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Evaluation of mechanical & electrical properties of Nanowires Used for Nano Mechanical Sensors Using Functional MEMS Device

Research Project

Project/Area Number 20360060
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionKobe University

Principal Investigator

ISONO Yoshitada  Kobe University, 大学院・工学研究科, 教授 (20257819)

Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥19,630,000 (Direct Cost: ¥15,100,000、Indirect Cost: ¥4,530,000)
Fiscal Year 2010: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2009: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2008: ¥12,090,000 (Direct Cost: ¥9,300,000、Indirect Cost: ¥2,790,000)
Keywordsマイクロ材料力学 / ナノメカニクス / マルチフィジックス / MEMS / ナノセンサ材料
Research Abstract

This research developed the in situ scanning electron microscopy (SEM) nanomaterial testing system to reveal mechanical & electrical properties of carbon nanotubes (CNTs) for developing novel nano mechanical sensors. The in situ SEM testing system is constituted of Electrostatically Actuated NAno Tensile testing devices (EANATs) and the nano probe manipulation system. The EANATs can measure uniaxial tensile elongation of nanomaterials by the capacitance sensor integrated into the laver motion amplification system on the EANATs. The sensing resolution was 0.93 nm. The 51 nm-diametric multiwalled CNT prepared by the thermal CVD were tested on the EANATs. The stress-strain relation obtained in the test clarified the fracture mechanism of the CNT. In the fracture process of the CNT, a couple of outer shells of CNT have broken at the first step and the other inside core of the CNT followed the outer shells to failure. The Young's modulus of the CNT was about 600 GPa, which was roughly the same as previously reported values.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (8 results)

All 2011 2010 2008

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (6 results)

  • [Journal Article] Piezoresistance Effect of FIB Deposited Carbon Nanowires under Severe Strain2008

    • Author(s)
      Mario Kiuchi, Shinji Matsui, Yoshitada Isono
    • Journal Title

      Journal of Micromechanics and Microengineerings, Institute of Physics Vol.18, No.6

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Piezoresistance Effect of FIB Deposited Carbon Nanowires under Severe Strain2008

    • Author(s)
      Mario Kiuchi, Shinji Matsui, Yoshitada Isono
    • Journal Title

      Journal of Micromechanics and Microengineerings, Institute of Physics Vol. 18, No. 6

      Pages: 65011-65011

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] Strain Rate Dependence of Mechanical Properties for Sub 100nm-thick Au Film Using Electrostatically Actuated Nano Tensile Testing Device2011

    • Author(s)
      Hyun-Jin Oh, Itsuo Hanasaki, Yoshitada Isono, Seung-Woo Han, Hak-Joo Lee
    • Organizer
      The 24th IEEE Int.Conf.on MEMS (MEMS 2011)
    • Place of Presentation
      Cancun, MEXICO
    • Year and Date
      2011-01-25
    • Related Report
      2010 Final Research Report
  • [Presentation] STRAIN RATE DEPENDENCE OF MECHANICAL PROPERTIES FOR SUB 100 NM-THICK AU FILM USING ELECTROSTATICALLY ACTUATED NANO TENSILE TESTING DEVICE2011

    • Author(s)
      Hyun-Jin Ohl, Itsuo Hanasaki, Yoshitada Isono, Seung-Woo Han, Hak-Joo Lee
    • Organizer
      The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011)
    • Place of Presentation
      Cancun, MEXICO
    • Year and Date
      2011-01-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] Experimental Nanomechanics for FIB-CVD Carbon Nanowires Using MEMS Devices2010

    • Author(s)
      磯野吉正
    • Organizer
      The 5th International Symposium on Nanoscale Mechatronics & Manufacturing
    • Place of Presentation
      Gyeonggi-do, Korea
    • Year and Date
      2010-08-20
    • Related Report
      2010 Final Research Report
  • [Presentation] Experimental Nanomechanics for FIB-CVD Carbon Nanowires Using MEMS Devices2010

    • Author(s)
      Yoshitada Isono
    • Organizer
      The 5th International Symposium on Nanoscale Mechatronics & Manufacturing
    • Place of Presentation
      Gyeonggi-do, KOREA(招待講演)
    • Year and Date
      2010-08-20
    • Related Report
      2010 Annual Research Report
  • [Presentation] MEMS機能デバイスによるナノ厚金薄膜の力学特性評価に関する研究2010

    • Author(s)
      呉衒珍、磯野吉正
    • Organizer
      日本機械学会関西支部第85期定時総会講演会
    • Place of Presentation
      神戸大学
    • Year and Date
      2010-03-16
    • Related Report
      2010 Final Research Report
  • [Presentation] MEMS機能デバイスによるナノ厚金薄膜の力学特性評価に関する研究2010

    • Author(s)
      呉衒珍, 磯野吉正
    • Organizer
      日本機械学会関西支部第85期定時総会講演会
    • Place of Presentation
      神戸大学(兵庫県)
    • Year and Date
      2010-03-16
    • Related Report
      2009 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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