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Development of High-Power Pulsed Microplasma for Analysis of Small Amount Samples

Research Project

Project/Area Number 20245017
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Analytical chemistry
Research InstitutionTokyo Institute of Technology

Principal Investigator

OKINO Akitoshi  東京工業大学, 大学院・総合理工学研究科, 准教授 (60262276)

Co-Investigator(Kenkyū-buntansha) HOTTA Eiki  東京工業大学, 大学院・総理工, 教授 (70114890)
WATANABE Masato  東京工業大学, 大学院・総理工, 助教 (20251663)
FURUTA Naoki  中央大学, 理工学部, 教授 (90101055)
Project Period (FY) 2008 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥49,140,000 (Direct Cost: ¥37,800,000、Indirect Cost: ¥11,340,000)
Fiscal Year 2011: ¥8,580,000 (Direct Cost: ¥6,600,000、Indirect Cost: ¥1,980,000)
Fiscal Year 2010: ¥10,400,000 (Direct Cost: ¥8,000,000、Indirect Cost: ¥2,400,000)
Fiscal Year 2009: ¥12,870,000 (Direct Cost: ¥9,900,000、Indirect Cost: ¥2,970,000)
Fiscal Year 2008: ¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
Keywordsマイクロプラズマ / 微量元素分析 / 細胞分析 / 大気圧プラズマ / パルスパワー / 微少量試料 / 発光分析 / 質量分析 / 微小量試料
Research Abstract

In recent years, there is growing interest in element analysis for small samples such as bio-cells. In this study, high power pulsed microplasma source and droplet direct injection nebulizer(D-DIN) system were developed. The maximum input power of 55 kW was achieved and about 10, 000 times higher emission intensity compared with DC discharge was obtained. D-DIN was applied to microplasma and absolute detection limit of 3. 2 ag with sodium was achieved. It was less than 1/1, 000, 000 compare with conventional ICP-MS. Finally, single cell analysis of yeast cell was achieved using D-DIN-ICP-MS.

Report

(6 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report   Self-evaluation Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (60 results)

All 2012 2011 2010 2009 2008 Other

All Journal Article (9 results) (of which Peer Reviewed: 8 results) Presentation (33 results) Book (4 results) Remarks (8 results) Patent(Industrial Property Rights) (6 results)

  • [Journal Article] 大気圧非平衡プラズマを用いた新しい励起・イオン化法2011

    • Author(s)
      岩井貴弘, 鏑木結貴, 沖野晃俊
    • Journal Title

      ぶんせき

      Volume: 第11号 Pages: 662-667

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] 大気圧非平衡プラズマを用いた新しい励起・イオン化源2011

    • Author(s)
      岩井貴弘, 鏑木結貴, 沖野晃俊
    • Journal Title

      ぶんせき

      Volume: 10 Pages: 662-667

    • NAID

      10030723129

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 微量元素分析用高周波/パルス重畳大気圧マイクロプラズマ源の評価2010

    • Author(s)
      永田洋一, 宮原秀一, 大場吾郎, 磯部高範, 嶋田隆一, 堀田栄喜, 沖野晃俊
    • Journal Title

      電気学会論文誌A

      Volume: 130 Pages: 669-676

    • NAID

      10026865243

    • Related Report
      2011 Final Research Report 2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ナノリットル試料分析のための試料導入法及び励起・イオン化源の開発2010

    • Author(s)
      宮原秀一, 重田香織, 中島尚紀, 永田洋一, 沖野晃俊
    • Journal Title

      分析化学

      Volume: 59 Pages: 363-378

    • NAID

      10026476032

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] 大気圧プラズマを用いた微量元素分析技術2010

    • Author(s)
      重田香織, 永田洋一, 岩井貴弘, 宮原秀一, 沖野晃俊
    • Journal Title

      電気学会論文誌A 130,10

      Pages: 955-962

    • NAID

      10026693553

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] ナノリットル試料分析のための試料導入法および励起・イオン化源の開発2010

