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Fabrication of ultra high density nanohole array using combination of top-down and bottom-up approaches and its application for a high density magnetic storage media

Research Project

Project/Area Number 20241027
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Nanomaterials/Nanobioscience
Research InstitutionKansai University

Principal Investigator

SINGUBARA Shoso  Kansai University, システム理工学部, 教授 (10231367)

Co-Investigator(Kenkyū-buntansha) TANAKA Syukichi  情報通信研究機構(独), 主任研究員 (40284608)
Co-Investigator(Renkei-kenkyūsha) SHIMIZU Tomohiro  関西大学, システム理工学部, 助教 (80581165)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥26,780,000 (Direct Cost: ¥20,600,000、Indirect Cost: ¥6,180,000)
Fiscal Year 2010: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2009: ¥21,320,000 (Direct Cost: ¥16,400,000、Indirect Cost: ¥4,920,000)
Keywords磁性体 / 磁気記録媒体 / ナノワイヤ / ナノホール / 自己組織化 / トップダウン / ボトムアップ / ナノインプリント / 垂直磁気記録 / 保磁力 / 陽極酸化アルミナ / コバルト / 磁気抵抗 / 電解めっき / FePt / 合金めっき
Research Abstract

We succeeded in the fabrication of ultra high density ferromagnetic nanorod array which density was ranged from 200 Giga to 2.5 Tera per square inch, using porous alumina nanohole array formed on Si substrate. The smallest diameter of nanorod is 10 nm, and the coercivity at room temperature is 2.0 kOe. Furthermore, we succeeded in shrinkage of the ordered nanohole array using a combination of top-down and bottom-up technology, namely, ion beam etching with electron beam lithography and anodic oxidation of aluminum.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (54 results)

All 2011 2010 2009 2008

All Journal Article (15 results) (of which Peer Reviewed: 13 results) Presentation (35 results) Patent(Industrial Property Rights) (4 results)

  • [Journal Article] Preparation of Ultra High Density Magnetic Nanowire Arrays beyond 1 Tera Bit/Inch^2 on Si Substrate Using AAO Template2011

    • Author(s)
      T.Shimizu, K.Aoki, Y.Tanaka, T.Terui, S.Shingubara
    • Journal Title

      Jpn.J.Appl.Phys. (to be published)

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Large Magnetoresistance Switching Phenomena in Nanoconduction Path Formed with Dielectric Breakdown of SiO_2 Multilayered with Ferromagnetic Film2011

    • Author(s)
      Y.Shiotani, K.Shimomura, T.Shimizu, S.Shingubara
    • Journal Title

      Jpn.J.Appl.Phys.

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of Ultra High Density Magnetic Nanowire Arrays beyond 1 Tera Bit/Inch^2 on Si Substrate Using AAO Template2011

    • Author(s)
      Tgubar.Shimizu, K.Aoki, Y.Tanaka, T.Terui, S.Shina
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: (accepted)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Large Magnetoresistance Switching Phenomena in Nanoconduction Path Formed with Dielectric Breakdown of SiO_2 Multilayered with Ferromagnetic Film2011

    • Author(s)
      Yuichi Shiotani, Kohei Shimomura, Tomohiro Shimizu, Shoso Shingubara
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: (accepted)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Change in magnetoresistance property depending on the state of Ni-oxide memory device2011

    • Author(s)
      K.Suzuki, Y.Shiotani, Y.Sumita, T.Shimizu, S.Shingubara
    • Journal Title

      Proc.of MNC 2011

    • Related Report
      2010 Annual Research Report
  • [Journal Article] Reduction of pitch of nanohole array by self-organizing anodic oxidation after nanoimprinting2010

    • Author(s)
      S..Shingubara, S.Maruo, T.Yamashita, M.Nakao, T.Shimizu
    • Journal Title

      Micro-electronic Engineering 87

      Pages: 1451-1454

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] TRIAXIS MAGNETO-RESISTIVE (MR) SENSOR USING PERMALLOY PLATE OF DISTORTING MAGNETIC FIELD2010

    • Author(s)
      Suzuki M, Fukutani T, Hirata T, Aoyagi S, Shingubara S, Tajiri H , Yoshikawa Y, Nagahata T
    • Journal Title

      MEMS 2010 : 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, Proc.of IEEE MICRO ELECTRO MECHANICAL SYSTEMS

