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Development of an integrated model of the hybrid pumping plasma light source based on laser assisted discharge

Research Project

Project/Area Number 20340166
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionJapan Atomic Energy Agency

Principal Investigator

SASAKI Akira  独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究副主幹 (10215709)

Co-Investigator(Kenkyū-buntansha) NISHIHARA Katsunobu  大阪大学, レーザーエネルギー学研究センター, 特任研究員 (40107131)
SUNAHARA Atsushi  (財)レーザー技術総合研究所, 研究員 (00370213)
FURUKAWA Hiroyuki  (財)レーザー技術総合研究所, 副主任研究員 (70222271)
KOIKE Fumihiro  北里大学, 医学部, 准教授 (90095505)
NISHIKAWA Takeshi  岡山大学, 自然科学研究科, 助教 (80243492)
Co-Investigator(Renkei-kenkyūsha) KAI Takeshi  大阪大学, レーザーエネルギー学研究センター, 特任研究員 (70403037)
NUNAMI Masanori  自然科学研究機構, 核融合科学研究所, 助教 (40397203)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥17,030,000 (Direct Cost: ¥13,100,000、Indirect Cost: ¥3,930,000)
Fiscal Year 2010: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2009: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2008: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Keywordsプラズマ制御・レーザー / プラズマ光源 / シミュレーション / EUV光源 / 原子過程 / 放電 / レーザープラズマ / パーコレーション
Research Abstract

Modeling methods of laser-plasma hybrid pumping plasma light sources are investigated. On the modeling of plasma atomic processes, a model, which calculates level population, emissivity and opacity of the plasma with a reasonable accuracy and is capable of reproducing emission spectrum, is developed. Calculated dependence of the plasma radiation pressure, which shows non-monotonic behavior with respect to density, suggests instability of the plasmas. The model is also applied to evaluate the emission characteristics of Tb plasma for future EUV applications. On the modeling of plasma radiation hydrodynamics, importance of modeling methods, which can calculate the temporal and spatial structure formation, is discussed. Instead of existing MHD and other fluid and particle approach, it is found that using the percolation model, the initial structure of the discharge can be reproduced.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (35 results)

All 2011 2010 2009 2008 Other

All Journal Article (19 results) (of which Peer Reviewed: 17 results) Presentation (13 results) Book (2 results) Remarks (1 results)

  • [Journal Article] レーザー生成XUV光源の放射物理と将来の短波長化への展望2010

    • Author(s)
      佐々木明、西原功修
    • Journal Title

      レーザー研究

      Volume: vol.38 Pages: 969-957

    • NAID

      10027617850

    • Related Report
      2010 Annual Research Report 2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Theoretical investigation of the spectrum and conversion efficiency of short wavelength extreme-ultra-violet light sources based on terbium plasmas2010

    • Author(s)
      A. Sasaki, K. Nishihara, A. Sunahara, H. Furukawa, T. Nishikawa, and F. Koike
    • Journal Title

      Appl. Phys. Lett

      Volume: 97 Issue: 23 Pages: 231501-231501

    • DOI

      10.1063/1.3524494

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Percolation simulation of laser guided electrical discharge2010

    • Author(s)
      A. Sasaki, Y. Kishimoto, E. Takahashi, S. Kato, T. Fujii, and S. Kanazawa
    • Journal Title

      Phys. Rev. Lett

      Volume: 105 Issue: 7 Pages: 75004-75004

    • DOI

      10.1103/physrevlett.105.075004

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Modeling of radiative properties of Sn plasmas for EUV source2010

    • Author(s)
      A. Sasaki, A. Sunahara, H. Furukawa, K. Nishihara, S. Fujioka, T. Nishikawa, F. Koike
    • Journal Title

      J. Appl. Phys

      Volume: 107 Issue: 11 Pages: 113303-113303

    • DOI

      10.1063/1.3373427

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] EUV emission spectra in collisions of multiply charged Sn ions with He and Xe2010

    • Author(s)
      H. Ohashi, S. Suda, H. Tanuma, S. Fujioka, H. Nishimura, A. Sasaki, and K. Nishihara
    • Journal Title

      J. Phys

      Volume: B43 Issue: 6 Pages: 65204-65204

    • DOI

      10.1088/0953-4075/43/6/065204

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Modeling of radiative properties of Sn plasmas for extreme-ultraviolet source2010

    • Author(s)
      A.Sasaki, A.Sunahara, H.Furukawa, K.Nishihara, T.Nishikawa, F.Koike, H.Ohashi, H.Tanuma
    • Journal Title

      J.Appl.Phys.

      Volume: 9 Pages: 113303-113303

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Percolation simulation of laser-guided electrical discharges2010

    • Author(s)
      A.Sasaki, Y.Kishimoto, E.Takahashi, S.Kato, T.Fujii, S.Kanazawa
    • Journal Title

      Phys.Rev.Lett.

