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Development of the growth technique of truly bulk GaN single crystals

Research Project

Project/Area Number 20360140
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionOsaka University

Principal Investigator

MORI Yusuke  Osaka University, 工学研究科, 教授 (90252618)

Co-Investigator(Kenkyū-buntansha) KITAOKA Yasuo  大阪大学, 工学研究科, 教授 (70444560)
IMADE Mamoru  大阪大学, 工学研究科, 特任助教 (40457007)
KAWAMURA Fumio  大阪大学, 工学研究科, 研究員 (80448092)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥19,370,000 (Direct Cost: ¥14,900,000、Indirect Cost: ¥4,470,000)
Fiscal Year 2010: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2009: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2008: ¥13,000,000 (Direct Cost: ¥10,000,000、Indirect Cost: ¥3,000,000)
Keywords窒化ガリウム / Naフラックス法 / 液相エピタキシャル / 溶液攪拌 / GaN / Seeded Growth / 成長モード / 低転位化 / 長時間成長 / LPE / 対流シミュレーション
Research Abstract

The seeded growth of bulk GaN single crystals on a small GaN seed was performed by Na flux method. The addition of carbon into Ga/Na solution prevented the formation of polycrystals on a crucible wall, resulted in the promotion of GaN growth on a seed. Sr, Ba and Ca additives changed the growth habit from pyramidal shape to prism shape. In addition, the growth rate on a seed dramatically increased by stirring the solution. Using these techniques, the long-term growth of 600h enabled to obtain the prism-shaped bulk GaN single crystal (9.0mm width and 11mm height, with full widths at half maximum of GaN (10-11) X-ray rocking curve of 20~50 arcsec).

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (64 results)

All 2011 2010 2009 2008

All Journal Article (13 results) (of which Peer Reviewed: 13 results) Presentation (49 results) Book (2 results)

  • [Journal Article] Growth of Large GaN Single Crystals on High-Quality GaN Seed by Carbon-Added Na Flux Method2010

    • Author(s)
      M. Imade, Y. Hirabayashi, Y. Konishi, H. Ukegawa, N. Miyoshi, M. Yoshimura, T. Sasaki, Y. Kitaoka, Y. Mori
    • Journal Title

      Appl. Phys. Express 3

    • NAID

      10026495522

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Growth of GaN crystals by Na flux method2010

    • Author(s)
      Y. Mori, Y. Kitaoka, M. Imade, F. Kawamura, N. Miyoshi, M. Yoshimura, T. Sasaki
    • Journal Title

      phys. stat. sol. (a) 207

      Pages: 1283-1286

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Growth of GaN crystals by Na flux LPE method2010

    • Author(s)
      Y.Mori, et al.
    • Journal Title

      PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

      Volume: 207 Pages: 1283-1286

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of Large GaN Single Crystals on High-Quality GaN Seed by Carbon-Added Na Flux Method2010

    • Author(s)
      M.Imade, et al.
    • Journal Title

      APPLIED PHYSICS EXPRESS 3

      Pages: 75501-3

    • NAID

      10026495522

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of GaN Crystals by Na Flux LPE Method2010

    • Author(s)
      Y.Mori, et al.
    • Journal Title

      Phys, Status Solidi C (In press)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study of the metastable region in the growth of GaN using the Na flux method2009

    • Author(s)
      F. Kawamura, M. Morishita, N. Miyoshi, M. Imade, M. Yoshimura, Y. Kitaoka, Y. Mori, T. Sasaki,
    • Journal Title

      J. Cryst. Growth 311

      Pages: 4647-4651

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Growth of GaN single crystals with extremely low dislocation density by two-step dislocation reduction2009

    • Author(s)
      F. Kawamura, M. Tanpo, N. Miyoshi, M. Imade, M. Yoshimura, Y. Mori, Y. Kitaoka, T. Sasaki
    • Journal Title

      J. Cryst. Growth 311

      Pages: 3019-3024

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Study of the metastable region in the growth of GaN using the Na flux method2009

    • Author(s)
      F.Kawamura, et al.
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 4647-4651

