• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Accurate measurements of lattice strains and electric conductivity in nanometer-scale areas

Research Project

Project/Area Number 20360007
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionNagoya University

Principal Investigator

SAITOH Koh  Nagoya University, エコトピア科学研究所, 准教授 (50292280)

Co-Investigator(Kenkyū-buntansha) TANAKA Nobuo  名古屋大学, エコトピア科学研究所, 教授 (40126876)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥18,980,000 (Direct Cost: ¥14,600,000、Indirect Cost: ¥4,380,000)
Fiscal Year 2010: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2009: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2008: ¥14,820,000 (Direct Cost: ¥11,400,000、Indirect Cost: ¥3,420,000)
Keywords半導体歪み解析 / 電気伝導 / 収束電子回折 / 電子顕微鏡
Research Abstract

The present study has been aimed to reveal the correlation between lattice strains and electric conductivities in nanometer-scale areas. The results are the followings. (i) A method to determine lattice parameters and parameters characterizing lattice bending simultaneously with a spatial resolution of 10nm has been developed. (ii) A GUI-based software, in which the present algorithm is implemented, has been developed. (iii) An automated system for the pattern acquisition with a 2D beam-scanning and the lattice-strain analysis has been constructed. (iv) A method to determine the 3D lattice-strain-field from the HOLZ rocking curves using the Fourier iterative phase retrieval method has been developed. (v) A highly precise method to determine lattice parameters at the vicinity of interfaces of hetero-layers using the nano-beam diffraction technique has been developed. (vi) A high-voltage electron microscope has been used to apply the present method to relatively thick specimens, which has less influenced by the surface relaxation due to specimen thinning。(vii) I-V curves and lattice strains have been measured simultaneously by using an STM holder and HOLZ line analysis.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (35 results)

All 2010 2009 2008 Other

All Journal Article (10 results) (of which Peer Reviewed: 10 results) Presentation (24 results) Remarks (1 results)

  • [Journal Article] Atom-column distinction by Kikuchi pattern observed by an aberration-corrected convergent electron probe2010

    • Author(s)
      K.Saitoh, Y.Tatara, N.Tanaka
    • Journal Title

      Journal of Electron Microscopy 59

      Pages: 387-394

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Determination of a lattice strain field by iterative phase retrieval of rocking curves of HOLZ reflections2010

    • Author(s)
      K.Saitoh, M.Hamabe, S.Morishita, J.Yamasaki, N.Tanaka
    • Journal Title

      International Journal of Advanced Microscopy and Theoretical Calculations 2

      Pages: 120-121

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Automated mapping of lattice parameters and lattice bending strain near a SiGe/Si interface by using split HOLZ line patterns2010

    • Author(s)
      K.Saitoh, Y.Yasuda, N.Tanaka
    • Journal Title

      International Journal of Advanced Microscopy and Theoretical Calculations 2

      Pages: 38-39

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Automated characterization of bending and expansion of a lattice of a Si substrate near a SiGe/Si interface b using slit HOLZ line patterns2010

    • Author(s)
      Koh Saitoh, et al.
    • Journal Title

      Journal of Electron Microscopy

      Volume: 59 Pages: 367-378

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Atom-column distinction by Kikuchi pattern observed by an aberration-corrected convergent electron probe2010

    • Author(s)
      Koh Saitoh, et al.
    • Journal Title

      Journal of Electron Microscopy

      Volume: 59 Pages: 387-394

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Coherent electron interference from amorphous TEM specimens2010

    • Author(s)
      Rodney A.Herring, et al.
    • Journal Title

      Journal of Electron Microscopy

      Volume: 59 Pages: 321-330

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Annealing effects on a high-k lanthanum oxide film on Si (001) analyzed by aberration-corrected transmission electron microscopy/scanning transmission electron microscopy and electron energy loss spectroscopy2010

    • Author(s)
      Shin Inamoto, et al.
    • Journal Title

      Journal of Applied Physics

      Volume: 107 Pages: 12451010-12451010

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Automated characterization of bending and expansion of a lattice of a Si substrate near a SiGe/Si interface by using split HOLZ line patterns2010

    • Author(s)
      K.Saitoh, et al.
    • Journal Title

      Journal of Electron Microscopy (accepted)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Automated lattice-parameter determination by using HOLZ line patterns2008

    • Author(s)
      K.Saitoh, Y.Yasuda, N.Tanaka
    • Journal Title

      International Journal of Advanced Microscopy and Theoretical Calculations 1

      Pages: 90-91

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Automated lattice-parameter determination by using HOLZ line patterns2008

    • Author(s)
      K. Saitoh, Y. Yasuda N. Tanaka
    • Journal Title

      International Journal of Advanced Microscopy and Theoretical Calculations 1

      Pages: 90-91

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] Automated Mapping of Lattice Parameters and Lattice Bending Strain near a SiGe/Si Interface by using Split HOLZ Lines Patterns2010