      Volume: 105 Pages: 75004-75004

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Theoretical investigation of the spectrum and conversion efficiency of short wavelength extreme-ultraviolet light sources based on terbium plasmas2010

    • Author(s)
      A.Sasaki, A.Sunahara, H.Furukawa, K.Nishihara, T.Nishikawa, F.Koike
    • Journal Title

      Appl.Phys.Lett.

      Volume: 97 Pages: 231501-231501

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Atomic modeling of the plasma EUV sources, II2009

    • Author(s)
      A.Sasaki, A.Sunahara, H.Furukawa, K.Nishihara, T.Nishikawa, F.Koike, H.Tanuma
    • Journal Title

      HEDP 5

      Pages: 147-151

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] The atomic model of the Sn plasmas for the EUV source2009

    • Author(s)
      A.Sasaki, A.Sunahara, K.Nishihara, T.Nishikawa, F.Koike, H.Tanum
    • Journal Title

      J.Phys.Conf.Ser 163

      Pages: 0120621-4

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Atomic processes in the LPP and LA-DPP EUV sources2009

    • Author(s)
      A.Sasaki, K.Nishihara, A.Sunahara, H.Furukawa, T.Nishikawa, F.Koike
    • Journal Title

      Procedings. SPIE, Alternative Lithographic Technologies 7271

      Pages: 301-8

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Optimization of extreme ultraviolet emission from laser-produced tin plasmas based on radiation hydrodynamics simulations2008

    • Author(s)
      A. Sunahara, K. Nishihara, A. Sasaki
    • Journal Title

      Plasma Fusion Res

      Volume: 3 Pages: 43-43

    • NAID

      130000263925

    • URL

      http://www.jspf.or.jp/PFR/PFR_articles/pfr2008/pfr2008_03-043.html

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] 極端紫外光源の原子モデルと最適設計2008

    • Author(s)
      西原功修、砂原淳、佐々木明、田沼肇、小池文博、藤岡慎介、西村博明、島田義則
    • Journal Title

      レーザー研究

      Volume: vol.36 Pages: 690-699

    • NAID

      10024447909

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] 多価イオンの衝突輻射モデルの構築の自動化支援2008

    • Author(s)
      佐々木明, 西原功修, 村田真樹
    • Journal Title

      プラズマ・核融合学会誌 84

      Pages: 546-554

    • NAID

      110006881141

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 極端紫外光源の原子モデルと最適設計2008

    • Author(s)
      西原功修, 砂原淳, 佐々木明, 田沼肇, 小池文博, 藤岡慎介, 西村博明, 島田義則
    • Journal Title

      レーザー研究 36

      Pages: 690-699

    • NAID

      10024447909

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Plasma physics and radiation hydrodynamics in development of EUV light source for lithography2008

    • Author(s)
      K. Nishihara, A. Sunahara, A. Sasaki, F. Koike, T. Nishikawa, H. Furukawa, 他16名
    • Journal Title

      Phys. Plasmas 15

      Pages: 56708-56708

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Detailed atomic modeling of Sn plasmas for the EUV source2008

    • Author(s)
      A Sasaki, A Sunahara, K Nishihawra, T Nishikawa, F Koike, H Tanuma
    • Journal Title

      J. Phys. Conf. Ser. 112

      Pages: 42062-42062

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Two dimensional radiation hydrodynamic simulation for extreme ultra-violet emission from laser-produced tin plasmas2008

    • Author(s)
      A. Sunahara, A. Sasaki, K. Nishihara
    • Journal Title

      J. Phys. Conf. Ser. 112

      Pages: 42048-42048

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] UV source design flexibility for lithography2008

    • Author(s)
      T. Nishikawa, A. Sunahara, A. Sasaki, K. Nishihara
    • Journal Title

      J. Phys. Conf. Ser. 112

      Pages: 42065-42065

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] Formation mechanism of non-uniform structure in the gain distribution and its effect to the plasma x-ray lasers2011

    • Author(s)
      A. Sasaki
    • Organizer
      Proceedings SPIE, X-ray lasers and coherent x-ray sources
    • Related Report
      2010 Final Research Report
  • [Presentation] Atomic processes in plasma EUV sources at λ=6.5nm2010

    • Author(s)
      A.Sasaki
    • Organizer
      2010 International symposium on extreme ultraviolet lithography
    • Place of Presentation
      神戸
    • Year and Date
      2010-10-18
    • Related Report
      2010 Annual Research Report
  • [Presentation] パーコレーションモデルによる放電の確率と構造形成のシミュレーション2010

