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An implantable chip with integrated microprobe/tube arrays for electrical neural recording, stimulation, and drug delivery applications

Research Project

Project/Area Number 20226010
Research Category

Grant-in-Aid for Scientific Research (S)

Allocation TypeSingle-year Grants
Research Field Electron device/Electronic equipment
Research InstitutionToyohashi University of Technology

Principal Investigator

ISHIDA Makoto  豊橋技術科学大学, 大学院・工学研究科, 教授 (30126924)

Co-Investigator(Kenkyū-buntansha) SAWADA Kazuaki  豊橋技術科学大学, 大学院・工学研究科, 教授 (40235461)
KAWASHIMA Takahiro  豊橋技術科学大学, 大学院・工学研究科, 准教授 (50378270)
KAWANO Takeshi  豊橋技術科学大学, 大学院・工学研究科, 准教授 (70452216)
高尾 英邦  香川大学, 微細構造デバイス統合研究センター, 准教授 (40314091)
Project Period (FY) 2008 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥210,470,000 (Direct Cost: ¥161,900,000、Indirect Cost: ¥48,570,000)
Fiscal Year 2012: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Fiscal Year 2011: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Fiscal Year 2010: ¥23,140,000 (Direct Cost: ¥17,800,000、Indirect Cost: ¥5,340,000)
Fiscal Year 2009: ¥135,460,000 (Direct Cost: ¥104,200,000、Indirect Cost: ¥31,260,000)
Fiscal Year 2008: ¥37,830,000 (Direct Cost: ¥29,100,000、Indirect Cost: ¥8,730,000)
Keywords選択VLS成長 / シリコンプローブアレイ / マイクロチューブアレイ / 集積回路技術 / 細胞記録/刺激/薬剤投与 / 埋込み型マイクロデバイス / 脳神経科学 / ブレイン-マシ / 細胞記録,刺激,薬剤投与 / ブレイン-マシン・インタフェース / 細胞記録,刺激,薬剤投与 / ブレイン-マシン・インタフェース / 細胞記録 / 刺激 / 薬剤投与 / 埋込み型マイクロデバイ
Research Abstract

The goal of this project is to developtechnologies for integration of very fine out-of-plane silicon microprobe, silicon-dioxide microtubearrays with microelectronics using a “selective vapor-liquid-solid (VLS)growth”techniqueand three-dimensional microfabrication processes. Major achievements of the researchduring the project period includei) integration of microscalediameter probe electrode and tube arrays for simultaneous electrical recording, stimulation, and drug delivery system with a high spatialresolution, ii) realization of the microprobes with various lengths for three-dimensional recording/stimulationof neurons in a neuronal tissue, and iii) on-chip CMOS interface circuitry for high performanceelectronics includingamplifications and filtering of recorded neural signals, and data/power wireless transmission system. From these achievements,theproposed devicecould become apowerful technique to assist inunderstanding nervous systems and offerneural recording/stimulation and drug delivery in medical applications.

Assessment Rating
Verification Result (Rating)

A

Report

(7 results)
  • 2013 Research Progress Assessment (Verification Result) ( PDF )
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report   Self-evaluation Report ( PDF )
  • 2008 Annual Research Report
  • Research Products

    (126 results)

All 2013 2012 2011 2010 2009 2008 Other

All Journal Article (27 results) (of which Peer Reviewed: 27 results) Presentation (89 results) (of which Invited: 4 results) Book (2 results) Remarks (5 results) Patent(Industrial Property Rights) (3 results)

  • [Journal Article] Vibration Analysis and Transmission Characteristics Of Piezoelectric Micromachined Ultrasonic Transducers Using Epitaxial Pb(Zr, Ti)O3 Thin Films on γ-Al2O3/Si Substrate2012

    • Author(s)
      D. Akai, K. Ozaki, Y. Numata, K. Suzuki,N. Nagaya and M. Ishida
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: Vol.51 Issue: 11S Pages: 11PA04-11PA04

    • DOI

      10.1143/jjap.51.11pa04

    • NAID

      210000141612

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] An overhanging carbon nanotube/parylene core-shell nanoprobe electrode2012

    • Author(s)
      T. Kawano, C. Y. ChoandL. Lin
    • Journal Title

      Sensors and Actuators A

      Volume: No.187 Pages: 79-83

    • DOI

      10.1016/j.sna.2012.08.025

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Nanoscale Tipped Microwire Arrays Enhance Electrical Trap and Depth Injection of Nanoparticles2012

    • Author(s)
      A. Goryu, R. Numano,A. Ikedo, M. Ishidaand T. Kawano
    • Journal Title

      Nanotechnology

      Volume: Vol.23, No.41 Issue: 41 Pages: 415301-7

    • DOI

      10.1088/0957-4484/23/41/415301

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] CMOS RF Transmitter Using Pulse width Modulation for Wireless Smart Sensors2012

    • Author(s)
      W. H. Lee,H. Takao, K.Sawadaand M. Ishida
    • Journal Title

      IEEE Trans. Comp., Pack. & Manufac. Tech.

      Volume: Vol.2, No. 9 Issue: 9 Pages: 1501-1509

    • DOI

      10.1109/tcpmt.2012.2207956

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] RF Transmitter Using Dual Pulse Position Modulation Method for Low Power Smart Micro Sensing Chip2012

    • Author(s)
      B. J. Gu,W. H. Lee, K. Sawadaand M. Ishida
    • Journal Title

      IEEE Trans. Electrical & Electronic Eng.

      Volume: Vol.7, Issue 3 Issue: 3 Pages: 337-341

    • DOI

      10.1002/tee.21737

    • Related Report
      2012 Annual Research Report 2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Silicon based On-chip Antenna using an LC resonator for Near-field RF Systems2012

    • Author(s)
      K. Okabe, W. H. Lee, Y. Harada and M. Ishida
    • Journal Title

      Solid-State Electron.

