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Fabrication of novel quantum/classical devices based on excitons

Research Project

Project/Area Number 19K21978
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Review Section Medium-sized Section 21:Electrical and electronic engineering and related fields
Research InstitutionKyushu University

Principal Investigator

Itagaki Naho  九州大学, システム情報科学研究院, 教授 (60579100)

Project Period (FY) 2019-06-28 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Fiscal Year 2020: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2019: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Keywords酸化物半導体 / スパッタリング / 量子構造 / エキシトン / ZION / 酸窒化物半導体 / ZnO / ZnMgO / 結晶成長 / トランジスタ / プラズマエレクトロニクス / スパッタ
Outline of Research at the Start

本研究は,電子-正孔が再結合する過程 (=中間状態)として扱われてきたエキシトンを情報担体として進化させ,その伝導および記憶を利用した革新的古典/量子デバイスの創製を目指すものである.まず,オリジナル材料ZIONを用いて,室温・長寿命エキシトンを無機材料で実現する.これにより,エキシトンをキャリアとする新概念トランジスタや,制御性・長いコヒーレンス時間・室温動作安定性を兼ね揃えたエキシトン量子ビットを実現する.本研究は,新学術分野「エキシトニクス」の源流になるとともに,全てのデバイスが光配線でつながった古典-量子ハイブリットコンピューティングの先駆けになると期待される.

Outline of Final Research Achievements

We developed new semiconducting materials, (ZnO)x(InN)1-x (hereafter called ZION) for exciton transistors, synthesized by sputter epitaxy. The large exciton binding energy enables excitonic devices that are operational at room temperature. The large piezoelectric constant enhances the spatial separation of electrons and holes in quantum wells and thus elongates exciton lifetime. Fabrication of single crystalline ZION films, however, has been challenging because no bulk crystals of ZION exist. In this project, we succeeded in the growth of world’s first single crystalline ZION on 18%-lattice-mismatched sapphire substrate, in which the films grew in a new mode of heteroepitaxy, “inverse Stranski-Krastanov mode”, where high-density three dimensional (3D) islands initially form and two-dimensional (2D) layers subsequently grow on the 3D islands. Furthermore, we succeeded in optical switching of exciton transistors with ZION/ZnO QWs.

Academic Significance and Societal Importance of the Research Achievements

本研究は,代表者オリジナルのシーズ技術を背景に,エキシトンを情報担体に進化させ,革新的古典/量子デバイスの創製を目指したものである.エキシトンを「電子-正孔が再結合する過程 (=中間状態)としての準粒子」として扱い,受発光を伴うその生成と消滅に着目した物性解明・工学的応用を行ってきたこれまでのエキシトン研究を転換させる点で,学術的意義を有する.本研究は,新学術分野「エキシトニクス」の創成という学術的新規性に加え,古典/量子デバイスを利用した情報通信ネットワークの高度化への寄与等,実用的観点からも意義を有する.

Report

(3 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • Research Products

    (45 results)

All 2021 2020 2019 Other

All Journal Article (13 results) (of which Int'l Joint Research: 7 results,  Peer Reviewed: 12 results,  Open Access: 2 results) Presentation (30 results) (of which Int'l Joint Research: 21 results,  Invited: 8 results) Remarks (2 results)

  • [Journal Article] Sputtering Growth of Metal Oxynitride Semiconductors for Excitonic Devices2021

    • Author(s)
      R. Narishige, N. Itagaki, M. Shiratani
    • Journal Title

      Proc. 5th IEEE Electron Devices Technology & Manufacturing Conference

      Volume: -

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Synthesis of Yb3+/Ho3+ co-doped Y2O3 nanoparticles and its application to dye sensitized solar cells2021

    • Author(s)
      Chawarambwa Fadzai Lesley、Putri Tika Erna、Kamataki Kunihiro、Shiratani Masaharu、Koga Kazunari、Itagaki Naho、Nakamura Daisuke
    • Journal Title

      Journal of Molecular Structure

      Volume: 1228 Pages: 129479-129479

    • DOI

      10.1016/j.molstruc.2020.129479

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Activated Carbon Counter Electrode on Bifacial Dye Sensitized Solar Cells (DSSCs)2021

    • Author(s)
      Putri Tika Erna、Hao Yuan、Chawarambwa Fadzai Lesley、Seo Hyunwoong、Son Min Kyu、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
    • Journal Title