    • Author(s)
      宮原秀一, 重田香織, 中島尚紀, 永田洋一, 沖野晃俊
    • Journal Title

      分析化学 59

      Pages: 363-378

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] 微量元素分析用高周波/パルス重畳大気圧マイクロプラズマ源の評価2010

    • Author(s)
      永田洋一, 宮原秀一, 大場吾郎, 磯辺高範, 嶋田隆一, 堀田栄喜, 沖野晃俊
    • Journal Title

      電気学会論文誌A 130,7

      Pages: 669-676

    • NAID

      10026865243

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] 大気圧マルチガスプラズマ源の開発と産業応用2010

    • Author(s)
      沖野晃俊, 佐々木良太, 永田洋一, 重田香織, 岩井貴弘, 宮原秀一
    • Journal Title

      プラズマ・核融合学会誌 86,1

      Pages: 40-42

    • NAID

      110007521525

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] 大気圧マルチガス高純度プラズマ源の開発と応用2009

    • Author(s)
      宮原秀一, 沖野晃俊
    • Journal Title

      機能材料

      Volume: 29-4 Pages: 70-79

    • Related Report
      2009 Annual Research Report
  • [Presentation] 脱溶媒を用いたドロプレット試料導入ICP分析装置の評価2012

    • Author(s)
      鏑木結貴, 高妻智一, 岩井貴弘, 重田香織, 宮原秀一, 沖野晃俊
    • Organizer
      電気学会東京支部神奈川支所第1回研究会
    • Place of Presentation
      慶應義塾大学
    • Year and Date
      2012-02-24
    • Related Report
      2011 Annual Research Report
  • [Presentation] Improvement of detection limit of droplet direct injection ICP-TOFMS with desolvation and high time resolution for single cell analysis2012

    • Author(s)
      Yuki Kaburaki, Tomokazu Kozuma, Takahiro Iwai, Kaori Shigeta, Hidekazu Miyahara, Aki toshi Okino
    • Organizer
      2012 Winter Conference on Plasma Spectrochemistry
    • Place of Presentation
      Tucson, AZ, USA
    • Year and Date
      2012-01-11
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of new sample introduction system for single cells based on direct injection and laser ablation2012

    • Author(s)
      Kaori Shigeta, Larissa Wantig, Yuki Kaburaki, Takahiro Iwai, Hidekazu Miyahara, Akitoshi Okino, Norbert Jakubowski
    • Organizer
      2012 Winter Conference on Plasma Spectrochemistry
    • Place of Presentation
      Tucson, AZ, USA
    • Year and Date
      2012-01-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] ドロプレットネブライザを用いた単一細胞・単一粒子分析2011

    • Author(s)
      沖野晃俊, 鏑木結貴, 高妻智一, 重田香織, 宮原秀一
    • Organizer
      東北大学金属材料研究所ワークショップ
    • Place of Presentation
      東北大学(招待講演)
    • Year and Date
      2011-12-12
    • Related Report
      2011 Annual Research Report
  • [Presentation] 発光分光分析によるドロプレット試料導入ICP分析装置の基礎特性評価2011

    • Author(s)
      高妻智一, 鏑木結貴, 岩井貴弘, 重田香織, 宮原秀一, 沖野晃俊
    • Organizer
      平成23年度日本分光学会年次講演会
    • Place of Presentation
      横浜市立大学
    • Year and Date
      2011-12-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] Single Yeast Cell Analysis using Droplet Direct Injection ICP-TOFMS2011

    • Author(s)
      Yuki Kaburaki, Tomokazu Kozuma, Takahiro Iwai, Kaori Shigeta, Hidekazu Miyahara, Aki toshi Okino
    • Organizer
      Federation of Analytical Chemistry and Spectroscopy Societies conference
    • Place of Presentation
      Reno, NV, USA
    • Year and Date
      2011-10-04
    • Related Report
      2011 Annual Research Report
  • [Presentation] ドロプレット試料導入ICP質量分析装置を用いた単一酵母細胞分析2011