    • Author(s)
      佐々木明、高橋栄一、加藤進、岸本泰明、金澤誠司、藤井隆
    • Organizer
      平成22年 電気学会全国大会
    • Place of Presentation
      東京
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] Atomic processes in the LPP and LA-DPP EUV sources2010

    • Author(s)
      A.Sasaki, K.Nishihara, A.Sunahara, H.Furukawa, T.Nishikawa, F.Koike
    • Organizer
      SPIE Advanced Lithography 2010
    • Place of Presentation
      サンノゼ(米国)
    • Year and Date
      2010-02-24
    • Related Report
      2009 Annual Research Report
  • [Presentation] Modeling of atomic and plasma processes in the LPP and LA-DPP EUV sources2010

    • Author(s)
      A. Sasaki, K. Nishihara, A. Sunahara, H. Fujrukawa, T. Nishikawa, F. Koike
    • Organizer
      Proceedings SPIE, Extreme Ultraviolet(EUV) Lithography
    • Related Report
      2010 Final Research Report
  • [Presentation] 放電励起EUV光源等におけるプラズマ生成の相転移過程に着目した考察2009

    • Author(s)
      佐々木明、高橋栄一、加藤進、岸本泰明
    • Organizer
      日本物理学会2009年秋季大会(物性)
    • Place of Presentation
      熊本
    • Year and Date
      2009-09-26
    • Related Report
      2009 Annual Research Report
  • [Presentation] レーザー、放電励起EUV光源における原子過程および放電初期過程の考察2009

    • Author(s)
      佐々木明、西原功修、砂原淳、西川亘、小池文博、古河裕之
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山
    • Year and Date
      2009-09-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Atomic processes in the LPP and LA-DPP EUV sources2009

    • Author(s)
      A. Sasaki, K. Nishihara, A. Sunahara, H. Furukawa, K. Nishikawa, F. Koike
    • Organizer
      SPIE Advanced Lithography 2009
    • Place of Presentation
      サンノゼ (米国)
    • Year and Date
      2009-02-26
    • Related Report
      2008 Annual Research Report
  • [Presentation] Atomic modeling of the plasma EUV sources, II2009

    • Author(s)
      A. Sasaki, A. Sunahara, H. Furukawa, K. Nishihara, T. Nishikawa, F. Koike and H. Tanuma
    • Organizer
      14^<th> international workshop on radiative properties of hot dense matter
    • Related Report
      2010 Final Research Report
  • [Presentation] Proceedings"Atomic processes in the LPP and LA-DPP EUV sources"2009

    • Author(s)
      A. Sasaki, K. Nishihara, A. Sunahara, H. Furukawa, T. Nishikawa, F. Koike
    • Organizer
      SPIE, Alternative Lithographic Technologies
    • Related Report
      2010 Final Research Report
  • [Presentation] Development of the theoretical model of the plasma EUV source2008

    • Author(s)
      A. Sasaki, K. Nishihara, A. Sunahara, H. Furukawa, K. Nishikawa, F. Koike
    • Organizer
      The 13^<th> International Workshop on Radiative Properties of Hot Dense Matter
    • Place of Presentation
      サンタバーバラ (米国)
    • Year and Date
      2008-11-10
    • Related Report
      2008 Annual Research Report
  • [Presentation] Development of the atomic model of Sn and Xe ions and its application to studies of the EUV source2008

    • Author(s)
      A. Sasaki, K. Nishihara, A. Sunahara, H. Furukawa, K. Nishikawa, F. Koike, M. Murata
    • Organizer
      The 6^<th> International Conference on Atomic and Molecular Data and Their Appications (ICAMDATA 2008)
    • Place of Presentation
      北京 (中国)
    • Year and Date
      2008-10-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] Development of the atomic model of Sn and Xe ions and its application to studies of the EUV source2008

    • Author(s)
      A. Sasaki, A. Sunahara, K. Nishihara, K. Nishikawa, F. Koike, H. Tanuma
    • Organizer
      14^<th> International Conference on the Physics of Highly Charged Ions (HCI2008)
    • Place of Presentation
      東京
    • Year and Date
      2008-09-02
    • Related Report
      2008 Annual Research Report
  • [Book] 第14章「レーザー生成プラズマ」「プラズマ原子分子過程ハンドブック」プラズマ・核融合学会編2011

    • Author(s)
      浜口智志、村上泉、加藤太治
    • Publisher
      大阪大学出版会
    • Related Report
      2010 Final Research Report
  • [Book] プラズマ原子分子過程ハンドブック第14章レーザー生成プラズマ(分担執筆)2010

    • Author(s)
      佐々木明, 他22名、浜口智志、村上泉、加藤太治、プラズマ・核融合学会編
    • Total Pages
      14
    • Publisher
      大阪大学出版会
    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://groups.google.co.jp/group/euv-s

    • Related Report
      2008 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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