      Volume: Vol.67 Issue: 1 Pages: 100-104

    • DOI

      10.1016/j.sse.2011.08.002

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Wireless Smart Sensor with Small Size Spiral Atnenna on Si-substrate2011

    • Author(s)
      B. J. Gu, W. H. Lee, K. Sawadaand M. Ishida
    • Journal Title

      Microelectron. J.

      Volume: Vol. 42 Issue: 9 Pages: 1066-1073

    • DOI

      10.1016/j.mejo.2011.06.009

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Heterogeneously Integrated Vapor-liquid-solid Grown Silicon probes/(111) and Silicon MOSFETs/(100)2011

    • Author(s)
      A. Okugawa, K. Mayumi, A. Ikedo, M. Ishidaand T. Kawano
    • Journal Title

      IEEE Electron DeviceLett.

      Volume: Vol. 32, No.5 Issue: 5 Pages: 683-685

    • DOI

      10.1109/led.2011.2120590

    • Related Report
      2012 Final Research Report 2011 Annual Research Report 2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Out-of-plane High-density Piezoresistive Silicon Microwire/p-n Diode Array for Force and Temperature Sensitive Artificial Whisker Sensors2011

    • Author(s)
      A. Ikedo, M. Ishidaand T. Kawano
    • Journal Title

      J. Micromech. & Microeng.

      Volume: Vol. 21, No. 3 Issue: 3 Pages: 35007-35007

    • DOI

      10.1088/0960-1317/21/3/035007

    • Related Report
      2012 Final Research Report 2011 Annual Research Report 2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enlarged Gold-tipped Silicon Microprobe Arrays and Signal Compensation for Multi-site Electroretinogram Recordings in the Isolated Carp Retina2011

    • Author(s)
      T. Harimoto, K. Takei, T. Kawano, A. Ishihara, T. Kawashima, H. Kaneko, M. Ishidaand S. Usui
    • Journal Title

      Biosensors & Bioelectron.

      Volume: Vol.26,No.5 Issue: 5 Pages: 2368-2375

    • DOI

      10.1016/j.bios.2010.10.014

    • Related Report
      2012 Final Research Report 2011 Annual Research Report 2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Out-of-plane High-density Piezoresistive Silicon Microwire/p-n Diode Array for Force and Temperature Sensitive Artificial Whisker Sensors2011

    • Author(s)
      Akihito Ikedo, Makoto Ishida, Takeshi Kawano
    • Journal Title

      Journal of Micromechanics and Microengineering Vol.21, No.3

      Pages: 35007-35007

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Enlarged Gold-tipped Silicon Microprobe Arrays and Signal Compensation for Multi-site Electroretinogram Recordings in the Isolated Carp Retina2011

    • Author(s)
      Tetsuhiro Harimoto, Kuniharu Takei, Takeshi Kawano, Akito Ishihara, Takahiro Kawashima, Hidekazu Kaneko, Makoto Ishida, Shiro Usui
    • Journal Title

      Biosensors and Bioelectronics Vol.26, No.5

      Pages: 2368-2375

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Nanoscale Sharpening Tips of Vapor-liquid-solid Grown Silicon Microwire Arrays2010

    • Author(s)
      A. Goryu, A. Ikedo, M. Ishidaand T. Kawano
    • Journal Title

      Nanotechnology

      Volume: Vol.21, No.12 Issue: 12 Pages: 125302-125302

    • DOI

      10.1088/0957-4484/21/12/125302

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Electrical Interfacing between Neurons and Electronics via Vertically-integrated Sub-4 Micron-diameter Silicon Probe Arrays Fabricated by Vapor-liquid-solid Growth2010

    • Author(s)
      T. Kawano, T. Harimoto, A. Ishihara, K. Takei, T. Kawashima, S. Usuiand M. Ishida
    • Journal Title

      Biosensors & Bioelectron.

      Volume: Vol.25, No.7 Issue: 7 Pages: 1809-1815

    • DOI

      10.1016/j.bios.2009.12.037

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Microtube-based Electrode Arrays for Low Invasive Extracellular Recording with a High Signal-to-noise Ratio2010

    • Author(s)
      K. Takei, T. Kawano, T. Kawashima, K.Sawada, H. Kanekoand M. Ishida
    • Journal Title

      Biomedical Microdevices

      Volume: Vol. 12, No. 1 Issue: 1 Pages: 41-48

    • DOI

      10.1007/s10544-009-9356-y

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Nanoscale Sharpening Tips of Vapor-liquid-solid Grown Silicon Microwire Arrays2010

    • Author(s)
      Akihiro Goryu, Akihito Ikedo, Makoto Ishida, Takeshi Kawano
    • Journal Title

      Nanotechnology Vol.21, No.12

      Pages: 125302-125302

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Electrical Interfacing between Neurons andElectronics via Vertically-integrated Sub-4 Micron-diameter Silicon Probe ArraysFabricated by Vapor-liquid-solid Growth2010

    • Author(s)
      Takeshi Kawano, Tetsuhiro Harimoto, Akito Ishihara, Kuniharu Takei, Takahiro Kawashima, Shiro Usui, Makoto Ishida
    • Journal Title

      Biosensors and Bioelectronics Vol.25, No.7

      Pages: 1809-1815

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Microtube-based Electrode Arrays for LowInvasive Extracellular Recording with a High Signal-to-noise Ratio, Biomedical2010

    • Author(s)
      Kuniharu Takei, Takeshi Kawano, Takahiro Kawashima, Kazuaki Sawada, Hidekazu Kaneko, Makoto Ishida
    • Journal Title

      Microdevices Vol.12, No.1

      Pages: 1387-2176

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Microtube-based Electrode Arrays for Low Invasive Extracellular Recording with a High Signal-to-noise Ratio2010

    • Author(s)
      K.Takei, T.Kawano, T.Kawashima, K.Sawada, H.Kaneko, M.Ishida
    • Journal Title