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of GaN single crystals with extremely low dislocat ion density by two-step dislocation reduction.2009

    • Author(s)
      F. Kawamura, et al.
    • Journal Title

      Journal of Crystal Growth (In press)

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of high-quali ty large GaN crystal by Na fluxLPE method.2009

    • Author(s)
      F. Kawamura et, al.
    • Journal Title

      Proceedings of SPIE Photonics West (In press)

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of carbon additive on increases in the growth rate of 2 in GaN single crystals in the Na flux method2008

    • Author(s)
      F. Kawamura, M. Morishita, M. Tanpo, M. Imade, M. Yoshimura, Y. Kitaoka, Y. Mori, T. Sasaki
    • Journal Title

      Journal of Crystal Growth 310

      Pages: 3946-3949

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Global analysis of GaN growth using a solution technique2008

    • Author(s)
      D. Kashiwagi, R. Gejo, Y. Kangawa, L. Liu, F. Kawamura, Y. Mori, T. Sasaki, K. Kakimoto
    • Journal Title

      Journal of Crystal Growth 310,Issues 7-9

      Pages: 1790-1793

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effect of carbon additive on increases in the growth rate of 2 in GaN single crystals in the Na flux method.2008

    • Author(s)
      F. Kawamura, et al.
    • Journal Title

      Journal of Crystal Growth 310

      Pages: 3946-3949

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] Li添加Naフラックス法によるGaN単結晶育成2011

    • Author(s)
      本城正智, 他
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] Ba添加Naフラックス法を用いたGaN単結晶育成2011

    • Author(s)
      今林弘毅, 他
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] Ca-Li共添加Naフラックス法によるGaN単結晶のSeeded Growth2011

    • Author(s)
      今出完, 他
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] Naフラックス法を用いた無極性面GaN結晶成長における添加物効果2011

    • Author(s)
      升本恵子, 他
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] Growth GaN single crystals by Ca- and Ba-added Na flux method2011

    • Author(s)
      H.Ukegawa, et al.
    • Organizer
      SPIE Photonics West 2011
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2011-01-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] Growth of bulk GaN crystal by Na flux method2011

    • Author(s)
      森勇介, 北岡康夫, 今出完
    • Organizer
      SPIE Photonics West 7939-01
    • Place of Presentation
      USA
    • Year and Date
      2011-01-24
    • Related Report
      2010 Final Research Report
  • [Presentation] Growth of bulk GaN crystal by Na flux method2011

    • Author(s)
      Y.Mori, et al.
    • Organizer
      SPIE Photonics West 2011
    • Place of Presentation
      San Francisco, USA(invited)
    • Year and Date
      2011-01-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] Growth of bulk GaN crystal by Na flux method2010

    • Author(s)
      Y.Mori, Y.Kitaoka, M.Imade, N. Miyoshi, M.Yoshimura, T.Sasaki
    • Organizer
      2010International Symposium on Crystal Growth A-03
    • Place of Presentation
      Korea
    • Year and Date
      2010-11-08
    • Related Report
      2010 Final Research Report
  • [Presentation] Growth of bulk GaN crystal by Na flux method2010

    • Author(s)
      Y.Mori, et al.
    • Organizer
      2010 International Symposium on Crystal Growth
    • Place of Presentation
      Korea(invited)
    • Year and Date
      2010-11-08
    • Related Report
      2010 Annual Research Report
  • [Presentation] Na フラックス法によるバルクGaN 結晶育成技術2010

    • Author(s)
      森勇介、北岡康夫、今出完、吉村政志、佐々木孝友
    • Organizer
      GaN 系プラネットコンシャスデバイス・材料の現状
    • Place of Presentation
      東北大学
    • Year and Date
      2010-11-04
    • Related Report
      2010 Final Research Report
  • [Presentation] Naフラックス法によるバルクGaN結晶育成技術2010

    • Author(s)
      森勇介, 他
    • Organizer
      GaN系プラネットコンシャスデバイス・材料の現状
    • Place of Presentation
      東北大学(招待講演)
    • Year and Date
      2010-11-04
    • Related Report
      2010 Annual Research Report
  • [Presentation] Growth of bulk GaN crystal by Na flux method2010