    • Author(s)
      鏑木結貴, 高妻智一, 岩井貴弘, 重田香織, 宮原秀一, 沖野晃俊
    • Organizer
      日本分析化学会第60年会
    • Place of Presentation
      名古屋大学
    • Year and Date
      2011-09-16
    • Related Report
      2011 Annual Research Report
  • [Presentation] 細胞の個別分析を目的としたマイクロプラズマ発光分析装置の開発2011

    • Author(s)
      根岸祐多,鈴木雄太,岩井貴弘,永田洋一,宮原秀一,沖野晃俊
    • Organizer
      日本分析化学会第60年会
    • Place of Presentation
      名古屋大学東山キャンパス
    • Year and Date
      2011-09-14
    • Related Report
      2011 Final Research Report
  • [Presentation] Direct Injection of Cells into an ICP-MS for metallomic studies by using a droplet injection nebulizer2011

    • Author(s)
      Kaori Shigeta, Larissa Wantig, Norbert Jakubowski, Yuki Kaburaki, Takahiro Iwai, Hidekazu Miyahara, Akitoshi Okino
    • Organizer
      3rd International Symposium on Metallomics
    • Place of Presentation
      Munster, Germany
    • Year and Date
      2011-06-17
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of Single Shot ICP-MS for Single Cell Analysis2011

    • Author(s)
      Hidekazu Miyahara, Kaori Shigeta, Yuki Kaburaki, Takahiro Iwai, Akitoshi Okino
    • Organizer
      IUPAC International Congress on Analytical Science, ICAS 2011
    • Place of Presentation
      京都国際会館
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of Droplet Direct Injection ICP-TOFMS for Single Cell Analysis2011

    • Author(s)
      Yuki Kaburaki, Kaori Shigeta, Takahiro Iwai, Hidekazu Miyahara, Akitoshi Okino
    • Organizer
      IUPAC International Congress on Analytical Science, ICAS 2011
    • Place of Presentation
      京都国際会館
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of D-DIN-Microplasma System for Individual Analysis of Single Cell/Particle2011

    • Author(s)
      Yuta Negishi, Yoichi Nagata, Yuichiro Takahashi, Kaori Shigeta, Hidekazu Miyahara, Akitoshi Okino
    • Organizer
      IUPAC International Congress on Analytical Science, ICAS 2011
    • Place of Presentation
      京都国際会館
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] Development of Droplet-DIN Microplasma AES System for Individual Analysis of Single Cell/Particle2011

    • Author(s)
      Y. Negishi, Y. Nagata, Y. Takahashi, K. Shigeta, H. Miyahara, A. Okino
    • Organizer
      6thInternational Workshop on Microplasmas
    • Place of Presentation
      France
    • Year and Date
      2011-04-05
    • Related Report
      2011 Final Research Report
  • [Presentation] Brand-new Sample Introduction Systems for Bio/Medical Applications2010

    • Author(s)
      A.Okino, K.Shigeta, Y.Kaburaki, H.Miyahara
    • Organizer
      Pacifichem 2010
    • Place of Presentation
      ホノルル・コンベンションセンター
    • Year and Date
      2010-12-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] 単一細胞メタロミクス実現に向けた分析技術の開発2010

    • Author(s)
      K.Shigeta, Y.Kaburaki, H.Miyahara, A.Okino
    • Organizer
      プラズマ分光分析研究会第80回講演会
    • Place of Presentation
      名古屋大学野依記念会館
    • Year and Date
      2010-10-21
    • Related Report
      2010 Annual Research Report
  • [Presentation] Investigation of Excitation/Ionization Processes of High-Power Pulsed Microplasma for Aqueous Sample Analysis2010

    • Author(s)
      Y. Nagata, Y. Takahashi, Y. Negishi, K. Kodama, H. Miyahara, K. Kitagawa, A. Okino
    • Organizer
      The 37th annual Federation of the Analytical Chemistry and Spectroscopy Societies(FACSS)
    • Place of Presentation
      USA
    • Year and Date
      2010-10-19
    • Related Report
      2011 Final Research Report
  • [Presentation] Investigation of Excitation/Ionization Processes of High-Power Pulsed Microplasma for Aqueous Sample Analysis2010

