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Development and application of optically-driven micro rotator that rotates inside transparent solid substrate

Research Project

Project/Area Number 20360115
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionThe University of Tokushima

Principal Investigator

MATSUO Shigeki  徳島大学, 大学院・ソシオテクノサイエンス研究部, 准教授 (20294720)

Project Period (FY) 2008 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥18,460,000 (Direct Cost: ¥14,200,000、Indirect Cost: ¥4,260,000)
Fiscal Year 2011: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2010: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2009: ¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000)
Fiscal Year 2008: ¥7,410,000 (Direct Cost: ¥5,700,000、Indirect Cost: ¥1,710,000)
Keywordsマイクロ・ナノデバイス / 光ピンセット / マイクロマシン / フェムト秒レーザー加工 / エッチング / サファイア
Research Abstract

We fabricated an optical rotator that is confined in a microcavity inside a glass substrate, and rotated it by an non-contact technique of optical tweezers. The fabrication technique used consists of two steps :{ micro modification by focused femtosecond laser pulses} and{ selective etching of the modified region}. This is a unique technique that enables us to carry out a removal processing inside transparent solid substrate with a micro-meter resolution. In the present, study we developed such fabrication and rotation techniques.

Report

(6 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report   Self-evaluation Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (55 results)

All 2012 2011 2010 2009 2008 Other

All Journal Article (19 results) (of which Peer Reviewed: 19 results) Presentation (28 results) Remarks (6 results) Patent(Industrial Property Rights) (2 results) (of which Overseas: 1 results)

  • [Journal Article] Reduction of Pulse-to-Pulse Fluctuation in Laser Pulse Energy using the Optical Kerr Effect2012

    • Author(s)
      S. Matsuo, L. Yan, J. Si, T. Tomita and S. Hashimoto
    • Journal Title

      Optics Letters

      Volume: (掲載決定, 2012年5月掲載予定)

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Matrix calculus for axially symmetric polarized beam2011

    • Author(s)
      S. Matsuo
    • Journal Title

      Optics Express

      Volume: Vol.19 Issue: 13 Pages: 12815-12824

    • DOI

      10.1364/oe.19.012815

    • Related Report
      2011 Annual Research Report 2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Hashimoto and Tatsuya Okada, Femtosecond Laser-Assisted Etching of Fluoride Crystals2011

    • Author(s)
      S. Matsuo, K. Iwasa, T. Tomita, S.
    • Journal Title

      Journal of Laser Micro/ Nanoengineering

      Volume: Vol.6 Issue: 3 Pages: 245-248

    • DOI

      10.2961/jlmn.2011.03.0014

    • Related Report
      2011 Annual Research Report 2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Micro Three-dimensional Removal Processing inside Sapphire Substrate2010

    • Author(s)
      K. Tokumi, S. Matsuo, S. Kiyama, T. Tomita and S. Hashimoto
    • Journal Title

      Journal of Laser Micro/ Nanoengineering

      Volume: Vol.5 Issue: 2 Pages: 179-182

    • DOI

      10.2961/jlmn.2010.02.0015

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Micro Three-dimensional Removal Processing inside Sapphire Substrate2010

    • Author(s)
      K. Tokumi, S. Matsuo, S. Kiyama, T. Tomita, S. Hashimoto
    • Journal Title

      Journal of Laser Micro/Nanoengineering Vol.5

      Pages: 179-182

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Micro Three-dimensional Removal Processing inside Sapphire Substrate2010

    • Author(s)
      K.Tokumi, et al
    • Journal Title

      Journal of Laser Micro/Nanoengineering

      Volume: 5 Pages: 179-182

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH2009

    • Author(s)
      S. Matsuo, H. Sumi, S. Kiyama, T. Tomita and S. Hashimoto
    • Journal Title

      Applied Surface Science

      Volume: Vol.255 Issue: 24 Pages: 9758-9760

    • DOI

      10.1016/j.apsusc.2009.04.065

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Examination of etching agent and etching mechanism on femtosecond laser microfabrication of channels inside vitreous silica substrates2009

    • Author(s)
      S. Kiyama, S. Matsuo, S. Hashimoto and Y. Morihira
    • Journal Title

      The Journal of Physical Chemistry C

      Volume: Vol.113 Issue: 27 Pages: 11560-11566

    • DOI

      10.1021/jp900915r

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Laser Fabrication and Manipulation of an Optical Rotator Embedded inside a Transparent Solid Material2009

    • Author(s)
      S. Kiyama, T. Tomita, S. Matsuo and S. Hashimoto
    • Journal Title

