| Project/Area Number |
20340164
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Plasma science
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| Research Institution | Sasebo National College of Technology |
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Principal Investigator |
KAWASAKI Hiroharu Sasebo National College of Technology, 電気電子工学科, 教授 (10253494)
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| Co-Investigator(Renkei-kenkyūsha) |
OHSHIMA Tamiko 佐世保工業高等専門学校, 電気電子工学科, 准教授 (00370049)
YAGYU Yoshihito 佐世保工業高等専門学校, 電気電子工学科, 准教授 (40435483)
SUDA Yoshiaki 佐世保工業高等専門学校, 電気電子工学科, 教授 (20124141)
JOHNO Yuuki 佐世保工業高等専門学校, 物質工学科, 准教授 (80353233)
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| Project Period (FY) |
2008 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2009: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2008: ¥8,320,000 (Direct Cost: ¥6,400,000、Indirect Cost: ¥1,920,000)
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| Keywords | マグネトロンスパッタリング / ハードコーティング / 変調磁界 / 3相交流磁界 / スパッタリング / プラズマプロセス / 摩擦係数 / 耐摩耗 |
|---|
| Research Abstract |
Tungsten, carbon and titanium thin films were prepared on the carbide steel cylinder rod using new magnetron sputtering deposition method to prevent their corrosion and/or increasing friction resistance. In the deposition, plasmas were generated between cylinder rod anode substrate and cylinder pipe targets. Experimental results suggest that plasma density distribution move to the axial direction using modulated magnetic field generated by low frequency alternating coil current. Deposition rate and film uniformity increased using modulated magnetic field, and corrosion resistance and friction resistance were increased by this hard coating.
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