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Development of Fast Multiscale Dynamic Simulation Method and Its Application and Verification in Power MEMS Design

Research Project

Project/Area Number 20360059
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionKeio University

Principal Investigator

TAKANO Naoki  慶應義塾大学, 理工学部, 教授 (10206782)

Co-Investigator(Kenkyū-buntansha) TORIYAMA Toshiyuki  立命館大学, 理工学部, 教授 (30227681)
SANDOU Atsushi  和歌山工業高等専門学校, 知能機械工学科, 講師 (50435442)
Project Period (FY) 2008 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥19,500,000 (Direct Cost: ¥15,000,000、Indirect Cost: ¥4,500,000)
Fiscal Year 2011: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2010: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2009: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2008: ¥9,880,000 (Direct Cost: ¥7,600,000、Indirect Cost: ¥2,280,000)
Keywords動的解析 / モデル縮約法 / マルチスケール解析 / MEMS / 不確かさ / エッチングシミュレーション / モンテカルロシミュレーション / 確率均質化法 / 重合メッシュ法 / 高速化 / 応答曲面法 / 熱流体一構造連成 / パワーMEMS / 熱流体-構造連成解析 / マイクロ燃焼器 / 最適設計 / 熱流体解析 / 構造解析 / マイクロガスタービンエンジン
Research Abstract

This study aims at the development of fast dynamic analysis method for a structure consisting of very large number of repeated unit microstructures and at the design, fabrication and experiment of MEMS combustor. With the use of model order reduction technique, a developed computational method is practical because it allows fast computing by parallel processing on a standard PC and also because it is capable of predicting the phenomena that may occur with very low probability considering the uncertainties of loading condition. Also stochastic homogenization method was developed that can predict the effect of misalignment of approximately 1, 000 nozzles in the flame holder. In the experiment, stable combustion with the temperature 1150K to 1350K was confirmed.

Report

(6 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report   Self-evaluation Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (36 results)

All 2011 2010 2009 2008 Other

All Journal Article (10 results) (of which Peer Reviewed: 10 results) Presentation (24 results) Remarks (2 results)

  • [Journal Article] 自動メッシュ分割を用いて重合メッシュ法の連成項を高精度に数値積分するための積分範囲の適切な分割方法2011

    • Author(s)
      山東篤
    • Journal Title

      Transactions of JSCES(日本計算工学会論文集)

      Volume: Vol.2011

    • NAID

      130008056298

    • Related Report
      2011 Annual Research Report 2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Calibration of wet etching parameters for sacrifice layer of MEMS2011

    • Author(s)
      N. Takano, K. Sato, T. Toriyama, T. Yamazaki and S. Uesugi
    • Journal Title

      Journal of Computational Science and Technology

      Volume: Vol.5 Pages: 106-119

    • NAID

      130001310992

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] 自動メッシュ生成を用いた重合メッシュ法における連成項の数値積分2011

    • Author(s)
      山東篤
    • Journal Title

      日本機械学会論文集(A編)

      Volume: Vol.76 Pages: 600-609

    • NAID

      130000874038

    • Related Report
      2011 Annual Research Report 2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Calibration of wet etching parameters for sacrifice layer of MEMS2011

    • Author(s)
      高野直樹・佐藤健一・鳥山寿之・山埼透・上杉誠一
    • Journal Title

      Journal of Computational Science and Technology

      Volume: 5 Pages: 106-119

    • NAID

      130001310992

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural strength prediction for porous titanium based on micro-stress concentration by micro-CT image-based multiscale simulation2010

    • Author(s)
      N. Takano, K. Fukasawa and K. Nishiyabu
    • Journal Title

      International Journal of Mechanical Sciences

      Volume: Vol.52 Pages: 229-235

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Structural Strength Prediction for Porous Titanium Based on Micro-stress Concentration by Micro-CT Image-based Multiscale Simulation2010

    • Author(s)
      高野直樹, 深澤健, 西籔和明
    • Journal Title

      International Journal of Mechanical Sciences 52

      Pages: 229-235

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Structural strength prediction for porous titanium based on micro-stress concentration by micro-CT image-based multiscale simulation2010

    • Author(s)
      Naoki Takano, Ken Fukasawa, Kazuaki Nishiyabu
    • Journal Title

      International Journal of Mechanical Sciences 52

      Pages: 229-235

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Reduction of finite element mesh and model order for fast dynamic analysis of global/local problem2009

    • Author(s)
      A. Sando, N. Takano, M. Asai, T. Toriyama, S. Kido and J. Korvink
    • Journal Title

