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Innovation of material science through wafer-scale synthesis of hexagonal boron nitride

Research Project

Project/Area Number 19K22113
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Review Section Medium-sized Section 28:Nano/micro science and related fields
Research InstitutionKyushu University

Principal Investigator

Ago Hiroki  九州大学, グローバルイノベーションセンター, 教授 (10356355)

Project Period (FY) 2019-06-28 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000)
Fiscal Year 2020: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Fiscal Year 2019: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Keywords六方晶窒化ホウ素 / CVD法 / グラフェン / 触媒・化学プロセス / 結晶成長 / 遷移金属ダイカルコゲナイド / CVD / 転写 / 二次元デバイス
Outline of Research at the Start

グラフェンに代表される原子数個分の厚みしかない二次元材料が、優れた特性から次世代デバイス材料として期待されている。しかし、二次元材料は基板表面や吸着ガスなどの影響を受けて特性が大きく低下する問題がある。そのような中、絶縁性の六方晶窒化ホウ素(h-BN)の二次元膜が、特性を大きく引き出す材料として注目を集めている。しかし、現在使われているh-BN膜は結晶から剥離して得られる非常に小さな薄片であり、応用を進める上で大きな妨げとなっていた。そこで本研究では、高結晶性のh-BN膜をウェハースケールで合成する方法を開発し、二次元材料の特性を発揮するプラットフォームを創出し、材料科学の発展に貢献していく。

Outline of Final Research Achievements

Multilayer hexagonal boron nitride (hBN) is one of the key materials in two-dimensional layered materials, because hBN can screen influences from environment, such as substrate roughness and charged impurities. This allows to observe unique and excellent physical properties of other two-dimensional materials, such as graphene. However, there is no established method to synthesize large-area, uniform hBN multilayers. In this research, by utilizing metal alloy films deposited on single-crystal substrates, we succeeded in synthesizing uniform multilayer hBN in large scale. In addition, we found interesting structural change of the metal alloy film that is synchronized with the segregation of multilayer hBN. We also demonstrated that our CVD-grown hBN is effective to improve the physical properties of monolayer graphene based on Raman spectroscopy.

Academic Significance and Societal Importance of the Research Achievements

本研究で合成を試みた六方晶窒化ホウ素(hBN)の多層膜は、現在では二次元物質の研究に欠かせない材料になっている。それは、多層hBNが周囲の環境の影響を効果的に遮へいして、グラフェンなどの二次元物質の優れた特性や特異的な物性を発現させる舞台を提供するからである。そのため、この多層hBNをウェハースケールで合成する技術を開発することは、二次元物質の学術と応用研究の推進のために極めて重要である。しかし、高品質の多層hBN合成は非常に難しく、現在でも剥離片が広く用いられている。本研究は多層hBNを大面積に合成する可能性を提示しており、科学的、産業的に大きな意義とインパクトを有している。

Report

(3 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • Research Products

    (46 results)

All 2021 2020 2019 Other

All Int'l Joint Research (5 results) Journal Article (13 results) (of which Int'l Joint Research: 3 results,  Peer Reviewed: 13 results,  Open Access: 2 results) Presentation (24 results) (of which Int'l Joint Research: 12 results,  Invited: 15 results) Book (3 results) Remarks (1 results)

  • [Int'l Joint Research] UNIST/POSTECH(韓国)

    • Related Report
      2020 Annual Research Report
  • [Int'l Joint Research] Los Alamos National Laboratory(米国)

    • Related Report
      2020 Annual Research Report
  • [Int'l Joint Research] Leibniz Institute of Surface Engineering(ドイツ)

    • Related Report
      2020 Annual Research Report
  • [Int'l Joint Research] University of Technology Sydney(オーストラリア)

    • Related Report
      2019 Research-status Report
  • [Int'l Joint Research] Leibniz Institute of Surface Engineering(ドイツ)

    • Related Report
      2019 Research-status Report
  • [Journal Article] Stacking Orientation-Dependent Photoluminescence Pathways in Artificially Stacked Bilayer WS2 Nanosheets Grown by Chemical Vapor Deposition: Implications for Spintronics and Valleytronics2021

    • Author(s)
      Ji Hyun Goo、Solis-Fernandez Pablo、Erklic Ufuk、Ago Hiroki
    • Journal Title

