Fabrication and evaluation of 3 dimensional bio-nanotool byfocused-ion-beam

• Project/Area Number: 20310068
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Nanomaterials/Nanobioscience
• Research Institution: University of Hyogo
• Principal Investigator: MATSUI Shinji University of Hyogo, 高度産業科学技術研究所, 教授 (00312306)
• Co-Investigator(Kenkyū-buntansha): KANDA Kazuhiro 兵庫県立大学, 高度産業科学技術研究所, 教授 (20201452) ; HATTA Kohei 兵庫県立大学, 大学院・生命理学研究科, 教授 (40183909)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥17,420,000 (Direct Cost: ¥13,400,000、Indirect Cost: ¥4,020,000); Fiscal Year 2010: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000); Fiscal Year 2009: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000); Fiscal Year 2008: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
• Keywords: 集束イオンビーム / FIB / CVD / バイオツール / ダイヤモンドライクカーボン / 立体ナノ構造

Research Abstract

The bio-nano-tool was developed on a top of glass capillary by using focused-ion-beam -CVD (FIB-CVD) and the excellent performance was demonstrated in a bio-experiment.

Research Products

• [Journal Article] Nnoimprint rplication of nonplanar nanopstructure fabricated by focused-ion-beam chemical vapor deposition (2011)
  • Author(s): Y.Kang, S.Omoto, Y.Nakay, M.Okada, K.Kanda, Y.Haruyama, S.Matsui
  • Journal Title: J.Vac.Sci.Technol. Volume: B20
  • Peer Reviewed
• [Journal Article] Mrcahnical Characteristics of Nanospring fabricated by Focused-Ion-Beam Chemical Vapor deposition Using Ferrocene Source Gas (2010)
  • Author(s): Y. Nakai, Y. Kang, M. Okada, Y. haruyama, K. kanda, T. Ichihashi, S. Matsui
  • Journal Title: Jpn.J.Appl.Phys. Vol.49
  • Peer Reviewed
• [Journal Article] Room-Temperature Nanoimprinting Using Liquid-Phase Hydrogen Silsesquioxane (2010)
  • Author(s): Y. Kang, M. Okada, C. Minari. K. Kanda, Y. Haruyama, S. Matsui
  • Journal Title: Jpn.J.Appl.Phys. Vol.49
  • Peer Reviewed
• [Journal Article] Room-Temperature Nanoimprinting Using Liquid-Phase Hydrogen Silses quioxane (2010)
  • Author(s): Y.Kang, M.Okada, C.Minari.K.kanda, Y.Haruyama, S.Matsui.
  • Journal Title: Jpn.J.Appl.Phys. Volume: 49
  • Peer Reviewed
• [Journal Article] Education Position contral of Incorporated Gallium in Diamond-Like Carbon Deposition by Focused-Ion-Beam Chermical Vapor Deposition (2008)
  • Author(s): Y. Kometani, S. Ishihara, K. Kanda, Y. Haruyama, T. Kaito, S. Matsui
  • Journal Title: Jpn.J.Appl.Phys. Vol.47 Pages: 5032-5035
  • Peer Reviewed
• [Journal Article] Effects of Annealing on Material Characteristics of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemcal Vapor Depopsition (2008)
  • Author(s): K. Kand J. Igaku, A. saikubo, R. Kometani, T.Suzuki, K. Nishihara, H. Satoh, S. Matsui
  • Journal Title: Jpn.J.Appl.Phys. Vol.47 Pages: 7464-7466
  • Peer Reviewed
• [Journal Article] Eduction Position control of Incorporated Gallium in Diamond-Lile Carbon Deposited by Focused-Ion-Beam Chemical Vapor Deposition (2008)
  • Author(s): R. kometani, S. Ishihara, K. Kanda, Y. Haruyama, T. Kaito, S. Matsui
  • Journal Title: Jpn. J. Appl. Phys. 47 Pages: 5032-5035
  • Peer Reviewed
• [Journal Article] Effects of Annealing on Material Characteristics of Diamond- Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor deposition (2008)
  • Author(s): K. Kand, J. Igaki, A. Saikubo, R. Kometani, T. Suzuki, K. Niihara, H. Saitoh, S. Matsui
  • Journal Title: Jpn. J. Appl. Phys. 47 Pages: 7464-7466
  • NAID: 40016295000
  • Peer Reviewed
• [Journal Article] Nanoimprint aplication of nonplanar nanostructure fabricated by focused-ion-beam chemical vapor deposition
