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高精度AFMリソグラフィー手法の開発による単一分子の電気伝導測定

Research Project

Project/Area Number 20027001
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionTohoku University

Principal Investigator

秋山 琴音  Tohoku University, 原子分子材料科学高等研究機構, 助教 (60447175)

Co-Investigator(Kenkyū-buntansha) 江口 豊明  東京大学, 物性研究所, 助教 (70308196)
浜田 雅之  東京大学, 物性研究所, 技術職員 (00396920)
Project Period (FY) 2008 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥4,500,000 (Direct Cost: ¥4,500,000)
Fiscal Year 2009: ¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 2008: ¥2,300,000 (Direct Cost: ¥2,300,000)
Keywords走査プローブ顕微鏡
Research Abstract

集束イオンビーム(FIB)により先鋭化した金探針の付いたAFMセンサー(水晶振動子)を作製して非接触AFMで用い、探針・試料間にパルス電圧を印可することによって、探針先端原子の電界蒸発を促し試料表面上への文字パターンや金ナノ細線の描画(AFMリソグラフィー)を行った。独自に開発したナノレベルで鋭利な金探針を距離制御性に優れ高分解能を有する非接触AFMで制御してAFMリソグラフィーに成功した点で意義深い。これまでのAFMリソグラフィーでは、曲率半径50~100nm程度の金属被覆Si探針を用いており、描画線幅も50nm程度が限界だったのに対し、本研究で、先端半径12nm程度の金探針のついたAFMセンサーを非接触AFMで制御したことにより、線幅20~30nm程度の金属細線の描画が可能となった。また、この高精度AFMリソグラフィー手法は、半導体デバイスの導線など様々な応用が考えられるが、中でもナノ構造の電気伝導測定に威力を発揮すると考えている。特に、ナノギャップ作製の技術的難解さやbreak-junktion法の再現性の低さなどから単一分子の電気伝導測定結果については異なる実験間での値がまちまちであり、加えて理論値と実験値が異なるのが現状である。本研究により高精度AFMリソグラフィー手法を確立し、試料表面上で分子・マクロ金属電極を結ぶことができれば、新たな電気伝導測定手法を確立することができ、分子エレクトロニクス発展への手がかりとなると考えている。

Report

(2 results)
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (13 results)

All 2010 2009 2008

All Journal Article (5 results) (of which Peer Reviewed: 5 results) Presentation (7 results) Book (1 results)

  • [Journal Article] Controlled formation and mechanical characterization of metallic glassy nanowires2009

    • Author(s)
      K.Nakayama, K.Akiyama, et. al
    • Journal Title

      Advanced Materials 21

      Pages: 1-4

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Direct evidence of the contribution of surface states to the Kondo resonance2009

    • Author(s)
      Q.Li, T.Eguchi, Y Hasegawa, et. al
    • Journal Title

      Phys.Rev.B 80

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Initial adsorption and Kondo resonance of 5,10,15,20-tetrakis(4-bromophenyl)porphyrin-Co molecules on Ag/Si(111) surface studied by low-temperature scanning tunneling microscopy/spectroscopy2009

    • Author(s)
      Q.Li, T.Eguchi, Y Hasegawa, et. al
    • Journal Title

      Japanese Journal of Applied Physics 48

    • NAID

      210000067307

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanoscale chemical imaging by scanning tunneling microscopy assisted by synchrotron radiation2009

    • Author(s)
      T. Okuda, K. Akiyama, et.al.
    • Journal Title

      Physical Review Letters 102

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanoscale lithography with frequency-modulation atomic force microscopy2008

    • Author(s)
      M. Hamada, K. Akiyama, et.al.
    • Journal Title

      Review of Scientific Instruments 79

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] AFM lithography and electrical mode spectroscopy using metal-tip cantilevers2010

    • Author(s)
      Kotone Akiyama, G.Bremond
    • Organizer
      ElyT lab Workshop
    • Place of Presentation
      Sevrier, France
    • Year and Date
      2010-03-16
    • Related Report
      2009 Annual Research Report
  • [Presentation] Nano-scale lithography with frequency modulation AFM2009

    • Author(s)
      Kotone Akiyama
    • Organizer
      Surface kinetics international conference
    • Place of Presentation
      Salt Lake. City, USA
    • Year and Date
      2009-03-20
    • Related Report
      2008 Annual Research Report
  • [Presentation] Mechanical and electrical measurements of nano-materials2009

    • Author(s)
      Kotone Akiyama
    • Organizer
      WPI-AIMR. annual workshop
    • Place of Presentation
      Zao
    • Year and Date
      2009-03-04
    • Related Report
      2008 Annual Research Report
  • [Presentation] Nano-scale lithography with frequency modulation atomic force microscopy2008

    • Author(s)
      Kotone Akiyama
    • Organizer
      16th international colloquium on scanning probe microscopy
    • Place of Presentation
      16th international colloquium on scanning probe microscopy
    • Year and Date
      2008-12-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] Nano-scale lithography with frequency modulation atomic force microscopy2008

    • Author(s)
      Kotone Akiyama
    • Organizer
      ELyT Lab workshop
    • Place of Presentation
      Sendai
    • Year and Date
      2008-12-01
    • Related Report
      2008 Annual Research Report
  • [Presentation] Nano-scale lithography with frequency-modulation atomic force microscopy2008

    • Author(s)
      Kotone Akiyama
    • Organizer
      International conference on nanoscience + technology 2008
    • Place of Presentation
      Keystone, USA
    • Year and Date
      2008-07-24
    • Related Report
      2008 Annual Research Report
  • [Presentation] 高精度AFMリソグラフィー手法の開発による単一分子の電気伝導測定2008

    • Author(s)
      秋山琴音
    • Organizer
      特定領域「ナノリンク分子の電気伝導」領域会議
    • Place of Presentation
      函館
    • Year and Date
      2008-07-04
    • Related Report
      2008 Annual Research Report
  • [Book] 走査プローブ顕微鏡2009

    • Author(s)
      長谷川幸雄、江口豊明
    • Publisher
      共立出版
    • Related Report
      2009 Annual Research Report

URL: 

Published: 2008-04-01   Modified: 2018-03-28  

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