    • Author(s)
      齋藤晃, 濱邊麻衣子, 田中信夫
    • Organizer
      名古屋大学材料バックキャストテクノロジーシンポジウム次世代グリーンビークルに向けた材料テクノロジーの展開
    • Place of Presentation
      名古屋大学
    • Year and Date
      2010-09-29
    • Related Report
      2010 Annual Research Report
  • [Presentation] 収差補正TEMを用いた3C-SiC/Si(100)界面の3次元原子配列構造解析2010

    • Author(s)
      稲元伸, 山崎順, 玉置央和, 岡崎一行, 田中信夫
    • Organizer
      名古屋大学材料バックキャストテクノロジーシンポジウム次世代グリーンビークルに向けた材料テクノロジーの展開
    • Place of Presentation
      名古屋大学
    • Year and Date
      2010-09-29
    • Related Report
      2010 Annual Research Report
  • [Presentation] HOLZ線のロッキングカーブプロファイルをもちいた3次元格子歪み分布解析II2010

    • Author(s)
      浜辺麻衣子, 齋藤晃, 田中信夫
    • Organizer
      日本物理学会第65回年次大会
    • Place of Presentation
      岡山大学
    • Year and Date
      2010-03-21
    • Related Report
      2009 Annual Research Report
  • [Presentation] HOLZ線ロッキングカーブの反復位相回復による格子湾曲変位場の再生2010

    • Author(s)
      齋藤晃, 濱邊麻衣子, 森下茂幸, 山崎順, 田中信夫
    • Organizer
      日本顕微鏡学会66回学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Related Report
      2010 Annual Research Report 2010 Final Research Report
  • [Presentation] Determination of 3D Lattice Displacements of Strained Semiconductors by Convergent-Beam Electron Diffraction2010

    • Author(s)
      齋藤晃, 濱邊麻衣子, 森下茂幸, 山崎順, 田中信夫
    • Organizer
      The 17th IFSM International Microscopy Congress
    • Place of Presentation
      Rio de Janeiro, Brazil.
    • Related Report
      2010 Annual Research Report 2010 Final Research Report
  • [Presentation] In-situ TEM/STEM Observation of Photocatalytic Reactions of Titanium Oxide Materials2010

    • Author(s)
      N.Tanaka
    • Organizer
      The 2nd International Symposium on Advanced Microscopy and Theoretical Calculations
    • Place of Presentation
      Nagoya
    • Related Report
      2010 Annual Research Report
  • [Presentation] Spherical aberration corrected HRTEM of nano interfaces of semiconductors2010

    • Author(s)
      N.Tanaka
    • Organizer
      The 13th International Conference on Intergranular and Interphase Boundaries in Materials
    • Place of Presentation
      Shima, Mie
    • Related Report
      2010 Annual Research Report
  • [Presentation] Advanced and In-site TEM/STEM of Functional Small Particles on Titanium Oxide Materials2010

    • Author(s)
      N.Tanaka, S.Sueda, K. Yoshida
    • Organizer
      The 17th IFSM International Microscopy Congress
    • Place of Presentation
      Rio de Janeiro, Brazil
    • Related Report
      2010 Annual Research Report
  • [Presentation] Automated Mapping of Lattice Parameters and Lattice Bending Strain Near a SiGe/Si Interface by Using Split HOLZ Lines Patterns2010

    • Author(s)
      K.Saitoh, Y. Yasuda, M. Hamabe, N. Tanaka
    • Organizer
      The 2nd International Symposium on Advanced Microscopy and Theoretical Calculations
    • Place of Presentation
      Nagoya
    • Related Report
      2010 Annual Research Report
  • [Presentation] Determination of a Lattice Strain Field by Iterative Phase Retrieval of Rocking Curves of HOLZ Reflections2010

    • Author(s)
      K.Saitoh, M.Hamabe, S.Morishita, J.Yamasaki, N.Tanaka
    • Organizer
      The 2nd International Symposium on Advanced Microscopy and Theoretical Calculations
    • Place of Presentation
      Nagoya
    • Related Report
      2010 Annual Research Report
  • [Presentation] Development of High-Voltage Electron Microscope for Reaction Science2010

    • Author(s)
      N.Tanaka, J.Usukura, M.Kusnoki, K.Kuroda, Y.Saito, T.Tanji, S.Muto, S.Arai
    • Organizer
      The 17th IFSM International Microscopy Congress
    • Place of Presentation
      Rio de Janeiro, Brazil.
    • Related Report
      2010 Annual Research Report
  • [Presentation] Atomic Structure of a 3C-SiC/Si (100) Interface Revealed by Aberration-Corrected Transmission Electron Microscopy and Ab Initio Calculations2010

