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High-aspect-ratio clack-free processing of transparent materials by laser-backside irradiation

Research Project

Project/Area Number 20360065
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionTokyo Institute of Technology

Principal Investigator

TOKURA Hitoshi  Tokyo Institute of Technology, 大学院・理工学研究科, 教授 (10016628)

Co-Investigator(Kenkyū-buntansha) HIDAI Hirofumi  千葉大学, 大学院・工学研究科, 准教授 (60313334)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2010: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2009: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2008: ¥10,400,000 (Direct Cost: ¥8,000,000、Indirect Cost: ¥2,400,000)
Keywordsレーザ / 透明材料 / 変質 / レーザ加工 / ガラス
Research Abstract

We report on a permanent change in the physical properties inside glasses using a continuous-wave laser beam. Themethod is explained as follows: the absorption of the glass was enhanced by laser heating, and the heated spot moved as a result of thermal radiation and conduction. To trigger heating, an absorbent material was placed on the backside of a glass plate and irradiated through the glass. Etching of the modified zone formed cone shaped structures. The modified zone was bended and curved by changing the direction of the laser beam.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (24 results)

All 2010 2009 2008 Other

All Journal Article (11 results) (of which Peer Reviewed: 11 results) Presentation (12 results) Remarks (1 results)

  • [Journal Article] Structural Changes in Silica Glass by Continuous-Wave Laser Backside Irradiation (CW-LBI)2010

    • Author(s)
      H.Hidai, M.Yoshioka, K.Hiromatsu, H.Tokura
    • Journal Title

      J.Am.Ceram.See 93, 6

      Pages: 1597-1601

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Metal Particle Manipulation by Laser Irradiation in Borosilicate Glass2010

    • Author(s)
      H.Hidai, T.Yamazaki, S.Itoh, K.Hiromatsu, H.Tokura
    • Journal Title

      Opt.Exp. 18, 19

      Pages: 20313-20320

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] CWレーザ背面照射法(CW-LBI)によるガラスの内部変質(第3報)-ガラス内部への白金微粒子の導入-2010

    • Author(s)
      山崎貴斗, 比田井洋史, 戸倉和
    • Journal Title

      精密工学会誌 76, 5

      Pages: 577-581

    • NAID

      130000421829

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] CWレーザ背面照射法(CW-LBI)によるガラスの内部変質(第4報)一白金微粒子導入により作製した変質層の評価一2010

    • Author(s)
      山崎貴斗, 比田井洋史, 戸倉和
    • Journal Title

      精密工学会誌 76, 6

      Pages: 668-672

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] CWレーザ背面照射法(CW-LBI)によるガラスの内部変質(第5報)一様々な金属のガラス内部への導入一2010

    • Author(s)
      比田井洋史, 山崎貴斗, 伊東翔, 廣松邦明, 戸倉和
    • Journal Title

      精密工学会誌 76, 8

      Pages: 933-937

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] CWレーザ背面照射法(CW-LBI)によるガラスの内部変質(第3報)-ガラス内部への白金微粒子の導入-2010

    • Author(s)
      山崎貴斗, 比田井洋史, 戸倉和
    • Journal Title

      精密工学会誌

      Volume: 76 Pages: 577-581

    • NAID

      130000421829

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] CWレーザ背面照射法(CW-LBI)によるガラスの内部変質(第4報)-白金微粒子導入により作製した変質層の評価-2010

    • Author(s)
      山崎貴斗, 比田井洋史, 戸倉和
    • Journal Title

      精密工学会誌

      Volume: 76 Pages: 668-672

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] CWレーザ背面照射法(CW-LBI)によるガラスの内部変質(第5報)-様々な金属のガラス内部への導入-2010

    • Author(s)
      比田井洋史, 山崎貴斗, 伊東翔, 廣松邦明, 戸倉和
    • Journal Title

      精密工学会誌

      Volume: 76 Pages: 933-937

    • NAID

      130000421895

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Metal Particle Manipulation by Laser Irradiation in Borosilicate Glass2010

    • Author(s)
      H.Hidai, T.Yamazaki, S.Itoh, K.Hiromatsu, H.Tokura
    • Journal Title

      Opt.Exp.

      Volume: 18 Pages: 20313-20320

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Glass Modification by Continuous-Wave Laser Backside Irradiation (CW-LBI)2009

    • Author(s)
      H.Hidai, M.Yoshioka, K.Hiromatsu, H.Tokura
    • Journal Title

      Appl.Phys.A 96, 4

      Pages: 869-872

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Glass Modification by Continuous-Wave Laser Backside Irradiation (CW-LBI)2009

    • Author(s)
      H.Hidai, M.Yoshioka, K.Hirom atsu, H.Tokura
    • Journal Title

      Appl.Phys.A 96

      Pages: 869-872

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] Metal Particle Implantation by Laser Irradiation in Borosiilicate Glass2010

    • Author(s)
      H.Hidai, H.Tokura
    • Organizer
      29th International Congress on ICALEO 2010
    • Place of Presentation
      アメリカ, カリフォルニア, アナハイム
    • Year and Date
      2010-09-28
    • Related Report
      2010 Final Research Report
  • [Presentation] レーザ照射によるガラス内部への金属微粒子の導入2010

    • Author(s)
      比田井洋史, 戸倉和
    • Organizer
      2010年度砥粒加工学会学術講演会
    • Place of Presentation
      岡山大学, 岡山県
    • Year and Date
      2010-09-28
    • Related Report
      2010 Final Research Report
  • [Presentation] レーザ照射によるガラス内部への金属微粒子の導入2010

    • Author(s)
      比田井洋史, 山崎貴斗, 戸倉和
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学, 長崎県
    • Year and Date
      2010-09-15
    • Related Report
      2010 Final Research Report
  • [Presentation] Continuous-Wave Laser Induced Modification in Glasses2010

    • Author(s)
      H.Hidai, T.Watanabe
    • Organizer
      Internat.Conf.FLAMN-10, Fundamentals of Laser Assisted, Micro- & Nanotechnologies
    • Place of Presentation
      ロシア, サンクトペテルブルグ
    • Year and Date
      2010-07-07
    • Related Report
      2010 Final Research Report
  • [Presentation] Glass modification by Continuous Wave Laser Backside Irradiation (CW-LBI)-Study on the mechanism-2009

    • Author(s)
      Sho Itoh, Hirofumi Hidai, Hitoshi Tokura
    • Organizer
      The International Symposium on Advances in Abrasive Technology 2009
    • Place of Presentation
      Gold coast, Australia
    • Year and Date
      2009-09-29
    • Related Report
      2009 Annual Research Report
  • [Presentation] Glass Modification by Continuous Wave Laser Backside Irradiation (CW-LBI) -Study on the mechanism-2009

    • Author(s)
      S.Itoh, H.Hidai, H.Tokura
    • Organizer
      Tnternat.Symp.Adv.Abrasive Technol.ISAAT 2009
    • Place of Presentation
      オーストラリア, ゴースト
    • Year and Date
      2009-09-28
    • Related Report
      2010 Final Research Report
  • [Presentation] CWレーザ背而照射法によるガラスの内部変質-メカニズムの検討-2009

    • Author(s)
      伊東翔, 比田井洋史, 戸倉和
    • Organizer
      2008年度精密工学会秋期大会学術講演会
    • Place of Presentation
      東北大学, 宮城県
    • Year and Date
      2009-09-18
    • Related Report
      2010 Final Research Report
  • [Presentation] 連続発振レーザによるガラスの変質とその現象観察2009

    • Author(s)
      比田井洋史, 伊東翔, 戸倉和
    • Organizer
      レーザ協会
    • Place of Presentation
      東京工業大学, 東京都
    • Year and Date
      2009-05-20
    • Related Report
      2010 Final Research Report
  • [Presentation] CWレーザ背面照射法(CW-LBI)によるガラスの内部変質一光吸収材金属の影響一2009

    • Author(s)
      山崎貴斗, 比田井洋史, 戸倉和
    • Organizer
      2009年度精密工学会春期大会学術講演会
    • Place of Presentation
      中央大学, 東京都
    • Year and Date
      2009-03-13
    • Related Report
      2010 Final Research Report
  • [Presentation] CWレーザ背面照射法(CW-LBI)によるガラスの内部変質-光吸収材金属の影響-2009

    • Author(s)
      山崎貴斗, 比田井洋史, 戸倉 和
    • Organizer
      2009年度精密工学会春期大会学術講演論文集
    • Place of Presentation
      中央大学
    • Year and Date
      2009-03-13
    • Related Report
      2008 Annual Research Report
  • [Presentation] CWレーザ背面照射法によるガラス内部のin-situ観察2008

    • Author(s)
      伊東翔, 比田井洋史, 戸倉和
    • Organizer
      2008年度砥粒加工学会学術講演会
    • Place of Presentation
      滋賀県立大学, 滋賀県
    • Year and Date
      2008-09-03
    • Related Report
      2010 Final Research Report
  • [Presentation] CWレーザ背面照射法によるガラス内部のin-situ観察2008

    • Author(s)
      伊東翔, 比田井洋史, 戸倉和
    • Organizer
      2008年度砥粒加工学会学術講演会
    • Place of Presentation
      滋賀県立大学
    • Year and Date
      2008-09-03
    • Related Report
      2008 Annual Research Report
  • [Remarks]

    • URL

      http://t2r2.star.titech.ac.jp/cgi-bin/researcherinfo.cgi?q_researcher_content_number=CTT100380597

    • Related Report
      2008 Annual Research Report

URL: 

Published: 2008-04-01   Modified: 2016-04-21  

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