    • Author(s)
      Y.Nagata, Y.Takahashi, Y.Negishi, K.Kodama, H.Miyahara, K.Kitagawa, A.Okino
    • Organizer
      The 37th annual Federation of the Analytical Chemistry and Spectroscopy Societies 207 p.53
    • Place of Presentation
      USA
    • Year and Date
      2010-10-19
    • Related Report
      2010 Self-evaluation Report
  • [Presentation] 超微少溶液試料導入マイクロプラズマ発光分析装置の開発2010

    • Author(s)
      根岸祐多,永田洋一,高橋勇一郎,重田香織,宮原秀一,沖野晃俊
    • Organizer
      日本分析化学会第59年会
    • Place of Presentation
      東北大学川内北キャンパス
    • Year and Date
      2010-09-15
    • Related Report
      2011 Final Research Report
  • [Presentation] 超微少溶液試料導入マイクロプラズマ発光分析装置の開発2010

    • Author(s)
      根岸祐多, 永田洋一, 高橋勇一郎, 重田香織, 宮原秀一, 沖野晃俊
    • Organizer
      日本分析化学会第59年会
    • Place of Presentation
      東北大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Simultaneous Determination of Multi-element in Yeast Cells by Droplet Direct Injection ICP-MS Systems2010

    • Author(s)
      K.Shigeta, T.Iwai, Y.Kaburaki, H.Miyahara, A.Okino
    • Organizer
      Symposium Massenspektrometrische Verfahren der Elementspurenanalye zusammen mit dem 22.ICP-MS Anwendertreffen
    • Place of Presentation
      Germany
    • Related Report
      2010 Self-evaluation Report
  • [Presentation] Direct Injection of Yeast Cells into ICP Using Droplet Direct Injection Nebulizer2010

    • Author(s)
      K.Shigeta, N.Nakashima, T.Iwai, H.Miyahara, A.Okino
    • Organizer
      2010 Winter Conference on Plasma Spectrochemistry TP11 p.117
    • Place of Presentation
      USA
    • Related Report
      2010 Self-evaluation Report
  • [Presentation] Development of High-sensitive GC Detector using Atmospheric Helium Plasma2010

    • Author(s)
      Y.Nagata, Y.Takahashi, H.Miyahara, A.Okino
    • Organizer
      2010 Winter Conference on Plasma Spectrochemistry WP16 p.177
    • Place of Presentation
      USA
    • Related Report
      2010 Self-evaluation Report
  • [Presentation] Introduction of Aqueous Samples to High Power Pulse Microplasma Source2009

    • Author(s)
      K.Shigeta, N.Nakashima, T.Iwai, H.Miyahara, A.Okino, et al.
    • Organizer
      日本分光学会 年次講演会
    • Place of Presentation
      東工大,大岡山
    • Year and Date
      2009-11-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] Development of Single Cell Analysis System using Atmospheric Thermal Plasma2009

    • Author(s)
      H.Miyahara, A.Okino, et al.
    • Organizer
      APFA2009/APPTC2009
    • Place of Presentation
      青森
    • Year and Date
      2009-10-16
    • Related Report
      2009 Annual Research Report
  • [Presentation] ドロプレット試料の高効率イオン化のためのプラズマ生成条件の最適化2009

    • Author(s)
      重田香織, 中島尚紀, 宮原秀一, 堀田栄喜, 沖野晃俊
    • Organizer
      日本分析化学会 第58年会
    • Place of Presentation
      北海道大学,札幌
    • Year and Date
      2009-09-26
    • Related Report
      2009 Annual Research Report
  • [Presentation] ドロプレット試料導入ICPにおける質量・発光同時分析2009

