Low temperature fabrication of Si02/SiC structure by use of surface nanopores formed by nitric acid oxidation method
| Project/Area Number |
20246005
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied materials science/Crystal engineering
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| Research Institution | Osaka University |
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Principal Investigator |
KOBAYASHI Hikaru Osaka University, 産業科学研究所, 教授 (90195800)
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| Co-Investigator(Kenkyū-buntansha) |
MATSUMOTO Taketoshi 大阪大学, 産業科学研究所, 助教 (20390643)
YAMAGUCHI Shunro 大阪大学, 産業科学研究所, 助教 (40167698)
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| Project Period (FY) |
2008 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥50,050,000 (Direct Cost: ¥38,500,000、Indirect Cost: ¥11,550,000)
Fiscal Year 2010: ¥14,430,000 (Direct Cost: ¥11,100,000、Indirect Cost: ¥3,330,000)
Fiscal Year 2009: ¥17,810,000 (Direct Cost: ¥13,700,000、Indirect Cost: ¥4,110,000)
Fiscal Year 2008: ¥17,810,000 (Direct Cost: ¥13,700,000、Indirect Cost: ¥4,110,000)
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| Keywords | SiC / SiO2 / 低温酸化 / MOS / 硝酸酸化 / リーク電流 / 水素処理 / 界面準位 / MOS構造 / SiO_2 / 酸素原子 / 硝酸 / SiOC / 界面反応 / ナノ細孔 / 欠陥制御 / 界面制御 / 二酸化シリコン膜 / 電流-電圧特性 / 電気容量-電圧特性 / 電気特性 |
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| Research Abstract |
We have developed a method of low temperature formation by use of nitric acid oxidation method. 3C-SiC surfaces can be atomically flattened by hydrogen treatment at 400℃, and SiO_2/SiC structure with good electrical characteristics can be formed by two-step nitric acid oxidation method using 40 and 68wt% HNO_3 solutions below 120℃. The leakage current density flowing through SiO_2 is high with no hydrogen treatment, but it can be decreased by approximately six orders of magnitude using the hydrogen treatment. We have also fabricated SiO_2/4H-SiC structure by use of nitric acid vapor oxidation method at 600℃. The oxidation proceeds only from step edges, and the initial oxidation rate for C-face is 2.8 times higher than that for Si-face. For the Si-face, SiOC species is formed at the interface, while it is not present for the C-face.
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Report
(4 results)
Research Products
(52 results)
