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Development of Intelligent RF Induction Plasma Source

Research Project

Project/Area Number 20340160
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionKanazawa University

Principal Investigator

UESUGI Yoshihiko  金沢大学, 電子情報学系, 教授 (90213339)

Co-Investigator(Kenkyū-buntansha) TANAKA Yasunori  金沢大学, 電子情報学系, 教授 (90303263)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥19,500,000 (Direct Cost: ¥15,000,000、Indirect Cost: ¥4,500,000)
Fiscal Year 2010: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2009: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2008: ¥9,620,000 (Direct Cost: ¥7,400,000、Indirect Cost: ¥2,220,000)
Keywords高周波誘導プラズマ / 熱プラズマ / 帰還制御 / プラズマ-材料相互作用 / MOSFETインバータ / DSP帰還制御 / 任意波形変調プラズマ / PWM/PLL帰還制御インバータ / 表面改質 / 機能性ナノ粒子生成 / MOSFET-PWMインバータ / ナノ粒子生成 / プラズマ対向壁 / グラファイト損耗 / PWM / PLL帰還制御インバータ
Research Abstract

We have developed a temperature controlled RF induction plasma source using a digital signal processor for feedback control and real time calculation of plasma radiation temperature. Experiments on the plasma-wall interactions in plasma applications and fusion plasmas have been done using this newly developed RF induction plasma source.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (50 results)

All 2011 2010 2009 2008 Other

All Journal Article (25 results) (of which Peer Reviewed: 25 results) Presentation (23 results) Remarks (2 results)

  • [Journal Article] Influence of coilcurrent modulation on TiO2 nanoparticle synthesis using pulse-modulated induction thermal plasmas2011

    • Author(s)
      Y. Tanaka, H. Sakai, T. Tsuke, Y. Uesugi, Y. Sakai, K. Nakamura
    • Journal Title

      Thin Solid Films

      Volume: vol.519 Pages: 7100-7105

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Influence of coil current modulation on TiO2 nanoparticle synthesis using pulse-modulated induction thermal plasmas2011

    • Author(s)
      Y.Tanaka, H.Sakai, T.Tsuke, Y.Uesugi, Y.Sakai, K.Nakamura
    • Journal Title

      Thin Solid Films 2011

      Volume: (in press)

    • NAID

      120002754102

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Simulation of dynamics of carbon dust particles in JT-60U tokamak2011

    • Author(s)
      Y.Tanaka, R.D.Smirnov, AX.Pigarov, H.Takcnaga, NAsakura, Y.Ucsugi, N.Ohno
    • Journal Title

      J.Nuclenr Materials

      Volume: (in press)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Suppression of carbon agglomeration and volatile molecular formation in C-H-N reactive molecular system2011

    • Author(s)
      Y.Uesugi, M.Kyo, Y.Takeguchi, Y.Takai, Y.Tanaka, S.Masuzaki
    • Journal Title

      J.Nuclear Materials

      Volume: (in press)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanoparticle synthesis using high-powered pulse-modulated induction thermal plasma2010

    • Author(s)
      Y. Tanaka, T. Nagumo, H. Sakai, Y. Uesugi, Y. Sakai, K. Nakamura
    • Journal Title

      J. Phys. D : Appl. Phys.

      Volume: Vol.43 Pages: 265201-265201

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Suppression of Carbon Dust Formation by Nitrogen Injection into Hydrogen Plasmas in Detached Plasma Conditions2010

    • Author(s)
      M.Kyo, Y.Takeguchi, Y.Uesugi Y.Tanaka, et at.
    • Journal Title

      Plasma Fusion Res. 5

      Pages: 4-4

    • NAID

      130000264035

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Chemical Erosion of Diamond Coated Graphite under Low Energy Hydrogen Atom Irradiation2010

    • Author(s)
      Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et at.
    • Journal Title

      Plasma Fusion Res. 5

      Pages: 3-3

    • NAID

      130000264034

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study of Carbon Dust Formation and their Structure using Inductively Coupled Plasmas under High Atomic Hydrogen Irradiation2009

    • Author(s)
      Y. Takeguchi, M. Kyo, Y. Uesugi, Y. Tanaka, S. Masuzaki
    • Journal Title

      Journal of Nuclear Materials

      Volume: vol.390-391 Pages: 188-191

    • NAID

      120001295188

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Control of induction thermal plasmas by coil current modulation inarbitrary-waveform2009

    • Author(s)
      Y. Tsubokawa, Y. Tanaka, Y. Uesugi
    • Journal Title

      J. Plasma Fusion Res. SERIES

      Volume: vol.8 Pages: 1353-1357

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Study of Carbon Dust Formation and their Structure using Inductively Coupled Plasmas under High Atomic Hydrogen Irradiation2009

