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Development of organic/inorganic hybrid optical devices using molecular doped organic single crystal activelayer

Research Project

Project/Area Number 19K22147
Research Category

Grant-in-Aid for Challenging Research (Exploratory)

Allocation TypeMulti-year Fund
Review Section Medium-sized Section 30:Applied physics and engineering and related fields
Research InstitutionSophia University

Principal Investigator

Kikuchi Akihiko  上智大学, 理工学部, 教授 (90266073)

Project Period (FY) 2019-06-28 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000)
Fiscal Year 2020: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2019: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Keywords有機単結晶 / 結晶成長 / 分子ドーピング / 光デバイス / 有機無機複合デバイス / 静電塗布 / 窒化物半導体 / ナノ光構造 / 有機半導体 / 分子ドープ / 誘導放出 / 波長変換 / ナノ流路 / 有機無機複合光デバイス / 集積型RGB光源 / ナノ構造 / 分布ブラッグ反射 / DBR / 水素雰囲気異方性熱エッチング / HEATE / 非晶質膜 / 溶融固化膜 / GaN
Outline of Research at the Start

本研究では、分子ドープ有機単結晶を活性層とし、無機半導体を電流注入層に用いて高電流密度でも動作可能な高輝度LEDやレーザを実現し得る新規ハイブリッド光デバイス技術の開発を行う。独自技術である不揮発性溶媒薄膜と静電塗布を組合わせた有機半導体薄膜単結晶成長技術やマイクロギャップ昇華法を用いて分子ドープ有機単結晶を成長し、高発光効率を実現可能なホストとドーパントの組合せを探索する。無機半導体のバンドギャップを階段状に広げる多段構造、自己配列双極子分子を組合わせた多重中間層技術、独自の窒化物半導体無損傷ナノ加工技術で作製するGaN系フォトニック結晶構造などを導入し、デバイス化技術を検証する。

Outline of Final Research Achievements

In this study, we aim to develop hybrid optical device technology using molecularly doped organic semiconductor single crystal and inorganic semiconductors. The research results are follows: (1) developing in-plane doping control techniques for plate-like organic single crystals using electro-spray and low vapor pressure thin liquid films, (2) understanding energy transfer mechanisms in co-doping and emission enhancement phenomena in organic single crystals (3) fabrication of organic (BP3T)/inorganic (GaN) composite LEDs by micro-gap sublimation method, (4) observation of ASE and optical degradation properties of single crystal and amorphous organic semiconductors, (5) fabrication of organic-inorganic hybrid perovskite single crystal arrays, (6) development of organic-inorganic hybrid nanostructure integrated optical device platform technology. The research on the molecularly doped organic semiconductor was completed with getting better-than-expected results.

Academic Significance and Societal Importance of the Research Achievements

本研究により、デバイス応用に適した薄板状有機単結晶の成長や分子ドーピングに適用可能な新しい結晶成長技術が複数提案され、分子ドーピングの面内プロファイル制御や、アシストドーパントによる発光増強効果、有機単結晶が非晶質膜に比べASE閾値や光劣化耐性に優れることなどの実証を行い、有機単結晶と分子ドーピングに関する多様な新しい知見を得たことに大きな学術的意義を有する。また、有機半導体単結晶と分子ドーピング技術、無機半導体ナノ構造を組み合せた新しい高機能性光デバイスの可能性を示したことに社会的意義を有するといえる。

Report

(5 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Research-status Report
  • 2020 Research-status Report
  • 2019 Research-status Report
  • Research Products

    (67 results)

All 2023 2022 2021 2020 2019

All Journal Article (5 results) (of which Peer Reviewed: 5 results,  Open Access: 3 results) Presentation (61 results) (of which Int'l Joint Research: 20 results,  Invited: 7 results) Book (1 results)

  • [Journal Article] Fabrication of GaN topological photonic crystal membranes in the visible wavelength region by a combination process of HEATE and AlInN wet etching2022

    • Author(s)
      Koji Yoneta, Koki Abe, Taiju Kudou, and Akihiko Kikuchi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: SC Pages: SC1078-SC1078

    • DOI

      10.35848/1347-4065/ac51e4

    • Related Report
      2022 Annual Research Report 2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Fabrication and optical characterization of InGaN/GaN MQW fine nanopillar arrays by low-damage HEATE process2022