  • Author(s): Y. Kang, S. Omoto, Y. Nakai, M. Okada. K. Kanda, Y. Haruyama, S. Matsui
  • Journal Title: J.Vac.Sci.Technol. Vol.B20
  • Peer Reviewed
• [Presentation] FIB-CVDで成膜したFe-Ga含有DLC膜のアニールによるFeおよびGaの挙動観察 (2011)
  • Author(s): 中井康喜、姜有志、岡田真、神田一浩、春山雄一、市橋徹也、松井真二
  • Organizer: 第58回応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学
  • Year and Date: 2011-03-26
• [Presentation] Annealing effect of Fe-Ga doped DLC film formed by Focused-ion-beam chemical vapor deposition using ferrocene source gas (2010)
  • Author(s): Y.Nakai, Y. Kang, M.Okada, Y.Haruyama, K.Kanda, S.Matsui
  • Organizer: 23rd International Microprocesses and Nanotechnology Conference
  • Place of Presentation: リーガロイヤルホテル小倉
  • Year and Date: 2010-11-12
• [Presentation] FIB-CVD法で成膜されたFe0Ga含有薄膜のアニール効果 (2010)
  • Author(s): 中井康喜、姜有志、岡田真、神田一浩、春山雄一、松井真二
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学
  • Year and Date: 2010-09-14
• [Presentation] 集束イオンビーム励起化学気相成長法で作成した鉄含有ナノスプリングへのアニール効果 (2010)
  • Author(s): 中井康喜、姜有志、岡田真、神田一浩、春山雄一、市橋徹也、松井真二
  • Organizer: 第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学
  • Year and Date: 2010-03-19
• [Presentation] Mechanical Characteristics of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition Using Ferrocene Source Gas (2009)
  • Author(s): Y.Nakai, Y. Kang, M.Okada, Y.Haruyama, K.Kanda, S.Matsui
  • Organizer: 22^<nd> International Microprocesses and Nanotechnology Conference
  • Place of Presentation: シェラトン札幌
  • Year and Date: 2009-11-18
• [Presentation] Mechanical Characteristics of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition using Ferrocene Source Gas (2009)
  • Author(s): Y.Nakai, Y.Kang, M.Okada, Y.Haruyama, K.Kanda, S.Matsui
  • Organizer: The 22nd Internationl Microprocesses and Nanotechnology Conference 2009
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2009-11-18
• [Presentation] Structural Changes in the DLC Films Fabricated using Ga Focused Ion Beam Assisted Deposition by Heat Treatment (2009)
  • Author(s): K.Kanda, M.Okada, Y.Kang, M.Niibe, T.Suzuki S.Matsui
  • Organizer: The 22nd Internationl Microprocesses and Nanotechnology Conference 2009
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2009-11-18
• [Presentation] 集束イオンビーム励起化学気相成長法によるナノスプリングの作製と力学的特性評価 (2009)
  • Author(s): 中井康喜, 姜有志, 岡田真, 神田一浩, 春山雄一, 松井真二
  • Organizer: 応用物理学会学術講演会2009秋
  • Place of Presentation: 富山県富山市
  • Year and Date: 2009-09-10
• [Presentation] Ga FIB-CVD DLC膜からのアニールによるGaの脱離過程 (2009)
  • Author(s): 神田一浩, 岡田真, 姜有志, 新部正人, 鈴木常生, 松井真二
  • Organizer: 応用物理学会学術講演会2009秋
  • Place of Presentation: 富山県富山市
  • Year and Date: 2009-09-10
• [Presentation] FIB-CVD法で成膜したDLC薄膜に対するアニール効果 (2009)
  • Author(s): 神田一浩、岡田真、姜有志、松井真二
  • Organizer: 第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学
  • Year and Date: 2009-04-01
• [Presentation] FIB-CVD法で製膜したDLC薄膜に対するアニール効果 (2009)
  • Author(s): 神田一浩, 岡田真, 姜有志, 松井真二
  • Organizer: 第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学
  • Year and Date: 2009-04-01
• [Book] 細胞分離・操作技術の最前線(分担出版)第4章 集束イオンビームを用いたバイオナノツールの作製と応用 (2008)
  • Author(s): 松井真二、米谷玲皇
  • Publisher: シーエムシ出版
• [Book] ナノイメージング(分担執筆)、第4章 第3章 集束イオンビームCVDによる立体ナノ構造形成の動的観測 (2008)
  • Author(s): 松井真二、米谷玲皇
  • Publisher: (株)エヌ・テイ・エス
• [Book] 細胞分離・操作技術の最前線(分担執筆) 第4章 集束イオンビームを用いたバイオナノツールの作製と応用(31-41頁) (2008)
  • Author(s): 松井真二, 米谷玲皇
  • Total Pages: 11
  • Publisher: シーエムーシー出版
• [Book] ナノイメージング(分担執筆) 第4編第3章 集束イオンビームCVDによる立体ナノ構造形成の動的観察(341-348頁) (2008)
  • Author(s): 松井真二, 米谷玲皇
  • Total Pages: 8
  • Publisher: (株)エヌ. ティー. エス.
• [Remarks] ホームページ
  • URL: http://www.lasti.u-hyogo.ac.jp/nanostructure/index.html