    • Author(s)
      Y.Mori, Y.Kitaoka, M.Imade, N. Miyoshi, M.Yoshimura, T.Sasaki
    • Organizer
      Korea-Japan Workshop on Semiconductors for Energy Saving and Harvesting
    • Place of Presentation
      Korea
    • Year and Date
      2010-10-11
    • Related Report
      2010 Final Research Report
  • [Presentation] Growth of bulk GaN crystal by Na flux method2010

    • Author(s)
      Y.Mori, et al.
    • Organizer
      Korea-Japan Workshop on Semiconductors for Energy Saving and Harvesting
    • Place of Presentation
      Korea(invited)
    • Year and Date
      2010-10-11
    • Related Report
      2010 Annual Research Report
  • [Presentation] CAICISSによるGaN(1010)表面構造の解析2010

    • Author(s)
      梅本智司, 他
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] Ca添加Naフラックス法による六角柱状GaN単結晶育成2010

    • Author(s)
      小西悠介, 他
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Baを添加したNaフラックス法を用いたGaN単結晶成長における成長方位制御2010

    • Author(s)
      請川紘嗣, 他
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Naフラックス法によるロッド状GaN種結晶を用いたバルク成長2010

    • Author(s)
      村上航介, 他
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Seeded growth of GaN crystals grown on a spontaneous nucleated crystal by Na flux method2010

    • Author(s)
      Y.Konishi, et al.
    • Organizer
      The 16th International Conference on Crystal Growth
    • Place of Presentation
      Beijing, China
    • Year and Date
      2010-08-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] Seeded growth of GaN single crystals by Na flux method2010

    • Author(s)
      M.Imade, Y. Hirabayashi, Y. Konishi, H. Ukegawa, N. Miyoshi, M.Yoshimura, T.Sasaki, Y.Kitaoka, Y.Mori
    • Organizer
      29th Electronic Materials Symposium(EMS-29) Fr1-2
    • Place of Presentation
      Shizuoka
    • Year and Date
      2010-07-16
    • Related Report
      2010 Final Research Report
  • [Presentation] Seeded Growth of GaN single crystals by Na flux method2010

    • Author(s)
      M.Imade, et al.
    • Organizer
      29th Electronic Materials Symposium(EMS-29)
    • Place of Presentation
      ラフォーレ修善寺、静岡県
    • Year and Date
      2010-07-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] Growth of bulk GaN crystal by Na flux method2010

    • Author(s)
      Y.Mori, Y.Kitaoka, M.Imade, N. Miyoshi, M.Yoshimura, T.Sasaki
    • Organizer
      3rd International Symposium on Growth of Nitrides Mo1-1
    • Place of Presentation
      France
    • Year and Date
      2010-07-05
    • Related Report
      2010 Final Research Report
  • [Presentation] Growth of Bulk GaN Crystal by Na Flux Method2010

    • Author(s)
      Y.Mori, et al.
    • Organizer
      3rd International Symposium on Growth of Nitrides
    • Place of Presentation
      Montpellier, France(invited)
    • Year and Date
      2010-07-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] Seeded growth of GaN crystals grown on a spontaneous nucleated crystal by Na flux2010

    • Author(s)
      Y.Konishi, et al.
    • Organizer
      3rd International Symposium on Growth of III-Nitrides
    • Place of Presentation
      Montpellier, France
    • Year and Date
      2010-07-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] Naフラックス法によるバルクGaN結晶育成技術2010

    • Author(s)
      森勇介, 他
    • Organizer
      第二回窒化物半導体結晶成長講演会, チュートリアル講演
    • Place of Presentation
      三重大学(招待講演)
    • Year and Date
      2010-05-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Naフラックス法による自然核発生単結晶を用いたGaN結晶成長モードの制御2010

    • Author(s)
      小西悠介, 他
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] Naフラックス法によるバルクGaN結晶育成技術2010

    • Author(s)
      森勇介, 他
    • Organizer
      窒化物ナノ・エレクトロニクス材料研究センター講演会
    • Place of Presentation
      東北大学
    • Year and Date
      2010-01-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Na フラックス法によるバルク GaN 結晶育成技術2010