      Biomedical Microdevices

      Volume: Vol.12 Pages: 41-48

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrical Interfacing between Neurons and Electronics via Vertically-integrated Sub-4 Micron-diameter Silicon Probe Arrays Fabricated by Vapor-liquid-solid Growth2010

    • Author(s)
      T.Kawano, T.Harimoto, A.Ishihara, K.Takei, T.Kawashima, S.Usui, M.Ishida
    • Journal Title

      Biosensors and Bioelectronics

      Volume: Vol.25 Pages: 1809-1815

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanoscale Sharpening Tips of Vapor-liquid-solid Grown Silicon Microwire Arrays2010

    • Author(s)
      A.Goryu, A.Ikedo, M.Ishida, T.Kawano
    • Journal Title

      Nanotechnology

      Volume: Vol.21 Pages: 125302-125302

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Vertically aligned silicon microwire arrays of various lengths by repeated selective vapor-liquid-solid growth of n-type silicon/n-type silicon2009

    • Author(s)
      A. Ikedo, T. Kawashima, T. Kawanoand M. Ishida
    • Journal Title

      Appl. Phys. Lett.

      Volume: Vol.95, No.3 Issue: 3

    • DOI

      10.1063/1.3178556

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Out-of-plane Microtube Arrays for Drug Delivery-Liquid Flow Properties and an Application to the Nerve Block Test2009

    • Author(s)
      K. Takei, T. Kawashima, T. Kawano, H. Kaneko, K. Sawadaand M.Ishida
    • Journal Title

      Biomedical Microdevices

      Volume: Vol.11, No.3 Issue: 3 Pages: 539-545

    • DOI

      10.1007/s10544-008-9259-3

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Vertically Aligned Silicon MicrowireArrays of Various Lengths by Repeated Selective Vapor-Liquid-Solid Growth ofn-type Silicon/n-type Silicon, Applied2009

    • Author(s)
      Akihito Ikedo, Takahiro Kawashima, Takeshi Kawano, Makoto Ishida
    • Journal Title

      Physics Letters Vol.95

      Pages: 33502-33502

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Out-of-plane Microtube Arrays for Drug Delivery-Liquid Flow Properties and an Application to the Nerve Block Test -2009

    • Author(s)
      Kuniharu Takei, Takahiro Kawashima, Takeshi Kawano, Hidekazu Kaneko, Kazuaki Sawada, Makoto Ishida
    • Journal Title

      Biomedical Microdevices Vol.11, No.3

      Pages: 539-545

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Out-of-plane Microtube Arrays for Drug Delivery - Liquid Flow Properties and an Application to the Nerve Block Test -2008

    • Author(s)
      K. Takei, T. Kawashima, T. Kawano, H. Kaneko, K. Sawada, M. Ishida
    • Journal Title

      Biomedical Microdevices (Published online : 04 December08)

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Heterogeneously IntegratedVapor-liquid-solid Grown Siliconprobes/(111) and Silicon MOSFETs/(100)

    • Author(s)
      Akihiro Okugawa, Kotaro Mayumi, Akihito Ikedo, Makoto Ishida, Takeshi Kawano
    • Journal Title

      IEEE Electron Device Letters (accepted)

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Presentation] ナノスケールニューロプローブアレイデバイス2013

    • Author(s)
      河野 剛士
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] ナノプローブ神経電極アレイの電気的特性2013

    • Author(s)
      久保田吉博,牛流章弘,石田誠,河野剛士
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2012 Annual Research Report
  • [Presentation] 高アスペクト比Vapor-liquid-Solid Siマイクロプローブ神経電極の刺入評価2013

    • Author(s)
      八木智史,今塩屋竜也,大井英生,石田誠,河野剛士
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2012 Annual Research Report
  • [Presentation] 0.06mm214nV/√Hz Chopper Instrumentation Amplifier 9:45 AMwith Automatic Differential-Pair Matching2013

    • Author(s)
      I. Akita, M. Ishida
    • Organizer
      IEEE International Solid-State Conference(ISSCC2013)
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Metal/Silicon Dioxide Microtube Improves Optical and Electrical Properties of Neuroprobe2013

    • Author(s)
      T. Nakamura, M. Sakata, A. Goryu, M. Ishida and T. Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Taipei, Taiwan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Verification of Bending Strength of Vapor-liquid-solid Grown High-aspect-ratio Silicon-Neuroprobes2013

    • Author(s)
      T. Imashioya, H. Oi, S. Yagi, M. Ishida and T. Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Taipei, Taiwan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Self-curling and -sticking Flexible Substrate for ECoG Electrode Array2013

    • Author(s)
      S. Yamagiwa, M. Ishida and T. Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Taipei, Taiwan
    • Related Report
      2012 Annual Research Report
  • [Presentation] シリコンウィスカ剣山型神経電極アレイの開発2013

    • Author(s)
      河野剛士(オーガナイズドセッションスピーカー)
    • Organizer
      本機械学会 第25回バイオエンジニアリング講演会
    • Place of Presentation
      茨城
    • Related Report
      2012 Annual Research Report
  • [Presentation] Bio-Medical Applications of smart sensing devices2012

    • Author(s)
      M. Ishida
    • Organizer
      2012 International Conference on Solid State Devices and Materials (SSDM2012)
    • Place of Presentation
      Kyoto
    • Year and Date
      2012-09-27
    • Related Report
      2012 Final Research Report
  • [Presentation] SmartMicro Sensing Chips for Life Innovation2012

    • Author(s)
      M. Ishida
    • Organizer
      2012 MRS Spring meeting & Exhibit
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2012-04-12
    • Related Report
      2012 Final Research Report
  • [Presentation] Three Dimensional Micro/nanowire Arrays for Sensing Applications2012

    • Author(s)
      T. Kawano
    • Organizer
      Japan Institute of Electronics Packaging (JIEP)
    • Place of Presentation
      Tokyo
    • Year and Date
      2012-03-07
    • Related Report
      2012 Final Research Report
  • [Presentation] Three Dimensional Micro/nanowire Arrays for Sensing Applications2012