    • Author(s)
      Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et at.
    • Journal Title

      Journal of Nuclear Materials 390-39

      Pages: 188-191

    • NAID

      120001295188

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Carbon Erosion under Heavy Atomic Hydrogen Irradiation2009

    • Author(s)
      Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et at.
    • Journal Title

      J.Plasma Fusion Res.SERIES 8

      Pages: 366-370

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Erosion and Dust Formation of Graphite Materials under Low Energy and High Flux Atomic Hydrogen Irradiation2009

    • Author(s)
      Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et at.
    • Journal Title

      Physca Scripta T138

      Pages: 14056-14056

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Control of induction thermal plasmas by coil current modulation in arbitrary-waveform2009

    • Author(s)
      Y.Tsubokawa, Y.Tanaka, Y.Uesugi
    • Journal Title

      J.Plasma Fusion Res.SERIES 8

      Pages: 1353-1357

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Carbon Dust Formation under Heavy Atomic Hydrogen Irradiation2009

    • Author(s)
      M.Kyo, Y.Takeguchi, Y.Uesugi Y.Tanaka, et at.
    • Journal Title

      J.Plasma Fusion Res.SERIES 8

      Pages: 371-375

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Carbon erosion and dust for mationunder heavy atomic hydrogen irradiation2008

    • Author(s)
      Y. Takeguchi, M. Kyo, Y. Uesugi, Y. Tanaka
    • Journal Title

      Journal of Plasma Fusion Research

      Volume: vol.3

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Spatial distribution of C2 spectra from induction thermal plasmas with polymer powder injection2008

    • Author(s)
      Y. Tanaka, T. Sakuyama, Y. Takeuchi, Y. Uesugi
    • Journal Title

      IEEE Trans. Plasma Science

      Volume: vol.36 Pages: 1058-1059

    • NAID

      120001130496

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] CO2 and H2 gas mixture inclusion effect on shrinkage of Ar induction thermal plasmas2008

    • Author(s)
      S. A. Al-Mamun, Y. Tanaka, Y. Uesugi
    • Journal Title

      IEE of Japan

      Volume: vol.128 Pages: 476-485

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Numericaland experimental investigations onthermal interaction between thermalplasma and solid polymer powders using induction thermal plasma technique2008

    • Author(s)
      Y. Tanaka, Y. Takeuchi, T. Sakuyama, Y. Uesugi, S. Kaneko, S. Okabe
    • Journal Title

      J. Phys

      Volume: vol.41

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Influence of ontime onincreased number density of excitednitrogen atom in pulse modulated induction thermal plasmas2008

    • Author(s)
      Y. Tanaka, K. Hayashi, T. Nakamura, Y. Uesugi
    • Journal Title

      J. Phys

      Volume: vol.41

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Measurement of Plasma Properties of the Atmospheric Oxy-Combustion Flame by Using Double Probe Method2008

    • Author(s)
      Y. Osaka, K. Kobayasi, N. Ohno, Y. Tanaka, et al.
    • Journal Title

      Contrib., Plasma Physics 48

      Pages: 485-490

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Carbon erosion and dust formation under heavy atomic hydrogen irradiation2008

    • Author(s)
      Y. Takeguchi, M. Kyo, Y. Uesugi, Y. Tanaka
    • Journal Title

      Journal of Plasma Fusion Research (Rapid Communicat ions) 3

    • NAID

      130000263907

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spatial distribution of C2 spectra from induction thermal plasmas withpolymer powder injection2008

    • Author(s)
      Y. Tanaka, T. Sakuyama, Y. Takeuchi, Y. Uesugi
    • Journal Title

      IEEE Trans. Plasma Science 36

      Pages: 1058-1059

    • NAID

      120001130496

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] C02 and H2 gas mixture inclusion effect on shrinkage of Arinduction thermal plasmas2008

    • Author(s)
      S. A. Al-Mamun, Y. Tanaka, Y. Uesugi
    • Journal Title

      Trans. IEE of Japan 128-PE

      Pages: 476-485

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Numerical and experimental investigations on thermal interaction between thermal plasma and solid polymer powders using induction thermal plasma technique2008

    • Author(s)
      Y. Tanaka, Y. Takeuehi, T. Sakuyama, Y. Uesugi, S. Kaneko, S. Okabe
    • Journal Title

      J. Phys. D : Appl. Phys. 41

    • NAID

      120001134707

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Influence of ontime on increased number density of excited nitrogenatom in pulse modulated induction thermal plasmas2008

    • Author(s)
      Y. Tanaka, Y. Takeuchi, T. Sakuyama, Y. Uesugi, S. kaneko, S. okabe
    • Journal Title

      J. Phys. D : Appl. Phys. 41

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] Suppression of carbon agglomeration and volatile molecular formation in C-H-N reactive molecular system2010