      ACS Applied Nano Materials

      Volume: - Issue: 4 Pages: 3717-3724

    • DOI

      10.1021/acsanm.1c00192

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Scanning Moire Fringe Method: A Superior Approach to Perceive Defects, Interfaces, and Distortion in 2D Materials2020

    • Author(s)
      Lin Yung-Chang、Ji Hyun Goo、Chang Li-Jen、Chang Yao-Pang、Liu Zheng、Lee Gun-Do、Chiu Po-Wen、Ago Hiroki、Suenaga Kazu
    • Journal Title

      ACS Nano

      Volume: 14 Issue: 5 Pages: 6034-6042

    • DOI

      10.1021/acsnano.0c01729

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Nanoscale Bubble Dynamics Induced by Damage of Graphene Liquid Cells2020

    • Author(s)
      Hirokawa Sota、Teshima Hideaki、Solis-Fernandez Pablo、Ago Hiroki、Tomo Yoko、Li Qin-Yi、Takahashi Koji
    • Journal Title

      ACS Omega

      Volume: 5 Issue: 19 Pages: 11180-11185

    • DOI

      10.1021/acsomega.0c01207

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Isothermal Growth and Stacking Evolution in Highly Uniform Bernal-Stacked Bilayer Graphene2020

    • Author(s)
      Solis-Fernandez Pablo、Terao Yuri、Kawahara Kenji、Nishiyama Wataru、Uwanno Teerayut、Lin Yung-Chang、Yamamoto Keisuke、Nakashima Hiroshi、Nagashio Kosuke、Hibino Hiroki、Suenaga Kazu、Ago Hiroki
    • Journal Title

      ACS Nano

      Volume: 14 Issue: 6 Pages: 6834-6844

    • DOI

      10.1021/acsnano.0c00645

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] One-step vapour phase growth of two-dimensional formamidinium-based perovskite and its hot carrier dynamics2020

    • Author(s)
      Erklic Ufuk、Ji Hyun Goo、Nishibori Eiji、Ago Hiroki
    • Journal Title

      Physical Chemistry Chemical Physics

      Volume: 22 Issue: 37 Pages: 21512-21519

    • DOI

      10.1039/d0cp02652b

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Chemical Vapor Deposition Growth of Uniform Multilayer Hexagonal Boron Nitride Driven by Structural Transformation of a Metal Thin Film2020

    • Author(s)
      Uchida Yuki、Kawahara Kenji、Fukamachi Satoru、Ago Hiroki
    • Journal Title

      ACS Applied Electronic Materials

      Volume: 2 Issue: 10 Pages: 3270-3278

    • DOI

      10.1021/acsaelm.0c00601

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Type-I Heterostructure and Improved Phase Stability of Formamidinium Lead Iodide Perovskite Grown on WS22020

    • Author(s)
      Ufuk Erklic、Hiroki Ago
    • Journal Title

      Evergreen

      Volume: 7 Pages: 323-328

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electronic States of Electrochemically Doped Single-Layer Graphene Probed through Fano Resonance Effects in Raman Scattering2020

    • Author(s)
      Inukai Daiki、Koyama Takeshi、Kawahara Kenji、Ago Hiroki、Kishida Hideo
    • Journal Title

      The Journal of Physical Chemistry C

      Volume: 124 Issue: 48 Pages: 26428-26433

    • DOI

      10.1021/acs.jpcc.0c06566

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High flux and adsorption based non-functionalized hexagonal boron nitride lamellar membrane for ultrafast water purification2020

    • Author(s)
      Das Rasel、Solis-Fernandez Pablo、Breite Daniel、Prager Andrea、Lotnyk Andriy、Schulze Agnes、Ago Hiroki
    • Journal Title

      Chemical Engineering Journal

      Volume: - Pages: 127721-127721

    • DOI

      10.1016/j.cej.2020.127721

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] High output voltage generation of over 5?V from liquid motion on single-layer MoS22020

    • Author(s)
      Aji Adha Sukma、Nishi Ryohei、Ago Hiroki、Ohno Yutaka
    • Journal Title

      Nano Energy

      Volume: 68 Pages: 104370-104370

    • DOI

      10.1016/j.nanoen.2019.104370

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Synthesis of sub-millimeter single-crystal grains of aligned hexagonal boron nitride on an epitaxial Ni film2019