    • Author(s)
      T.Kawano
    • Organizer
      Japan Institute of Electronics Packaging (JIEP)
    • Place of Presentation
      Tokyo, Japan(招待講演)
    • Year and Date
      2012-03-07
    • Related Report
      2011 Annual Research Report
  • [Presentation] Vapor-Liquid-Solid Grown Silicon-wires compatible (100)-Silicon CMOS Process2012

    • Author(s)
      K. Asai, A. Okugawa, M. Ishida and T. Kawano
    • Organizer
      Asia-Pacific Interdisciplinary Research Conference (AP-IRC) 2012
    • Place of Presentation
      Aichi
    • Related Report
      2012 Annual Research Report
  • [Presentation] Multi-ERG Recording from Carp Retina by Penetrating Electrode Array with Various Length Microprobes2012

    • Author(s)
      T. Harimoto, A. Ikedo, T. Kawano, A. Ishihara, A. Fujishiro, S. Yamagiwa, A. Goryu, M. Ishida and S. Usui
    • Organizer
      Asia-Pacific Interdisciplinary Research Conference (AP-IRC) 2012
    • Place of Presentation
      Aichi
    • Related Report
      2012 Annual Research Report
  • [Presentation] Integration of vapor-liquid-solid silicon probe compatible (100)-Si CMOS electronics2012

    • Author(s)
      K. Asai, A. Okugawa, M. Ishida, T. Kawano
    • Organizer
      The 29th SENSOR SYMPOSIUM on Sensors, Micromachines and Application Systems
    • Place of Presentation
      Fukuoka
    • Related Report
      2012 Annual Research Report
  • [Presentation] Implementation of Wireless Sensor System using Smart Sensor Chip2012

    • Author(s)
      B. J. Gu, K. Sawada, M. Ishida
    • Organizer
      The 29th SENSOR SYMPOSIUM on Sensors, Micromachines and Application Systems
    • Place of Presentation
      Fukuoka
    • Related Report
      2012 Annual Research Report
  • [Presentation] Vertical Piezoresisitive Silicon Microwires as Force Sensitive Bioprobe Arrays2012

    • Author(s)
      S. Morita, A. Fujishiro, A. Ikedo, M. Ishida and T. Kawano
    • Organizer
      The 29th SENSOR SYMPOSIUM on Sensors, Micromachines and Application Systems
    • Place of Presentation
      Fukuoka
    • Related Report
      2012 Annual Research Report
  • [Presentation] Bio-Medical Applications of smart sensing devices2012

    • Author(s)
      M. Ishida
    • Organizer
      SSDM2012
    • Place of Presentation
      Kyoto
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Integration of Vapor-liquid-solid Grown Silicon Microprobes/(111)-Si and (100)-Si CMOS using Silicon on Insulator Substrates2012

    • Author(s)
      K. Asai, A. Okugawa, M. Ishida, T. Kawano
    • Organizer
      Tokai-Section Joint Conference on Electrical and Related Engineering
    • Place of Presentation
      Aichi
    • Related Report
      2012 Annual Research Report
  • [Presentation] OOK電力増幅器に向けたLDOレギュレータ2012

    • Author(s)
      浅井翔地,秋田一平,石田誠
    • Organizer
      2012年電子情報通信学会ソサイエティ大会
    • Place of Presentation
      富山
    • Related Report
      2012 Annual Research Report
  • [Presentation] ワイヤレスセンサシステムに向けた小型基準発振器の開発2012

    • Author(s)
      山根駿也,秋田一平,石田誠
    • Organizer
      2012年電子情報通信学会ソサイエティ大会
    • Place of Presentation
      富山
    • Related Report
      2012 Annual Research Report
  • [Presentation] 焦電型赤外線イメージセンサ応用へ向けた薄膜赤外線吸収膜の作製2012

    • Author(s)
      大石浩史,大江一樹,赤井大輔,石田誠
    • Organizer
      2012年秋季 第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛
    • Related Report
      2012 Annual Research Report
  • [Presentation] Failsafe Wafer-Level Packaging of a Piezoelectric MEMS Actuator2012

    • Author(s)
      M. A. Matin, K. Ozaki, D. Akai, K. Sawada, and M. Ishida
    • Organizer
      The 62nd Electronic Components and Technology Conference(ECTC2012)
    • Place of Presentation
      California, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Nanotip Array for Gene Transfer into Individualcells2012

    • Author(s)
      A. Goryu, R. Numano, M. Ishida and T. Kawano
    • Organizer
      The 51st Annual Conference of Japanese Society for Medical and Biological Engineering (The 51st JSMBE)
    • Place of Presentation
      Fukuoka
    • Related Report
      2012 Annual Research Report
  • [Presentation] Samrt Micro Sensing Chips for Life Innovation2012

    • Author(s)
      M. Ishida
    • Organizer
      2012 MRS Spring meeting & Exhiti
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Nanoprobe Array for Gene Transfer into Individual Cells2012

    • Author(s)
      A. Goryu, R. Numano, M. Ishida, T. Kawano
    • Organizer
      2012 MRS Spring Meeting & Exhibit
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Recording of ECoG and Intracortical Neural Activity2012

    • Author(s)
      T. Imashioya, A. Fujishiro, H. Sawahata, H. Toda, A. Ikedo, M. Ishida, I. Hasegawa and T. Kawano
    • Organizer
      2012 MRS Spring Meeting & Exhibit
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] High Density Piezoelectric Micro-machined Ultrasonic Transducers Array Using Epitaxial PZT Thin Film on γ-Al2O3/Si Substrate2012

    • Author(s)
      K. Ozaki, K. Suzuki, Y. Numata, N. Okada, D. Akai, M. Ishida
    • Organizer
      2012 MRS Spring meeting & Exhiti
    • Place of Presentation
      San Francisco, USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] Multifunctional Metal/silicon Dioxide Microtube Neuroprobes2012

