• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of aL-fL/sec Flow Monitor in Nanospace

Research Project

Project/Area Number 19K15417
Research Category

Grant-in-Aid for Early-Career Scientists

Allocation TypeMulti-year Fund
Review Section Basic Section 28050:Nano/micro-systems-related
Research InstitutionThe University of Tokyo

Principal Investigator

Morikawa Kyojiro  東京大学, 大学院工学系研究科(工学部), 特任講師 (20796437)

Project Period (FY) 2019-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2022: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2021: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2020: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2019: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Keywordsナノ流体工学 / 流動電流 / 流動電位 / ナノ電極 / 流量計測 / 流動電位/流動電流
Outline of Research at the Start

本研究はナノ空間でのaL-fL/sec流量測定ツールを創成するものである。
流体デバイス工学において流量の制御は最も基本かつ重要であるが、ナノ空間ではaL-fL/sec(aL:10の-18乗リットル, fL:10の-15乗リットル)の極微少流量を計測する方法がない。そこで、溶液の圧力駆動による流れを電流/電位として検出する流動電流/流動電位法という申請者独自の方法でナノ空間の流量計測を実現する。

Outline of Final Research Achievements

For fabrication of the size-regulated nanochannels, we successfully fabricated the size-regulated nanochannels from 50 nm (minimum) to several 1000 nm (maximum). For nano-electrode fabrication, we tried a new fabrication process with nanofluidic and nano-electrochemical experiments and finally succeeded in nano-electrode fabrication. For the relationship between streaming current and flow rate, experimental results corresponded well to calculations using unique properties such as higher viscosity, lower dielectric constant, and lower disassociation constant which we previously found in namespaces. From these parameters, the streaming current value was calibrated to the flow rate value, and the flow rate in a 50 nm channel was approximately 30aL/sec. Therefore, we successfully measured the flow rate in aL/sec region for the first time.

Academic Significance and Societal Importance of the Research Achievements

本研究で開発した制御された流路の加工法や、ナノ電極の作製法、流路の修飾法、閉空間の修飾評価法などは本研究に必須なだけでなくナノ流体工学において重要な基盤技術として多いに貢献できる。さらに、本研究において流動電流値を流量値に校正するために行ったナノ物性計測結果については、50nmの空間で得られた初めての溶液物性に関する知見であり、ナノ流体工学やナノ溶液化学における基礎科学的な知見として大いに重要な知見が得られたと考えられる。

Report

(5 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Research-status Report
  • 2020 Research-status Report
  • 2019 Research-status Report
  • Research Products

    (36 results)

All 2023 2022 2021 2020 2019 Other

All Int'l Joint Research (1 results) Journal Article (13 results) (of which Int'l Joint Research: 3 results,  Peer Reviewed: 13 results,  Open Access: 5 results) Presentation (18 results) (of which Int'l Joint Research: 10 results,  Invited: 3 results) Book (1 results) Remarks (3 results)

  • [Int'l Joint Research] National Tsing Hua University/National Kaohsiung Normal University(台湾)

    • Related Report
      2022 Annual Research Report
  • [Journal Article] Fused silica microchannel fabrication with smooth surface and high etching selectivity2023

    • Author(s)
      Kyojiro Morikawa, Po-yin Chen, Hai Linh Tran, Yutaka Kazoe, Chihchen Chen and Takehiko Kitamori
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 33 Issue: 4 Pages: 047001-047001

    • DOI

      10.1088/1361-6439/acbe4a

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Shift of charge inversion point of a trivalent ion solution in a nanofluidic channel2022

    • Author(s)
      Kyojiro Morikawa, Takehiko Tsukahara
    • Journal Title

      Colloid and Interface Science Communications

      Volume: 50 Pages: 100646-100646

    • DOI

      10.1016/j.colcom.2022.100646

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] STREAMING CURRENT IN 50NM NANOFLUIDIC CHANNEL2022

    • Author(s)
      Kyojiro Morikawa, Chih-Chang Chang, Yutaka Kazoe, Kazuma Mawatari and Takehiko Kitamori
    • Journal Title

      Proceedings of MicroTAS

      Volume: - Pages: 825-826

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] GENERARION AND FUSION OF SIZE-CONTROLLED fL DROPLETS USING GAS/LIQUID INTERFACE2022

    • Author(s)
      Kyojiro Morikawa, Ryoichi Ohta, Naoya Sawahata, and Takehiko Kitamori
    • Journal Title

      Proceedings of MicroTAS

      Volume: - Pages: 1025-1026

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] LOW TEMPERATURE BONDING WITH ROUGH BONDING SURFACE FOR GLASS MICRO/NANOFLUIDIC DEVICE2022

    • Author(s)
      Ryoichi Ohta, Kyojiro Morikawa, Takehiko Kitamori
    • Journal Title

