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カーボンナノチューブ1本の熱伝導率計測

Research Project

Project/Area Number 20048006
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionKyushu University

Principal Investigator

高橋 厚史  Kyushu University, 工学研究院, 准教授 (10243924)

Project Period (FY) 2008 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 2009: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 2008: ¥1,700,000 (Direct Cost: ¥1,700,000)
KeywordsMEMS技術 / ナノセンサ / 熱整流作用 / 熱伝導率 / 熱物性 / 弾道的熱伝導 / 一次元調和振動子
Research Abstract

カーボンナノチューブ(CNT)をデバイスへ応用するには電気的性質に加えて熱物性の把握が欠かせない.特に,正確な熱物性データを取得するには直径など性質が異なった集合体から一本のCNTを取り出して計測する必要がある.今年度は,フラーレンピーポッドなどバンドル状態で供給される単層カーボンナノチューブ(SWNT)から1本を取り出してT字一体型ナノセンサによって熱伝導率を計測するためのMEMS技術の開発に取り組んだ.成功した手順は以下の通りである.1)超音波分散させたSWNT分散液を酸化膜付きシリコンウエハ上に滴下,2)高解像度SEMで1本だけになったチューブの位置を把握,3)電子線レジストをスピンコートした上で電子線描画装置を用いてT字一体型ナノセンサのパターンを直接描画,4)プラチナを蒸着してリフトオフ法でパターニング,5)BHFおよびCF_4プラズマでSi酸化膜とSiを等方的エッチング.この工程中においてSWNTの位置とセンサの位置を合わせることで,センサとSWNTがともに基板から浮いた状態、すなわち熱計測の必要条件を実現することができた.ただし,リフトオフの工程でSWNTによってセンサが傷ついてしまう問題が発生しており,今のところ熱伝導率計測の完了までには至っていない.これはリフトオフ等の条件の改善で解決できるものと考えている.また,平行して行った理論研究において,SWNTに存在する格子欠陥が熱の整流作用を生み出すことを予見し,非平衡分子動力学法によって確認した.さらに,この熱整流作用の基本的物理機構を1次元格子モデルで明らかにすることができた.

Report

(2 results)
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (21 results)

All 2010 2009 2008

All Journal Article (17 results) (of which Peer Reviewed: 12 results) Presentation (4 results)

  • [Journal Article] Defective Carbon Nanotube for Use as a Thermal Rectifier2010

    • Author(s)
      Koji Takahashi, Masato Inoue, Yohei Ito
    • Journal Title

      Japanese Journal of Applied Physics Vol 49

    • NAID

      210000067983

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] One-dimensionality of phonon transport in cup-stacked carbon nanofiber2010

    • Author(s)
      Yohei Ito, Masato Inoue, Koji Takahashi
    • Journal Title

      J.Phys.: Condens. Matter Vol 22

      Pages: 65403-65403

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] THERMAL RECTIFICATION OF ASYMMETRICALLY-DEFECTIVE CARBON NANOTUBES2010

    • Author(s)
      Hiroyuki Hayashi, Yohei Ito, Koji Takahashi
    • Journal Title

      Proc.Joint Int.Symposia 3rd Micro & Nano-Technology and Micro/Nanoscale Energy Conversion & Transport-2010, March 21-24, 2010, Seoul, Korea

      Pages: 24-26

    • Related Report
      2009 Annual Research Report
  • [Journal Article] EXPERIMENTAL STUDY ON INTERFACIAL THERMAL RESISTANCE BETWEEN CARBON NANOTUBE TIP AND SOLID SURFACE2010

    • Author(s)
      J.Hirotani, S.Kai, T.Ikuta, K.Takahashi
    • Journal Title

      Proc.Joint Int.Symposia 3rd Micro & Nano-Tech nology and Micro/Nanoscale Energy Conversion & Transport-2010, March 21-24, 2010, Seoul, Korea

      Pages: 95-97

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Experimental and numerical studies on ballistic phonon transport of cup-stacked carbon nanofiber2009

    • Author(s)
      K.Takahashi, Y.Ito, T.Ikuta, X.Zhang, M.Fujii
    • Journal Title

      Physica B: Condensed Matter Vol 404

      Pages: 2431-2434

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Estimating Error in Measuring Thermal Conductivity Using a T-type Nanosensor2009

    • Author(s)
      Yohei Ito, Koji Takahashi, Motoo Fujii, Xing Zhang
    • Journal Title

      Heat Transfer-Asian Research Vol.38,No.5

      Pages: 297-312

    • NAID

      10020753794

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Underetching on Thermal Conductivity Measurement of Suspended Nanofilm2009

    • Author(s)
      Yohei Ito, Koji Takahashi, Tatsuya Ikuta, Xing Zhang
    • Journal Title