    • Author(s)
      T.Nakamura, M.Sakata, A.Goryu, M.Ishida, T.Kawano
    • Organizer
      The Japan Society of Applied Physics(The 59th Spring Meeting)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of Force sensitive Penetrating Electrical Neuroprobe Arrays2012

    • Author(s)
      S.Morita, A.Fujishiro, A.Ikedo, M.Ishida, T.Kawano
    • Organizer
      The Japan Society of Applied Physics(The 59th Spring Meeting)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Layerby-layer Nanoassembly of Iridium Oxide/Platinum-black for Low Impedance, High Charge Injecting Microelectrode Applications2012

    • Author(s)
      S.Yamagiwa, A.Fujishiro, A.Ikedo, M.Ishida, T.Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Paris, France
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fabrication of Force Sensitive Penetrating Electrical Neuroprobe Arrays2012

    • Author(s)
      S.Morita, A.Fujishiro, A.Ikedo, M.Ishida, T.Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Paris, France
    • Related Report
      2011 Annual Research Report
  • [Presentation] インテリジェントバイオチップ-LSI/MEMS融合のスマートマイクロセンサ-2011

    • Author(s)
      石田誠
    • Organizer
      Electronic Journal第960回Technical Seminar
    • Place of Presentation
      総評会館,東京(招待講演)
    • Year and Date
      2011-12-02
    • Related Report
      2011 Annual Research Report
  • [Presentation] Neural Interface Microprobe/Tube Array Devices2011

    • Author(s)
      T.Kawano
    • Organizer
      Ritsumeikan University
    • Place of Presentation
      Kyoto, Japan(招待講演)
    • Year and Date
      2011-10-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] 集積化デバイスの切り拓くライフイノベーション2011

    • Author(s)
      石田誠, 澤田和明, 河野剛士, 赤井大輔
    • Organizer
      応用物理学会特別シンポジウム異種機能集積化と応用物理~最先端多様分野の融合によって拓かれる未来社会~
    • Place of Presentation
      神奈川工科大学、神奈川(招待講演)
    • Year and Date
      2011-03-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] Vertically Integrated Silicon Wires for Neural Interface and Artificial Whisker Electronics2011

    • Author(s)
      T. Kawano
    • Organizer
      KAIST Seminar
    • Place of Presentation
      Daejeon, Republic of Korea
    • Year and Date
      2011-02-25
    • Related Report
      2012 Final Research Report
  • [Presentation] Vertically Integrated Silicon Wires for Neural Interface and Artificial Whisker Electronics2011

    • Author(s)
      T.Kawano
    • Organizer
      KAIST Seminar
    • Place of Presentation
      Daejeon, Republic of Korea(招待講演)
    • Year and Date
      2011-02-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] 集積化MEMS技術によるスマートマイクロチップ2011

    • Author(s)
      石田誠
    • Organizer
      第16回MEMS講習会「MEMSプロセス技術の最新動向とアプリケーション」
    • Place of Presentation
      名古屋大学東山キャンパス(招待講演)
    • Year and Date
      2011-02-22
    • Related Report
      2010 Annual Research Report
  • [Presentation] Neural Interface Microprobe/Tube Array Devices2011

    • Author(s)
      T. Kawano
    • Organizer
      Ritsumeikan University
    • Place of Presentation
      Kyoto
    • Year and Date
      2011-01-26
    • Related Report
      2012 Final Research Report
  • [Presentation] Simultaneous Recording of Surface and Intra-Retinal Electroretinograms using a Penetrating- and Planar-Electrode Array2011

    • Author(s)
      T.Harimoto, A.Ikedo, T.Kawano, A.Ishihara, A.Fujishiro, S.Yamagiwa, A.Goryu, S.Usui, M.Ishida
    • Organizer
      The Asia-Pacific Interdisciplinary Research Conference (APIRC) 2011
    • Place of Presentation
      Toyohashi, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] A Vertical Micro-scale Light Guiding Silicon Dioxide Tube Array for Optical Neurostimulator2011

    • Author(s)
      M.Sakata, A.Goryu, A.Ikedo, T.Harimoto, M.Ishida, T.Kawano
    • Organizer
      The 28th SENSOR SYMPOSIUM on Sensors, Micromachines and Application Systems
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Electrical Caching and Transfer of Nanoparticles via Nanotip Silicon Probe Arrays2011

    • Author(s)
      A.Goryu, M.Ishida, T.Kawano
    • Organizer
      The 28th SENSOR SYMPOSIUM on Sensors, Micromachines and Application Systems
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Penetrating Micro-scale Diameter Probe Arrays for in-vivo Neuron Spike Recordings2011

    • Author(s)
      T.Kawano, A.Fujishiro, H.Kaneko, T.Kawashima, M.Ishida
    • Organizer
      The 34th Annual Meeting of the Japan Neuroscience Society-Neuroscience of the Mind-
    • Place of Presentation
      Yokohama, Japan
    • Related Report
      2011 Annual Research Report
  • [Presentation] Electrical Catching and Transfer of Nanoparticles via Nanotip Silicon Probe Arrays2011

    • Author(s)
      A.Goryu, A.Ikedo, M.Ishida, T.Kawano
    • Organizer
      16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'11)
    • Place of Presentation
      Beijing, China
    • Related Report
      2011 Annual Research Report
  • [Presentation] Battery-free wireless touch driven transmitter with on-chip antennas for wireless sensor systems2011

    • Author(s)
      M.Niino, T.A.Nguyen, W.H.Lee, K.Sawada, M.Ishida
    • Organizer
      16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'11)
    • Place of Presentation
      Beijing, China
    • Related Report
      2011 Annual Research Report
  • [Presentation] A Vertical micro-scale light guiding silicon dioxide tube array for optical neurostimulator2011

    • Author(s)
      M.Sakata, A.Goryu, A.Ikedo, T.Harimoto, M.Ishida, T.Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2010 Annual Research Report
  • [Presentation] A penetrating micro-scale diameter probe array for in vivo neuron spike recordings2011

