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Fabrication of injection-type infrared light emitting devices for high-speed integrated circuits and investigation of the light emission mechanism

Research Project

Project/Area Number 20360144
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionKumamoto University

Principal Investigator

NAKAMURA Yusui  Kumamoto University, 大学院・自然科学研究科, 教授 (00381004)

Co-Investigator(Kenkyū-buntansha) TSUCHIYA Masahiro  独立行政法人情報通信研究機構, 上席研究員 (50183869)
NAKA Yoshihiro  熊本大学, 大学院・自然科学研究科, 助教 (30305007)
YAMAMOTO Naokatsu  独立行政法人情報通信研究機構, 第一研究部門新世代ネットワーク研究センター, 研究員 (60328523)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥19,110,000 (Direct Cost: ¥14,700,000、Indirect Cost: ¥4,410,000)
Fiscal Year 2010: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2009: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2008: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Keywords電気・電子材料 / シリコンフォトニクス / 赤外発光素子 / 発光素子 / 酸化物 / 希土類 / 赤外光 / 集積回路 / 酸化珪素 / エルビウム
Research Abstract

It is important to establish optical interconnection technology for high-speed integrated circuits. We have proposed and developed a new light emitting device, which is composed of an Er-doped oxide layer sandwiched by wide bandgap semiconductors. Using the devices, we have successfully observed infrared electroluminescence at wavelength of 1.5μm from low operation voltage of 10V at room temperature.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (46 results)

All 2010 2009 2008

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (38 results) Patent(Industrial Property Rights) (4 results)

  • [Journal Article] エルビウム添加シリコン酸化膜を用いた電流注入型赤外発光素子の低電圧化2010

    • Author(s)
      中良弘, 曽根田真也, 中野誠一, 疋田創, 住吉猛, 土屋昌弘, 中村有水
    • Journal Title

      電子情報通信学会論文誌C Vol.J93-C, No.8

      Pages: 264-265

    • NAID

      110007681462

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] エルビウム添加シリコン酸化膜を用いた電流注入型赤外発光素子の低電圧化2010

    • Author(s)
      中良弘
    • Journal Title

      電子情報通信学会論文誌C

      Volume: J93-C Pages: 264-265

    • NAID

      110007681462

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optical Characterization and X-ray Photoelectron Spectroscopy of Erbium-Doped Silicon Suboxide Infrared Emitting at 1.5μm2008

    • Author(s)
      Y.Naka, N.Yamamoto, M.Kishi, D.Miyawaki, T.Yoshida, T.Minami, K.Ito, M.Tsuchiya, Y.Nakamura
    • Journal Title

      Jpn.J.Appl.Phys. Vol.47, No.12

      Pages: 8871-8873

    • NAID

      40016389623

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Optical Characterization and X-ray Photoelectron Spectroscopyof Erbium-Doped Silicon Suboxide Infrared Emitting at 1.5μm2008

    • Author(s)
      Y. Naka
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 8871-8873

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] 真空蒸着及びミストCVDを用いて形成した酸化スズ薄膜のp型化に関する検討2010

    • Author(s)
      新田貴史, 高山和也, 森中将嵩, 須惠耕二, 中良弘, 中村有水
    • Organizer
      平成22年度応用物理学会九州支部学術講演会
    • Place of Presentation
      27Fp-4(九州大学伊都キャンパス)
    • Year and Date
      2010-11-27
    • Related Report
      2010 Final Research Report
  • [Presentation] 赤外発光を有するEr添加SnO_2薄膜のアニール条件最適化2010

    • Author(s)
      住吉猛, 疋田創, 木須光一郎, 中良弘, 中村有水
    • Organizer
      平成22年度応用物理学会九州支部学術講演会
    • Place of Presentation
      27Fp-5(九州大学伊都キャンパス)
    • Year and Date
      2010-11-27
    • Related Report
      2010 Final Research Report
  • [Presentation] ミストCVD法による酸化亜鉛薄膜のP型化に関する検討2010