      Pages: 671-674

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Reduction of pitch of nanohole array by self-organizing anodic oxidation after nanoimprinting2010

    • Author(s)
      S.Shingubara, S.Maruo, T.Yamashita, M.Nakao, T.Shimizu
    • Journal Title

      Microelectronic Engineering 87

      Pages: 1451-1464

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Strain imaging of a perpendicular recording head in a Hard Disk Drive2010

    • Author(s)
      K.Takata, N.Kurata, S.Tamura, S.Shingubara, S.Nakahara, N.Tagawa, Y.Arai
    • Journal Title

      J.of Magnetism and Magnetic Materials 322-6

      Pages: 638-642

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Filling of FePt in AAO Nanohole Array by DC Pulsed Electrodeposition2009

    • Author(s)
      H.Mori, T.Korenaga, N.Hosomi, T.Terui, S.Shingubara
    • Journal Title

      ECS Transactions 16(45)

      Pages: 65-71

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Enormous Resistance Switching Phenomena Observed In Nickel-Aluminum-Oxide Nanocomposite2009

    • Author(s)
      S.Shingubara, S.Yamanishi, Y.Shiotani, S.Aoyagi, N.Tagawa, S.Nakahara, K.Saitoh, S.Tamura, T.Yamaguchi
    • Journal Title

      Science and Technology Report of Kansai University

      Pages: 1-9

    • Related Report
      2010 Final Research Report
  • [Journal Article] Filling of FePt in AAO Nanohole Array by DC Pulsed Electrodeposition2009

    • Author(s)
      H.Mori, T.Korenaga, N.Hosomi, T.Terui, S.Shingubara
    • Journal Title

      ECS Transactions 16-45

      Pages: 65-71

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Filling of FePt in AAO Nanohole Array by DC Pulsed Electrodeposition (accepted for publication)2009

    • Author(s)
      H. Mori, T. Korenaga, N. Hosomi, T. Terui, S. Shingubara
    • Journal Title

      ECS Transaction 16(印刷中)

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Vertical Epitaxial Wire-on-Wire Growth of Ge/Si on Si (100) Substrate2009

    • Author(s)
      Tomohiro Shimizu, Zhang Zhang, Shoso Shingubara, Stephan Senz, Ulrich Goesele
    • Journal Title

      Nano Lett. 9-4

      Pages: 1523-1526

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Measurement of electromigration-induced stress in aluminum alloy interconnection2009

    • Author(s)
      K. Kusaka, T. Hanabusa, S. Shingubara, T. Matsue, O, Sakata
    • Journal Title

      Vacuum 83

      Pages: 637-640

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] Huge magnetoresistance switching in a ferromagnetic nano-conduction-path formed by dielectric breakdown2011

    • Author(s)
      T.Shimizu, Y.Shiotani, K.Shimomura, S.Shingubara
    • Organizer
      MORIS
    • Year and Date
      2011-06-23
    • Related Report
      2010 Final Research Report
  • [Presentation] Huge Resistance Switching Induced by Magnetic Field in a Ferro Magnetic Nano-Conduction Path (FNCP)2011

    • Author(s)
      T.Shimizu, Y.Shiotani, K.Shimomura, S.Shingubara
    • Organizer
      IEEE INTERMAG
    • Year and Date
      2011-04-26
    • Related Report
      2010 Final Research Report
  • [Presentation] Reduction of pitch of nanohole array by self-organizing anodic oxidation after pre-patterning with IBE on the surface of Al film2010

    • Author(s)
      Y.Ishida, S.Tanaka, T.Shimizu, S.Shinguhara
    • Organizer
      ICMNE 2010
    • Year and Date
      2010-12-15
    • Related Report
      2010 Final Research Report
  • [Presentation] Reduction of pitch of nanohole array by self-organizing anodic oxidation after pre-patterning with IBE on the surface of Al film2010

    • Author(s)
      Y.Ishida, S.Tanaka, T.Shimizu, S.Shingubara
    • Organizer
      ICMNE 2010
    • Place of Presentation
      神戸市国際会議場
    • Year and Date
      2010-12-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Fabrication of Various Nanowires Using AAO Template for Preparation of Building Blocks of Highly Functional Nanodevices and Sensors2010

    • Author(s)
      Shoso Shingubara
    • Organizer
      ICMNE 2010
    • Place of Presentation
      神戸市国際会議場
    • Year and Date
      2010-12-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Large magnetoresistance observed in a nano-conduction path formed with dielectric breakdown of SiO_2 connected with ferromagnetic layer2010

