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Analysis of enhanced electron-phonon scattering at semiconductor surface/interface

Research Project

Project/Area Number 19K15050
Research Category

Grant-in-Aid for Early-Career Scientists

Allocation TypeMulti-year Fund
Review Section Basic Section 21060:Electron device and electronic equipment-related
Research InstitutionThe University of Tokyo

Principal Investigator

Tanaka Takahisa  東京大学, 大学院工学系研究科(工学部), 助教 (30782081)

Project Period (FY) 2019-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2022: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2021: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2020: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2019: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Keywordsナノワイヤ / ナノシート / キャリア散乱 / フォノン / 移動度 / シリコン / 分子動力学法 / フォノン散乱 / 界面 / 表面 / 変形ポテンシャル / 電子フォノン散乱
Outline of Research at the Start

フォノンによる電子の散乱は,電子材料の電気抵抗を決定する重要な機構である.半導体表面/界面近傍における電子フォノン散乱の増大は,ナノスケールSi電子デバイス内の電気特性を再現するために,経験的に電子輸送の物理モデルに取り込まれてきた.しかし,電子フォノン散乱変調の起源については未だ解明されていない.本研究では,表面/界面の影響が支配的となるナノシート構造内の電子フォノン散乱の実験的評価と原子スケールの計算の比較から,半導体表面/界面近傍における電子フォノン散乱変調の起源を明らかにする.

Outline of Final Research Achievements

In order to understand the modulation of carrier scattering at surfaces/interfaces, which is not observed in bulk materials, carrier transport in nanowires and nanosheets is computationally reproduced and compared with experiments. The carrier transport was calculated by a combination of molecular dynamics and quantum transport calculations, and the effect of electron-phonon scattering was successfully taken into account with a low computational burden. As a result, we succeeded in reproducing the carrier transport on a scale similar to that of realistic semiconductor nanowires and metallic nanosheets, and analyzed the modulation of carrier scattering.

Academic Significance and Societal Importance of the Research Achievements

本研究で得られた表面/界面におけるキャリア散乱の理解は,今後の集積回路内のトランジスタや配線の設計・材料選択において,表面/界面のエンジニアリングによる電気特性の制御を実現するために重要である.また,本研究で実施した計算手法は低い計算負荷で現実的なキャリア輸送を再現できることから,集積回路に限らず様々なデバイスの特性を予測し,材料の最適化を行う際に適用可能である.

Report

(5 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Research-status Report
  • 2020 Research-status Report
  • 2019 Research-status Report
  • Research Products

    (9 results)

All 2022 2021 2020 2019

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Open Access: 1 results) Presentation (7 results) (of which Int'l Joint Research: 2 results,  Invited: 1 results)

  • [Journal Article] Atomistic Simulation Study of Impacts of Surface Carrier Scatterings on Carrier Transport in Pt Nanosheets2021

    • Author(s)
      Tanaka Takahisa、Kato Taro、Yajima Takeaki、Uchida Ken
    • Journal Title

      IEEE Electron Device Letters

      Volume: 42 Issue: 7 Pages: 1057-1060

    • DOI

      10.1109/led.2021.3077466

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Impact of defects in self-assembled monolayer on humidity sensing by molecular functionalized transistors2020

    • Author(s)
      T. Tanaka, T. Yajima, K. Uchida
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SI Pages: SIIE04-SIIE04

    • DOI

      10.35848/1347-4065/ab80dc

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Open Access
  • [Presentation] Ru配線の原子論的輸送計算に向けた反応力場構築2022

    • Author(s)
      田中 貴久,内田 建
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Enhanced electron phonon scattering in Si nanowires covered by oxide2021

    • Author(s)
      T. Tanaka, K. Uchida
    • Organizer
      240th ECS Meeting
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] 酸素吸着によるPt薄膜抵抗率変化の原子論的解析2021

    • Author(s)
      田中 貴久, 内田 建
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] 酸素吸着によるPt薄膜抵抗率変化の原子論的解析2021

    • Author(s)
      田中貴久,内田建
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 原子スケールでSiO2/Si界面の電子フォノン散乱を考慮したSiナノワイヤ中の移動度計算2020

    • Author(s)
      田中貴久,矢嶋赳彬,内田建
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 分子修飾トランジスタガスセンサにおける修飾分子と標的ガス分子との相互作用の研究2020

    • Author(s)
      田中 貴久, 矢嶋 赳彬, 内田 建
    • Organizer
      第67回 応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Atomistic Study of Sensing Mechanisms of Molecular Decorated FETs2019

    • Author(s)
      T. Tanaka, T. Yajima, K. Uchida
    • Organizer
      32nd International Microprocesses and Nanotechnology Conference
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research

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Published: 2019-04-18   Modified: 2024-01-30  

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