    • Author(s)
      森勇介、北岡康夫、今出完、吉村政志、佐々木孝友
    • Organizer
      窒化物ナノ・エレクトロニクス材料研究センター講演会,バルク GaN単結晶育成技術の現状
    • Place of Presentation
      東北大学
    • Year and Date
      2010-01-07
    • Related Report
      2010 Final Research Report
  • [Presentation] Sr添加したNaフラックス法による無極性面GaN基板の育成2009

    • Author(s)
      勝池悟史, 他
    • Organizer
      第38回結晶成長国内会議
    • Place of Presentation
      名古屋大学
    • Year and Date
      2009-11-14
    • Related Report
      2009 Annual Research Report
  • [Presentation] Growth of GaN Crystals by Na Flux LPE Method2009

    • Author(s)
      Y.Mori, Y.Kitaoka, M.Imade, F. Kawamura, N. Miyoshi, M.Yoshimura, T.Sasaki
    • Organizer
      The 8th International Conference on Nitride Semiconductors (ICNS-8)
    • Place of Presentation
      Jeju,Korea,B1(invit ed)
    • Year and Date
      2009-10-19
    • Related Report
      2010 Final Research Report
  • [Presentation] Decrease of Dislocations in GaN Crystals by Controlling Growth Face in Na Flux Method2009

    • Author(s)
      Y.Hirabayashi, et al.
    • Organizer
      The 8th International Conference on Nitride Semiconductors
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2009-10-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] Low-Resistive Germanium-Doped GaN Crystal Prepared by Na Flux Method2009

    • Author(s)
      B.Yuan, et al.
    • Organizer
      The 8th International Conference on Nitride Semiconductors
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2009-10-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] Growth of GaN Crystals by Na Flux LPE Method2009

    • Author(s)
      Y.Mori, et al.(invited)
    • Organizer
      The 8th International Conference on Nitride Semiconductors
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2009-10-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] NaフラックスLPE法におけるGaN単結晶成長モード制御による低転位化2009

    • Author(s)
      平林康弘, 他
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Low-resistive Germanium-doped GaN crystal prepared by Na flux method2009

    • Author(s)
      B.Yuan, et al.
    • Organizer
      28th Electronic Materials Symposium
    • Place of Presentation
      滋賀県
    • Year and Date
      2009-07-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Low-resistive Germanium-doped GaN Crystal prepared by Na flux method2009

    • Author(s)
      卜淵, 他
    • Organizer
      第1回窒化物半導体結晶成長講演会
    • Place of Presentation
      東京農工大学
    • Year and Date
      2009-05-16
    • Related Report
      2009 Annual Research Report
  • [Presentation] NaフラックスLPE法を用いたGaN単結晶成長モード制御による低転位化の検討2009

    • Author(s)
      平林康弘, 他
    • Organizer
      第1回窒化物半導体結晶成長講演会
    • Place of Presentation
      東京農工大学
    • Year and Date
      2009-05-16
    • Related Report
      2009 Annual Research Report
  • [Presentation] Growth of High-quality GaN Crystal by Na Flux Method2009

    • Author(s)
      H.Ukegawa, et al.
    • Organizer
      2009 International Meeting for Future of Electron Devices, Kansai
    • Place of Presentation
      関西大学
    • Year and Date
      2009-05-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] Naフラックス法によるLPE-GaN単結晶の低圧育成2009

    • Author(s)
      請川 紘嗣
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-03-31
    • Related Report
      2008 Annual Research Report
  • [Presentation] Growth of high-quality large GaN crystal by Na flux LPEmethod.2009

    • Author(s)
      F. Kawamura
    • Organizer
      SPIE Photonics West
    • Place of Presentation
      San Jose, California
    • Year and Date
      2009-01-02
    • Related Report
      2008 Annual Research Report
  • [Presentation] Growth of high-quality large GaN crystal by Na flux LPE2009