    • Author(s)
      中島尚紀, 重田香織, 宮原秀一, 堀田栄喜, 沖野晃俊
    • Organizer
      日本分析化学会 第58年会
    • Place of Presentation
      北海道大学,札幌
    • Year and Date
      2009-09-26
    • Related Report
      2009 Annual Research Report
  • [Presentation] 微少量試料元素分析用高出力パルスマイクロプラズマの時間・空間分解計測2009

    • Author(s)
      永田洋一, 宮原秀一, 堀田栄喜, 嶋田隆一, 北川邦行, 沖野晃俊, ほか
    • Organizer
      プラズマ分光分析研究会 筑波セミナー
    • Place of Presentation
      産総研,つくば市
    • Year and Date
      2009-07-16
    • Related Report
      2009 Annual Research Report
  • [Presentation] Ion/Atomic Emission Properties of High Power Helium Microplasma2008

    • Author(s)
      Y. Nagata, R. Sasaki, A. Okino, et al.
    • Organizer
      2008 Annual Mtg. of the Spectroscopical Society of Japan
    • Place of Presentation
      東北大学, 仙台
    • Year and Date
      2008-11-20
    • Related Report
      2008 Annual Research Report
  • [Presentation] Study of Excitation and Ionization Ability in High -Power Pulsed Microplasma Source2008

    • Author(s)
      Y. Nagata, H. Miyahara, A. Okino, et al.
    • Organizer
      2008 Third Asia-Pacific Winter Conf. on Plasma Spectrochemistry
    • Place of Presentation
      つくば国際会議場, つくば
    • Year and Date
      2008-11-19
    • Related Report
      2008 Annual Research Report
  • [Presentation] Introduction of Aqueous Samples to High Power Pulse Microplasma Source2008

    • Author(s)
      Y. Nagata, H. Miyahara, Okino, et al.
    • Organizer
      35th the Federation of Analytical Chemistry and Spectroscopy Societies
    • Place of Presentation
      Reno, NV, USA
    • Year and Date
      2008-09-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超高出力パルスマイクロプラズマ源におけるイオン化能力の制御2008

    • Author(s)
      永田洋一, 宮原秀一, 沖野晃俊, ほか
    • Organizer
      第57回分析化学会年会
    • Place of Presentation
      福岡大学, 福岡
    • Year and Date
      2008-09-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] Generation of Multi-gas Microplasma and Its Application for Elemental Analysis2008

    • Author(s)
      Y. Nagata, H. Miyahara, A. Okino, et al.
    • Organizer
      19th Europhysics Conf. on the Atomic and Molecular Physics of Ionized Gases
    • Place of Presentation
      Granada, Spain
    • Year and Date
      2008-07-16
    • Related Report
      2008 Annual Research Report
  • [Presentation] SPECTROSCOPICCHARACTERISTICS OF HIGH POWER PULSEOPERATED MULTI-GAS MICROPLASMA SOURECEFOR ELEMENTAL ANALYSIS2008

    • Author(s)
      H. Miyahara, Y. Nagata, R. Shimada, E. Hotta, A. Okino
    • Organizer
      35th IEEE International Conference on Plasma Science
    • Place of Presentation
      Karlsruhe, Germany
    • Year and Date
      2008-06-16
    • Related Report
      2011 Final Research Report
  • [Book] マイクロ・ナノプラズマ技術の開発と産業応用2012

    • Author(s)
      橘邦英,寺嶋和夫監修
    • Publisher
      シーエムシー出版
    • Related Report
      2011 Final Research Report
  • [Book] 大気圧プラズマの技術とプロセス開発2011

    • Author(s)
      沖野晃俊監修
    • Total Pages
      268
    • Publisher
      シーエムシー出版
    • Related Report
      2011 Final Research Report
  • [Book] 大気圧プラズマの技術とプロセス開発2011

    • Author(s)
      沖野晃俊(監修,著)
    • Total Pages
      268
    • Publisher
      (株)シーエムシー出版
    • Related Report
      2011 Annual Research Report
  • [Book] マイクロ・ナノプラズマ技術の開発と産業応用2011