      Japanese Journal of Applied Physics Vol.48,No.5

    • NAID

      210000066801

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Measurement of the Thermal Conductivity of Nanodeposited Material2009

    • Author(s)
      K.Takahashi, N.Hilmi, Y.Ito, T.Ikuta, X. Zhang
    • Journal Title

      International Journal of Thermophysics Vol.30

      Pages: 1864-1874

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Interlayer Thermal Conductance of a Carbon Nanotube2009

    • Author(s)
      Y.Ito, K.Takahashi, M.Inoue, X.Zhang, M.Fujii
    • Journal Title

      Proc.20th Int.Symp.Transport Phenomena, Victoria BC, Canada, July 7-10, 2009 ISTP-20

      Pages: 180-180

    • Related Report
      2009 Annual Research Report
  • [Journal Article] CARBON NANOTUBE THERMAL PROBE USING PLATINUM NANOHOT-FILM2009

    • Author(s)
      Koji Takahashi, Jun Hirotani, Satoshi Kai, Tatsuya Ikuta
    • Journal Title

      Proceedings of ASME 2009 2nd Micro/Nanoscale Heat & Mass Transfer International Conference, Dec. 18-22, 2009, Shanghai, China

    • Related Report
      2009 Annual Research Report
  • [Journal Article] ナノ材料の熱物性計測2009

    • Author(s)
      高橋厚史,藤井丕夫
    • Journal Title

      伝熱 Vol.48

      Pages: 20-25

    • NAID

      10025191636

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Visualization of Horizontally-Aligned Single-Walled Carbon Nanotube Gr owth with 13C/12C Isotopes2008

    • Author(s)
      H. Ago, N. Ishigami, N. Yoshihara, K. Imamoto, S. Akita, K. Ikeda, M. Tsuji, T. Ikuta, and K. Takahashi
    • Journal Title

      J. Physical Chem. C. Letters 112

      Pages: 1735-1738

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] T字-体型ナノセンサを用いた熱伝導率計測における誤差の推定2008

    • Author(s)
      伊藤洋平、高橋厚史、藤井丕夫、張興
    • Journal Title

      熱物性 22

      Pages: 104-112

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] パラフィンを用いたEBIDの堆積速度と移動現象2008

    • Author(s)
      甲斐聡、高橋厚史、ノルシャズワン、生田竜也、西山貴史、永山邦仁
    • Journal Title

      電気学会論文誌E 128

      Pages: 161-166

    • NAID

      10021135203

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Thermal conductivity of SiC nanowire formed by combustion synthesis2008

    • Author(s)
      K. Takahashi, et.al.
    • Journal Title

      High Temperatures-High Pressures 37

      Pages: 119-125

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Charge and Heat transport in Polysrystalline Metallic Nanostructures2008

    • Author(s)
      X. Zhang, K. Takahashi, M. Fujii
    • Journal Title

      Chinese Physics Letters 25

      Pages: 3360-3363

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Measuring Thermal Conductivity of Nano Deposition Using Pt Hot Film2008

    • Author(s)
      Y. Ito, K. Takahashi, N. Hi1mi, X. Zhang
    • Journal Title

      Thermal Science & Engineering 16

      Pages: 105-111

    • NAID

      10024261984

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] ナノ材料の熱物性と計測技術(招待講演)2009

    • Author(s)
      高橋厚史
    • Organizer
      ナノマシンシステム技術研究会2009年度第1回例会
    • Place of Presentation
      滋賀県草津市
    • Year and Date
      2009-07-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] Study on Thermal Conductivity Measurement of Suspended Metal Films by Using NEMS Technology2008

    • Author(s)
      Y. Ito, K. Takahashi, T. Ikuta, X. Zhang
    • Organizer
      Proc. 1st International Symposium on Thermal D esign and Thermophysical Property for Electronics
    • Place of Presentation
      つくば市
    • Related Report
      2008 Annual Research Report
  • [Presentation] Micro Oscillation Heat Pipe Fabricated On Silicon Wafer2008

    • Author(s)
      M. Kohno, T. Nishizono, Y. Ona ka, S. Hidaka, K. Takahashi, Y Takata
    • Organizer
      Proc. 6th Intl. ASME Conf. Nanochannels, Microc hannels and Minichannels
    • Place of Presentation
      Darmstadt, Germany
    • Related Report
      2008 Annual Research Report
  • [Presentation] Measuring Thermal Conductivity of Nano Deposition Usinh Pt Hot Film2008

    • Author(s)
      Y. Ito, N. Hilmi, K. Takahashi, X. Zhang
    • Organizer
      Proc. The 7th JSME-KSME Thermal and Fluids Eng. Conf
    • Place of Presentation
      札幌市
    • Related Report
      2008 Annual Research Report

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Published: 2008-04-01   Modified: 2018-03-28  

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