    • Author(s)
      Y.Shiotani, K.Shimomura, T.Shimizu, S.Shingubara
    • Organizer
      ICMUAS 2010
    • Place of Presentation
      チェジュ、韓国
    • Year and Date
      2010-12-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] Large magnetoresistance observed in a nano-conduction path formed with dielectric breakdown of SiO_2 connected with ferromagnetic layer2010

    • Author(s)
      Y.Shiotani, K.Shimomura, T.Shimizu, S.Shingubara
    • Organizer
      ICAUMS 2010
    • Year and Date
      2010-12-06
    • Related Report
      2010 Final Research Report
  • [Presentation] Large Magnetoresistance Switching Phenomena in Nanoconduction Path Formed with Dielectric Breakdown of SiO_2 Multilayered with Ferromagnetic Film2010

    • Author(s)
      Yuichi Shiotani, Kohei Shimomura, Tomohiro Shimizu, Shoso Shingubara
    • Organizer
      MNC 2010
    • Place of Presentation
      小倉市リーガロイヤルホテル小倉
    • Year and Date
      2010-11-12
    • Related Report
      2010 Annual Research Report
  • [Presentation] Large magnetoresistance switching phenomena in a nano-conduction path formed with dielectric breakdown2010

    • Author(s)
      Y.Shiotani, K.Shimomura, T.Shimizu, S.Shingubara
    • Organizer
      MNC2010
    • Year and Date
      2010-11-11
    • Related Report
      2010 Final Research Report
  • [Presentation] Change in magnetoresistance property depending on the state of Ni-oxide memory device2010

    • Author(s)
      K.Suzuki, Y.Shiotani, Y.Sumita, T.Shimizu, S.Shingubara
    • Organizer
      MNC2010
    • Year and Date
      2010-11-11
    • Related Report
      2010 Final Research Report
  • [Presentation] Preparation of Ultra High Density Magnetic Nanowire Arrays beyond 1 Tera Bit/Inch^2 on Si Substrate Using AAO Template2010

    • Author(s)
      T.Shimizu, K.Aoki, Y.Tanaka, T.Terui, S.Shingubara
    • Organizer
      MNC 2010
    • Place of Presentation
      小倉市リーガロイヤルホテル小倉
    • Year and Date
      2010-11-11
    • Related Report
      2010 Annual Research Report
  • [Presentation] Preparation of ultra high density magnetic nanowire arrays beyond 1 tera bit/inch2 on Si substrate using AAO template2010

    • Author(s)
      K.Aoki, Y.Tanaka, T, Terui, T.Shimizu, S.Shingubara,
    • Organizer
      MNC2010
    • Year and Date
      2010-11-10
    • Related Report
      2010 Final Research Report
  • [Presentation] AAOテンプレートを利用したAu/NiO/Auナノワイヤの作製と評価2010

    • Author(s)
      角田譲、巳之口哲司、青木和茂、清水智弘、新宮原正三
    • Organizer
      日本表面科学会講演会
    • Place of Presentation
      大阪府吹田市大阪大学
    • Year and Date
      2010-11-04
    • Related Report
      2010 Annual Research Report
  • [Presentation] 絶縁破壊により形成された微細導通経路における抵抗揺らぎ特性2010

    • Author(s)
      下村耕平、塩谷裕一、清水智弘、新宮原正三
    • Organizer
      応用物理学会秋季講演会
    • Place of Presentation
      長崎市長崎大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Imaging, Structuring and Functionalization on Organic Molecules in Nano-meter Scale2010

    • Author(s)
      S.Tanaka
    • Organizer
      International Workshop on Organic Electronics and Spintronics
    • Place of Presentation
      名古屋市 名古屋国際会議場
    • Year and Date
      2010-03-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] Enormous Magnetoresistance Switching Observed in partially Ni-filled AAO on Si2009

    • Author(s)
      S.Yamanishi, Y.Shiotani, K.Murakami, M.Takai, T.Shimizu, S.Shingubara
    • Organizer
      MNC 2009
    • Year and Date
      2009-11-09
    • Related Report
      2010 Final Research Report
  • [Presentation] Fabrication of Metal Nanowires Sandwiched with Gold for Self-Assembling of NW sensors2009