    • Author(s)
      A.Fujishiro, H.Kaneko, T.Kawashima, M.Ishida, T.Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2010 Annual Research Report
  • [Presentation] Temperature sensitive microwire array for artificial whisker electronics2011

    • Author(s)
      A.Ikedo, M.Ishida, T.Kawano
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2010 Annual Research Report
  • [Presentation] ナノスケール先鋭化Siワイヤーアレイによるナノ粒子吸脱着デバイス2011

    • Author(s)
      牛流章弘, 池戸昭仁, 石田誠, 河野剛士
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Related Report
      2010 Annual Research Report
  • [Presentation] VLS-Siプローブを用いた皮質脳波、皮質内活動同時計測神経電極デバイス2011

    • Author(s)
      今塩屋竜也, 藤城彬史, 澤畑博人, 戸田春男, 池戸昭仁, 石田誠, 長谷川功, 河野剛士
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Related Report
      2010 Annual Research Report
  • [Presentation] 神経活動計測用高アスペクト比Siプローブの形成及び評価2011

    • Author(s)
      藤城彬史, 池戸昭仁, 石田誠, 河野剛士
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Related Report
      2010 Annual Research Report
  • [Presentation] 医療・生体応用スマートマイクロセンシングチップ2010

    • Author(s)
      石田誠
    • Organizer
      応用電子物性分科会研究例会バイオセンサ・医療デバイス-モノつくりからのアプローチ-
    • Place of Presentation
      首都大学東京秋葉原サテライトキャンパス(招待講演)
    • Year and Date
      2010-12-13
    • Related Report
      2010 Annual Research Report
  • [Presentation] 医療・生体応用マイクロチップセンサー2010

    • Author(s)
      石田誠
    • Organizer
      シンポジウム「メデイカルエレクトロニクスに於ける材料、プロセスとその応用」
    • Place of Presentation
      東京工業大学、デジタル多目的ホール(招待講演)
    • Year and Date
      2010-09-21
    • Related Report
      2010 Annual Research Report
  • [Presentation] Smart Microchips for Intelligent Sensing2010

    • Author(s)
      M. Ishida, T. Kawanoand K. Sawada
    • Organizer
      2010 Seventh International Conference on IEEE Networked Sensing Systems(INSS)
    • Place of Presentation
      Kassel, Germany
    • Year and Date
      2010-06-16
    • Related Report
      2012 Final Research Report
  • [Presentation] Integrated Silicon Microprobe/Tube Arrays for Neural Interface2010

    • Author(s)
      T. Kawano
    • Organizer
      2nd UK-Japan Workshop on the Brain-Machine Interface
    • Place of Presentation
      Newcastle, UK
    • Year and Date
      2010-02-25
    • Related Report
      2012 Final Research Report
  • [Presentation] Integrated Neuroprobe/Tube Arrays: Microdevices for Neural Interface2010

    • Author(s)
      T. Kawano
    • Organizer
      International workshop on Advances in Neuroengineering(Osaka University Global COE Program)
    • Place of Presentation
      Osaka
    • Year and Date
      2010-02-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Smart Microchips for Intelligent Sensing2010

    • Author(s)
      M.Ishida, T.Kawano, K.Sawada
    • Organizer
      2010 Seventh International Conference on IEEE Networked Sensing Systems (INSS)
    • Place of Presentation
      Kassel, Germany(招待講演)
    • Related Report
      2010 Annual Research Report
  • [Presentation] ナノスケール先鋭化マイクロプローブ神経電極の集積化技術2010

    • Author(s)
      牛流章弘、池戸昭仁、石田誠、河野剛士
    • Organizer
      応用物理学会集積化MEMS技術研究会主催第2回集積化MEMSシンポジウム
    • Place of Presentation
      くにびきメッセ、島根
    • Related Report
      2010 Annual Research Report
  • [Presentation] シリコンウィスカ神経電極アレイ/Si(111)とMOSFET/Si(100)の集積化技術2010

    • Author(s)
      奥川晃宏、真弓広太郎、池戸昭仁、石田誠、河野剛士
    • Organizer
      応用物理学会集積化MEMS技術研究会主催第2回集積化MEMSシンポジウム
    • Place of Presentation
      くにびきメッセ、島根
    • Related Report
      2010 Annual Research Report
  • [Presentation] pn接合を有する垂直配向Siマイクロワイヤを用いた突出型フォースセンサアレイ2010

    • Author(s)
      池戸昭仁、河野剛士、石田誠
    • Organizer
      応用物理学会集積化MEMS技術研究会主催第2回集積化MEMSシンポジウム
    • Place of Presentation
      くにびきメッセ、島根
    • Related Report
      2010 Annual Research Report
  • [Presentation] シリコンマイクロプローブ神経電極アレイを用いた網膜光応答の多チャンネル同時記録と信号補正2010

    • Author(s)
      針本哲宏, 竹井邦晴, 河野剛士, 石原彰人, 金子秀和, 川島貴弘, 石田誠, 臼井支朗
    • Organizer
      第25回生体・生理工学シンポジウム
    • Place of Presentation
      岡山大学
    • Related Report
      2010 Annual Research Report
  • [Presentation] Integrated Neuroprobe/Tube Arrays: Microdevices for Neural Interface2009

    • Author(s)
      T. Kawano
    • Organizer
      International Symposium on Toyohashi Global COE Program
    • Place of Presentation
      Tokyo
    • Year and Date
      2009-11-05
    • Related Report
      2012 Final Research Report
  • [Presentation] Fabrication of multi-step vapor-liquid-solid grown silicon microprobe array by probe etching2009

    • Author(s)
      A. Ikedo, K. Sawada, T. Kawano, M. Ishida
    • Organizer
      The Japan Society of Applied Physics (The 56th Spring Meeting)
    • Place of Presentation
      筑波大学、筑波
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] Reduced electrical impedance of VLS-grown silicon microprobe electrode2009