      Proceedings of MicroTAS

      Volume: - Pages: 1237-1238

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ELECTROKINETIC ENERGY CONVERSION IN NANOFLUIDIC CHANNEL: SQUARE NANOCHANNEL VS PLATE NANOCHANNEL2022

    • Author(s)
      Kyojiro Morikawa, Chih-Chang Chang, Yutaka Kazoe
    • Journal Title

      Proceedings of MicroTAS

      Volume: - Pages: 1259-1260

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Surface Patterning of Closed Nanochannel Using VUV Light and Surface Evaluation by Streaming Current2021

    • Author(s)
      Kyojiro Morikawa, Haruki Kazumi, Yoshiyuki Tsuyama, Ryoichi Ohta and Takehiko Kitamori
    • Journal Title

      Micromachines

      Volume: 12 Issue: 11 Pages: 1367-1367

    • DOI

      10.3390/mi12111367

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Metal-Free Fabrication of Fused Silica Extended Nanofluidic Channel to Remove Artifacts in Chemical Analysis2021

    • Author(s)
      Kyojiro Morikawa, Ryoichi Ohta, Kazuma Mawatari, Takehiko Kitamori
    • Journal Title

      Micromachines

      Volume: 12 Issue: 8 Pages: 917-917

    • DOI

      10.3390/mi12080917

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] MICRO- AND NANOFLUIDIC CONTROL WITH PARTIAL INTEGRATION OF PDMS VALVE INTO GLASS NANOFLUIDIC DEVICE2021

    • Author(s)
      Kyojiro Morikawa, Shu Matsuura, Hiroki Sano, Yutaka Kazoe and Takehiko Kitamori
    • Journal Title

      Proceeding of MicroTAS

      Volume: 1 Pages: 1405-1406

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Advanced Top-Down Fabrication for a Fused Silica Nanofluidic Device2020

    • Author(s)
      Kyojiro Morikawa, Yutaka Kazoe, Yuto Takagi, Yoshiyuki Tsuyama, Yuriy Pihosh, Takehiko Tsukahara, Takehiko Kitamori
    • Journal Title

      Micromachines

      Volume: 11 Issue: 11 Pages: 995-995

    • DOI

      10.3390/mi11110995

    • Related Report
      2020 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Advances in Label-Free Detections for Nanofluidic Analytical Devices2020

    • Author(s)
      Thu Hac Huong Le, Hisashi Shimizu, Kyojiro Morikawa
    • Journal Title

      Micromachines

      Volume: 11 Issue: 10 Pages: 885-885

    • DOI

      10.3390/mi11100885

    • Related Report
      2020 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] SURFACE PATTERNING OF NANOFLUIDIC CHANNELS AND ITS EVALUATION USING STREAMING CURRENT2020

    • Author(s)
      Kyojiro Morikawa, Haruki Kazumi, Ryoichi Ohta, and Takehiko Kitamori
    • Journal Title

      Proceeding of MicroTAS

      Volume: 1 Pages: 356-357

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] DEVELOPMENT OF FABRICATION METHOD FOR CONCENTRIC CONNECTION OF MICROCHANNEL AND NANOCHANNEL2020

    • Author(s)
      Kyojiro Morikawa, Erina Takeuchi, and Takehiko Kitamori
    • Journal Title

      Proceeding of MicroTAS

      Volume: 1 Pages: 362-363

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Presentation] Picoliter protein digestion and separation with glass nanofluidic device fabrication2023

    • Author(s)
      Kyojiro Morikawa
    • Organizer
      Pittcon2023
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] ドライエッチングによる平滑なガラス製マイクロ流路の高選択比加工法2023

    • Author(s)
      森川響二朗, Po-yin Chen, Hai Linh Tran, 嘉副裕, Chihchen Chen, 北森武彦
    • Organizer
      化学とマイクロ・ナノシステム学会 第47回研究会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Nanofluidic Device Fabrication and Application to Picoliter Protein Analysis2022

    • Author(s)
      Kyojiro Morikawa
    • Organizer
      International Conference on Smart Sensors 2022 (ICSS 2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] STREAMING CURRENT IN 50NM NANOFLUIDIC CHANNEL2022

    • Author(s)
      Kyojiro Morikawa, Chih-Chang Chang, Yutaka Kazoe, Kazuma Mawatari and Takehiko Kitamori
    • Organizer
      The 26th Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] GENERARION AND FUSION OF SIZE-CONTROLLED fL DROPLETS USING GAS/LIQUID INTERFACE2022

    • Author(s)
      Kyojiro Morikawa, Ryoichi Ohta, Naoya Sawahata, and Takehiko Kitamori
    • Organizer
      The 26th Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] LOW TEMPERATURE BONDING WITH ROUGH BONDING SURFACE FOR GLASS MICRO/NANOFLUIDIC DEVICE2022

