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Dual-axis micro friction force miscroscopy pobe for dynamic measurements

Research Project

Project/Area Number 20360077
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Design engineering/Machine functional elements/Tribology
Research InstitutionNagoya University

Principal Investigator

FUKUZAWA Kenji  Nagoya University, 大学院・工学研究科, 教授 (60324448)

Co-Investigator(Kenkyū-buntansha) SHIKIDA Mitsuhiro  名古屋大学, 大学院・工学研究科, 准教授 (80273291)
ITOH Shintaro  名古屋大学, 大学院・工学研究科, 講師 (50377826)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥19,370,000 (Direct Cost: ¥14,900,000、Indirect Cost: ¥4,470,000)
Fiscal Year 2010: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2009: ¥8,710,000 (Direct Cost: ¥6,700,000、Indirect Cost: ¥2,010,000)
Fiscal Year 2008: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Keywords走査型プローブ顕微鏡 / 摩擦力顕微鏡 / トライボロジー / マイクロマシン / プローブ顕微鏡 / ナノ計測
Research Abstract

Friction force microscopy, a type of scanning probe microscopy, is a core method for measuring micro/nanotribological phenomena. In this study, we succeeded in developing a probe with an electrostatic actuator, which can provide the dynamic measurement and probe position control. In this probe, the lateral and vertical forces are measured without interfering with each other, by detecting the lateral and vertical forces with the double-cantilever and torsion beams, respectively. The electrode part that faces the double-cantilever beam was successfully fabricated by using micromachining techniques, which can provide an electrostatic actuator that drives the probe laterally.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (25 results)

All 2010 2009 2008 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (16 results) Remarks (2 results) Patent(Industrial Property Rights) (3 results) (of which Overseas: 2 results)

  • [Journal Article] Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy2010

    • Author(s)
      H.Amakawa, K.Fukuzawa, M.Shikida, H.Zhang, S.Itoh
    • Journal Title

      Tribology Online Vol.5

      Pages: 144-149

    • NAID

      130000308509

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Quantification of Friction Force on Dual-Axis Micro-Mechanical Probe for Friction Force Microscopy2010

    • Author(s)
      H.Amakawa, K.Fukuzawa, M.Shikida, H.Zhang, S.Itoh
    • Journal Title

      Tribology Online

      Volume: Vol.5 Pages: 144-149

    • NAID

      130000308509

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope2008

    • Author(s)
      H.Amakawa, K.Fukuzawa, M.Shikida, H.Zhang, S.Itoh
    • Journal Title

      Tribology Online Vol.3

      Pages: 356-360

    • NAID

      130000453664

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope2008

    • Author(s)
      H. Amakawa, K. Fukuzawa, M. Shikida, H. Zhang, S. Itoh
    • Journal Title

      Tribology Online 3

      Pages: 356-360

    • NAID

      130000453664

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] 摩擦力顕微鏡用二軸独立検出型マイクロ・メカニカルプローブの高精度化2010

    • Author(s)
      福澤健二, 雨川洋章, 辻弘明, 式田光宏, 伊藤伸太郎, 張賀東
    • Organizer
      第2回マイクロ・ナノ工学シンポジウム(pp.119-120)
    • Place of Presentation
      松江市くびきにメッセ
    • Year and Date
      2010-10-14
    • Related Report
      2010 Final Research Report
  • [Presentation] 摩擦力顕微鏡用二軸独立検出型マイクロ・メカニカルプローブの高精度化2010

    • Author(s)
      福澤健二, 雨川洋章, 辻弘明, 式田光宏, 伊藤伸太郎, 張賀東
    • Organizer
      第2回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      くにびきメッセ(松江市)
    • Year and Date
      2010-10-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Development of driving structure with dual-axis micro-mechanical probe for fricion forcemictoscope2010

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 辻弘明, 張賀東, 伊藤伸太郎
    • Organizer
      トライボロジー会議予稿集(2010-9, pp.495-496)
    • Place of Presentation
      福井
    • Year and Date
      2010-09-16
    • Related Report
      2010 Final Research Report
  • [Presentation] Development of driving structure with dual-axis micro-mechanical probe for fricion forcemictoscope2010

    • Author(s)
      H.Amakawa, K.Fukuzawa, M.Shikida, H.Tsuji, H.Zhang, S.Itoh
    • Organizer
      トライボロジー会議予稿集 福井 2010-9
    • Place of Presentation
      福井大学(福井市)
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] 摩擦力顕微鏡用二軸独立型プローブを用いた紫外線照射による潤滑膜の摩擦特性の変化の測定2010

    • Author(s)
      雨川洋章, 板倉誠史, 張賀東, 福澤健二, 式田光宏, 伊藤伸太郎
    • Organizer
      日本機械学会2010年度年次大会講演論文集(Vol.8, pp.227-228)
    • Place of Presentation
      名古屋工業大学
    • Year and Date
      2010-09-07
    • Related Report
      2010 Final Research Report
  • [Presentation] 摩擦力顕微鏡用二軸独立型プローブを用いた紫外線照射による潤滑膜の摩擦特性の変化の測定2010

