| Budget Amount *help |
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2010: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
Fiscal Year 2009: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2008: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
|
|---|
| Research Abstract |
In this project, we have studied transport, arrangement and deposition of nanoparticles. We have obtained following results.
(1) Localized potential structure on substrates allows us to arrange nanoparticles on the substrates.
(2) Novel developed 2-dementional in-situ laser light scattering method is useful for evaluating the initial growth phase of nanoparticles in 2-d ways.
(3) Nanoparticle-composit films show ultra low-k and high Young's medullas.
(4) Amplitude modulated pulse discharges are effective for realizing deposition profile control on fine structures.
|