    • Author(s)
      F. Kawamura, N.Miyoshi, M.Imade, M.Yoshimura, Y.Kitaoka, Y.Mori, T.Sasaki
    • Organizer
      SPIE Photonics West 2009 LASE 2009, paper7216-10
    • Place of Presentation
      San Jose, USA.
    • Related Report
      2010 Final Research Report
  • [Presentation] Naフラックス法を用いたGaN厚膜単結晶育成による高品質化の検討2008

    • Author(s)
      平林 康弘
    • Organizer
      第38回結晶成長国内会議
    • Place of Presentation
      仙台市戦災復興記念館
    • Year and Date
      2008-11-05
    • Related Report
      2008 Annual Research Report
  • [Presentation] NaフラックスLPE法による無極性GaN結晶育成2008

    • Author(s)
      勝池 悟史
    • Organizer
      第38回結晶成長国内会議
    • Place of Presentation
      仙台市戦災復興記念館
    • Year and Date
      2008-11-05
    • Related Report
      2008 Annual Research Report
  • [Presentation] Recent progress in the growth of GaN single crystals Using the Na flux method.2008

    • Author(s)
      F. Kawamura
    • Organizer
      Asian Core Workshop
    • Place of Presentation
      光州(韓国)
    • Year and Date
      2008-10-23
    • Related Report
      2008 Annual Research Report
  • [Presentation] Growth of two-inch GaN single crystals with thethickness of several mm in Na-flux method.2008

    • Author(s)
      S. Katsuike
    • Organizer
      International Workshop on NitrideSemiconductors 2008
    • Place of Presentation
      Montrex, Switzerland
    • Year and Date
      2008-10-08
    • Related Report
      2008 Annual Research Report
  • [Presentation] Naフラックス法によるGaN結晶の導電性制御2008

    • Author(s)
      森 勇介
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学
    • Year and Date
      2008-09-02
    • Related Report
      2008 Annual Research Report
  • [Presentation] Growth of thick GaN single crystals us ing the Na fluxLPE method.2008

    • Author(s)
      F. Kawamura
    • Organizer
      Second International Sympos ium onGrowth of Ill Nitrides
    • Place of Presentation
      Izu, Japan
    • Year and Date
      2008-07-08
    • Related Report
      2008 Annual Research Report
  • [Presentation] Improvement of crystal1ini ty of m-plane substrateby Na flux LPE method.2008

    • Author(s)
      S. Katsuike
    • Organizer
      Second International Symposium onGrowth of Ill Nitrides
    • Place of Presentation
      Izu, Japan
    • Year and Date
      2008-07-08
    • Related Report
      2008 Annual Research Report
  • [Presentation] Recent progress in the growth of GaN single crystals using the Na flux method2008

    • Author(s)
      F. Kawamura, S. Katsuike, Y. Hirabayashi, Y. Kitano, N. Miyoshi, M.Imade, M.Yoshimura, Y.Kitaoka, T.sasaki, Y.Mori
    • Organizer
      Asia Core Workshop on Wide Bandgap Semiconductors(ACW)
    • Place of Presentation
      Kwangju, Korea.
    • Related Report
      2010 Final Research Report
  • [Presentation] Growth of highquality large GaN crystal by Na flux LPE method2008

    • Author(s)
      Y.Mori, F. Kawamura, N. Miyoshi, M.Imade, M. Tanpo, S. Katsuike, Y. Hirabayashi, Y.Kitaoka, T.Sasaki
    • Organizer
      The 4th Asian Conference on Crystal Growth and Crystal Technology (CGCT-4)
    • Place of Presentation
      Miyagi, Japan.
    • Related Report
      2010 Final Research Report
  • [Book] 次世代パワー半導体(p99-p109)2009

    • Author(s)
      森勇介, 他
    • Total Pages
      400
    • Publisher
      エヌ・ティー・エス
    • Related Report
      2009 Annual Research Report
  • [Book] Na フラックスLP 法による大型高品質GaN 結晶育成技術の現状と展望, Vol.50,No.12008

    • Author(s)
      森勇介, 川村史朗, 北岡康夫, 吉村政志, 佐々木孝友
    • Publisher
      豊田合成技報
    • Related Report
      2010 Final Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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