Microfabrication of three-dimensional metal structures using localized photon interaction and photocatalyst nanoparticles

• Project/Area Number: 20360062
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: The University of Tokyo
• Principal Investigator: TAKAHASHI Satoru The University of Tokyo, 大学院・工学系研究科, 准教授 (30283724)
• Co-Investigator(Kenkyū-buntansha): TAKAMASU Kiyoshi 東京大学, 大学院・工学系研究科, 教授 (70154896)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥19,500,000 (Direct Cost: ¥15,000,000、Indirect Cost: ¥4,500,000); Fiscal Year 2010: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000); Fiscal Year 2009: ¥8,060,000 (Direct Cost: ¥6,200,000、Indirect Cost: ¥1,860,000); Fiscal Year 2008: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
• Keywords: 精密位置決め / 加工計測 / 局在フォトン / 酸化チタン / 三次元マイクロ加工 / マイクロマシン / イクロ・ナノデバイス / マイクロ・ナノデバイス / 高速プロトタイピング

Research Abstract

Target of this research is to realize a micro-3D-metal-structure fabrication using localized photon interaction with photocatalyst nanoparticle. This proposed method is characterized by the reduction of metal ions via the photocatalysis of titanium dioxide (TiO2) excited at the laser beam waist. Verification experiments confirmed the proposed concept and its micro-3D-metal-structure fabrication mechanism was analyzed by developing the in-process microscopic observation system.