      Materials Science Forum

      Volume: 1016 Pages: 863-868

    • DOI

      10.4028/www.scientific.net/msf.1016.863

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Impact of surface morphologies of substrates on the epitaxial growth of magnetron-sputtered (ZnO) x (InN)1-x films2020

    • Author(s)
      Narishige Ryota、Kaneshima Kentaro、Yamashita Daisuke、Kamataki Kunihiro、Koga Kazunori、Shiratani Masaharu、Itagaki Naho
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SA Pages: SAAB02-SAAB02

    • DOI

      10.35848/1347-4065/abba0c

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Graphene-Si3N4 nanocomposite blended polymer counter electrode for low-cost dye-sensitized solar cells2020

    • Author(s)
      Chawarambwa Fadzai Lesley、Putri Tika Erna、Son Min-Kyu、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
    • Journal Title

      Chemical Physics Letters

      Volume: 758 Pages: 137920-137920

    • DOI

      10.1016/j.cplett.2020.137920

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Size and flux of carbon nanoparticles synthesized by Ar+CH4 multi-hollow plasma chemical vapor deposition2020

    • Author(s)
      Hwang Sung-Hwa、Okumura Takamasa、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Shiratani Masaharu
    • Journal Title

      Diamond and Related Materials

      Volume: 109 Pages: 108050-108050

    • DOI

      10.1016/j.diamond.2020.108050

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Time of Flight Size Control of Carbon Nanoparticles Using Ar+CH4 Multi-Hollow Discharge Plasma Chemical Vapor Deposition Method2020

    • Author(s)
      Hwang Sung Hwa、Koga Kazunori、Hao Yuan、Attri Pankaj、Okumura Takamasa、Kamataki Kunihiro、Itagaki Naho、Shiratani Masaharu、Oh Jun-Seok、Takabayashi Susumu、Nakatani Tatsuyuki
    • Journal Title

      Processes

      Volume: 9 Issue: 1 Pages: 2-2

    • DOI

      10.3390/pr9010002

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Low-stress diamond-like carbon films containing carbon nanoparticles fabricated by combining rf sputtering and plasma chemical vapor deposition2020

    • Author(s)
      Hwang Sung-Hwa、Okumura Takamasa、Kamataki Kunihiro、Itagaki Naho、Koga Kazunori、Nakatani Tatsuyuki、Shiratani Masaharu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: 10 Pages: 100906-100906

    • DOI

      10.35848/1347-4065/abbb20

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Plasma Treatment Effect on the Paramagnetic Species of Barley Seed Radical's Intensity: An EPR study2020

    • Author(s)
      Attri Pankaj、Teruki Anan、Arita Ryo、Okumura Takamasa、Tanaka Hayate、Yamashita Daisuke、Matsuo Kayo、Itagaki Naho、Kamataki Kunihiro、Koga Kazunori、Shiratani Masaharu、Kuchitsu Kazuyuki、Ishibashi Yushi
    • Journal Title

      Plasma Medicine

      Volume: - Issue: 3 Pages: 159-168

    • DOI

      10.1615/plasmamed.2020036353

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Growth of single crystalline films on lattice-mismatched substrates through 3D to 2D mode transition2020

    • Author(s)
      Itagaki Naho、Nakamura Yuta、Narishige Ryota、Takeda Keigo、Kamataki Kunihiro、Koga Kazunori、Hori Masaru、Shiratani Masaharu
    • Journal Title

      Scientific Reports

      Volume: 10 Issue: 1 Pages: 4669-4669

    • DOI

      10.1038/s41598-020-61596-w

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Improved Nanoscale Al-Doped ZnO with a ZnO Buffer Layer Fabricated by Nitrogen-Mediated Crystallization for Flexible Optoelectronic Devices2020

    • Author(s)
      Suhariadi Iping、Itagaki Naho、Shiratani Masaharu
    • Journal Title

      ACS Applied Nano Materials

      Volume: 3 Issue: 3 Pages: 2480-2490

    • DOI

      10.1021/acsanm.9b02571

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Room-temperature fabrication of amorphous In2O3:Sn films with high electron mobility via nitrogen mediated amorphization2020

    • Author(s)
      K. Imoto, H. Wang, D. Yamashita, H. Seo, K. Koga, M. Shiratani, N. Itagaki
    • Journal Title

      J. Phys. Conf. Ser.

      Volume: -

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Fabrication of low resistive amorphous In2O3:Sn films using impurity mediate amorphization method: Effects of substrate temperature2019

