric photodetector using CVD graphene and asymmetric-metal electrodes2022

    • Author(s)
      Ryota Seki, Morohashi Isao, Ya Zhang
    • Organizer
      JSAP 69th Spring meeting
    • Related Report
      2021 Annual Research Report
  • [Presentation] Thermoelectric photodetector using monolayer graphene and metal electrodes of different working functions2021

    • Author(s)
      Ryota Seki, Isao Morohashi, and Ya Zhang
    • Organizer
      JSAP autumn meeting 2021
    • Related Report
      2021 Annual Research Report
  • [Presentation] Improvement of the thermal sensitivity of MEMS sensors with mesh phononic nanostructures2021

    • Author(s)
      Ryoko Yamamoto, Naomi Nagai, Kazuhiko Hirakawa Akira Kojima, Nobuyoshi Koshida, Ya Zhang
    • Organizer
      応用物理学会春季講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] Effect of Restrahlen band and phonon absorption on the response spectra of GaAs-based MEMS terahertz bolometers2021

    • Author(s)
      Tianye Niu, Natalia Morais, Boqi Qiu, Naomi Nagai, Ya Zhang, Yasuhiko Arakawa, Kazuhiko Hirakawa
    • Organizer
      応用物理学会春季講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 1:1 mode coupling strength in GaAs MEMS resonators investigated by thermal effect2020

    • Author(s)
      Ya Zhang, Yuri Yoshioka
    • Organizer
      応用物理学会秋季講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] GaAs-based MEMS terahertz bolometers fabricated on high-resistivity Si substrates using wafer bonding technique2020

    • Author(s)
      Tianye Niu, Natalia Morais, Boqi Qiu, Naomi Nagai, Ya Zhang, Yasuhiko Arakawa, Kazuhiko Hirakawa
    • Organizer
      応用物理学会秋季講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] Quasi double layer terahertz meta-absorber for bolometric applications2020

    • Author(s)
      Shota Iino, Ya Zhang, and et al.
    • Organizer
      応用物理学会春季講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] A sensitive MEMS bolometer with high temperature stability2020

    • Author(s)
      Yuri Yoshioka , Ya Zhang, and et al.
    • Organizer
      応用物理学会春季講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Improvement of acquisition time using high speed MEMS bolometer in active imaging2020

    • Author(s)
      I Morohashi, Y Zhang, B Qiu, N Sekine, K Hirakawa, I Hosako
    • Organizer
      Fourth International Conference on Photonics Solutions (ICPS2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Fast and sensitive bolometric terahertz detection at room temperature through thermomechanical transduction2019

    • Author(s)
      K Hirakawa, Y Zhang, B Qiu, T Niu, R Kondo, N Nagai, K Kuroyama
    • Organizer
      2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Effects of Substrate Phonon Absorption on the Resonance Properties of Ultrathin Metamaterials in the Terahertz Range2019

    • Author(s)
      T Niu, B Qiu, Y Zhang, K Hirakawa
    • Organizer
      2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Control of absorption properties of MEMS terahertz bolometers using metamaterials2019

    • Author(s)
      T Niu, B Qiu, Y Zhang, K Hirakawa
    • Organizer
      2019 Compound Semiconductor Week (CSW)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Remarks] 張研究室研究紹介

    • Related Report
      2021 Annual Research Report
  • [Remarks] Reserach Introduction

    • URL

      http://web.tuat.ac.jp/~zhang/research.html

    • Related Report
      2020 Research-status Report 2019 Research-status Report

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Published: 2019-04-18   Modified: 2023-01-30  

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