Research Products

• [Journal Article] Laser direct fabrication of three-dimensional microstructures using photocatalyst nanoparticles (2010)
  • Author(s): Satoru Takahashi, Keisuke Matsuda, Hisamichi Yoshigoe, Kiyoshi Takamasu
  • Journal Title: Proceedings of CIRP-HPC 1 Pages: 381-384
  • Peer Reviewed
• [Journal Article] Development of In-process Visualization System for Laser-Assisted Three-Dimensional Microfabrication using Photocatalyst Nanoparticles (2010)
  • Author(s): Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
  • Journal Title: International Journal of Precision Engineering and Manufacturing 11, 6 Pages: 811-815
  • Peer Reviewed
• [Journal Article] Laser direct fabrication of three-dimensional microstructures using photocatalyst nanoparticles (2010)
  • Author(s): Satoru Takahashi, Keisuke Matsuda, Hisamichi Yoshigoe, Kiyoshi Takamasu
  • Journal Title: Proceedings of CIRP-HPC Volume: 1 Pages: 381-384
  • Peer Reviewed
• [Journal Article] Development of In-process Visualization System for Laser-Assisted Three-Dimensional Microfabrication using Photocatalyst Nanoparticles (2010)
  • Author(s): Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
  • Journal Title: International Journal of Precision Engineering and Manufacturing Volume: 11,6 Pages: 811-815
  • Peer Reviewed
• [Journal Article] Novel laser applications to 3-D micromachining and high-resolution measurement for micor/nano-manufacturing (2009)
  • Author(s): S.Takahashi, K.Takamasu
  • Journal Title: Jsme News -Surface Engineering and Science- 20, 2 Pages: 8-11
• [Journal Article] In-process visualization of laser-assisted three-dimensional microfabrication using photocatalyst nanoparticles (2009)
  • Author(s): Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
  • Journal Title: Proceedings of ASPEN 2009,2C6
  • Peer Reviewed
• [Journal Article] Novel laser applications to 3-D micromachining and high-reso lution measurement for micor/nano-manufacturing (2009)
  • Author(s): S.Takahashi, K.Takamasu
  • Journal Title: Jsme News -Surface Engineering and Science- Volume: 20, 2 Pages: 8-11
• [Journal Article] In-process visualization of laser-assisted three-dimensional microfabrication using photocatalyst nanoparticles (2009)
  • Author(s): Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu
  • Journal Title: Proceedings of ASPEN2009 Volume: 206
  • Peer Reviewed
• [Journal Article] Study on resist layer thickness measurement for nanoimprint lithography based on near-field optics (2009)
  • Author(s): S. Takahashi, S. Minamiguchi, T. Nakao, S. Usuki, K. Takamasu
  • Journal Title: International Journal Surface Science and Engineering (印刷中(掲載確定))
  • Peer Reviewed
• [Journal Article] Development of an in-process confocal positioning system for nano-stereolithography using evaenscent light (2008)
  • Author(s): Y.Kajihara, T.Takeuchi, S.Takahashi, K.Takamasu
  • Journal Title: International Journal of Precision Engineering and Manufacturing 9, 3 Pages: 51-54
  • Peer Reviewed
• [Journal Article] Development of an in-process confocal positioning system for nano-stereolithography using evaenscent light (2008)
  • Author(s): Y. Kajihara, T. Takeuchi, S. Takahashi, K. Takamasu
  • Journal Title: International Journal of Precision Engineering and Manufacturing 9,3 Pages: 51-54
  • Peer Reviewed
• [Journal Article] Theoretical and numerical analysis of lateral resolution improvement characteristics for fluorescence microscopy using standing evanescent light with image retrieval (2008)
  • Author(s): S. Takahashi, S. Okada, H. Nishioka, S. Usuki and K Takarnagu
  • Journal Title: Measurement Science and Technology 19 Pages: 84006-84006
  • Peer Reviewed
• [Presentation] 光触媒ナノ粒子を用いた3次元金属微細構造創製に関する研究(第5報)-創製構造体の気相下観察に基づく加工特性の解析- (2011)
  • Author(s): 吉越久倫, 関野貴宏, 高橋哲, 高増潔
  • Organizer: 2011年度精密工学会春季大会学術講演会講演論文集
  • Place of Presentation: 東洋大学
  • Year and Date: 2011-03-16
• [Presentation] Laser Direct Fabrication of 3-D metal microstructures using photocatalyst nanoparticles (2010)
  • Author(s): 高橋哲
  • Organizer: CIRP August Meeting, STC E
  • Place of Presentation: ピサ
  • Year and Date: 2010-08-27
• [Presentation] Laser Direct Fabrication of 3-D metal microstructures using photocataly st nanoparticles (2010)
  • Author(s): S.Takahashi
  • Organizer: CHIP August Meeting, STC E
  • Place of Presentation: イタリア・ピサ
  • Year and Date: 2010-08-27
• [Presentation] 光触媒ナノ粒子を用いた3次元金属微細構造創製に関する研究(第4報)-インプロセス観察に基づく創製特性の実験的検討- (2010)
  • Author(s): 松田恵介, 吉越久倫, 高橋哲, 高増潔
  • Organizer: 2010年度精密工学会秋季大会学術講演会講演論文集
  • Year and Date: 2010-03-17
• [Presentation] Micro 3-D Fabrication and Nano Scale Metrology by Controlling Localized Light Energy (2010)
  • Author(s): 高橋哲, 高増潔
  • Organizer: 4th TU-SNU-UT Joint Symposium
  • Place of Presentation: Tokyo
  • Year and Date: 2010-03-12
• [Presentation] Micro 3-D Fabrication and Nano Scale Metrology by Controlling Localized Light Energy (2010)
  • Author(s): Satoru Takahashi, Kiyoshi Takamasu
  • Organizer: 4th TU-SNU-UT Joint Symposium
  • Place of Presentation: Tokyo,武田ホール
  • Year and Date: 2010-03-12
• [Presentation] 光触媒ナノ粒子を用いた3次元金属微細構造創製に関する研究(第3報)-3次元創製プロセスの顕微観察- (2009)
  • Author(s): 松田恵介, 高橋哲, 高増潔
  • Organizer: 2009年度精密工学会秋季大会学術講演会講演論文集
  • Place of Presentation: 神戸大学
  • Year and Date: 2009-09-07
• [Presentation] Development of residual layer thickness measurement system for nano-imprint lighography based on near-field optics (2008)
  • Author(s): S. Takahashi, T. Nagao, S. Minamiguchi, S. Usuki, K. Takarnagu
  • Organizer: The euspen international conference
  • Place of Presentation: Zurich
  • Year and Date: 2008-05-19
• [Remarks] ホームページ等
  • URL: http://www.nanolab.t.u-tokyo.ac.jp/research.html
• [Patent(Industrial Property Rights)] 形状形成方法 (2010)
  • Inventor(s): 高橋哲, 高増潔
  • Industrial Property Rights Holder: 高橋哲, 高増潔
  • Filing Date: 2010-10-08