Remote-plasma-enhance MOCVD growth of ZnO-based systems for high-performance nano-structrured optical devices
| Project/Area Number |
20310059
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Nanomaterials/Nanobioscience
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| Research Institution | Shizuoka University |
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Principal Investigator |
TEMMYO Jiro Shizuoka University, 電子工学研究所, 教授 (90334961)
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| Co-Investigator(Kenkyū-buntansha) |
NAKAMURA Atsushi 静岡大学, 電子工学研究所, 助教 (50402243)
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| Project Period (FY) |
2008 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥19,500,000 (Direct Cost: ¥15,000,000、Indirect Cost: ¥4,500,000)
Fiscal Year 2010: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2009: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2008: ¥12,220,000 (Direct Cost: ¥9,400,000、Indirect Cost: ¥2,820,000)
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| Keywords | ナノ構造形成 / 制御 / ZnO系混晶 / MOCVD成長 / 励起子 / ラジカル / ショットキーフォトダイオード / 酸化亜鉛系薄膜 / 有機金属気相堆積法 / 光デバイス / 量子効果 |
|---|
| Research Abstract |
We studied ZnO-based alloy system using remote-plasma-enhanced CVD method for low-power consumption green devices. Green electroluminescence (EL) emission was successfully demonstrated by current injection into ZnO-based light emitting diodes with multi-quantum well structures. Alcohol CVD grown graphene layers were achieved to shows a feasibility of transparent conductive film electrodes.
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Report
(4 results)
Research Products
(79 results)
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[Presentation]2009
Author(s)
山本兼司, 安達光彦, 俵毅彦, 後藤秀樹, 中村篤志, 天明二郎
Organizer
28^<th> Electronic Materials Symposium (EMS-28)
Place of Presentation
Laforet Biwako, I-7
Related Report
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