    • Author(s)
      A. Fujishiro, K. Takei, A. Ikedo, K. Sawada, T. Kawano, M. Ishida
    • Organizer
      The Japan Society of Applied Physics (The 56th Spring Meeting)
    • Place of Presentation
      筑波大学、筑波
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] VLS-grown micro-neuroprobe array/Si(111)integrated with MOSFET/Si(100) interface circuitry2009

    • Author(s)
      A. Okueawa, K. Takei, A. Ikedo, K. Sawada, T. Kawano, M. Ishida
    • Organizer
      The Japan Society of Applied Physics(The 56th Spring Meeting)
    • Place of Presentation
      筑波大学、筑波
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] Neuroprobe chips-Toyohashi probe2009

    • Author(s)
      M. Ishida, K. Takei, A, Ikedo, T. Harimoto, T. Kawashima, T. Kawano
    • Organizer
      Annual Conference of IEEJ
    • Place of Presentation
      北海道大学、北海道
    • Year and Date
      2009-03-19
    • Related Report
      2008 Annual Research Report
  • [Presentation] Sub-5μm diameter silicon microprobe and silicon dioxide microtube arrays for low-invasive in-vivo animal experiments2009

    • Author(s)
      K. Takei, T. Kawano, T. Kawashima, K. Sawada, H. Kaneko, M. Ishida
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Sorrento, Italy
    • Year and Date
      2009-01-29
    • Related Report
      2008 Annual Research Report
  • [Presentation] Vertically aligned various lengths doped-silicon microwire arrays by repeated selective vapor-liquid-solid growth2009

    • Author(s)
      T. Kawano, A. Ikedo, T. Kawashima, K. Sawada, M. Ishida
    • Organizer
      IEEE Micro Electro Mechanical Systems (IEEE-MEMS)
    • Place of Presentation
      Sorrento, Italy
    • Year and Date
      2009-01-27
    • Related Report
      2008 Annual Research Report
  • [Presentation] Silicon micro/nano-probe neural interface devices by vapor-liquid-solid growth2009

    • Author(s)
      T. Kawano
    • Organizer
      Lifechips 2009
    • Place of Presentation
      UC Irvine, CA, USA
    • Related Report
      2008 Annual Research Report
  • [Presentation] Out-of-plane microtube arrays for drug delivery2009

    • Author(s)
      K. Takei
    • Organizer
      Lifechips 2009
    • Place of Presentation
      UC Irvine, CA, USA
    • Related Report
      2008 Annual Research Report
  • [Presentation] TUT Global COE and Core University Program2008

    • Author(s)
      M. Ishida
    • Organizer
      International Forum of Centers of Excellence(SRC/ERC)
    • Place of Presentation
      Seoul, Korea
    • Year and Date
      2008-12-12
    • Related Report
      2012 Final Research Report
  • [Presentation] 「Silicon Smart Microchips for Intelligent Sensing」"2008 Symposium on VLS Technoloey" (Hawaii, USA) Plenary Talkを中心として2008

    • Author(s)
      石田誠
    • Organizer
      第5回豊橋技術科学大学産官学交流フォーラム(特別講演)
    • Place of Presentation
      豊橋技術科学大学、愛知
    • Year and Date
      2008-11-07
    • Related Report
      2008 Annual Research Report
  • [Presentation] Sensor Applications of Micro-process and Nanotechnology2008

    • Author(s)
      M. Ishida
    • Organizer
      21st International Microprocesses and Nanotechnology Conference(MNC2008)
    • Place of Presentation
      Fukuoka
    • Year and Date
      2008-10-29
    • Related Report
      2012 Final Research Report
  • [Presentation] Integration of source-follower amplifier array and vapor-liq/uid-solid grown silicon microprobe electrode array on silicon (111)substrate2008

    • Author(s)
      K. Mayumi, K. Takei, A. Ikedo, T. Kawano, H. Takao, K. Sawada, M. Ishida
    • Organizer
      The Japan Society of Applied Physics (The 69th Autumn Meeting)
    • Place of Presentation
      中部大学、愛知
    • Year and Date
      2008-09-04
    • Related Report
      2008 Annual Research Report
  • [Presentation] Fabrication and characterization of multi-step vapor-liquid-solid grown silicon microprobe array2008

    • Author(s)
      A. Ikedo, T. Kawano, K. Sawada, M. Ishida
    • Organizer
      The Japan Society of Applied Physics (The 69th Autumn Meeting)
    • Place of Presentation
      中部大学、愛知
    • Year and Date
      2008-09-04
    • Related Report
      2008 Annual Research Report
  • [Presentation] Silicon whisker" Neuroprobe-Toyohashi probe-2008

    • Author(s)
      M. Ishida, K. Takei, A. Ikedo, T. Harimoto, T. Kawashima, T. Kawano
    • Organizer
      第1回有機ナノ材料・計測技術ミニシンポジウム&第19回NAIST Advanced Polymer Colloquium
    • Place of Presentation
      奈良先端科学技術大学院大学、奈良
    • Year and Date
      2008-07-31
    • Related Report
      2008 Annual Research Report
  • [Presentation] スマートマイクロセンシングチップ開発2008

    • Author(s)
      石田誠
    • Organizer
      立命館大学ナノマシンシステム技術研究会「2008年度 第1回例会]
    • Place of Presentation
      立命館大学、滋賀
    • Year and Date
      2008-07-07
    • Related Report
      2008 Annual Research Report
  • [Presentation] バイオ・医療応用へのスマートマイクロセンシングチップ2008

    • Author(s)
      石田誠
    • Organizer
      第1回広島大学半導体・バイオ融合集積化技術シンポジウム (招待講演)
    • Place of Presentation
      キャンパスイノベーション七万ター東京国際会議室、東京
    • Year and Date
      2008-06-27
    • Related Report
      2008 Annual Research Report
  • [Presentation] Siliconsmart microchips for intelligent sensing2008