    • Author(s)
      Y.Uesugi, M.Kyo, Y.Takeguchi, Y.Takai, Y.Tanaka, S.Masuaaki
    • Organizer
      Plasma Surface Interaction PSI-2010
    • Place of Presentation
      San Diego, USA
    • Year and Date
      2010-05-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] Erosion Properties of Polycrystalline Diamond Film under Low Energy and High Flux Atomic Hydrogen Irradiation2010

    • Author(s)
      Y. Takeguchi, M. Kyo, Y. Uesugi, Y. Tanaka, S. Masuzaki
    • Organizer
      Plasma Surface Interaction
    • Place of Presentation
      USA
    • Related Report
      2010 Final Research Report
  • [Presentation] Suppression of Carbon Agglomeration and Volatile Molecular Formation in C-H-N Reactive Molecular System2010

    • Author(s)
      Y. Uesugi, M. Kyo, Y. Takeguchi, Y. Tanaka, S. Masuzaki
    • Organizer
      Plasma Surface Interaction PSI-2010
    • Place of Presentation
      USA
    • Related Report
      2010 Final Research Report
  • [Presentation] New development of the feedback control type of modulated induction thermal plasma2010

    • Author(s)
      Y. Tanaka, Y. Tsubokawa, Y. Uesaka, Y. Uesugi
    • Organizer
      Asia Pacific Conf. Plasma Sci. Technol
    • Place of Presentation
      Korea
    • Related Report
      2010 Final Research Report
  • [Presentation] Frequency dependence for temperature modulation control of the feedback control type of modulated induction thermal plasma2010

    • Author(s)
      Y. Tanaka, Y. Tsubokawa, Y. Uesaka*, Y. Uesugi
    • Organizer
      Asia Pacific Conf. Plasma Sci
    • Place of Presentation
      Korea
    • Related Report
      2010 Final Research Report
  • [Presentation] Erosion Properties of Polycrystalline Diamond under Extremely High Flux Atomic Hydrogen Bombardment2009

    • Author(s)
      Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et al.
    • Organizer
      7^<th> General Scientific Assembly of the Asia Plasma and Fusion Association in 2009
    • Place of Presentation
      フェスティバルシティーアウガ(青森県)
    • Year and Date
      2009-10-27
    • Related Report
      2009 Annual Research Report
  • [Presentation] Suppression of carbon dust formation by nitrogen gas injection into argon/hydrogen plasmas2009

    • Author(s)
      M.Kyo, Y.Takeguchi, Y.Uesugi Y.Tanaka, et al.
    • Organizer
      70^<th> General Scientific Assembly of the Asia Plasma and Fusion Association in 2009
    • Place of Presentation
      フェスティバルシティーアウガ(青森県)
    • Year and Date
      2009-10-27
    • Related Report
      2009 Annual Research Report
  • [Presentation] Chemical Erosion of Carbon Material Irradiated with Low Energy Atomic Hydrogen Neutrals2009

    • Author(s)
      Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et al.
    • Organizer
      19th Int.Symp.on Plasma Chemistry
    • Place of Presentation
      ルール大学(ドイツ)
    • Year and Date
      2009-07-29
    • Related Report
      2009 Annual Research Report
  • [Presentation] Characterization of Carbon Dust Particles Formed under Low Energy and High Flux Atomic Hydroeen Irradiation2009

    • Author(s)
      M.Kyo, Y.Takeguchi, Y.Uesugi Y.Tanaka, et al.
    • Organizer
      19th Int.Symp.on Plasma Chemistry
    • Place of Presentation
      ルール大学(ドイツ)
    • Year and Date
      2009-07-27
    • Related Report
      2009 Annual Research Report
  • [Presentation] Erosion and Dust Formation of Graphite Materials under Low Energy and High Flux Atomic Hydrogen Irradiation2009

    • Author(s)
      Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et al.
    • Organizer
      12th International workshop on Plasma Facing Material Components PFMC-12
    • Place of Presentation
      ユーリッヒ研究所(ドイツ)
    • Year and Date
      2009-05-12
    • Related Report
      2009 Annual Research Report
  • [Presentation] Control of induction thermal plasmas by coil current modulation in arbitrary-waveform2008

    • Author(s)
      Y. Tsubokawa, Y. Tanaka Y. Uesugi
    • Organizer
      Int. Congress on Plasma Phys. ICPP2008, EAP-P3-158
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2008-09-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] Chemically non-equilibrium modelling of Ar inductively coupled thermal plasma with C-H-0 systems2008

    • Author(s)
      S. A. Al-Mamun, Y. Tanaka, Y. Uesugi
    • Organizer
      Int. Congress on Plasma Phys. ICPP2008, CFR-P3-140
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2008-09-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] Dynamic behavior of hydrogen and nitrogen radicals in pulse modulated induction thermal plasmas2008

