Development of Intelligent RF Induction Plasma Source

• Project/Area Number: 20340160
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Plasma science
• Research Institution: Kanazawa University
• Principal Investigator: UESUGI Yoshihiko 金沢大学, 電子情報学系, 教授 (90213339)
• Co-Investigator(Kenkyū-buntansha): TANAKA Yasunori 金沢大学, 電子情報学系, 教授 (90303263)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥19,500,000 (Direct Cost: ¥15,000,000、Indirect Cost: ¥4,500,000); Fiscal Year 2010: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000); Fiscal Year 2009: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000); Fiscal Year 2008: ¥9,620,000 (Direct Cost: ¥7,400,000、Indirect Cost: ¥2,220,000)
• Keywords: 高周波誘導プラズマ / 熱プラズマ / 帰還制御 / プラズマ-材料相互作用 / MOSFETインバータ / DSP帰還制御 / 任意波形変調プラズマ / PWM/PLL帰還制御インバータ / 表面改質 / 機能性ナノ粒子生成 / MOSFET-PWMインバータ / ナノ粒子生成 / プラズマ対向壁 / グラファイト損耗 / PWM / PLL帰還制御インバータ

Research Abstract

We have developed a temperature controlled RF induction plasma source using a digital signal processor for feedback control and real time calculation of plasma radiation temperature. Experiments on the plasma-wall interactions in plasma applications and fusion plasmas have been done using this newly developed RF induction plasma source.

Research Products

• [Journal Article] Influence of coilcurrent modulation on TiO2 nanoparticle synthesis using pulse-modulated induction thermal plasmas (2011)
  • Author(s): Y. Tanaka, H. Sakai, T. Tsuke, Y. Uesugi, Y. Sakai, K. Nakamura
  • Journal Title: Thin Solid Films Volume: vol.519 Pages: 7100-7105
  • Peer Reviewed
• [Journal Article] Influence of coil current modulation on TiO2 nanoparticle synthesis using pulse-modulated induction thermal plasmas (2011)
  • Author(s): Y.Tanaka, H.Sakai, T.Tsuke, Y.Uesugi, Y.Sakai, K.Nakamura
  • Journal Title: Thin Solid Films 2011 Volume: (in press)
  • NAID: 120002754102
  • Peer Reviewed
• [Journal Article] Simulation of dynamics of carbon dust particles in JT-60U tokamak (2011)
  • Author(s): Y.Tanaka, R.D.Smirnov, AX.Pigarov, H.Takcnaga, NAsakura, Y.Ucsugi, N.Ohno
  • Journal Title: J.Nuclenr Materials Volume: (in press)
  • Peer Reviewed
• [Journal Article] Suppression of carbon agglomeration and volatile molecular formation in C-H-N reactive molecular system (2011)
  • Author(s): Y.Uesugi, M.Kyo, Y.Takeguchi, Y.Takai, Y.Tanaka, S.Masuzaki
  • Journal Title: J.Nuclear Materials Volume: (in press)
  • Peer Reviewed
• [Journal Article] Nanoparticle synthesis using high-powered pulse-modulated induction thermal plasma (2010)
  • Author(s): Y. Tanaka, T. Nagumo, H. Sakai, Y. Uesugi, Y. Sakai, K. Nakamura
  • Journal Title: J. Phys. D : Appl. Phys. Volume: Vol.43 Pages: 265201-265201
  • Peer Reviewed
• [Journal Article] Suppression of Carbon Dust Formation by Nitrogen Injection into Hydrogen Plasmas in Detached Plasma Conditions (2010)
  • Author(s): M.Kyo, Y.Takeguchi, Y.Uesugi Y.Tanaka, et at.
  • Journal Title: Plasma Fusion Res. 5 Pages: 4-4
  • NAID: 130000264035
  • Peer Reviewed
• [Journal Article] Chemical Erosion of Diamond Coated Graphite under Low Energy Hydrogen Atom Irradiation (2010)
  • Author(s): Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et at.
  • Journal Title: Plasma Fusion Res. 5 Pages: 3-3
  • NAID: 130000264034
  • Peer Reviewed
• [Journal Article] Study of Carbon Dust Formation and their Structure using Inductively Coupled Plasmas under High Atomic Hydrogen Irradiation (2009)
  • Author(s): Y. Takeguchi, M. Kyo, Y. Uesugi, Y. Tanaka, S. Masuzaki
  • Journal Title: Journal of Nuclear Materials Volume: vol.390-391 Pages: 188-191
  • NAID: 120001295188
  • Peer Reviewed
• [Journal Article] Control of induction thermal plasmas by coil current modulation inarbitrary-waveform (2009)
  • Author(s): Y. Tsubokawa, Y. Tanaka, Y. Uesugi
  • Journal Title: J. Plasma Fusion Res. SERIES Volume: vol.8 Pages: 1353-1357
  • Peer Reviewed
• [Journal Article] Study of Carbon Dust Formation and their Structure using Inductively Coupled Plasmas under High Atomic Hydrogen Irradiation (2009)
  • Author(s): Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et at.