    • Author(s)
      Takeki Aikawa, and Akihiko Kikuchi
    • Journal Title

      Extended Abstract of the 2022 International Conference on Solid State Devices and Materials

      Volume: 2022 Pages: 97-98

    • DOI

      10.7567/ssdm.2022.b-5-01

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Investigation of etching characteristics of HVPE-grown c-In2O3 layers by hydrogen-environment anisotropic thermal etching2021

    • Author(s)
      Rie Togashi, Ryo Kasaba, Ken Goto, Yoshinao Kumagai, and Akihiko Kikuchi
    • Journal Title

      Journal of Crystal Growth

      Volume: 575 Pages: 126338-126338

    • DOI

      10.1016/j.jcrysgro.2021.126338

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] In-plane doping profile control of plate-like organic single crystals grown by a method combining electrospray and low vapor pressure liquid film2019

    • Author(s)
      Takeuchi Keita、Ueda Hiroyuki、Kikuchi Akihiko
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 58 Issue: SB Pages: SBBG07-SBBG07

    • DOI

      10.7567/1347-4065/aafe6e

    • NAID

      210000135406

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] Fabrication of CH3NH3PbBr3‐Based Perovskite Single‐Crystal Arrays by Spin‐Coating Method Using Hydrophobic Patterned Substrate2019

    • Author(s)
      Abe Ryogo、Suzuki Asuka、Watanabe Kosuke、Kikuchi Akihiko
    • Journal Title

      physica status solidi (a)

      Volume: 217 Issue: 3 Pages: 1900511-1900511

    • DOI

      10.1002/pssa.201900511

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Open Access
  • [Presentation] HEATE法によるGaNトポロジカルPhCメンブレンの作製と可視領域バンドトポロジカルエッジ状態モードの観測2023

    • Author(s)
      米田幸司,高野大和,秋元弥頼,倉邉海史,工藤大樹,本多卓人,胡暁,菊池昭彦
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] GaN系トポロジカルフォトニック結晶の作製と可視全域でのフォトニックバンド制御2023

    • Author(s)
      秋元弥頼,米田幸司,工藤大樹,髙野大和,倉邉海史,本多卓人,菊池昭彦
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 水素雰囲気異方性熱エッチング(HEATE)法によるGaNナノホールの加工特性2023

    • Author(s)
      本多卓人,米田幸司,相川健喜,倉邉海史,菊池昭彦
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] High-optical quality InGaN/GaN nano-porous membrane structures fabricated by combination process of hydrogen environment anisotropic thermal etching and AlInN selective wet etching2022

    • Author(s)
      Umito Kurabe, Koji Yoneta, and Akihiko Kikuchi
    • Organizer
      2022 MRS Spring Meeting & Exhibition
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication and optical characterization of InGaN/GaN MQW fine nanopillar arrays by low-damage HEATE process2022

    • Author(s)
      Takeki Aikawa, and Akihiko Kikuchi
    • Organizer
      2022 International Conference on Solid State Devices and Materials (SSDM 2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optimization of GaN-based Topological Photonic Insulator Cladding Structure -Membrane, Slab, and Bulk type Structure-2022

    • Author(s)
      Rodrigo Sato, Koki Abe, Koji Yoneta, and Akihiko Kikuchi
    • Organizer
      International Workshop on Nitride Semiconductors (IWN 2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of high aspect DBR structures for optical integrated devices by hydrogen environment anisotropic thermal etching of β-Ga2O32022

    • Author(s)
      Yuki Yamazaki, Tomoaki Monma, Takeki Aikawa, and Akihiko Kikuchi
    • Organizer
      The 4th International Workshop on Gallium Oxide and Related Materials (IWGO-4)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Theoretical simulation of GaN-based visible light topological photonic waveguides2022

    • Author(s)
      Akihiko Kikuchi, Yuta Moriya, Koki Abe, Kentaro Kinoshita, Yusei Kawasaki, and Daichi Ito
    • Organizer
      The 10th Asia-Pacific Workshop on Widegap Semiconductors (APWS 2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Hydrogen environment anisotropic thermal etching of GaN nanoholes2022