    • Author(s)
      M.Yamanaka, K.Aoki, Y.Ishida, Y.Ohya, S.Tanaka, T.Shimizu, S. Shingubara
    • Organizer
      MNC 2009
    • Year and Date
      2009-11-09
    • Related Report
      2010 Final Research Report
  • [Presentation] 陽極酸化アルミナを用いたSi基板上の磁性体ナノワイヤの形成2009

    • Author(s)
      青木和茂, 前原誠, 坂田智裕, 新宮原正三
    • Organizer
      表面科学会講演会
    • Place of Presentation
      東京都、タワーホール船堀
    • Year and Date
      2009-10-28
    • Related Report
      2009 Annual Research Report
  • [Presentation] 陽極酸化アルミナを用いたSi基板上の磁性体ナノワイヤの形成2009

    • Author(s)
      青木和茂、前原誠、坂田智裕、新宮原正三
    • Organizer
      表面科学会講演会
    • Year and Date
      2009-10-15
    • Related Report
      2010 Final Research Report
  • [Presentation] AAOナノホールをテンプレートとしたハイブリットナノワイヤーの形成2009

    • Author(s)
      石田康晴、青木和茂、新宮原正三、大矢裕一
    • Organizer
      表面科学会講演会
    • Year and Date
      2009-10-15
    • Related Report
      2010 Final Research Report
  • [Presentation] Reduction of the Pitch of the Nano-Hole Array by Self-Organizing Anodic Oxidation After Nano-Imprinting2009

    • Author(s)
      S.Maruo, T.Yamashita, M.Nakao, T.Shimizu, S.Shingubara
    • Organizer
      MNE2009
    • Place of Presentation
      Ghent,Belgium
    • Year and Date
      2009-09-29
    • Related Report
      2010 Final Research Report
  • [Presentation] Reduction of the Pitch of the Nano-Hole Array by Self-Organizing Anodic Oxidation After Nano-Imprinting2009

    • Author(s)
      S.Maruo, T.Yamashita, M.Nakao, T.Shimizu, S.Shingubara
    • Organizer
      MNE 2009
    • Place of Presentation
      ベルギー、ゲント市 Congress Center
    • Year and Date
      2009-09-29
    • Related Report
      2009 Annual Research Report
  • [Presentation] 新宮原正三"Ni-アルミナ・ナノコンポジットにおける巨大磁気抵抗スイッチング現象"2009

    • Author(s)
      塩谷裕一、山西卓、村上勝久、清水智弘
    • Organizer
      磁気学会2009年度学術講演会
    • Place of Presentation
      長崎市
    • Year and Date
      2009-09-14
    • Related Report
      2010 Final Research Report
  • [Presentation] Ni-アルミナ・ナノコンポジットにおける巨大磁気抵抗スイッチング現象2009

    • Author(s)
      塩谷裕一, 山西卓, 村上勝久, 清水智弘, 新宮原正三
    • Organizer
      日本磁気学会学術講演会
    • Place of Presentation
      長崎市、長崎大学
    • Year and Date
      2009-09-12
    • Related Report
      2009 Annual Research Report
  • [Presentation] Enormous Magneto-resistance Switching Observed in Ni-diffused Anodic Aluminum Oxide2009

    • Author(s)
      S.Yamanishi, Y.Shiotani, K.Murakami, T.Shimizu, S.Shingubara
    • Organizer
      Inter.Conf. on Magnetism 2009
    • Place of Presentation
      Karlsruhe, Germany
    • Year and Date
      2009-07-27
    • Related Report
      2010 Final Research Report
  • [Presentation] ENORMOUS RESISTANCE SWITCHING PHENOMENA OBSERVED IN NICKEL- ALUMINIUM- OXIDE NANOCOMPOSITE2009

    • Author(s)
      山西卓, 塩谷裕一, 村上勝久, 清水智弘, 新宮原正三
    • Organizer
      IEEE Intermag 2009 conference
    • Place of Presentation
      米国サクラメント市 Convention Center
    • Year and Date
      2009-05-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Enormaous resistance switching phenomena observed in Nickel-Alumina oxide nanocomposite2009

    • Author(s)
      S.Yamanishi, Y.Siotani, K.Murakami, T.Shimizu, S.Shingubara
    • Organizer
      IEEE Intermag 2009
    • Place of Presentation
      Sacramento, USA
    • Year and Date
      2009-05-06
    • Related Report
      2010 Final Research Report
  • [Presentation] Fabrication of Metal Nanowires Sandwiched with Gold for Self-Assembling of NW sensors2008