    • Author(s)
      M. Ishida, T. Kawano, H. Takao and K. Sawada
    • Organizer
      2008 Symposium on VLSI Technology
    • Place of Presentation
      Honolulu, HI, USA
    • Year and Date
      2008-06-17
    • Related Report
      2012 Final Research Report
  • [Presentation] Bio-medical Si microchips with sensors and IC2008

    • Author(s)
      M. Ishida
    • Organizer
      The fourth international nanotechnology conference on communication and cooperation(INC4) International nanotechnology conference on communication and cooperation(INC4)
    • Place of Presentation
      Tokyo
    • Year and Date
      2008-04-16
    • Related Report
      2012 Final Research Report
  • [Presentation] Source-follower Amplifier Array with Vapor-Liquid-Solid Grown Silicon Microprobe Electrodes on Silicon (111) Substrate2008

    • Author(s)
      K. Mayumi, K. Takei, T. Kawashima, T. Kawano, H. Takao, K. Sawada, M. Ishida
    • Organizer
      The 4th Asia Pacific Conference on Transducers and Micro/Nano Technology (APCOT 2008)
    • Place of Presentation
      Tainan, Taiwan
    • Related Report
      2008 Annual Research Report
  • [Presentation] TUT Global COE and Core University Program2008

    • Author(s)
      M. Ishida
    • Organizer
      International Forum of Centers of Excellenee (SRC/ERC) (Invited)
    • Place of Presentation
      Seoul, Korea
    • Related Report
      2008 Annual Research Report
  • [Presentation] Sensor Applications of Micro-process and Nanotechnology2008

    • Author(s)
      M. Ishida
    • Organizer
      21st International Microprocesses and Nanotechnology Conference (MNC 2008) (Invited)
    • Place of Presentation
      Fukuoka, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Silicon smart microchips for intelligent sensing2008

    • Author(s)
      M. Ishida, T. Kawano, H. Takao, K. Sawada
    • Organizer
      2008 Symposium on VLSI Technology (Invited)
    • Place of Presentation
      Honolulu, HI, USA
    • Related Report
      2008 Annual Research Report
  • [Presentation] Bio-medical Si microchips with sensors and IC2008

    • Author(s)
      M. Ishida
    • Organizer
      The fourth international nanotechnology conference on communication and cooperation (INC4)(Invited)
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Multiple local electroretinograms from isolated carp retina using Si whisker microprobe electrode array2008

    • Author(s)
      T. Harimoto, A. Ishihara, T. Kawano, K. Takei, M. Ishida, S. Usui
    • Organizer
      JNNS2008
    • Place of Presentation
      産業技術研究所、筑波
    • Related Report
      2008 Annual Research Report
  • [Presentation] センサ/MEMS・IC融合によるスマートマイクロチップ2008

    • Author(s)
      石田誠
    • Organizer
      フロンティアプロセス2008
    • Place of Presentation
      産業技術総合研究所、筑波
    • Related Report
      2008 Annual Research Report
  • [Presentation] マイクロ/ナノプローブアレイデバイスのニューラルインタフェース応用

    • Author(s)
      河野剛士(パネリスト)
    • Organizer
      MEとバイオサイバネティックス研究会/ニューロコンピューティング研究会(NC)
    • Place of Presentation
      愛知
    • Related Report
      2012 Annual Research Report
  • [Presentation] ニューラルインタフェースデバイスの研究

    • Author(s)
      河野剛士
    • Organizer
      第1回ICE Cube Center研究会(第67回精密工学研究所シンポジウム,Green ICE Initiative 3rd Technical Workshop for Open Innovation)
    • Place of Presentation
      神奈川
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Book] 新インターユニバーシティ集積回路2011

    • Author(s)
      石田誠, 石井仁
    • Total Pages
      184
    • Publisher
      株式会社オーム社
    • Related Report
      2012 Final Research Report 2011 Annual Research Report 2010 Annual Research Report
  • [Book] バイオテクノロジーシリーズ「ヘルスケアとバイオ医療のための先端デバイス機器(Advanced BioMedical Devices and Equipmentsfor Health Care)」2009

    • Author(s)
      石田誠, 澤田和明
    • Total Pages
      385
    • Publisher
      シーエムシー出版
    • Related Report
      2012 Final Research Report
  • [Remarks]

    • URL

      http://int.ee.tut.ac.jp/icg/

    • Related Report
      2012 Final Research Report
  • [Remarks]

    • URL

      http://int.ee.tut.ac.jp/icg/

    • Related Report
      2011 Annual Research Report
  • [Remarks] 研究グループホームページ

    • URL

      http://www.int.ee.tut.ac.jp/icg/

    • Related Report
      2010 Self-evaluation Report
  • [Remarks]

    • URL

      http://int.ee.tut.ac.jp/icg/

    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.dev.eee.tut.ac.jp/ishidalab

    • Related Report
      2008 Annual Research Report
  • [Patent(Industrial Property Rights)] 差動増幅器およびこれを使用する信号増幅装置2012

    • Inventor(s)
      秋田一平,石田誠
    • Industrial Property Rights Holder
      秋田一平,石田誠
    • Industrial Property Number
      2012-267878
    • Filing Date
      2012-12-07
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 差動増幅器およびこれを使用する信号増幅装置2012

    • Inventor(s)
      秋田一平, 石田 誠
    • Industrial Property Rights Holder
      秋田一平, 石田 誠
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-267878
    • Filing Date
      2012-12-07
    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 中空マイクロチューブ構造およびその作製方法ならびに生体検査装置2010

    • Inventor(s)
      石田誠, 河野剛士, 川島貴弘, 竹井邦晴
    • Industrial Property Rights Holder
      豊橋技術科学大学
    • Filing Date
      2010-06-19
    • Related Report
      2012 Final Research Report

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Published: 2008-04-01   Modified: 2019-07-29  

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