  • Journal Title: Journal of Nuclear Materials 390-39 Pages: 188-191
  • NAID: 120001295188
  • Peer Reviewed
• [Journal Article] Carbon Erosion under Heavy Atomic Hydrogen Irradiation (2009)
  • Author(s): Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et at.
  • Journal Title: J.Plasma Fusion Res.SERIES 8 Pages: 366-370
  • Peer Reviewed
• [Journal Article] Erosion and Dust Formation of Graphite Materials under Low Energy and High Flux Atomic Hydrogen Irradiation (2009)
  • Author(s): Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et at.
  • Journal Title: Physca Scripta T138 Pages: 14056-14056
  • Peer Reviewed
• [Journal Article] Control of induction thermal plasmas by coil current modulation in arbitrary-waveform (2009)
  • Author(s): Y.Tsubokawa, Y.Tanaka, Y.Uesugi
  • Journal Title: J.Plasma Fusion Res.SERIES 8 Pages: 1353-1357
  • Peer Reviewed
• [Journal Article] Carbon Dust Formation under Heavy Atomic Hydrogen Irradiation (2009)
  • Author(s): M.Kyo, Y.Takeguchi, Y.Uesugi Y.Tanaka, et at.
  • Journal Title: J.Plasma Fusion Res.SERIES 8 Pages: 371-375
  • Peer Reviewed
• [Journal Article] Carbon erosion and dust for mationunder heavy atomic hydrogen irradiation (2008)
  • Author(s): Y. Takeguchi, M. Kyo, Y. Uesugi, Y. Tanaka
  • Journal Title: Journal of Plasma Fusion Research Volume: vol.3
  • Peer Reviewed
• [Journal Article] Spatial distribution of C2 spectra from induction thermal plasmas with polymer powder injection (2008)
  • Author(s): Y. Tanaka, T. Sakuyama, Y. Takeuchi, Y. Uesugi
  • Journal Title: IEEE Trans. Plasma Science Volume: vol.36 Pages: 1058-1059
  • NAID: 120001130496
  • Peer Reviewed
• [Journal Article] CO2 and H2 gas mixture inclusion effect on shrinkage of Ar induction thermal plasmas (2008)
  • Author(s): S. A. Al-Mamun, Y. Tanaka, Y. Uesugi
  • Journal Title: IEE of Japan Volume: vol.128 Pages: 476-485
  • Peer Reviewed
• [Journal Article] Numericaland experimental investigations onthermal interaction between thermalplasma and solid polymer powders using induction thermal plasma technique (2008)
  • Author(s): Y. Tanaka, Y. Takeuchi, T. Sakuyama, Y. Uesugi, S. Kaneko, S. Okabe
  • Journal Title: J. Phys Volume: vol.41
  • Peer Reviewed
• [Journal Article] Influence of ontime onincreased number density of excitednitrogen atom in pulse modulated induction thermal plasmas (2008)
  • Author(s): Y. Tanaka, K. Hayashi, T. Nakamura, Y. Uesugi
  • Journal Title: J. Phys Volume: vol.41
  • Peer Reviewed
• [Journal Article] Measurement of Plasma Properties of the Atmospheric Oxy-Combustion Flame by Using Double Probe Method (2008)
  • Author(s): Y. Osaka, K. Kobayasi, N. Ohno, Y. Tanaka, et al.