    • Author(s)
      雨川洋章, 板倉誠史, 張賀東, 福澤健二, 式田光宏, 伊藤伸太郎
    • Organizer
      日本機械学会2010年度年次大会
    • Place of Presentation
      名古屋工業大学(名古屋市)
    • Year and Date
      2010-09-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] 摩擦力顕微鏡用二軸独立型プローブの摩擦力・鉛直力の検出におけるクロストーク効果2010

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      日本機械学会情報・知能・精密機器部門講演会講演論文集(pp.40-43)
    • Place of Presentation
      東京電機大学
    • Year and Date
      2010-03-16
    • Related Report
      2010 Final Research Report
  • [Presentation] 摩擦力顕微鏡用二軸独立型プローブの摩擦力・鉛直力の検出におけるクロストーク効果2010

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      日本機械学会IIP2011情報・知能・精密機器部門講演会講演論文集, pp. 40-43
    • Place of Presentation
      東京 電機大学
    • Year and Date
      2010-03-16
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高感度な摩擦力顕微鏡用二軸独立検出型マイクロ・メカニカルプローブ2010

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      第59期総会講演会講演論文集(No.103-1, pp.335-336)
    • Place of Presentation
      名古屋市名城大学
    • Year and Date
      2010-03-10
    • Related Report
      2010 Final Research Report
  • [Presentation] 高感度な摩擦力顕微鏡用二軸独立検出型マイクロ・メカニカルプローブ2010

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      日本機械学会東海支部第59期総会講演会講演論文集No. 103-1, pp. 335-336
    • Place of Presentation
      名古屋 名城大学
    • Year and Date
      2010-03-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Quantification of Friction Force for Dual-Axis Probe Friction Force Microscope2009

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      Proceedings of the ASME/STLE International Joint Tribology Conference(IJTC2009-15241)
    • Place of Presentation
      Memphis (USA)(CD-ROM)
    • Year and Date
      2009-10-20
    • Related Report
      2010 Final Research Report
  • [Presentation] Dual-Axis Micro-Mechanical Probe for Highly Sensitive Friction Force Microscope2009

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      Proceedings of World Tribology Congress 2009(WTC2009)261
    • Place of Presentation
      Kyoto International Conference Center
    • Year and Date
      2009-09-08
    • Related Report
      2010 Final Research Report
  • [Presentation] Dual-Axis Micro-Mechanical Probe for Highly Sensitive Friction Force Microscope2009

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      Proceedings of World Tribology Congress 2009 (WTC2009), p. 261
    • Place of Presentation
      Kyoto Internationl Conference Center
    • Year and Date
      2009-09-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Improved sensitivity of dual-axis micro-mechanical probe for friction force microscope2008

    • Author(s)
      雨川洋章, 福澤健二, 式田光宏, 張賀東, 伊藤伸太郎
    • Organizer
      トライボロジー会議予稿集名古屋(2008-9, pp.493-494)
    • Place of Presentation
      名古屋
    • Year and Date
      2008-09-17
    • Related Report
      2010 Final Research Report
  • [Presentation] Improved Sensitivity of Dual-Axis Micro-Mechanical Probe for Friction Force Microscope2008

    • Author(s)
      H. Amakawa, K. Fukuzawa, M. Shikida, H. Zhang, S. Itoh
    • Organizer
      トライボロジー会議予稿集名古屋2008-9(国際セッション)
    • Place of Presentation
      名古屋
    • Year and Date
      2008-09-17
    • Related Report
      2008 Annual Research Report
  • [Presentation] 高精度な摩擦力顕微鏡用二軸独立検出型マイクロ・メカニカルプローブの開発2008

    • Author(s)
      雨川洋章, 福澤健二, 張賀東, 伊藤伸太郎, 式田光宏
    • Organizer
      日本機械学会2008年度年次大会講演論文集(vol.8, pp.3-4)
    • Place of Presentation
      横浜国立大学
    • Year and Date
      2008-08-04
    • Related Report
      2010 Final Research Report
  • [Remarks] ホームページ等

    • URL

      http://www.mitsuya.nuem.nagoya-u.ac.jp/Research/mmprobe.html

    • Related Report
      2010 Final Research Report
  • [Remarks]

    • URL

      http://www.mitsuya.nuem.nagoya-u.ac.jp/Research/mmprobe.html

    • Related Report
      2010 Annual Research Report
  • [Patent(Industrial Property Rights)] 測定プローブ,試料表面測定装置,及び試料表面測定方法2010

    • Inventor(s)
      福澤健二, 式田光宏, 寺田諭
    • Industrial Property Rights Holder
      科学技術振興機構
    • Acquisition Date
      2010-07-09
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] 測定プローブ,試料表面測定装置,及び試料表面測定方法2009

    • Inventor(s)
      福澤健二, 式田光宏, 寺田諭
    • Industrial Property Rights Holder
      科学技術振興機構
    • Acquisition Date
      2009-07-07
    • Related Report
      2010 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 測定プローブ, 試料表面測定装置, 及び試料表面測定方法2009

    • Inventor(s)
      福澤健二, 式田光宏, 寺田諭
    • Industrial Property Rights Holder
      科学技術振興機構
    • Acquisition Date
      2009-07-07
    • Related Report
      2009 Annual Research Report
    • Overseas

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Published: 2008-04-01   Modified: 2016-04-21  

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