    • Author(s)
      沖野晃俊(共著)
    • Total Pages
      329
    • Publisher
      (株)シーエムシー出版
    • Related Report
      2011 Annual Research Report
  • [Remarks] 「大気圧プラズマ装置温度を精密に制御医療利用に道」, Fuji Sankei Businessi2012. 2. 22 P. 11新聞報道

    • Related Report
      2011 Final Research Report
  • [Remarks] 「温度制御プラスマイナス1度℃内プラズマ装置氷点下でも使える」,日刊工業新聞2011. 11. 3 P. 13新聞報道

    • Related Report
      2011 Final Research Report
  • [Remarks] 国際水素・燃料電池展FC EXPO 2012(東京ビッグサイト)で特別講演講演と研究室ブース出展(2012. 2. 29-3. 2)その他の活動

    • Related Report
      2011 Final Research Report
  • [Remarks] 神戸大学医学部で生命医学イノベーション特論特別講義(2011. 9. 8)その他の活動

    • Related Report
      2011 Final Research Report
  • [Remarks] 日本化学会主催「化学だいすきクラブ.大学研究室への招待」を研究室で開催(2011. 8. 4)その他の活動

    • Related Report
      2011 Final Research Report
  • [Remarks] ホームページ

    • URL

      http://www.es.titech.ac.jp/okino/index.html

    • Related Report
      2010 Self-evaluation Report
  • [Remarks] 沖野研究室ホームページ

    • URL

      http://www.es.titech.ac.jp/okino/index.html

    • Related Report
      2009 Annual Research Report
  • [Remarks] 沖野研究室ホームページ

    • URL

      http://www.es.titech.ac.jp/okino/index.html

    • Related Report
      2008 Annual Research Report
  • [Patent(Industrial Property Rights)] 高周波・高速パルス用絶縁機構および絶縁装置ならびに電流導入端子2011

    • Inventor(s)
      沖野晃俊,宮原秀一
    • Industrial Property Rights Holder
      沖野晃俊,宮原秀一
    • Filing Date
      2011-06-02
    • Related Report
      2011 Final Research Report
  • [Patent(Industrial Property Rights)] プラズマを用いた検出方法および検出装置2011

    • Inventor(s)
      藤田修,浦行雄,野晃俊,宮原秀一,永田洋一,高橋勇一郎
    • Industrial Property Rights Holder
      藤田修,豊浦行雄,沖野晃俊,宮原秀一,永田洋一,高橋勇一郎
    • Industrial Property Number
      2011-001945
    • Filing Date
      2011-01-07
    • Related Report
      2011 Final Research Report
  • [Patent(Industrial Property Rights)] プラズマ温度制御装置及びプラズマ温度制御方法2010

    • Inventor(s)
      沖野晃俊,宮原秀一
    • Industrial Property Rights Holder
      沖野晃俊,宮原秀一
    • Acquisition Date
      2010-10-22
    • Related Report
      2011 Final Research Report
  • [Patent(Industrial Property Rights)] 液体導入プラズマシステム2010

    • Inventor(s)
      沖野晃俊,宮原秀一,大場吾郎
    • Industrial Property Rights Holder
      東京工業大学
    • Acquisition Date
      2010-08-06
    • Related Report
      2011 Final Research Report
  • [Patent(Industrial Property Rights)] 液体導入プラズマシステム2010

    • Inventor(s)
      沖野晃俊, 宮原秀一, 大場吾郎
    • Industrial Property Rights Holder
      東京工業大学
    • Acquisition Date
      2010-08-06
    • Related Report
      2010 Self-evaluation Report
  • [Patent(Industrial Property Rights)] プラズマ発生装置及びプラズマ生成方法2008

    • Inventor(s)
      沖野晃俊,宮原秀一,永田洋一
    • Industrial Property Rights Holder
      東京工業大学
    • Filing Date
      2008-05-27
    • Related Report
      2011 Final Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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