Frontier science and technology of nanoblock transport and arrangement
| Project/Area Number |
20360040
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied physics, general
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| Research Institution | Kyushu University |
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Principal Investigator |
SHIRATANI Masaharu Kyushu University, システム情報科学研究院, 教授 (90206293)
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| Co-Investigator(Kenkyū-buntansha) |
KOGA Kazunori 九州大学, 大学院・システム情報科学研究院, 准教授 (90315127)
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| Project Period (FY) |
2008 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2010: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
Fiscal Year 2009: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2008: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
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| Keywords | プラズマ / プラズマナノ工場 / ナノ材料 / プラズマ加工 / 異方性CVD / ナノ粒子 / ナノ粒子輸送 / ナノ粒子配置 / 振幅変調パルス放電 |
|---|
| Research Abstract |
In this project, we have studied transport, arrangement and deposition of nanoparticles. We have obtained following results.
(1) Localized potential structure on substrates allows us to arrange nanoparticles on the substrates.
(2) Novel developed 2-dementional in-situ laser light scattering method is useful for evaluating the initial growth phase of nanoparticles in 2-d ways.
(3) Nanoparticle-composit films show ultra low-k and high Young's medullas.
(4) Amplitude modulated pulse discharges are effective for realizing deposition profile control on fine structures.
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Report
(4 results)
Research Products
(56 results)
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[Journal Article] LHD Experimental Group, Carbon Dust Particles Generated Due to H_2 Plasma-Carbon Wall Interaction2010
Author(s)
H.Miyata, K.Nishiyama, S.Iwashita, H.Matsuzaki, D.Yamashita, G.Uchida, N.Itagaki, K.Kamataki, K.Koga, M.Shiratani, N.Ashikawa, S.Masuzaki, K.Nishimura, A.Sagara
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Journal Title
Proceedings of 63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Related Report
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[Journal Article] Carbon Dust Particles Generated Due to H_2 Plasma-Carbon Wall Interaction2010
Author(s)
H.Miyata, K.Nishiyama, S.Iwashita, H.Matsuzaki, D.Yamashita, G.Uchida, N.Itagaki, K.Kamataki, K.Koga, M.Shiratani, N.Ashikawa, S.Masuzaki, K.Nishimura, A.Sagara LHDexperimentalGroup
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Journal Title
Proceedings of 63^<rd> Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Related Report
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[Presentation] Effects of Ar Addition on Breakdown Voltage in a Si(CH_3)_2(OCH_3)_2 RF Discharge2010
Author(s)
G.Uchida, S.Nunomura, H.Miyata, S.Iwashita, D.Yamashita, H.Matsuzaki, K.Kamataki, N.Itagaki, K.Koga, M.Shiratani
Organizer
IEEE TENCON 2010
Place of Presentation
福岡国際センター,福岡市
Year and Date
2010-11-22
Related Report
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[Presentation] Deposition of Nanoparticles Using Substrate Bias Voltage2010
Author(s)
K.Koga, H.Miyata, G.Uchida, K.Kamataki, N.Itagaki, M.Shiratani, A.Ashikawa, K.Nishimura, A.Sagara, LHDexperimentalGroup
Organizer
23^<rd> International Microprocesses and Nanotechnogy Conference
Place of Presentation
リーガロイヤルホテル小倉,小倉市
Year and Date
2010-11-11
Related Report
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[Presentation] Carbon Dust Particles Generated Due to H_2 Plasma-Carbon Wall Interaction2010
Author(s)
H.Miyata, K.Nishiyama, S.Iwashita, H.Matsuzaki, D.Yamashita, G.Uchida, N.Itagaki, K.Kamataki, K.Koga, M.Shiratani, N.Ashikawa, S.Masuzaki, K.Nishimura, A.Sagara, LHDexperimentalGroup
Organizer
63^<rd> Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Place of Presentation
パリ,フランス
Year and Date
2010-10-05
Related Report
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