      Journal of Solid Mechanics and Materials Engineering

      Volume: 3-3 Pages: 572-583

    • NAID

      130000106334

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Jan Korvink, Reduction of Finite Element Mesh and Model Order for Fast Dynamic Analysis of Global/Local Problem2009

    • Author(s)
      山東篤, 高野直樹, 浅井光輝, 鳥山寿之, 城戸詳治
    • Journal Title

      JSME Journal of Solid Mechanics and Materials Engineering 3-3

      Pages: 572-583

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Reduction of Finite Element Mesh and Model Order for Fast Dynamic Analysis of Global/Local Problem2009

    • Author(s)
      A. Sando, N. Takano, M. Asai, T. Toriyama, S. Kido, J. Korvink
    • Journal Title

      JSME Journal of Solid Mechanics and Materials Engineering 3-3

      Pages: 572-583

    • NAID

      130000106334

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] Monte Carlo simulation of dynamic problem using model order reduction technique2011

    • Author(s)
      鈴木翔・高野直樹・浅井光輝
    • Organizer
      日本機械学会第24回計算力学講演会
    • Place of Presentation
      岡山
    • Year and Date
      2011-11-08
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] モデル縮約による高速動的解析法のモンテカルロシミュレーションへの適用可能性2011

    • Author(s)
      鈴木翔・高野直樹・浅井光輝
    • Organizer
      日本機械学会2011年度年次大会
    • Place of Presentation
      東京
    • Year and Date
      2011-09-12
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] Fast dynamic analysis considering uncertainty by model order reduction technique2011

    • Author(s)
      N. Takano and M. Asai
    • Organizer
      The 11th U. S. National Congress on Computational Mechanics(USNCCM-11)
    • Place of Presentation
      Minneapolis, MN, USA
    • Year and Date
      2011-07-25
    • Related Report
      2011 Final Research Report
  • [Presentation] Fast dynamic analysis considering uncertainty by model order reduction technique2011

    • Author(s)
      高野直樹・浅井光輝
    • Organizer
      The 11th U.S.National Congress on Computational Mechanics (USNCCM-11)
    • Place of Presentation
      Minneapolis, MN, USA
    • Year and Date
      2011-07-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] MEMSウェットエッチングシミュレータの開発2011

    • Author(s)
      山崎透・上杉誠一・高野直樹・佐藤健一・鳥山寿之
    • Organizer
      日本計算工学会第16回計算工学講演会
    • Place of Presentation
      柏(千葉)
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] 荷重条件の不確かさを考慮した高速動的解析法に関する研究2011

    • Author(s)
      高野直樹・浅井光輝・深澤健
    • Organizer
      日本計算工学会第16回計算工学講演会
    • Place of Presentation
      柏(千葉)
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] 不連続関数の数値積分における積分範囲の分割方法に関する考察2011

    • Author(s)
      山東篤・名手裕喜
    • Organizer
      日本計算工学会第16回計算工学講演会
    • Place of Presentation
      柏(千葉)
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] Model order reduction for practical multi-physics and multi-scale analysis of MEMS gas turbine engine2010

    • Author(s)
      鈴木翔・高野直樹・鳥山寿之
    • Organizer
      電気学会第27回センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      松江(島根)
    • Year and Date
      2010-10-14
    • Related Report
      2011 Final Research Report
  • [Presentation] Model Order Reduction for Practical Multi-physics and Multi-scale Analysis of MEMS Gas Turbine Engine2010

    • Author(s)
      鈴木翔, 高野直樹, 鳥山寿之
    • Organizer
      電気学会第27 回センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      島根
    • Year and Date
      2010-10-14
    • Related Report
      2010 Self-evaluation Report
  • [Presentation] Model order reduction for practical multi-physics and multi-scale analysis of MEMS gas turbine engine2010

    • Author(s)
      鈴木翔・高野直樹・鳥山寿之
    • Organizer
      電気学会第27回センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      島根
    • Year and Date
      2010-10-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] 犠牲層ウェットエッチングにおける物理パラメータのキャリブレーション2010

    • Author(s)
      佐藤健一・高野直樹・鳥山寿之
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋(愛知)
    • Year and Date
      2010-09-07
    • Related Report
      2011 Final Research Report
  • [Presentation] 犠牲層ウェットエッチングにおける物理パラメータのキャリブレーション2010

    • Author(s)
      佐藤健一, 高野直樹, 鳥山寿之
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋
    • Year and Date
      2010-09-07
    • Related Report
      2010 Self-evaluation Report
  • [Presentation] 犠牲層ウェットエッチングにおける物理パラメータのキャリブレーション2010