  • Journal Title: Contrib., Plasma Physics 48 Pages: 485-490
  • Peer Reviewed
• [Journal Article] Carbon erosion and dust formation under heavy atomic hydrogen irradiation (2008)
  • Author(s): Y. Takeguchi, M. Kyo, Y. Uesugi, Y. Tanaka
  • Journal Title: Journal of Plasma Fusion Research (Rapid Communicat ions) 3
  • NAID: 130000263907
  • Peer Reviewed
• [Journal Article] Spatial distribution of C2 spectra from induction thermal plasmas withpolymer powder injection (2008)
  • Author(s): Y. Tanaka, T. Sakuyama, Y. Takeuchi, Y. Uesugi
  • Journal Title: IEEE Trans. Plasma Science 36 Pages: 1058-1059
  • NAID: 120001130496
  • Peer Reviewed
• [Journal Article] C02 and H2 gas mixture inclusion effect on shrinkage of Arinduction thermal plasmas (2008)
  • Author(s): S. A. Al-Mamun, Y. Tanaka, Y. Uesugi
  • Journal Title: Trans. IEE of Japan 128-PE Pages: 476-485
  • Peer Reviewed
• [Journal Article] Numerical and experimental investigations on thermal interaction between thermal plasma and solid polymer powders using induction thermal plasma technique (2008)
  • Author(s): Y. Tanaka, Y. Takeuehi, T. Sakuyama, Y. Uesugi, S. Kaneko, S. Okabe
  • Journal Title: J. Phys. D : Appl. Phys. 41
  • NAID: 120001134707
  • Peer Reviewed
• [Journal Article] Influence of ontime on increased number density of excited nitrogenatom in pulse modulated induction thermal plasmas (2008)
  • Author(s): Y. Tanaka, Y. Takeuchi, T. Sakuyama, Y. Uesugi, S. kaneko, S. okabe
  • Journal Title: J. Phys. D : Appl. Phys. 41
  • Peer Reviewed
• [Presentation] Suppression of carbon agglomeration and volatile molecular formation in C-H-N reactive molecular system (2010)
  • Author(s): Y.Uesugi, M.Kyo, Y.Takeguchi, Y.Takai, Y.Tanaka, S.Masuaaki
  • Organizer: Plasma Surface Interaction PSI-2010
  • Place of Presentation: San Diego, USA
  • Year and Date: 2010-05-25
• [Presentation] Erosion Properties of Polycrystalline Diamond Film under Low Energy and High Flux Atomic Hydrogen Irradiation (2010)
  • Author(s): Y. Takeguchi, M. Kyo, Y. Uesugi, Y. Tanaka, S. Masuzaki
  • Organizer: Plasma Surface Interaction
  • Place of Presentation: USA
• [Presentation] Suppression of Carbon Agglomeration and Volatile Molecular Formation in C-H-N Reactive Molecular System (2010)
  • Author(s): Y. Uesugi, M. Kyo, Y. Takeguchi, Y. Tanaka, S. Masuzaki
  • Organizer: Plasma Surface Interaction PSI-2010
  • Place of Presentation: USA
• [Presentation] New development of the feedback control type of modulated induction thermal plasma (2010)
  • Author(s): Y. Tanaka, Y. Tsubokawa, Y. Uesaka, Y. Uesugi
  • Organizer: Asia Pacific Conf. Plasma Sci. Technol
  • Place of Presentation: Korea
• [Presentation] Frequency dependence for temperature modulation control of the feedback control type of modulated induction thermal plasma (2010)
  • Author(s): Y. Tanaka, Y. Tsubokawa, Y. Uesaka*, Y. Uesugi
  • Organizer: Asia Pacific Conf. Plasma Sci
  • Place of Presentation: Korea
• [Presentation] Erosion Properties of Polycrystalline Diamond under Extremely High Flux Atomic Hydrogen Bombardment (2009)
  • Author(s): Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et al.
  • Organizer: 7^<th> General Scientific Assembly of the Asia Plasma and Fusion Association in 2009
  • Place of Presentation: フェスティバルシティーアウガ(青森県)
  • Year and Date: 2009-10-27
• [Presentation] Suppression of carbon dust formation by nitrogen gas injection into argon/hydrogen plasmas (2009)
  • Author(s): M.Kyo, Y.Takeguchi, Y.Uesugi Y.Tanaka, et al.
  • Organizer: 70^<th> General Scientific Assembly of the Asia Plasma and Fusion Association in 2009
  • Place of Presentation: フェスティバルシティーアウガ(青森県)
  • Year and Date: 2009-10-27
• [Presentation] Chemical Erosion of Carbon Material Irradiated with Low Energy Atomic Hydrogen Neutrals (2009)
  • Author(s): Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et al.
  • Organizer: 19th Int.Symp.on Plasma Chemistry
  • Place of Presentation: ルール大学(ドイツ)
  • Year and Date: 2009-07-29
• [Presentation] Characterization of Carbon Dust Particles Formed under Low Energy and High Flux Atomic Hydroeen Irradiation (2009)
  • Author(s): M.Kyo, Y.Takeguchi, Y.Uesugi Y.Tanaka, et al.
  • Organizer: 19th Int.Symp.on Plasma Chemistry
  • Place of Presentation: ルール大学(ドイツ)
  • Year and Date: 2009-07-27
• [Presentation] Erosion and Dust Formation of Graphite Materials under Low Energy and High Flux Atomic Hydrogen Irradiation (2009)
  • Author(s): Y.Takeguchi, M.Kyo, Y.Uesugi Y.Tanaka, et al.