    • Author(s)
      M. Yamanaka Y. Ohya, S. Tanaka, T. Shimizu, S. Shingubara
    • Organizer
      ICMNE 2008
    • Place of Presentation
      神戸市
    • Year and Date
      2008-12-17
    • Related Report
      2008 Annual Research Report
  • [Presentation] Realizing 1/3 pitch of the alumna nano-hole array by self-organizing anodic oxidation after nano-imprinting2008

    • Author(s)
      S.Maruo, T.Yamashita, M.Nakao, T.Shimizu, S.Shingubara
    • Organizer
      2008 International Conference of MNC
    • Year and Date
      2008-10-18
    • Related Report
      2010 Final Research Report
  • [Presentation] Filling of FePt in AAO Nanohole Array by DC Pulsed Electrodeposition2008

    • Author(s)
      H.Mori, T.Korenaga, N.Hosomi, T.Terui, S.Shingubara
    • Organizer
      ECSPRIME 2008
    • Place of Presentation
      Honolulu, USA
    • Year and Date
      2008-10-15
    • Related Report
      2010 Final Research Report
  • [Presentation] FILLING OF FEPT IN AAO NANOHOLE ARRAY BY DC PULSED ELECTRODEPO SITION2008

    • Author(s)
      H. Mori, T. Korenaga, N. Hosomi, T. Terui, S. Shingu bara
    • Organizer
      Eectrochemical Society, Prime 2008
    • Place of Presentation
      米国、ホノルル
    • Year and Date
      2008-10-14
    • Related Report
      2008 Annual Research Report
  • [Presentation] Aspect Ratio Dependence of M-H Switching Characteristics of Oblong Ferromagnetic Film2008

    • Author(s)
      H.Oka, S.Yamanishi, S.Shingubara, K.Akabane
    • Organizer
      IUMRS 2008
    • Year and Date
      2008-10-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Epitaxial growth of vertical group IV semiconductor nanowires on Si (100) substrate using anodic alumina template2008

    • Author(s)
      T. Shimizu, Z. Zhang, X. Tian, Jo Nishikawa, S. Shingubara, S. Senz (Max Planck Institute), Ulrich Gosele
    • Organizer
      2008 International Conf. on Solid State Devices and Materials
    • Place of Presentation
      つくば市
    • Year and Date
      2008-09-24
    • Related Report
      2008 Annual Research Report
  • [Presentation] Niナノワイヤの形成と磁気伝導特性評価2008

    • Author(s)
      山西卓、河上茂太、新宮原正三、清水智弘
    • Organizer
      第69回応用物理学会学術講演会
    • Year and Date
      2008-09-03
    • Related Report
      2010 Final Research Report
  • [Presentation] Niナノワイヤの形成と磁気伝導特性評価2008

    • Author(s)
      山西卓, 河上茂太, 新宮原正三, 清水智弘
    • Organizer
      応用物理学会
    • Place of Presentation
      名古屋市
    • Year and Date
      2008-09-03
    • Related Report
      2008 Annual Research Report
  • [Patent(Industrial Property Rights)] 巨大磁気抵抗素子及びその作製法2010

    • Inventor(s)
      新宮原正三、清水智弘、塩谷裕一
    • Industrial Property Rights Holder
      関西大学
    • Filing Date
      2010-11-09
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] 巨大磁気抵抗素子及びその作製法2010

    • Inventor(s)
      新宮原正三, 清水智弘, 塩谷裕一
    • Industrial Property Rights Holder
      関西大学
    • Filing Date
      2010-11-09
    • Related Report
      2010 Annual Research Report
  • [Patent(Industrial Property Rights)] 陽極酸化アルミナの製造方法、陽極酸化アルミナ、および高密度構造体2008

    • Inventor(s)
      新宮原正三、山下尊史、中尾正史
    • Industrial Property Rights Holder
      関西大学、情報通信研究機構
    • Filing Date
      2008-02-12
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] ナノワイヤ構造体、ナノワイヤ結合体、およびその製造方法2008

    • Inventor(s)
      新宮原正三, 大矢裕一
    • Industrial Property Rights Holder
      関西大学
    • Filing Date
      2008-08-08
    • Related Report
      2008 Annual Research Report

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Published: 2009-04-01   Modified: 2016-04-21  

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