      Journal of Laser Micro/ Nanoengineering

      Volume: Vol.4 Issue: 1 Pages: 18-21

    • DOI

      10.2961/jlmn.2009.01.0004

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH2009

    • Author(s)
      Matsuo, H. Sumi, S. Kiyama, T. Tomita, S. Hashimoto
    • Journal Title

      Applied Surface Science Vol.255

      Pages: 9758-9760

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Laser Fabrication and Manipulation of an Optical Rotator Embedded inside a Transparent Solid Material2009

    • Author(s)
      S. Kiyama, T. Tomita, S. Matsuo, S. Hashimoto
    • Journal Title

      Journal of Laser Micro/Nanoengineering Vol.4

      Pages: 18-21

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH2009

    • Author(s)
      S.Matsuo, et al.
    • Journal Title

      Applied Surface Science 255

      Pages: 9758-9760

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Laser Fabrication and Manipulation of an Optical Rotator Embedded inside a Transparent Solid Material2009

    • Author(s)
      S.Kiyama, et al.
    • Journal Title

      Journal of Laser Micro/Nanoengineering 4

      Pages: 18-21

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Three-Dimensional Residue-Free Volume Removal inside Sapphire by High-Temperature Etching after Irradiation of Femtosecond Laser Pulses2008

    • Author(s)
      S. Matsuo, K. Tokumi, T. Tomita and S. Hashimoto
    • Journal Title

      Laser Chemistry

      Volume: Vol.2008 Pages: 1-4

    • DOI

      10.1155/2008/892721

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Laser microfabrication and rotation of ship-in-a-bottle optical rotators2008

    • Author(s)
      S. Matsuo, S. Kiyama, Y. Shichijo, T. Tomita, S. Hashimoto, Y. Hosokawa and H. Masuhara
    • Journal Title

      Applied Physics Letters

      Volume: Vol.93 Issue: 5

    • DOI

      10.1063/1.2967872

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Hashimoto, Three- Dimensional Residue-Free Volume Removal inside Sapphire by High-Temperature Etching after Irradiation of Femtosecond Laser Pulses2008

    • Author(s)
      S. Matsuo, K. Tokumi, T. Tomita, S.
    • Journal Title

      Laser Chemistry Vol.2008

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Masuhara, Laser microfabrication and rotation of ship-in-a-bottle optical rotators2008

    • Author(s)
      S. Matsuo, S. Kiyama, Y. Shichijo, T. Tomita, S. Hashimoto, Y. Hosokawa, H.
    • Journal Title

      Applied Physics Letters Vol.93

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Laser microfabrication and rotation of ship-in-a-bottle optical rotators2008

    • Author(s)
      Matsuo S., et al
    • Journal Title

      Applied Physics Letters 93

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Three-Dimensional Residue-Free Volume Removal inside Sapphire by High-Temperature Etching after Irradiation of Femtosecond Laser Pulses2008

    • Author(s)
      Matsuo S., et al
    • Journal Title

      Laser Chemistry 2008

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] ガラスのフェムト秒レーザー支援エッチングにおける照射パラメータ依存性2012

    • Author(s)
      松尾繁樹
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-15
    • Related Report
      2011 Annual Research Report
  • [Presentation] Optical rotator inside glass substrate fabricated by femtosecond laser processing2011

    • Author(s)
      S. Matsuo
    • Organizer
      ISOT2011 International Symposium on Optomechatronic Technologies
    • Place of Presentation
      香港中文大学(香港)
    • Year and Date
      2011-11-02
    • Related Report
      2011 Final Research Report
  • [Presentation] Optical rotator inside glass substrate fabricated by femtosecond laser processing2011

    • Author(s)
      Shigeki Matsuo
    • Organizer
      International Symposium on Optomechatronic Technologies 2011
    • Place of Presentation
      香港中文大学(香港)(招待講演)
    • Year and Date
      2011-11-02
    • Related Report
      2011 Annual Research Report
  • [Presentation] Rotation Formulas in the Jones Calculus Extended to Axially Symmetrically Polarized Beam2011

    • Author(s)
      Shigeki Matsuo
    • Organizer
      Frontiers in Optics 2011
    • Place of Presentation
      サンノゼコンベンションセンター(アメリカ)
    • Year and Date
      2011-10-20
    • Related Report
      2011 Annual Research Report
  • [Presentation] 軸対称偏光の行列計算法:ジョーンズ計算法の拡張2011

    • Author(s)
      松尾繁樹
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Year and Date
      2011-09-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] Femtosecond laser-assisted etching of Fluoride crystals2011