    • Author(s)
      Ryoichi Ohta, Kyojiro Morikawa, Takehiko Kitamori
    • Organizer
      The 26th Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ELECTROKINETIC ENERGY CONVERSION IN NANOFLUIDIC CHANNEL: SQUARE NANOCHANNEL VS PLATE NANOCHANNEL2022

    • Author(s)
      Kyojiro Morikawa, Chih-Chang Chang, Yutaka Kazoe
    • Organizer
      The 26th Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ガラス製ナノ・マイクロ流体デバイス加工法2022

    • Author(s)
      森川響二朗、嘉副裕、太田諒一、清水久史、陳致真、北森武彦
    • Organizer
      4大学ナノ・マイクロファブリケーションコンソーシアム・シンポジウム
    • Related Report
      2022 Annual Research Report
  • [Presentation] 森川響二朗2022

    • Author(s)
      ガラス製ナノ流路加工法の開発とナノ流体デバイスへの展開
    • Organizer
      4大学ナノ・マイクロファブリケーションコンソーシアム・シンポジウム
    • Related Report
      2021 Research-status Report
    • Invited
  • [Presentation] MICRO- AND NANOFLUIDIC CONTROL WITH PARTIAL INTEGRATION OF PDMS VALVE INTO GLASS NANOFLUIDIC DEVICE2021

    • Author(s)
      Kyojiro Morikawa, Shu Matsuura, Hiroki Sano, Yutaka Kazoe, and Takehiko Kitamori
    • Organizer
      MicroTAS2021
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Crフリー加工法によるガラス製拡張ナノ流路・マイクロ流路の作製2021

    • Author(s)
      森川響二朗、太田諒一、馬渡和真、北森武彦
    • Organizer
      化学とマイクロ・ナノシステム学会 第44回研究会
    • Related Report
      2021 Research-status Report
  • [Presentation] ガラス製ナノ流体デバイスへのPDMS部分集積と局所変形バルブへの応用2021

    • Author(s)
      森川響二朗、松浦柊、佐野大樹、嘉副裕、北森武彦
    • Organizer
      化学とマイクロ・ナノシステム学会 第44回研究会
    • Related Report
      2021 Research-status Report
  • [Presentation] SURFACE PATTERNING OF NANOFLUIDIC CHANNELS AND ITS EVALUATION USING STREAMING CURRENT2020

    • Author(s)
      Kyojiro Morikawa, Haruki Kazumi, Ryoichi Ohta, and Takehiko Kitamori
    • Organizer
      MicroTAS2020
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] DEVELOPMENT OF FABRICATION METHOD FOR CONCENTRIC CONNECTION OF MICROCHANNEL AND NANOCHANNEL2020

    • Author(s)
      Kyojiro Morikawa, Erina Takeuchi, and Takehiko Kitamori
    • Organizer
      MicroTAS2020
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] マイクロ・ナノ流路の同心配置のための加工法2020

    • Author(s)
      森川響二朗, 竹内絵里奈, 北森武彦
    • Organizer
      化学とマイクロ・ナノシステム学会 第42回研究会
    • Related Report
      2020 Research-status Report
  • [Presentation] 電極集積ナノ流体デバイス加工とその応用2020

    • Author(s)
      森川響二朗、竹内智章、北森武彦
    • Organizer
      日本化学会 第100春季年会 (2020)
    • Related Report
      2019 Research-status Report
  • [Presentation] Fabrication of electrode integrated nanofluidic device2019

    • Author(s)
      Tomoaki Takeuchi, Kyojiro Morikawa, Takehiko Kitamori
    • Organizer
      RSC Tokyo International Conference 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 電極集積ナノ流体デバイス加工法の開発2019

    • Author(s)
      竹内智章、森川響二朗、北森武彦
    • Organizer
      化学とマイクロ・ナノシステム学会第40回研究会
    • Related Report
      2019 Research-status Report
  • [Book] 2020版 薄膜作製応用ハンドブック 第4編7章4節1項2020

    • Author(s)
      森川響二朗、北森武彦
    • Total Pages
      1570
    • Publisher
      (株)エヌ・ティー・エス
    • Related Report
      2019 Research-status Report
  • [Remarks] Research Map

    • URL

      https://researchmap.jp/KyojiroMorikawa

    • Related Report
      2022 Annual Research Report 2021 Research-status Report
  • [Remarks] HP

    • URL

      http://park.itc.u-tokyo.ac.jp/kitamori/cms/

    • Related Report
      2020 Research-status Report
  • [Remarks] 北森研究室HP

    • URL

      http://park.itc.u-tokyo.ac.jp/kitamori/cms/

    • Related Report
      2019 Research-status Report

URL: 

Published: 2019-04-18   Modified: 2024-01-30  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi