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Study on the mechanism of novel method to control oxidation by block the diffusion path at the lattice defects level

Research Project

Project/Area Number 19K22035
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Review Section Medium-sized Section 26:Materials engineering and related fields
Research InstitutionHokkaido University

Principal Investigator

SHIBAYAMA TAMAKI  北海道大学, 工学研究院, 教授 (10241564)

Co-Investigator(Kenkyū-buntansha) 中川 祐貴  北海道大学, 工学研究院, 助教 (00787153)
Project Period (FY) 2019-06-28 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Fiscal Year 2021: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2020: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2019: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
KeywordsHeイオン / 銅 / 照射効果 / 酸化 / 拡散 / イオン照射 / 水中結晶光合成 / 酸化銅 / 低温酸化 / ナノ結晶 / 残留弾性歪 / 格子欠陥
Outline of Research at the Start

Heイオンを純銅に照射すると表面に酸化物結晶や酸化皮膜の形成が抑制する現象を見出した。もし、この現象が銅の格子間位置や粒界にHe原子が存在することによって酸素の拡散経路を塞ぎ酸化を抑制しているとすれば、プリント基板や端子として現在使用している銅の酸化抑制に画期的な腐食防食法となり電子部品の長寿命化や環境低負荷に貢献できると考えられる。そこで、本研究では、純銅にHeイオン照射後酸化させ、Heイオン照射量による銅表面や内部の微細組織や微細構造の変化について先端電子顕微鏡法によるナノ構造解析と複合量子ビーム超高圧電子顕微鏡を用いたその場観察を試み、Heイオン照射による酸化抑制機構について解明する。

Outline of Final Research Achievements

He ion irradiated pure copper shows less oxide crystal or film formation on the surface. To study their oxidation resistance properties, He ion irradiated pure copper was oxidized in air at low temperatures or in NaOH aqueous solution at room temperature. After oxidation, the microstructure evolution on the surface and inside were evaluated in atomic scale by Cs-STEM/EELS, etc. As a result of microstructure investigations, it was clarified that the He interstitial atoms and irradiation defects would play a role of a diffusion barrier to oxygen, and the carbon-based film formed on the surface during He ion irradiation also suppressed the oxidation on the surface.

Academic Significance and Societal Importance of the Research Achievements

電気伝導に優れるが酸化しやすい純銅にHeイオンを照射し、格子間位置や粒界にHe原子が存在することによって酸素の拡散経路を塞ぎ酸化を抑制出来るか検討した。その結果、He格子間原子や照射欠陥が酸素の拡散バリア層となると共にHeイオン照射中に、表面に形成した炭素を主体とする皮膜により表面の酸化を抑制することが初めて明らかになった。薬剤を使用しないため電子部品の長寿命化や環境低負荷に貢献できると考えられる。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Research-status Report
  • 2019 Research-status Report
  • Research Products

    (5 results)

All 2022 2021 Other

All Int'l Joint Research (1 results) Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (1 results) (of which Int'l Joint Research: 1 results,  Invited: 1 results)

  • [Int'l Joint Research] Univ. of Science and Technology Beijing(中国)

    • Related Report
      2021 Annual Research Report
  • [Journal Article] An investigation of surface contamination introduced during He+ implantation and subsequent effects on the thermal oxidation of Cu2022

    • Author(s)
      Yang Subing、Nakagawa Yuki、Shibayama Tamaki
    • Journal Title

      Applied Surface Science

      Volume: 579 Pages: 152163-152163

    • DOI

      10.1016/j.apsusc.2021.152163

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Tailored copper oxidation in alkaline aqueous solution after helium cation implantation2022

    • Author(s)
      Yang Subing、Nakagawa Yuki、Shibayama Tamaki
    • Journal Title

      Applied Surface Science

      Volume: 591 Pages: 153087-153087

    • DOI

      10.1016/j.apsusc.2022.153087

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Anisotropic defect distribution in He+-irradiated 4H-SiC: effect of stress on defect distribution2021

    • Author(s)
      Subing Yang, Yuki Nakagawa, Minako Kondo and Tamaki Shibayama
    • Journal Title

      Acta Materialia

      Volume: - Pages: 116845-116845

    • DOI

      10.1016/j.actamat.2021.116845

    • Related Report
      2021 Annual Research Report 2020 Research-status Report
    • Peer Reviewed
  • [Presentation] Non-destructive evaluation of the strain distribution in ion irradiated wide-gap semiconductors for MOSFETs2022

    • Author(s)
      S. Yang, Y. Nakagawa and T. Shibayama
    • Organizer
      13th Polish-Japanese Joint Seminar on Micro and Nano Analysis
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited

URL: 

Published: 2019-07-04   Modified: 2023-12-25  

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