    • Author(s)
      Shigeki Matsuo, et al
    • Organizer
      The 12th International Symposium on Laser Precision Microfabrication
    • Place of Presentation
      高松市
    • Year and Date
      2011-06-08
    • Related Report
      2010 Annual Research Report
  • [Presentation] フッ化物結晶のフェムト秒レーザー支援エッチング2011

    • Author(s)
      松尾繁樹, 他
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      厚木市
    • Year and Date
      2011-03-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] フェムト秒レーザー照射によるガラスのエッチングレート増大のメカニズム2010

    • Author(s)
      松尾繁樹, 他
    • Organizer
      レーザー学会第408回研究会
    • Place of Presentation
      尾道市
    • Year and Date
      2010-11-29
    • Related Report
      2010 Annual Research Report
  • [Presentation] フェムト秒レーザーパルスを照射したガラスのエッチング特性の温度・濃度依存性2010

    • Author(s)
      松尾繁樹, 他
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎市
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] ガラスのフェムト秒レーザー支援エッチングにおける選択性のエッチング条件依存性2010

    • Author(s)
      松尾繁樹, 他
    • Organizer
      2010年光化学討論会
    • Place of Presentation
      千葉市
    • Year and Date
      2010-09-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] Femtosecond laser-assisted micro removal processing inside transparent solids2010

    • Author(s)
      S. Matsuo
    • Organizer
      The 7th Asia-Pacific Laser Symposium
    • Place of Presentation
      Seogwipo KAL Hotel(韓国済州島)
    • Year and Date
      2010-05-12
    • Related Report
      2011 Final Research Report
  • [Presentation] Femtosecond laser-assisted micro removal processing inside transparent solids2010

    • Author(s)
      S. Matsuo
    • Organizer
      The 7th Asia-Pacific Laser Symposium
    • Place of Presentation
      Seogwipo, Korea
    • Year and Date
      2010-05-12
    • Related Report
      2010 Annual Research Report 2010 Self-evaluation Report
  • [Presentation] フェムト秒レーザを用いた透明固体材料の内部微細加工技術の開発2009

    • Author(s)
      松尾繁樹
    • Organizer
      第72回 レーザ加工学会
    • Place of Presentation
      名古屋市
    • Year and Date
      2009-12-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] Laser Internal Modification Plus Wet Etching for Micro-structuring Crystalline and Glassy Materials2009

    • Author(s)
      S. Matsuo
    • Organizer
      The 28th International Congress on Applications of Lasers & Electro-Optics
    • Place of Presentation
      Hilton in Walt Disney World Resort(Orlando, U.S.A.)
    • Year and Date
      2009-11-03
    • Related Report
      2011 Final Research Report
  • [Presentation] Laser Internal Modification Plus Wet Etching for Micro- structuring Crystalline and Glassy Materials2009

    • Author(s)
      S. Matsuo
    • Organizer
      The 28th International Congress on Applications of Lasers & Electro-Optics
    • Place of Presentation
      Orlando, U.S.A.(招待講演)
    • Year and Date
      2009-11-03
    • Related Report
      2010 Self-evaluation Report
  • [Presentation] Laser Internal Modification Plus Wet Etching for Micro-structuring Crystalline and Glassy Materials2009

    • Author(s)
      S.Matsuo
    • Organizer
      The 28th International Congress on Applications of Lasers & Electro-Optics
    • Place of Presentation
      Orlando
    • Year and Date
      2009-11-03
    • Related Report
      2009 Annual Research Report
  • [Presentation] Micro three-dimensional removal processing inside sapphire substrate2009

    • Author(s)
      S. Matsuo et al.
    • Organizer
      The 5th International Congress on Laser Advanced Materials Processing
    • Place of Presentation
      神戸コンベンションセンター(神戸市)
    • Year and Date
      2009-06-30
    • Related Report
      2011 Final Research Report
  • [Presentation] Micro three-dimensional removal processing inside sapphire substrate2009

    • Author(s)
      S. Matsuo, et al.
    • Organizer
      The 5th International Congress on Laser Advanced Materials Processing
    • Place of Presentation
      Kobe, Japan
    • Year and Date
      2009-06-30
    • Related Report
      2010 Self-evaluation Report
  • [Presentation] Micro three-dimensional removal processing inside sapphire substrate2009

    • Author(s)
      S.Matsuo, et al.
    • Organizer
      The 5th International Congress on Laser Advanced Materials Processing
    • Place of Presentation
      神戸
    • Year and Date
      2009-06-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] Three-dimensional Microstructuring inside Transparent Solid Substrates Assisted by Femtosecond Laser Pulses2009