    • Author(s)
      S. Muraoka, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Journal Title

      Proc. 41st International Symposium on Dry Process

      Volume: なし

    • Related Report
      2019 Research-status Report
  • [Presentation] (仮)Sputter epitaxy through “inverse” SK mode for a new class of excitonic devices2021

    • Author(s)
      Naho Itagaki
    • Organizer
      MRS Fall 2021 Meeting
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] (仮)非晶質ZnON膜からの固相結晶化ZnO膜の形成とシード層としての効果2021

    • Author(s)
      板垣奈穂
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] スパッタエピタキシー法を駆使したZnO系新材料の開発2021

    • Author(s)
      板垣奈穂
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] スパッタエピタキシーによる新規酸窒化物半導体材料の作製とエキシトンデバイスへの応用2021

    • Author(s)
      板垣奈穂
    • Organizer
      東工大フロンティア材料研究所講演会「複合アニオン酸化物の新電子機能とデバイス研究の最前線」
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Structural and Optical Properties of ZnMgO Films on Sapphire Substrates Fabricated by Sputter Epitaxy2021

    • Author(s)
      D. Takahashi, Y. Nakamura, S. Urakawa, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      ICMAP 2020 & ISFM 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputter deposition of low resistive amorphous In2O3:Sn films using nitrogen mediate amorphization method: Effects of nitrogen flow rate2021

    • Author(s)
      Y. Mido, S. Urakawa, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      ICMAP 2020 & ISFM 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputter deposition of ZnAlO films with tunable bandgaps from 3.4 to 6.1 eV Structural and Optical Properties of ZnMgO Films on Sapphire Substrates Fabricated by Sputter Epitaxy 1.発表者名 D. Takahashi, Y. Nakamura, S. Urakawa, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki (6/2021

    • Author(s)
      R. Narishige, K. Kaneshima, S. Urakawa, D. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      ICMAP 2020 & ISFM 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Growth of high-quality (ZnO)x(InN)1-x films by RF magnetron sputtering using a two-step growth process2021

    • Author(s)
      K. Kaneshima, S. Urakawa, R. Narishige, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      ICMAP 2020 & ISFM 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Impact of surface morphologies of 3D island layers on the single crystal growth of magnetron sputtered ZnO films2021

    • Author(s)
      Y. Nakamura, M. Kikuchi, D. Yamashita, K. Kamataki, T. Okumura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      ICMAP 2020 & ISFM 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputter deposition of ZnAlO films with tunable bandgaps from 3.4 to 6.1 eV2021

    • Author(s)
      S. Urakawa, K. Kaneshima, R. Narishige, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. shiratani and N. Itagaki
    • Organizer
      ICMAP 2020 & ISFM 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sputter epitaxy through “inverse” SK mode for a new class of excitonic devices2020

    • Author(s)
      Naho Itagaki
    • Organizer
      4th Asia Pacific Conference on Plasma Physic
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] A novel semiconductor ZION for excitonic devices2020

    • Author(s)
      Naho Itagaki
    • Organizer
      Satellite meeting of AAPPS-DPP2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Sputter deposition of low resistive amorphous In2O3:Sn films using impurity mediate amorphization method: Effects of substrate temperature2020

    • Author(s)
      Y. Midou, S. Urakawa, D. Yamashita, T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 5th Asian Applied Physics Conference (Asian-APC)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Bandgap Tuning of ZnMgO Films on Sapphire Substrates Fabricated by Sputter Epitaxy2020

    • Author(s)
      D. Takahashi, Y. Nakamura, S. Urakawa, D. Yamashita,T. Okumura, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 5th Asian Applied Physics Conference (Asian-APC)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effects of substrate surface polarity on epitaxial growth of magnetron sputtered (ZnO)x(InN)1-xfilms2020

    • Author(s)
      R. Narishige, K. Kaneshima, D. Yamashita, K. Kamataki,T. Okumura, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 5th Asian Applied Physics Conference (Asian-APC)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ar/N2スパッタリングによるサファイア基板上へのZnO単結晶成長:O-poorバッファー層の効果2020

    • Author(s)
      松本翔剛, 髙橋大智, 中村優太, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] スパッタエピタキシー法による(ZnO)X(InN)1-X膜の作製: 高温バッファー層の効果2020