    • Author(s)
      T. Ito, Y. Tanaka, K. Hayashi, Y. Uesugi
    • Organizer
      Int, Congress on Plasma Phys. ICPP2008, FI-P2-246
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2008-09-09
    • Related Report
      2008 Annual Research Report
  • [Presentation] Investigation on temperature decay of thermal plasma with ablation of polymer materials2008

    • Author(s)
      T. Sakuyama, Y. Tanaka, Y. Uesugi, S. Kaneko, S. Okabe
    • Organizer
      Int. Congress on Plasma Phys. ICPP2008, FI-P2-247
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2008-09-09
    • Related Report
      2008 Annual Research Report
  • [Presentation] Formation under Heavy Atomic Hydrogen Irradiation2008

    • Author(s)
      M. Kyo, Y. Takeguchi, Y. Uesugi, Y. Tanaka
    • Organizer
      Int. Congress on Plasma Phys. ICPP2008, FF-P2-061
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2008-09-09
    • Related Report
      2008 Annual Research Report
  • [Presentation] Effeet of polymer ablation on temperature decay of thermal plasmas using induction thermal Plasma Irradiation technique2008

    • Author(s)
      Y. Tanaka, T. Sakuyama, D. Yamada, Y. Uesugi, S. Kaneko, S. Okabe
    • Organizer
      XVIIth Int. Conf. Gas Discharges and their Applications GD2008
    • Place of Presentation
      Cardiff, UK
    • Year and Date
      2008-09-08
    • Related Report
      2008 Annual Research Report
  • [Presentation] Influence of polymer and metallic vapor on low voltage arc2008

    • Author(s)
      T. Onchi, M. Isozaki, S. Sugiyaraa, Y. Tanaka, Y. Uesugi
    • Organizer
      XVIIth Int. Conf. Gas Discharges and their Applications GD2008
    • Place of Presentation
      Cardiff, UK
    • Year and Date
      2008-09-08
    • Related Report
      2008 Annual Research Report
  • [Presentation] Behaviors of excited N, N2+and NH in modulated induction thermal plasmas2008

    • Author(s)
      Y. Tanaka, K. Hayashi, T. Ito, Y. Uesugi
    • Organizer
      35th IEEE Int. Conf. on Plasma Sci. ICOPS2008
    • Place of Presentation
      Karlsruhe, Germany
    • Year and Date
      2008-06-17
    • Related Report
      2008 Annual Research Report
  • [Presentation] Study of carbon dust formation and their structure using inductively coupled plasmas under heavy atomic hydrogen irradiation.2008

    • Author(s)
      Y. Takeguchi, M. Kyo, Y. Tanaka, Y. Uesugi
    • Organizer
      18th Int. Plasma Surface Interactions Conf. PSI-18, P3-10
    • Place of Presentation
      Toledo, Spain
    • Year and Date
      2008-05-29
    • Related Report
      2008 Annual Research Report
  • [Presentation] Control of induction thermal plasmas by coil current modulation in arbitrary-waveform2008

    • Author(s)
      Y. Tsubokawa, Y. Tanaka, Y. Uesugi
    • Organizer
      Int. Congress on Plasma Phys
    • Place of Presentation
      Japan
    • Related Report
      2010 Final Research Report
  • [Presentation] Dynamic behavior of hydrogen and nitrogen radicals in pulse modulated induction thermal plasmas2008

    • Author(s)
      T. Ito, Y. Tanaka, K. Hayashi, Y. Uesugi
    • Organizer
      Int. Congress on Plasma Phys
    • Place of Presentation
      Japan
    • Related Report
      2010 Final Research Report
  • [Presentation] Investigation on temperature decay of thermal plasma with ablation of polymer materials2008

    • Author(s)
      T. Sakuyama, Y. Tanaka, Y. Uesugi, S. Kaneko, S. Okabe
    • Organizer
      Int. Congress on Plasma Phys
    • Place of Presentation
      Japan
    • Related Report
      2010 Final Research Report
  • [Presentation] Behaviors of excited N, N2+and NH in modulated induction thermal plasmas2008

    • Author(s)
      Y. Tanaka, K. Hayashi, T. Ito, Y. Uesugi
    • Organizer
      35th IEEE Int. Conf. on Plasma Sci
    • Place of Presentation
      Germany
    • Related Report
      2010 Final Research Report
  • [Remarks]

    • URL

      http://www.ee.t.kanazawa-u.ac.jp/staffs/tanaka/

    • Related Report
      2010 Final Research Report
  • [Remarks]

    • URL

      http://www.ee.t.kanazawa-u.ac;jp/staffs/tanaka/

    • Related Report
      2010 Annual Research Report

URL: 

Published: 2008-04-01   Modified: 2016-04-21  

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