    • Author(s)
      Matsuo S., et al
    • Organizer
      PIERS 2009 in Beijing
    • Place of Presentation
      Beijing
    • Year and Date
      2009-03-25
    • Related Report
      2008 Annual Research Report
  • [Presentation] Microfluidic devices のための埋め込み型可動構造物の作製2009

    • Author(s)
      松尾繁樹, 他
    • Organizer
      レーザー学会学術講演会第29回年次大会
    • Place of Presentation
      徳島市
    • Year and Date
      2009-01-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] ホウケイ酸ガラスのフェムト秒レーザー誘起選択エッチング2008

    • Author(s)
      松尾繁樹, 他
    • Organizer
      第27回固体・表面光化学討論会
    • Place of Presentation
      徳島市
    • Year and Date
      2008-11-22
    • Related Report
      2008 Annual Research Report
  • [Presentation] フェムト秒レーザー照射と高温エッチングによるサファイアの内部加工2008

    • Author(s)
      松尾 繁樹, 他
    • Organizer
      第27回固体・表面光化学討論会
    • Place of Presentation
      徳島市
    • Year and Date
      2008-11-22
    • Related Report
      2008 Annual Research Report
  • [Presentation] フェムト秒レーザー支援エッチング加工よる微小流体制御素子の開発2008

    • Author(s)
      松尾 繁樹, 他
    • Organizer
      第27回固体・表面光化学討論会
    • Place of Presentation
      徳島市
    • Year and Date
      2008-11-22
    • Related Report
      2008 Annual Research Report
  • [Presentation] Optically Driven Micro Rotator embedded in Solid Substrate2008

    • Author(s)
      Matsuo S., et al
    • Organizer
      Microprocesses and Nanotechnology 2008
    • Place of Presentation
      福岡市
    • Year and Date
      2008-10-29
    • Related Report
      2008 Annual Research Report
  • [Presentation] Femtosecond laser assisted etching of borosilicate glasses with aqueous solution of KOH2008

    • Author(s)
      Matsuo S., et al
    • Organizer
      6th International Conference on Photo-Excited Processes and Applications
    • Place of Presentation
      札幌市
    • Year and Date
      2008-09-09
    • Related Report
      2008 Annual Research Report
  • [Presentation] Femtosecond laser assisted etching of borosilicate glasses2008

    • Author(s)
      Matsuo S., et al
    • Organizer
      the 9th International Symposium on Laser Precision Microfabrication
    • Place of Presentation
      Qubec city
    • Year and Date
      2008-06-17
    • Related Report
      2008 Annual Research Report
  • [Presentation] Laser fabrication and manipulation of optical rotator embedded inside a transparent solid material2008

    • Author(s)
      Matsuo S., et al
    • Organizer
      the 9th International Symposium on Laser Precision Microfabrication
    • Place of Presentation
      Qubec city
    • Year and Date
      2008-06-17
    • Related Report
      2008 Annual Research Report
  • [Remarks] 研究紹介記事の掲載Nature Photonics, Vol.2, p. 590, 2008.

    • URL

      http://www.eco.tokushima-u.ac.jp/a1/matsuos/matsuos_j.html

    • Related Report
      2011 Final Research Report
  • [Remarks]

    • URL

      http://www.eco.tokushima-u.ac.jp/al/matsuos/matsuos_j.html

    • Related Report
      2011 Annual Research Report
  • [Remarks] ホームページ

    • URL

      http://www.eco.tokushima-u.ac.jp/a1/matsuos/

    • Related Report
      2010 Self-evaluation Report
  • [Remarks]

    • URL

      http://www.eco.tokushima-u.ac.jp/al/matsuos/

    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.eco.tokushima-u.ac.jp/al/matsuos/

    • Related Report
      2009 Annual Research Report
  • [Remarks]

    • URL

      http://www.eco.tokushima-u.ac.jp/w3/ecoA-l/matsuos/

    • Related Report
      2008 Annual Research Report
  • [Patent(Industrial Property Rights)] レーザー光束制御装置、レーザー光束エネルギー安定化装置、レーザー光束制御方法、及びレーザー光束エネルギー安定化方法2011

    • Inventor(s)
      松尾繁樹
    • Industrial Property Rights Holder
      徳島大学
    • Filing Date
      2011-09-02
    • Related Report
      2011 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] レーザー光束制御装置及びレーザー光束エネルギー安定化装置2010

    • Inventor(s)
      松尾繁樹
    • Industrial Property Rights Holder
      徳島大学
    • Industrial Property Number
      2010-203367
    • Filing Date
      2010-09-10
    • Related Report
      2011 Final Research Report 2010 Annual Research Report 2010 Self-evaluation Report

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Published: 2008-04-01   Modified: 2016-04-21  

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