    • Author(s)
      Taslim Alexandre Budiman、Nakajima Hideaki、Lin Yung-Chang、Uchida Yuki、Kawahara Kenji、Okazaki Toshiya、Suenaga Kazu、Hibino Hiroki、Ago Hiroki
    • Journal Title

      Nanoscale

      Volume: 11 Issue: 31 Pages: 14668-14675

    • DOI

      10.1039/c9nr03525g

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Chemically Tuned p‐ and n‐Type WSe2 Monolayers with High Carrier Mobility for Advanced Electronics2019

    • Author(s)
      Ji Hyun Goo、Solis‐Fernandez Pablo、Yoshimura Daisuke、Maruyama Mina、Endo Takahiko、Miyata Yasumitsu、Okada Susumu、Ago Hiroki
    • Journal Title

      Advanced Materials

      Volume: 31 Issue: 42 Pages: 1903613-1903613

    • DOI

      10.1002/adma.201903613

    • NAID

      120007133063

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Vapor Phase Selective Growth of Two-Dimensional Perovskite/WS2 Heterostructures for Optoelectronic Applications2019

    • Author(s)
      Erklic Ufuk、Solis-Fernandez Pablo、Ji Hyun Goo、Shinokita Keisuke、Lin Yung-Chang、Maruyama Mina、Suenaga Kazu、Okada Susumu、Matsuda Kazunari、Ago Hiroki
    • Journal Title

      ACS Applied Materials & Interfaces

      Volume: 11 Issue: 43 Pages: 40503-40511

    • DOI

      10.1021/acsami.9b13904

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Presentation] グラフェン超薄膜を用いた高機能汎用型光学素子の開発2021

    • Author(s)
      三石郁之,柏倉一斗, 丹羽由実, 小川ともよ, 田原譲, 北浦良, Pablo Solis-Fernandez, 河原憲治, 吾郷浩樹, 谷口卓郎, 野本憲太郎, 小髙大樹
    • Organizer
      第21回 宇宙科学シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] グラフェンとh-BNのCVD成長から広がる二次元物質研究2021

    • Author(s)
      吾郷浩樹
    • Organizer
      2021年 第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] h-BNナノ空間内での二次元ペロブスカイトの合成2021

    • Author(s)
      渡邉翔太, Ufuk Erklic, Pablo Solis-Fernandez,吾郷浩樹
    • Organizer
      2021年 第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Syntheses and growth mechanisms of 2D materials2020

    • Author(s)
      H. Ago
    • Organizer
      A3 Foresight Program (The 5th International Workshop on 2D Materials)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Synthesis of high-quality 2D materials for electronic applications2020

    • Author(s)
      H. Ago
    • Organizer
      2020 VLSI-TSA (VLSI: Technology, Systems and Applications)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] グラフェンの合成・物性・応用、そして二次元物質への広がり2020

    • Author(s)
      吾郷浩樹
    • Organizer
      炭素材料学会基礎講習会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Highly Controlled CVD Synthesis of Monolayer and Multilayer h-BN for 2D Materials Applications2020

    • Author(s)
      H. Ago
    • Organizer
      Graphene 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Chemically tuned p- and n-type WSe2 monolayers with improved carrier mobility for electronic applications2020

    • Author(s)
      H. G. Ji, P. Solis-Fernandez, D. Yoshimura, M. Maruyama, T. Endo, Y. Miyata, S. Okada, H. Ago
    • Organizer
      第59回FNTG総合シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] Isothermal growth and stacking evolution of highly uniform AB-stacked bilayer graphene2020

    • Author(s)
      Y. Terao, K. Kawahara, W. Nishiyama, T. Uwanno, Y.-C. Lin, K. Yamamoto, H. Nakashima, K. Nagashio, H. Hibino, K. Suenaga, H. Ago
    • Organizer
      第59回FNTG総合シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] 究極の表面物質、2次元物質の科学とフロンティア2020

    • Author(s)
      吾郷浩樹
    • Organizer
      表面・界面構造セミナー
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Controlled synthesis and processing of 2D materials for future applications2020

    • Author(s)
      H. Ago
    • Organizer
      1 & 2DM Conference and Exhibition 2020
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] CVD合成した多層h-BNによる単層MoS2の特性向上2020