    • Author(s)
      佐藤健一・高野直樹・鳥山寿之
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋工業大学
    • Year and Date
      2010-09-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] デローニー四面体分割を用いた三次元重合メッシュ法における連成項の数値積分2010

    • Author(s)
      山東篤・名手裕喜
    • Organizer
      日本計算工学会第15回計算工学講演会
    • Place of Presentation
      博多(福岡)
    • Year and Date
      2010-05-26
    • Related Report
      2011 Final Research Report
  • [Presentation] デローニー四面体分割を用いた三次元重合メッシュ法における連成項の数値積分2010

    • Author(s)
      山東篤, 名手裕喜
    • Organizer
      日本計算工学会第15回計算工学講演会
    • Place of Presentation
      博多
    • Year and Date
      2010-05-26
    • Related Report
      2010 Self-evaluation Report
  • [Presentation] デローニー四面体分割を用いた三次元重合メッシュ法における連成項の数値積分2010

    • Author(s)
      山東篤・名手裕喜
    • Organizer
      日本計算工学会第15回計算工学講演会
    • Place of Presentation
      九州大学
    • Year and Date
      2010-05-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] 重合メッシュ法によるポーラスチタン部材のミクロ応力基準強度予測2009

    • Author(s)
      深澤健・高野直樹・西籔和明・川崎雄介
    • Organizer
      日本機械学会M & M2009材料力学カンファレンス
    • Place of Presentation
      札幌(北海道)
    • Year and Date
      2009-07-24
    • Related Report
      2011 Final Research Report
  • [Presentation] 重合メッシュ法によるポーラスチタン部材のミクロ応力基準強度予測2009

    • Author(s)
      深澤健, 高野直樹, 西籔和明, 川崎雄介
    • Organizer
      日本機械学会M & M 2009材料力学カンファレンス
    • Place of Presentation
      北海道
    • Year and Date
      2009-07-24
    • Related Report
      2010 Self-evaluation Report
  • [Presentation] 重合メッシュ法によるポーラスチタン部材のミクロ応力基準強度予測2009

    • Author(s)
      深澤健, 高野直樹, 西籔和明, 川崎雄介
    • Organizer
      日本機械学会M&M2009材料力学カンファレンス
    • Place of Presentation
      札幌コンベンションセンター(北海道)
    • Year and Date
      2009-07-24
    • Related Report
      2009 Annual Research Report
  • [Presentation] 重合メッシュ法によるポーラスチタン部材のミクロ応力基準強度予測2009

    • Author(s)
      高野直樹・西籔和明・川崎雄介
    • Organizer
      日本計算工学会第14回計算工学講演会
    • Place of Presentation
      東京
    • Year and Date
      2009-05-14
    • Related Report
      2011 Final Research Report 2010 Self-evaluation Report
  • [Presentation] 重合メッシュ法によるポーラスチタン部材のミクロ応力基準強度予測2009

    • Author(s)
      高野直樹, 西籔和明, 川崎雄介
    • Organizer
      日本計算工学会第14回計算工学講演会
    • Place of Presentation
      東京大学(東京都)
    • Year and Date
      2009-05-14
    • Related Report
      2009 Annual Research Report
  • [Presentation] MEMSターボ機械用燃焼器の流体・構造解析2008

    • Author(s)
      城戸詳治・山田雄貴・古谷明・鳥山寿之・高野直樹・金哲晃
    • Organizer
      日本機械学会M & M2008材料力学カンファレンス
    • Place of Presentation
      南草津(滋賀)
    • Year and Date
      2008-09-17
    • Related Report
      2011 Final Research Report
  • [Presentation] MEMS ターボ機械用燃焼器の流体・構造解析2008

    • Author(s)
      城戸詳治, 山田雄貴, 古谷明, 鳥山寿之, 高野直樹, 金哲晃
    • Organizer
      日本機械学会M & M 2008 材料力学カンファレンス
    • Place of Presentation
      志賀
    • Year and Date
      2008-09-17
    • Related Report
      2010 Self-evaluation Report
  • [Presentation] MEMSターボ機械用燃焼器の流体・構造解析2008

    • Author(s)
      城戸詳治, 山田雄貴, 古谷明, 鳥山寿之, 高野直樹, 金哲晃
    • Organizer
      日本機械学会M&M2008材料力学カンファレンス
    • Place of Presentation
      立命館大学(滋賀県)
    • Year and Date
      2008-09-17
    • Related Report
      2008 Annual Research Report
  • [Remarks]

    • URL

      http://www.takano.mech.keio.ac.jp/

    • Related Report
      2011 Final Research Report
  • [Remarks]

    • URL

      http://www.takano.mech.keio.ac.jp/

    • Related Report
      2011 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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