  • Organizer: 12th International workshop on Plasma Facing Material Components PFMC-12
  • Place of Presentation: ユーリッヒ研究所(ドイツ)
  • Year and Date: 2009-05-12
• [Presentation] Control of induction thermal plasmas by coil current modulation in arbitrary-waveform (2008)
  • Author(s): Y. Tsubokawa, Y. Tanaka Y. Uesugi
  • Organizer: Int. Congress on Plasma Phys. ICPP2008, EAP-P3-158
  • Place of Presentation: Fukuoka, Japan
  • Year and Date: 2008-09-11
• [Presentation] Chemically non-equilibrium modelling of Ar inductively coupled thermal plasma with C-H-0 systems (2008)
  • Author(s): S. A. Al-Mamun, Y. Tanaka, Y. Uesugi
  • Organizer: Int. Congress on Plasma Phys. ICPP2008, CFR-P3-140
  • Place of Presentation: Fukuoka, Japan
  • Year and Date: 2008-09-11
• [Presentation] Dynamic behavior of hydrogen and nitrogen radicals in pulse modulated induction thermal plasmas (2008)
  • Author(s): T. Ito, Y. Tanaka, K. Hayashi, Y. Uesugi
  • Organizer: Int, Congress on Plasma Phys. ICPP2008, FI-P2-246
  • Place of Presentation: Fukuoka, Japan
  • Year and Date: 2008-09-09
• [Presentation] Investigation on temperature decay of thermal plasma with ablation of polymer materials (2008)
  • Author(s): T. Sakuyama, Y. Tanaka, Y. Uesugi, S. Kaneko, S. Okabe
  • Organizer: Int. Congress on Plasma Phys. ICPP2008, FI-P2-247
  • Place of Presentation: Fukuoka, Japan
  • Year and Date: 2008-09-09
• [Presentation] Formation under Heavy Atomic Hydrogen Irradiation (2008)
  • Author(s): M. Kyo, Y. Takeguchi, Y. Uesugi, Y. Tanaka
  • Organizer: Int. Congress on Plasma Phys. ICPP2008, FF-P2-061
  • Place of Presentation: Fukuoka, Japan
  • Year and Date: 2008-09-09
• [Presentation] Effeet of polymer ablation on temperature decay of thermal plasmas using induction thermal Plasma Irradiation technique (2008)
  • Author(s): Y. Tanaka, T. Sakuyama, D. Yamada, Y. Uesugi, S. Kaneko, S. Okabe
  • Organizer: XVIIth Int. Conf. Gas Discharges and their Applications GD2008
  • Place of Presentation: Cardiff, UK
  • Year and Date: 2008-09-08
• [Presentation] Influence of polymer and metallic vapor on low voltage arc (2008)
  • Author(s): T. Onchi, M. Isozaki, S. Sugiyaraa, Y. Tanaka, Y. Uesugi
  • Organizer: XVIIth Int. Conf. Gas Discharges and their Applications GD2008
  • Place of Presentation: Cardiff, UK
  • Year and Date: 2008-09-08
• [Presentation] Behaviors of excited N, N2+and NH in modulated induction thermal plasmas (2008)
  • Author(s): Y. Tanaka, K. Hayashi, T. Ito, Y. Uesugi
  • Organizer: 35th IEEE Int. Conf. on Plasma Sci. ICOPS2008
  • Place of Presentation: Karlsruhe, Germany
  • Year and Date: 2008-06-17
• [Presentation] Study of carbon dust formation and their structure using inductively coupled plasmas under heavy atomic hydrogen irradiation. (2008)
  • Author(s): Y. Takeguchi, M. Kyo, Y. Tanaka, Y. Uesugi
  • Organizer: 18th Int. Plasma Surface Interactions Conf. PSI-18, P3-10
  • Place of Presentation: Toledo, Spain
  • Year and Date: 2008-05-29
• [Presentation] Control of induction thermal plasmas by coil current modulation in arbitrary-waveform (2008)
  • Author(s): Y. Tsubokawa, Y. Tanaka, Y. Uesugi
  • Organizer: Int. Congress on Plasma Phys
  • Place of Presentation: Japan
• [Presentation] Dynamic behavior of hydrogen and nitrogen radicals in pulse modulated induction thermal plasmas (2008)
  • Author(s): T. Ito, Y. Tanaka, K. Hayashi, Y. Uesugi
  • Organizer: Int. Congress on Plasma Phys
  • Place of Presentation: Japan
• [Presentation] Investigation on temperature decay of thermal plasma with ablation of polymer materials (2008)
  • Author(s): T. Sakuyama, Y. Tanaka, Y. Uesugi, S. Kaneko, S. Okabe
  • Organizer: Int. Congress on Plasma Phys
  • Place of Presentation: Japan
• [Presentation] Behaviors of excited N, N2+and NH in modulated induction thermal plasmas (2008)
  • Author(s): Y. Tanaka, K. Hayashi, T. Ito, Y. Uesugi
  • Organizer: 35th IEEE Int. Conf. on Plasma Sci
  • Place of Presentation: Germany
• [Remarks]
  • URL: http://www.ee.t.kanazawa-u.ac.jp/staffs/tanaka/
• [Remarks]
  • URL: http://www.ee.t.kanazawa-u.ac;jp/staffs/tanaka/