    • Author(s)
      本田大樹, 田中大地, 内田勇気, 深町悟, 河原憲治, 吾郷浩樹
    • Organizer
      2020年 第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Hexagonal boron nitride nanosheets for ultrafast membrane filtration2020

    • Author(s)
      R. Das, P. Solis-Fernandez, H. Ago
    • Organizer
      第58回フラーレン・ナノチューブ・グラフェン総合シンポジウム
    • Related Report
      2019 Research-status Report
  • [Presentation] Controlled synthesis of high-quality 2D materials for device applications2019

    • Author(s)
      H. Ago
    • Organizer
      2019 Symposia on VLSI Technology and Circuits (Workshop on "2D Materials and Applications")
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] グラフェンをはじめとした二次元原子膜のCVD成長とその展開2019

    • Author(s)
      吾郷浩樹
    • Organizer
      第12回 酸化グラフェン研究
    • Related Report
      2019 Research-status Report
    • Invited
  • [Presentation] 単層MoS2のPL発光とラマン散乱に対するCVD h-BNの厚さ依存性2019

    • Author(s)
      本田大樹, 田中大地, 内田勇気, 河原憲治, 吾郷浩樹
    • Organizer
      第57回フラーレン・ナノチューブ・グラフェン総合シンポジウム
    • Related Report
      2019 Research-status Report
  • [Presentation] Controlled CVD Growth of High-Quality 2D Materials and Their Heterostructures for Device Applications2019

    • Author(s)
      H. Ago
    • Organizer
      SSDM2019 (Solid State Devices and Materials 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Controlled CVD growth of high-quality 2D materials and their heterostructures for electronic applications2019

    • Author(s)
      H. Ago
    • Organizer
      RPGR2019 (Recent Progress in Graphene and 2D Materials Research)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Controlled CVD growth of high-quality 2D materials and their heterostructures for electronic applications2019

    • Author(s)
      H. Ago
    • Organizer
      10th A3 Symposium on Emerging Materials: Nanomaterials for Electronics, Energy and Environment
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] CVD-Grown h-BN as a Substrate for Monolayer MoS22019

    • Author(s)
      H. Honda, D. Tanaka, Y. Uchida, K. Kawahara, H. Ago
    • Organizer
      10th A3 Symposium on Emerging Materials: Nanomaterials for Electronics, Energy and Environment
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 二次元原子膜の結晶成長とその展開2019

    • Author(s)
      吾郷浩樹
    • Organizer
      2019年日本表面真空学会学術講演会
    • Related Report
      2019 Research-status Report
    • Invited
  • [Presentation] Synthesis and growth mechanism of high quality multilaer hexagonal boron nitride films on metal foils2019

    • Author(s)
      D. Murase, K. Kawahara, D. Tanaka, H. Kim, H. Ago
    • Organizer
      CSS-EEST21 (The 21st Cross Straits Symposium on Energy and Environmental Science and Technology)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Controlled CVD hrowth of high-quality 2D layered materials for electronic and photonic applications2019

    • Author(s)
      H. Ago
    • Organizer
      Materials Research Meeting 2019
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Controlled synthesis of 2D materials and their heterostructures for device applications2019

    • Author(s)
      H. Ago
    • Organizer
      The 3rd Workshop on Functional Materials Science
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Book] ポストグラフェン材料の創製と用途開発最前線(遷移金属ダイカルコゲナイドの転写と応用展開)2020

    • Author(s)
      吾郷浩樹
    • Total Pages
      448
    • Publisher
      NTS出版
    • Related Report
      2020 Annual Research Report
  • [Book] 2020版 薄膜作製応用ハンドブック(グラフェンをはじめとする2次元材料の合成法)2020

    • Author(s)
      内田勇気, 吾郷浩樹
    • Total Pages
      1570
    • Publisher
      NTS出版
    • Related Report
      2019 Research-status Report
  • [Book] グラフェンから広がる二次元物質の新技術と応用(大面積h-BNのCVD成長)2020

    • Author(s)
      吾郷浩樹, 河原憲治
    • Total Pages
      558
    • Publisher
      NTS出版
    • Related Report
      2019 Research-status Report
  • [Remarks] 九州大学グローバルイノベーションセンター(吾郷研究室)

    • URL

      https://www.gic.kyushu-u.ac.jp/ago/

    • Related Report
      2020 Annual Research Report

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Published: 2019-07-04   Modified: 2022-01-27  

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