Accurate measurements of lattice strains and electric conductivity in nanometer-scale areas
| Project/Area Number |
20360007
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied materials science/Crystal engineering
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| Research Institution | Nagoya University |
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Principal Investigator |
SAITOH Koh Nagoya University, エコトピア科学研究所, 准教授 (50292280)
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| Co-Investigator(Kenkyū-buntansha) |
TANAKA Nobuo 名古屋大学, エコトピア科学研究所, 教授 (40126876)
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| Project Period (FY) |
2008 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥18,980,000 (Direct Cost: ¥14,600,000、Indirect Cost: ¥4,380,000)
Fiscal Year 2010: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2009: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2008: ¥14,820,000 (Direct Cost: ¥11,400,000、Indirect Cost: ¥3,420,000)
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| Keywords | 半導体歪み解析 / 電気伝導 / 収束電子回折 / 電子顕微鏡 |
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| Research Abstract |
The present study has been aimed to reveal the correlation between lattice strains and electric conductivities in nanometer-scale areas. The results are the followings. (i) A method to determine lattice parameters and parameters characterizing lattice bending simultaneously with a spatial resolution of 10nm has been developed. (ii) A GUI-based software, in which the present algorithm is implemented, has been developed. (iii) An automated system for the pattern acquisition with a 2D beam-scanning and the lattice-strain analysis has been constructed. (iv) A method to determine the 3D lattice-strain-field from the HOLZ rocking curves using the Fourier iterative phase retrieval method has been developed. (v) A highly precise method to determine lattice parameters at the vicinity of interfaces of hetero-layers using the nano-beam diffraction technique has been developed. (vi) A high-voltage electron microscope has been used to apply the present method to relatively thick specimens, which has less influenced by the surface relaxation due to specimen thinning。(vii) I-V curves and lattice strains have been measured simultaneously by using an STM holder and HOLZ line analysis.
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Report
(4 results)
Research Products
(35 results)