    • Author(s)
      Koji Yoneta, Takuto Honda, Umito Kurabe, Takeki Aikawa, and Akihiko Kikuchi
    • Organizer
      The 10th Asia-Pacific Workshop on Widegap Semiconductors (APWS 2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 水素雰囲気異方性熱エッチング(HEATE)法による可視域機能性光デバイス技術の開発2022

    • Author(s)
      菊池昭彦,阿部洸希,米田幸司,工藤大樹,山﨑裕貴,高野大和,門馬智亮,倉邉海史,秋元弥頼,本多卓人
    • Organizer
      第三回半導体ナノフォトニクス研究会
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] 可視領域におけるトポロジカルフォトニック結晶の構造解析2022

    • Author(s)
      阿部洸希,サトウロドリゴ,米田幸司,菊池昭彦
    • Organizer
      第三回半導体ナノフォトニクス研究会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 有機無機複合型集積デバイスに向けた細線流路における結晶析出制御2022

    • Author(s)
      門馬智亮,山﨑裕貴,菊池昭彦
    • Organizer
      第三回半導体ナノフォトニクス研究会
    • Related Report
      2022 Annual Research Report
  • [Presentation] HEATE法による可視域GaN系トポロジカルフォトニック結晶の作製とバンド測定2022

    • Author(s)
      髙野大和,倉邉海史,工藤大樹,米田幸司,秋元弥頼,本多卓人,菊池昭彦
    • Organizer
      第三回半導体ナノフォトニクス研究会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 水素雰囲気異方性熱エッチングを用いたワイドギャップ半導体微細加工技術と光デバイス応用2022

    • Author(s)
      菊池昭彦
    • Organizer
      TI-FRIS(学際融合東北拠点)支援講演会,山形大学
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] HEATE法によるGaN系メンブレン型トポロジカルフォトニック結晶の作製2022

    • Author(s)
      工藤大樹,米田幸司,高野大和,倉邉海史,菊池昭彦
    • Organizer
      第83 回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] HEATE法によるGaN系メンブレン型トポロジカルフォトニック結晶の作製2022

    • Author(s)
      阿部洸希,サトウロドリゴ,米田幸司,菊池昭彦
    • Organizer
      第83 回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] GaN系トポロジカルフォトニック結晶の導波路構造解析2022

    • Author(s)
      工藤大樹,米田幸司,高野大和,倉邉海史,菊池昭彦
    • Organizer
      第83 回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] GaN系可視域トポロジカルフォトニック結晶のフォトニックバンドの3D-FDTD解析2022

    • Author(s)
      高野大和,米田幸司,阿部洸希,菊池昭彦
    • Organizer
      第83 回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 立方晶GaNマイクロディスクにおけるWGM発振2022

    • Author(s)
      岩本優歌,東海林篤,光野徹也.菊池昭彦,岸野克巳,酒井優
    • Organizer
      第83 回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] InGaNナノピラーアレイへのキラル構造導入と旋光性評価2022

    • Author(s)
      浅井佑太,相川健喜,倉邉海史,菊池昭彦,大音隆男
    • Organizer
      第83 回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] HEATE法によるInGaN/GaN MQW極微細ナノピラーアレイの作製2022

    • Author(s)
      相川健喜,菊池昭彦
    • Organizer
      第83 回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] InGaN-MQWメソポーラスメンブレンの発光特性解析2022

    • Author(s)
      倉邉海史,山崎裕貴,米田幸司,菊池昭彦
    • Organizer
      第83 回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Fabrication of Shape-Controlled GaN High-aspect Fine-nano-hole Arrays by Hydrogen Environment Anisotropic Thermal Etching (HEATE)2021

    • Author(s)
      Akihiko Kikuchi, Koki Abe, Yusei Kawasaki, Daichi Ito, Yuta Moriya, and Kentaro Kinoshita
    • Organizer
      Compound Semiconductor Weeks 2021 (CSW 2021), The 47th International Symposium on Compound Semiconductors (ISCS 2021)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Fabrication of GaN Topological Photonic Crystal Membranes in Visible Wavelength Region by Combination Process of HEATE and Wet Etching2021

    • Author(s)
      Koji Yoneta, Taiju Kudou, and Akihiko Kikuchi
    • Organizer
      2021 International Conference on Solid State Devices and Materials (SSDM 2021)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] 水素雰囲気異方性熱エッチングとAlInN犠牲層ウェットエッチングによる高発光効率InGaN/GaNナノポーラスメンブレン構造の作製2021

    • Author(s)
      倉邉海史,山﨑裕貴,木下堅太郎,米田幸司,菊池 昭彦
    • Organizer
      第13回ナノ構造エピタキシャル成長講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] InGaN/GaNメンブレン型フォトニックデバイスの作製と発光増強効果の解析2021

    • Author(s)
      菊池昭彦,米田幸司,倉邉海史,山﨑裕貴,木下堅太郎,工藤大樹
    • Organizer
      第二回半導体ナノフォトニクス研究会
    • Related Report
      2021 Research-status Report
    • Invited
  • [Presentation] 水素雰囲気異方性熱エッチング法によるGaNナノポーラス結晶の作製2021

    • Author(s)
      倉邉海史,山﨑裕貴,木下堅太郎,米田幸司,菊池昭彦
    • Organizer
      第82 回応用物理学会秋季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] HEATE法による可視領域メンブレン型トポロジカルフォトニック結晶の作製2021

    • Author(s)
      米田幸司,工藤大樹,倉邉海史,菊池昭彦
    • Organizer
      第82 回応用物理学会秋季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] 水素雰囲気異方性熱エッチング(HEATE法)によるβ-Ga2O3の高アスペクトナノ構造の作製2021

    • Author(s)
      山崎裕貴,木下堅太郎,今田陵斗,相川健喜,門馬智亮,菊池昭彦
    • Organizer
      第82 回応用物理学会秋季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] Thermodynamic Study of Etching Characteristics of HVPE-Grown In2O3 Layers by Hydrogen-Environment Anisotropic Thermal Etching2021

    • Author(s)
      Rie Togashi, Ryo Kasaba, Yuuki Ooe, Ken Goto, Yoshinao Kumagai, and Akihiko Kikuchi
    • Organizer
      The 8th Asian Conference on Crystal Growth and Crystal Technology (CGCT-8)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] 溶液プロセスを用いた有機単結晶への分子ドープ技術2021

    • Author(s)
      渡辺航介,安部僚吾,鈴木明日香,菊池昭彦
    • Organizer
      半導体ナノフォトニクス研究会,Sophia Open Research Weeks 2020
    • Related Report
      2020 Research-status Report
  • [Presentation] 可視域光集積回路に向けた窒化物半導体導波デバイスのFDTD解析2021

    • Author(s)
      山﨑裕貴,木下堅太郎,渡辺航介,今田陵斗,菊池昭彦
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] GaN系青色域トポロジカルエッジ導波路のFDTD解析2021

    • Author(s)
      米田幸司,森谷裕太,阿部洸希,工藤大樹,菊池昭彦
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 水素雰囲気異方性熱エッチング(HEATE)法によるHVPE-In2O3成長層のエッチング特性の熱力学的検討2020

    • Author(s)
      富樫理恵,笠羽遼,大江優輝,後藤健,熊谷義直,菊池昭彦
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] HEATE法によるZnO単結晶のエッチング特性評価とナノ構造の作製2020

    • Author(s)
      伊藤大智,森谷裕太,菊池昭彦
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] InGaN/GaN系バルク型フォトニック結晶構造における可視域トポロジカルエッジ導波路のFDTD解析2020

    • Author(s)
      森谷裕太,阿部洸希,木下堅太郎,伊藤大智,菊池昭彦
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 水素雰囲気異方性熱エッチング(HEATE)法によるGaN高アスペクト微細ナノホールアレイの断面形状制御2020

    • Author(s)
      阿部洸希,森谷裕太,川崎祐生,伊藤大智,木下堅太郎,菊池昭彦
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Research-status Report
  • [Presentation] 水素雰囲気異方性熱エッチング(HEATE)法によるHVPE-In2O3成長層のエッチング特性評価2020

    • Author(s)
      富樫理恵,笠羽遼,大江優輝,後藤健,熊谷義直,菊池昭彦
    • Organizer
      半導体ナノフォトニクス研究会,Sophia Open Research Weeks 2020
    • Related Report
      2020 Research-status Report
    • Invited
  • [Presentation] GaNマイクロディスクにおけるWGM発振の新展開2020