    • Author(s)
      寺澤寛, 金島健太郎, 成重椋太, 山下大輔, 奥村賢直, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      令和2年度プラズマ・核融合学会 九州・沖縄・山口支部 第24回支部大会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Sputtering Deposition with Impurities: Another Key Parameter to Control Film Structures2019

    • Author(s)
      N. Itagaki, K. Kamataki, K. Koga, M. Shiratani
    • Organizer
      Materials Research Meeting 2019 (MRM2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] ZnO Based Semiconductors for Excitonic Devices2019

    • Author(s)
      N. Itagaki, K. Kamataki, K. Koga, M. Shiratani
    • Organizer
      Materials Research Meeting 2019 (MRM2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Developing Prediction of Amorphization Condition Models from Sputter Deposition Experimental Results by Machine Learning Method2019

    • Author(s)
      K. Kamataki, R. Iwamoto, S. Okunaga, S. Muraoka, D. Yamashita, N. Itagaki, K. Koga, M. Shiratani
    • Organizer
      Materials Research Meeting 2019 (MRM2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Tuning Parameters of Indium Tin Oxide Sputter Processing via Bayesian Optimization2019

    • Author(s)
      R. Iwamoto, S. Okunaga, S. Muraoka, D. Yamashita, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani
    • Organizer
      20th Workshop on Fine Particle Plasmas
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Sputter Epitaxy of (ZnO)x(InN)1-x films for Excitonic Transistors2019

    • Author(s)
      R. Narishige, N. Miyahara, K. Kaneshima, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 4th Asian Applied Physics Conference
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Machine Learning Analysis for Prediction of Key Plasma Process Parameters2019

    • Author(s)
      R. Iwamoto, S. Okunaga, K. Kamataki, H. Hara, K. Koga, M. Shiratani
    • Organizer
      The 4th Asian Applied Physics Conference
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effects of Substrate temperature on Crystal Quality of (ZnO)x(InN)1-x Films Fabricated by Sputter Epitaxy2019

    • Author(s)
      K. Kaneshima, N. Miyahara, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 4th Asian Applied Physics Conference
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Surface morphology of single-crystal ZnO films on sapphire substrates fabricated by sputter epitaxy *Yuta Nakamura, Soichiro Muraoka, Kunihiro K2019

    • Author(s)
      Y. Nakamura, S. Muraoka, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      The 4th Asian Applied Physics Conference
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Fabrication of low resistive amorphous In2O3:Sn films using impurity mediate amorphization method: Effects of substrate temperature2019

    • Author(s)
      S. Muraoka, D. Yamashita, K. Kamataki, K. Koga, M. Shiratani, N. Itagaki
    • Organizer
      41st International Symposium on Dry Process (DPS2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 不純物添加アモルファス化法による低抵抗アモルファスITO膜の作製: 基板温度の影響2019

    • Author(s)
      村岡宗一郎, 山下大輔, 鎌滝普礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第36回プラズマ・核融合学会年会
    • Related Report
      2019 Research-status Report
  • [Presentation] (ZnO)x(InN)1-x膜のスパッタエピタキシーにおける基板温度の影響2019

    • Author(s)
      金島健太郎, 宮原奈乃華, 山下大輔, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第36回プラズマ・核融合学会年会
    • Related Report
      2019 Research-status Report
  • [Presentation] スパッタエピタキシーによるサファイア基板上への単結晶ZnO膜の成長2019

    • Author(s)
      中村優太, 村岡宗一郎, 鎌滝晋礼, 古閑一憲, 白谷正治, 板垣奈穂
    • Organizer
      第36回プラズマ・核融合学会年会
    • Related Report
      2019 Research-status Report
  • [Presentation] ベイズ的最適化による高移動度アモルファスITO/In2O3成膜条件の探索2019

    • Author(s)
      岩本亮介, 鎌滝晋礼, 村岡宗一郎, 山下大輔, 板垣奈穂, 古閑一憲, 白谷正治
    • Organizer
      第36回プラズマ・核融合学会年会
    • Related Report
      2019 Research-status Report
  • [Remarks] 九州大学研究者情報

    • URL

      http://hyoka.ofc.kyushu-u.ac.jp/search/details/K003622/

    • Related Report
      2019 Research-status Report
  • [Remarks] 電子材料工学研究室

    • URL

      http://plasma.ed.kyushu-u.ac.jp/~inorganic/

    • Related Report
      2019 Research-status Report

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Published: 2019-07-04   Modified: 2022-01-27  

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