Development of Intelligent RF Induction Plasma Source
| Project/Area Number |
20340160
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Plasma science
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| Research Institution | Kanazawa University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
TANAKA Yasunori 金沢大学, 電子情報学系, 教授 (90303263)
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| Project Period (FY) |
2008 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥19,500,000 (Direct Cost: ¥15,000,000、Indirect Cost: ¥4,500,000)
Fiscal Year 2010: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2009: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2008: ¥9,620,000 (Direct Cost: ¥7,400,000、Indirect Cost: ¥2,220,000)
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| Keywords | 高周波誘導プラズマ / 熱プラズマ / 帰還制御 / プラズマ-材料相互作用 / MOSFETインバータ / DSP帰還制御 / 任意波形変調プラズマ / PWM/PLL帰還制御インバータ / 表面改質 / 機能性ナノ粒子生成 / MOSFET-PWMインバータ / ナノ粒子生成 / プラズマ対向壁 / グラファイト損耗 / PWM / PLL帰還制御インバータ |
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| Research Abstract |
We have developed a temperature controlled RF induction plasma source using a digital signal processor for feedback control and real time calculation of plasma radiation temperature. Experiments on the plasma-wall interactions in plasma applications and fusion plasmas have been done using this newly developed RF induction plasma source.
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Report
(4 results)
Research Products
(50 results)