    • Author(s)
      酒井優,東海林篤,光野徹也,菊池昭彦,岸野克巳
    • Organizer
      半導体ナノフォトニクス研究会,Sophia Open Research Weeks 2020
    • Related Report
      2020 Research-status Report
    • Invited
  • [Presentation] 水素雰囲気異方性熱エッチング(HEATE)を用いたワイドギャップ半導体の高アスペクトナノ加工技術と可視域フォトニックデバイスへの展開2020

    • Author(s)
      菊池昭彦,川崎祐生,森谷裕太,伊藤大智,阿部洸希,木下堅太郎
    • Organizer
      半導体ナノフォトニクス研究会,Sophia Open Research Weeks 2020
    • Related Report
      2020 Research-status Report
    • Invited
  • [Presentation] 水素雰囲気異方性熱エッチング(HEATE)法によるHVPE-In2O3成長層のエッチング特性評価2020

    • Author(s)
      富樫理恵,笠羽遼,大江優輝,長井研太,後藤健,熊谷義直,菊池昭彦
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] "バルク型フォトニック結晶構造における可視光領域トポロジカルエッジ導波路の設計と理論解析2020

    • Author(s)
      森谷祐太,阿部洸希,木下堅太郎,大江優輝,川崎祐生,伊藤大智,菊池昭彦
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] InGaN/GaN屈折率導波路型フォトニック結晶デバイスに向けたHEATE法による三角ナノホール構造の面方位依存性検討2020

    • Author(s)
      阿部洸希,大江優輝,川崎祐生,伊藤大智,森谷祐太,木下堅太郎,菊池昭彦
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] HEATE法で作製したInGaN/GaNナノピラーにおける内部量子効率・光取り出し効率のピラー径依存性2020

    • Author(s)
      大音隆,生江祐介,鈴木翔馬,相原碧人,菊池昭彦
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Optical characterization of co-doped single crystal organic semiconductor with emissive and assist dopants2019

    • Author(s)
      Kosuke Watanabe, Keita Takeuchi, Ryogo Abe, Asuka Suzuki, and Akihiko Kikuchi
    • Organizer
      46th International Symposium on Compound Semiconductors (ISCS) at Compound Semiconductor Week 2019 (CSW2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Fabrication of CH3NH3PbBr3 based Perovskite single crystal arrays by spin-coating method using hydrophobic patterned substrate2019

    • Author(s)
      Ryogo Abe, Keita Takeuchi, Asuka Suzuki, Kosuke Watanabe, and Akihiko Kikuchi
    • Organizer
      46th International Symposium on Compound Semiconductors (ISCS) at Compound Semiconductor Week 2019 (CSW2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Hydrogen-assisted thermal etching and ozone water passivation techniques for fabrication of GaN-based nanostructures towards visible light topological photonic devices2019

    • Author(s)
      Akihiko Kikuchi, Yusei Kawasaki, Yuki Ooe, Yuta Moriya, Daichi, Ito
    • Organizer
      International Workshop TOPOLOGY (IWTOPOLOGY)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Growth and fluorescence sensitization of wide-bandgap organic single crystals co-doped with emissive and assistant dopants2019

    • Author(s)
      Keita Takeuchi, Ryogo Abe, Asuka Suzuki, Kosuke Watanabe and Akihiko Kikuchi
    • Organizer
      61st Electronic Materials Conference (EMC)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Surface passivation effect of saturated ozone water treatment on InGaN/GaN nanostructures fabricated by hydrogen environment anisotropic thermal etching (HEATE)2019

    • Author(s)
      Yusuke Namae, Daichi Itou, Akihiro Matsuoka, Yuki Ooe, Yusei Kawasaki, Yuta Moriya, and Akihiko Kikuchi
    • Organizer
      13th International Conference on Nitride Semiconductors (ICNS-13)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Hydrogen environment anisotropic thermal etching of (010) β-Ga2O3 and fabrication of high-aspect Ga2O3 nanowall structures2019