    • Author(s)
      S.Inamoto, J.Yamasaki, H.Tamaki, K.Okazaki-Maeda, N.Tanaka
    • Organizer
      The 17th IFSM International Microscopy Congress
    • Place of Presentation
      Rio de Janeiro, Brazil.
    • Related Report
      2010 Annual Research Report
  • [Presentation] HOLZ線のロッキングカーブプロファイルをもちいた3次元格子歪み解析II2010

    • Author(s)
      濱邊麻衣子, 齋藤晃, 森下茂幸, 山崎順, 田中信夫
    • Organizer
      日本物理学会第65回年次大会
    • Place of Presentation
      岡山大学
    • Related Report
      2010 Annual Research Report
  • [Presentation] 反応学超高圧電子顕微鏡の開発2010

    • Author(s)
      田中信夫, 臼倉治郎, 楠美智子, 黒田光太郎, 斎藤弥八, 丹司敬義, 武藤俊介, 荒井重勇
    • Organizer
      日本顕微鏡学会66回学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Related Report
      2010 Annual Research Report
  • [Presentation] 電子線バイプリズムをもちいたアモルレファス試料の回折波干渉の観察2010

    • Author(s)
      齋藤晃, Rodney HERRING, 丹司敬義, 田中信夫
    • Organizer
      日本顕微鏡学会66回学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Related Report
      2010 Annual Research Report
  • [Presentation] 収差補正TEM像と第一原理計算を用いた3C-SiCISi(100)界面の原子構造精密化2010

    • Author(s)
      稲元伸, 山崎順, 玉置央和, 岡崎一行, 田中信夫
    • Organizer
      日本顕微鏡学会66回学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Related Report
      2010 Annual Research Report
  • [Presentation] エネルギーフィルター電子顕微鏡をもちいた結晶構造解析および電子軌道解析2010

    • Author(s)
      齋藤晃
    • Organizer
      平成22年度日本結晶学会年会
    • Place of Presentation
      大阪大学
    • Related Report
      2010 Annual Research Report
  • [Presentation] Strain mapping near Si/SiGe interfaces using HOLZ line CBED patterns2009

    • Author(s)
      齋藤晃, 濱邊麻衣子, 田中信夫
    • Organizer
      AsCA'09 Beijing, Joint Conference of the Asian Crystallographic Association and Chinese Crystallographic Society
    • Place of Presentation
      Beijing, China.
    • Year and Date
      2009-10-25
    • Related Report
      2010 Final Research Report
  • [Presentation] Strain mapping near Si/SiGe interfaces using HOLZ line CBED patterns2009

    • Author(s)
      齋藤晃, 浜辺麻衣子, 田中信夫
    • Organizer
      AsCA'09 Beijing, Joint Conference of the Asian Crystallographic Association and Chinese Crystallographic Society
    • Place of Presentation
      Beijing, China
    • Year and Date
      2009-10-25
    • Related Report
      2009 Annual Research Report
  • [Presentation] HOLZ線のロッキングカーブプロファイルをもちいた3次元格子歪み分布解析2009

    • Author(s)
      浜辺麻衣子, 齋藤晃, 田中信夫
    • Organizer
      日本物理学会2009年秋季大会
    • Place of Presentation
      熊本大学
    • Year and Date
      2009-09-26
    • Related Report
      2009 Annual Research Report
  • [Presentation] CBED法をもちいた格子湾曲歪みを含むSiGe/Si界面近傍の二次元格子歪み解析2009

    • Author(s)
      濱邊麻衣子、齋藤晃、田中信夫
    • Organizer
      日本顕微鏡学会第65回学術講演会
    • Place of Presentation
      仙台国際センター
    • Year and Date
      2009-05-26
    • Related Report
      2010 Final Research Report 2009 Annual Research Report
  • [Presentation] HOLZ線図形の多点自動解析による二次元歪みマツピング2009

    • Author(s)
      浜辺麻衣子, 斎藤晃, 田中信夫
    • Organizer
      日本物理学会第64回年次大会
    • Place of Presentation
      立教大学
    • Year and Date
      2009-03-27
    • Related Report
      2008 Annual Research Report
  • [Presentation] A method for the determination of a bending strain of a lattice by CBED2008

    • Author(s)
      濱邊麻衣子, 齋藤晃, 田中信夫
    • Organizer
      Development of Advanced Instruments for New Electron Microscopy and Diffraction, IUCr2008 satellite
    • Place of Presentation
      名古屋大学
    • Year and Date
      2008-09-01
    • Related Report
      2010 Final Research Report 2008 Annual Research Report
  • [Presentation] 分裂したHOLZ線を含むCBED図形の解析による湾曲格子歪み計測法の研究2008

    • Author(s)
      齋藤晃、浜辺麻衣子、田中信夫
    • Organizer
      日本顕微鏡学会第64回学術講演会
    • Place of Presentation
      京都国際会議場
    • Year and Date
      2008-05-21
    • Related Report
      2010 Final Research Report 2008 Annual Research Report
  • [Remarks] ホームページ等

    • Related Report
      2010 Final Research Report

URL: 

Published: 2008-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi