Combination of nano imprint and local mechano-chemical machining by micro robot

• Project/Area Number: 20360114
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Intelligent mechanics/Mechanical systems
• Research Institution: The University of Electro-Communications
• Principal Investigator: AOYAMA Hisayuki The University of Electro-Communications, 情報理工学研究科, 教授 (40159306)
• Co-Investigator(Kenkyū-buntansha): IWATA Futoshi 静岡大学, 工学部, 教授 (30262794) ; OOTA Akihiro 産業技術総合研究所, 計測標準部門, 室長 (80356641) ; 臼田 孝 産総研, 計測標準部門, 室長 (30356571)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥18,590,000 (Direct Cost: ¥14,300,000、Indirect Cost: ¥4,290,000); Fiscal Year 2010: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000); Fiscal Year 2009: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000); Fiscal Year 2008: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000)
• Keywords: 超小型機構 / ナノインプリント / 電磁石 / 圧電素子 / ボイスコイルモータ / 局所化学反応 / SPM / リニアスケール / 超小型自走機械 / ボイコイルスモータ / クングステン / マイクロカプセル

Research Abstract

In this project, the newly developed micro machining that is combined with nano imprint and local chemical micro reaction was proposed and the performances were experimentally proved. The micro actuator for nano imprint was also developed and implemented onto the micro robor that was composed of the piezo elements and electromagnets so that it could move like an inchworm with the nano stepping resolution. And the unique dispenser that can provide pico-liter resolution was designed and fabricated so that it could make such micro chemical reaction and successfully generate the accurate micro double layers capsule.

Research Products

• [Journal Article] Operation of Self-Sensitive Cantilever in Liquid for Multiprobe Manipulation (2010)
  • Author(s): F.Iwata, Y.Mizuguchi, K.Ozawa, T.Ushiki
  • Journal Title: Jpn.J.Appl.Phys 49
  • NAID: 210000069137
  • Peer Reviewed
• [Journal Article] Volume Control of Metal-Plating Deposition Using a Nanopipette Probe by Controlling Electric Charge (2010)
  • Author(s): S.Ito, T.Keino, F.Iwata
  • Journal Title: Jpn.J.Appl.Phys. 49
  • NAID: 210000069139
  • Peer Reviewed
• [Journal Article] マイクロ磁気プローブで操作された磁性体微粒子による生体試料のマニピュレーション (2010)
  • Author(s): 伊東聡, 岩田太, 中尾秀信, 七里元晴
  • Journal Title: 精密工学会誌 76 Pages: 64-68
  • NAID: 130000302339
  • Peer Reviewed
• [Journal Article] Correction and evaluation of the effect due to parasitic motion on primary accelerometer calibration (2010)
  • Author(s): A.Oota, T.Usuda, H.Nozato
  • Journal Title: Measurement 43 Pages: 714-725
  • Peer Reviewed
• [Journal Article] Calibration of vibration pick-ups with laser interferometry : part IV.Development of a shock acceleration exciter and calibration system (2010)
  • Author(s): A.Oota, T.Usuda, H.Nozato
  • Journal Title: Meas.Sci.Technol 21 Pages: 6107-6107
  • Peer Reviewed
• [Journal Article] Operation of Self-Sensitive Cantilever in Liquid for Multiprobe Manipulation (2010)
  • Author(s): F.Iwata, Y.Mizuguchi, K.Ozawa, T.Ushiki
  • Journal Title: Jpn.J.Appl.Phys Volume: 49
  • NAID: 210000069137
  • Peer Reviewed
• [Journal Article] Volume Control of Meta1-Plating Deposition Using a Nanopipette Probeby Controlling Electric Charge (2010)
  • Author(s): S.Ito, T.Keino, F.Iwata
  • Journal Title: Jpn.J.Appl.Phys. Volume: 49
  • Peer Reviewed
• [Journal Article] マイクロ磁気プローブで操作された磁性体微粒子による生体試料のマニピュレーション (2010)
  • Author(s): 伊東聡, 岩田太, 中尾秀信, 七里元晴
  • Journal Title: 精密工学会誌 Volume: 76 Pages: 64-68
  • NAID: 130000302339
  • Peer Reviewed
• [Journal Article] Correction and evaluation of the effect due to parasitic motion on primary accelerometer calibration (2010)
  • Author(s): A.Oota, T.Usuda, H.Nozato
  • Journal Title: Measurement Volume: 43 Pages: 714-725
  • Peer Reviewed
• [Journal Article] Calibration of vibration pick-ups with laser interferometry : part IV.Development of a shock acceleration exciter and calibration system (2010)
  • Author(s): A.Oota, T.Usuda, H.Nozato
  • Journal Title: Meas.Sci.Technol Volume: 21 Pages: 65107-65107
  • Peer Reviewed
• [Journal Article] Removal method of nano-cut debris for photomask repair using an atomic force microscopy system (2009)
  • Author(s): 岩田太
  • Journal Title: Jpn.J.Appl.Phys 48 Pages: 1-4
  • NAID: 210000067326
  • Peer Reviewed
• [Journal Article] マイクロ磁気プローブで操作された磁性体微粒子による生体試料のマニピュレーション (2009)
  • Author(s): 伊東聡
  • Journal Title: 精密工学会誌 76 Pages: 64-68
  • Peer Reviewed
• [Journal Article] Removal method of nano-cut debris for photomask repair using an atomic force microscopy system (2009)
  • Author(s): Futoshi Iwata
  • Journal Title: Jpn.J.Appl.Phys. 48 Pages: 1-4
  • NAID: 210000067326
  • Peer Reviewed
• [Journal Article] Development of the Orthogonal Micro Robot for Accurate Microscopic Operations (2008)
  • Author(s): Ohmi Fuchiwaki, Hisayuki Aoyama
  • Journal Title: Journal of Micro-Nano Mechatronics 4 Pages: 85-93
  • Peer Reviewed
• [Journal Article] Development of a Positioning & Compensation Device for a Versatile Micro Robot (2008)
  • Author(s): Ohmi Fuchiwaki, Hisayuki Aoyama
  • Journal Title: Proc. of the 2008 IEEE International Conference on Intelligent Robots and Systems 1 Pages: 83-88
  • Peer Reviewed
• [Journal Article] Multi-axial Micromanipulation Organized by Versatile Micro Robots and Micro Tweezers (2008)
  • Author(s): Ohmi Fuchiwaki, Hisayuki Aoyama
  • Journal Title: Proc. of IEEE Int. Conference on Robotics & Automation 1 Pages: 893-898
  • Peer Reviewed
• [Presentation] Development of a micro-encapsulation method using glass capillariesand thin needles for wide-variety and small quantity production (2010)
  • Author(s): Kiyoshi Terasaki, Naoya Hata, Shinnosuke Hirata, Hisayuki Aoyama
  • Organizer: The 8th France-Japan and 6th Europe-Asia Congresson Mechatronics
  • Place of Presentation: Yokohama, Japan
• [Presentation] Needle positioning method of the sub-pico-liter dispensing mechanism using vibration response of the needle (2010)
  • Author(s): Kazuki Hirose, Satoshi Adachihara, Yuuka Irie, Shinnosuke Hirata, Hisayuki Aoyama
  • Organizer: The 8th France-Japan and 6th Europe-Asia Congress on Mechatronics
  • Place of Presentation: Yokohama, Japan
• [Presentation] Microcapsule production by double micro pipette injecters (2010)
  • Author(s): Hisayuki Aoyama, Naoya Hata, Kiyoshi Terasaki, Shinnosuke Hirata
  • Organizer: 25th ASPE Annual Meeting
  • Place of Presentation: Atlanta, GA, USA
• [Presentation] Glass Pipette Bending by Multiple Peizo Driven Robots (2010)
  • Author(s): Hisayuki Aoyama, Kaori Koga, Sinnosuke Hirata
  • Organizer: The 7th International Workshop on Micro Factories
  • Place of Presentation: Daejeon, Korea
• [Presentation] Development of Piezo Driven Inchworm Micro X-Y Stage and Hemispherical Tilting Positioner with Microscope Head (2010)
  • Author(s): Hisayuki Aoyama, HiroyukiChiba, Masato Takizawa, YoheiItami, Yuuka Irie, Shinnosuke Hirata
  • Organizer: ICoPE2010 & 13th ICPE, International Conferenceon Precision Engineering
  • Place of Presentation: Singapore
• [Presentation] Development of Piezo Driven Hemispherical Gonio Micro Stage and Thin Wire String Puppet Micro Positioner (2010)
  • Author(s): Hisayuki Aoyama, MasatoTakizawa, Takumi Miyashita, AyaToyoshima, Yuuka Irie, Shinnosuke Hirata
  • Organizer: ACTUATOR 2010
  • Place of Presentation: Bremen, Germany
• [Presentation] Compact Micro Force Generatorwith Tandem Leaf Spring and VCA on MicroRobot for Micro Hardness and Stiffness Test (2010)
  • Author(s): Montree Pakkratoke, Natchapon Luekiaphaisan, Hisayuki Aoyama, Tassanai Saneponpiute
  • Organizer: IMEKO TC3, TC5 and TC22 Conferences
  • Place of Presentation: Pataya Thailand
• [Presentation] Development of Micro Hardness and Stiffness Testing System by Micro Robot for Biomaterials (2010)
  • Author(s): Montree Pakkratoke, SMG.Iroshana, Chisato Kanamori, Hisayuki Aoyama
  • Organizer: 4th International Symposium on Mechatronics
  • Place of Presentation: Singapore
• [Presentation] Combination of VCA based Micro Force Generater and Micro Robot for Micro Hardness and Stiffness Test (2010)
  • Author(s): Montree Pakkaratok, Nachapon Luekiatphaisan, Hisayuki Aoyama
  • Organizer: SICE Annual Conference
  • Place of Presentation: Taipe, Taiwan
• [Presentation] Omnidirectional Vision Based Robot Localization on Soccer Field by Particle Filter (2010)
  • Author(s): Chia Yang Chen, Chang Yao Ho, Ching-Chang Wong, Hisayuki Aoyama
  • Organizer: SICE Annual Conference
  • Place of Presentation: Taipe, Taiwan
• [Presentation] Pico Liter Dispenser with Needle and Tube (2010)
  • Author(s): Yoshiyuki Kato, Sadayuki Takahashi, Yuuka Irie, Hisayuki Aoyama
  • Organizer: Ceramic Interconnect and Ceramic Microsystems Technologies
  • Place of Presentation: Chiba, Japan
• [Presentation] Development of hemispherical manipulator and self-walking stage using piezoelectric actuators (2009)
  • Author(s): Masato Takizawa, Hisayuki Aoyama
  • Organizer: 3rd International Conference of Asian Society for Precision Engineering and Nanotechnology
  • Place of Presentation: Kokura, Fukuoka
  • Year and Date: 2009-11-12
• [Presentation] Development of Self-walking Small X-Y Stage and Manipulation Tool with Acoustic Force Display (2009)
  • Author(s): Hiroyuki Chiba, Hisayuki Aoyama
  • Organizer: 3rd International Conference of Asian Society for Precision Engineering and Nanotechnology
  • Place of Presentation: Kokura, Fukuoka
  • Year and Date: 2009-11-12
• [Presentation] Development of hemispherical manipulator and self-walking stage using piezoelectric actuators (2009)
  • Author(s): Masato Takizawa
  • Organizer: Proc.of 3rd International Conference of Asian Society for Precision Engineering and Nanotechnology
  • Place of Presentation: Kokura, Fukuoka
  • Year and Date: 2009-11-12
• [Presentation] Development of Self-walking Small X-Y Stage and Manipulation Tool with Acoustic Force Display (2009)
  • Author(s): Hiroyuki Chiba
  • Organizer: Proc.of 3rd International Conference of Asian Society for Precision Engineering and Nanotechnology
  • Place of Presentation: Kokura, Fukuoka
  • Year and Date: 2009-11-12
• [Presentation] Design and Development of Precision Micro Positioning Mechanism using ThinWire Connected Piezoelectric Actuators (2009)
  • Author(s): Takumi Miyashita
  • Organizer: Proc.of 3rd International Conference of Asian Society for Precision Engineering and Nanotechnology
  • Place of Presentation: Kokura, Fukuoka
  • Year and Date: 2009-11-12
• [Presentation] NANO IMPRINTING SYSTEM OPERATED BY MULTIPLE MICRO ROBOT (2009)
  • Author(s): Hisauiki Aoyama, Naoya Hata, Yoshiyuki Suzuki, Futoshi Iwata, Akihiro Ota, Takashi Usuda
  • Organizer: 26th Annual Meeting of American Society of PrecisionEngineering
  • Place of Presentation: Monterey, USA
  • Year and Date: 2009-10-11
• [Presentation] NANO IMPRINTING SYSTEM OPERATED BY MULTIPLE MICRO ROBOTS (2009)
  • Author(s): Hisayuki Aoyama
  • Organizer: Prof of 26^<th> Annual Meeting of American Society Of Precision Engineering
  • Place of Presentation: Monterey, California
  • Year and Date: 2009-10-11
• [Presentation] Development of of Micro Walking XY Stage with Piezo Elements (2008)
  • Author(s): Shunnsuke Kanegae, Hisayuki Aoyama
  • Organizer: 3rd Int.Conf on Positioning Technology
  • Place of Presentation: Hamamatsu, Japan
  • Year and Date: 2008-11-26
• [Presentation] Development of of Micro Walking XY Stage with Piezo Elements (2008)
  • Author(s): Shunnsuke Kanegae, Hisayuki Aoyama
  • Organizer: Proc. of 3rd Int. Conf on Positioning Technology
  • Place of Presentation: Hamamatsu, Japan
  • Year and Date: 2008-11-26
• [Presentation] Piezo Driven Micro Robot with Displacement Amplification Mechanism (2008)
  • Author(s): Kaori Koga, Hisayuki Aoyama
  • Organizer: Proc. of 3rd Int. Conf on Positioning Technology
  • Place of Presentation: Hamamatsu, Japan
  • Year and Date: 2008-11-26
• [Presentation] Design and Develolment of Wire Connected Micro Manipulation Mechanism (2008)
  • Author(s): Takumi Miyahsita, Hisayuki Aoyama
  • Organizer: Proc. of 3rd Int. Conf on Positioning Technology
  • Place of Presentation: Hamamatsu, Japan
  • Year and Date: 2008-11-26
• [Presentation] Feedback Nano Position Control for Micro Robot in XYθ Directions (2008)
  • Author(s): Naoya Hata, Hisayuki Aoyama
  • Organizer: Proc. of 3rd Int. Conf on Positioning Technology
  • Place of Presentation: Hamamatsu, Japan
  • Year and Date: 2008-11-26
• [Presentation] Piezo Drive XY Stage with Nano-Mamipulators for SEM Operation (2008)
  • Author(s): Shunsuke Kanegae, Hisayuki Aoyama
  • Organizer: 23rd Annual Meeting of American Society of Precision Engineering
  • Place of Presentation: Portland, USA
  • Year and Date: 2008-10-24
• [Presentation] Piezo Drive XY Stage with Nano-Mamipulators for SEM Operation (2008)
  • Author(s): Shunsuke Kanegae, Hisayuki Aoyama
  • Organizer: Proc. of 23rd Annual Meeting of ASPE
  • Place of Presentation: Portland, USA
  • Year and Date: 2008-10-24
• [Presentation] Precision Distance-Measurement of Versatile Piezo Driven Micro Robot Movement (2008)
  • Author(s): Masahiro Taguchi, Hisayuki Aoyama
  • Organizer: Proc. of 24th ISPE International Conference on CAD/CAM, Robotics & Factories of the Future
  • Place of Presentation: Koriyama, Japan
  • Year and Date: 2008-09-22
• [Presentation] Piezo driven micro robot with precise height adjustable four points contact legs (2008)
  • Author(s): Satoshi Kobayashi, Hisayuki Aoyama
  • Organizer: Proc. of 24th ISPE International Conference on CAD/CAM, Robotics & Factories of the Future