    • Author(s)
      Yuki Ooe, Yusei Kawasaki, Yusuke Moriya, Daichi Ito and Akihiko Kikuchi
    • Organizer
      The 3rd International Workshop on Gallium Oxide and Related Materials (IWGO-3)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Fabrication of GaN high-aspect fine nano-hole array structures by hydrogen atmosphere anisotropic thermal etching with ammonia gas2019

    • Author(s)
      Y. Moriya, Y. Ooe, Y. Kawasaki, D. Ito, and A. Kikuchi
    • Organizer
      2019 International Conference on Solid State Devices and Materials (SSDM 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Fabrication of high aspect ZnO nanostructures by hydrogen environment anisotropic thermal etching (HEATE)2019

    • Author(s)
      Daichi Ito, Yuki Ooe, Yusei Kawasaki, Yuta Moriya, and Akihiko Kikuchi
    • Organizer
      19th International Conference on II-VI Compounds and Related Materials (II-VI 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Low-cost fabrication technique of shape-controlled ultra-fine GaN nanostructures by maskless hydrogen environment anisotropic thermal etching (HEATE) method with ammonia addition2019

    • Author(s)
      Yusei Kawasaki, Yuki Ooe, Yusuke Moriya, Daichi Ito, and Akihiko Kikuchi
    • Organizer
      The 9th Asia-Pacific Workshop on Widegap Semiconductors (APWS2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Surface passivation effect by various oxidation treatment on InGaN/GaN nanostructures fabricated by HEATE2019

    • Author(s)
      Daichi Ito, Yuki Ooe, Yusei Kawasaki, Yuta Moriya, and Akihiko Kikuchi
    • Organizer
      The 9th Asia-Pacific Workshop on Widegap Semiconductors (APWS2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Investigation of etching characteristics of HVPE-grown In2O3 layers by hydrogen environment anisotropic thermal etching2019

    • Author(s)
      Ryo Kasaba, Yuki Ooe, Kenta Nagai, Ken Goto, Rie Togashi, Akihiko Kikuchi, and Yoshinao Kumagai
    • Organizer
      The 9th Asia-Pacific Workshop on Widegap Semiconductors (APWS2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 水素雰囲気異方性熱エッチング(HEATE)法による(010)面β-Ga2O3の高アスペクト エッチング特性2019

    • Author(s)
      大江優輝,川崎祐生,森谷祐太,伊藤大智,菊池昭彦
    • Organizer
      第11回ナノ構造・エピタキシャル成長講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] 六角形状GaNマイクロディスクにおけるWGM発光の共振特性2019

    • Author(s)
      酒井優,江頭真由,上石拳,東海林篤,光野徹也,菊池昭彦,岸野克巳
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] 共ドープ有機単結晶の蛍光増感効果におけるアシストドーパントの影響2019

    • Author(s)
      渡辺航介,安部僚吾,鈴木明日香,菊池昭彦
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] 水素雰囲気異方性熱エッチング(HEATE)法による(010)面β-Ga2O3基板上の幅7nm超薄膜高アスペクトナノウォールアレ2019

    • Author(s)
      大江優輝,川崎祐生,伊藤大智,森谷祐太,阿部洸希,木下堅太郎,富樫理恵,菊池昭彦
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] InGaN/GaN屈折率導波路型フォトニック結晶デバイスに向けたHEATE法による高アスペクトナノホールアレイの作製2019

    • Author(s)
      森谷祐太,大江優輝,川崎祐生,伊藤大智,阿部洸希,木下堅太郎,菊池昭彦
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] 六角形状GaNマイクロディスクにおけるWGM発光の温度依存性2019

    • Author(s)
      酒井優,江頭真由,上石拳,東海林篤,光野徹也,菊池昭彦,岸野克巳
    • Organizer
      日本光学会ナノオプティクス研究グループ 第26回研究討論会
    • Related Report
      2019 Research-status Report
  • [Book] 光学,第49巻,第11号,"トポロジーが織りなす光学現象とその応用 蜂の巣誘電体フォトニック結晶のトポロジカル特性と新規光機能"2020

    • Author(s)
      胡暁,雨宮智宏,菊池昭彦
    • Publisher
      一般社団法人日本光学会
    • Related Report
      2020 Research-status Report

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Published: 2019-07-04   Modified: 2024-01-30  

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