  • Place of Presentation: Koriyama, Japan
  • Year and Date: 2008-09-22
• [Presentation] Nano control for micro tilting semispherical stage supported by three piezo elements (2008)
  • Author(s): Toshio Koizumi, Hisayuki Aoyama
  • Organizer: Proc. of 24^<th> ISPE International Conference on CAD/CAM, Robotics & Factories of the Future
  • Place of Presentation: Koriyama, Japan
  • Year and Date: 2008-09-22
• [Presentation] Micro lens positioner composed of inertially actuated XY stage and precise sample holder (2008)
  • Author(s): Yuuka Irie, Hisayuki Aoyama
  • Organizer: Proc. of 24th ISPE International Conference on CAD/CAM, Robotics & Factories of the Future
  • Place of Presentation: Koriyama, Japan
  • Year and Date: 2008-09-22
• [Presentation] Development of Sub-pico Litter Dispensing Mechanism with Precise Automatic Optical Positioning System (2008)
  • Author(s): Yutaka Adachihara, Hisayuki Aoyama
  • Organizer: Proc. of 24th ISPE International Conference on CAD/CAM, Robotics & Factories of the Future
  • Place of Presentation: Koriyama, Japan
  • Year and Date: 2008-09-22
• [Presentation] Image Based Automatic Navigation with Three Micro Robots for Precise Operation (2008)
  • Author(s): Kotaro Ueda, Hisayuki Aoyama
  • Organizer: Proc. of 24th ISPE International Conference on CAD/CAM, Robotics & Factories of the Future
  • Place of Presentation: Koriyama, Japan
  • Year and Date: 2008-09-22
• [Presentation] Development of piezodriven small X-Y stage and micro tool turret with acoustic modulated micro force display for SEM operation (2008)
  • Author(s): Hiroyuki Chiba, Hisayuki Aoyama
  • Organizer: 3rd AsiaInternational Symposium on Mechatronics
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2008-08-26
• [Presentation] Development of nano manipulator based on an atomic force microscope coupled with a haptic device for SEM operation (2008)
  • Author(s): Satoshi Kawanishi, Hisayuki Aoyama, Futoshi Iwata
  • Organizer: 3rd Asia International Symposium on Mechatronics
  • Place of Presentation: Sapporo
  • Year and Date: 2008-08-26
• [Presentation] Development of piezodriven small X-Y stage and micro tool turret with acoustic modulated micro force display for SEM operation (2008)
  • Author(s): Hiroyuki Chiba, Hisayuki Aoyama
  • Organizer: Proc. of 3rd Asia International Symposium on Mechatronics
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2008-08-26
• [Presentation] Piezo Impact Driven X-Y stage for Accurate Micro Lens Alignment (2008)
  • Author(s): Yuuka Irie, Hisayuki Aoyama
  • Organizer: Proc. of 3rd Asia International Symposium on Mechatronics
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2008-08-26
• [Presentation] Development of nano manipulator based on an atomic force microscope coupled with a haptic device for SEM operation (2008)
  • Author(s): S. Kawanishi, H. Aoyama
  • Organizer: Proc. of 3rd Asia International Symposium on Mechatronics
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2008-08-26
• [Presentation] Crossover IT Mechatronics Remote Control : Innovative Education Methodology Development (2008)
  • Author(s): Taworn Benjanarasuth, Hisayuki Aoyama
  • Organizer: Proc. of 3rd Asia International Symposium on Mechatronics
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2008-08-26
• [Remarks] ホームページ等
  • URL: http://www.aolab.mce.uec.ac.jp