    • Author(s)
      小野隆博, 後藤雅典, 杉野雅俊, 牧雅俊, 須惠耕二, 中良弘, 中村有水
    • Organizer
      平成22年度応用物理学会九州支部学術講演会
    • Place of Presentation
      27Fp-6(九州大学伊都キャンパス)
    • Year and Date
      2010-11-27
    • Related Report
      2010 Final Research Report
  • [Presentation] 赤外発光を有するEr添加SnO_2薄膜のアニール条件最適化2010

    • Author(s)
      住吉猛
    • Organizer
      平成22年度応用物理学会九州支部学術講演会
    • Place of Presentation
      九州大学 伊都キャンパス
    • Year and Date
      2010-11-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] ミストCVD法による酸化亜鉛薄膜のP型化に関する検討2010

    • Author(s)
      小野隆博
    • Organizer
      平成22年度応用物理学会九州支部学術講演会
    • Place of Presentation
      九州大学 伊都キャンパス
    • Year and Date
      2010-11-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] 真空蒸着及びミストCVDを用いて形成した酸化スズ薄膜のp型化に関する検討2010

    • Author(s)
      新田貴史
    • Organizer
      平成22年度応用物理学会九州支部学術講演会
    • Place of Presentation
      九州大学 伊都キャンパス
    • Year and Date
      2010-11-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] テルビウム添加酸化スズ薄膜の緑色発光特性2010

    • Author(s)
      田中俊洋, 中良弘, 中村有水
    • Organizer
      2010年秋季第71回応用物理学会学術講演会
    • Place of Presentation
      15p-ZJ-8(長崎大学文教キャンパス)
    • Year and Date
      2010-09-15
    • Related Report
      2010 Final Research Report
  • [Presentation] テルビウム添加酸化スズ薄膜の緑色発光特性2010

    • Author(s)
      田中俊洋
    • Organizer
      平成22年度応用物理学会秋季学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Growth condition dependennce on thickness distribution of ZnO thin film formed by mist-CVD2010

    • Author(s)
      M.Maki, M.Sugino, M.Goto, T.Ono, K.Sue, Y.Naka, Y.Nakamura
    • Organizer
      The Proceedings of The 6th International Workshop on Zinc Oxide and Related Materials
    • Place of Presentation
      G24(268-269)(Bayi Hotel, Changchun, China.)
    • Year and Date
      2010-08-06
    • Related Report
      2010 Final Research Report
  • [Presentation] Growth condition dependennce on thickness distribution of ZnO thin film formed by mist-CVD2010

    • Author(s)
      M.Maki
    • Organizer
      The 6th International Workshop on Zinc Oxide and Related Materials
    • Place of Presentation
      Bayi Hotel, Changchun, China
    • Year and Date
      2010-08-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] 1.5μm Photoluminescence Properties of Er-doped SnO_22010

    • Author(s)
      K.Kisu, T.Hikida, T.Sumiyoshi, Y.Naka, M.Tsuchiya, Y.Nakamura
    • Organizer
      The Proceedings of The 37th International Symposium on Compound Semiconductors
    • Place of Presentation
      TuP36(Takamatsu Symbol Tower, Kagawa, Japan.)
    • Year and Date
      2010-06-01
    • Related Report
      2010 Final Research Report
  • [Presentation] 1.5um Photoluminescence Properties of Er-doped SnO22010

    • Author(s)
      K.Kisu
    • Organizer
      The 37th International Symposium on Compound Semiconductors
    • Place of Presentation
      Takamatsu Symbol Tower, Kagawa, Japan
    • Year and Date
      2010-06-01
    • Related Report
      2010 Annual Research Report
  • [Presentation] Optical Properties of Europium-doped Tin dioxide2010

    • Author(s)
      R.A.Inyangat, K.Kisu, T.Tanaka, Y.Naka, Y.Nakamura
    • Organizer
      The 4th International Student Conference on Advanced Science and Technology
    • Place of Presentation
      (Ege University, Izmir, Turkey.)
    • Year and Date
      2010-05-25
    • Related Report
      2010 Final Research Report
  • [Presentation] エルビウム添加シリコン酸化膜を用いた光導波路の特性評価2010

    • Author(s)
      中良弘, 山本直克, 伊藤功三郎, 高武明真, 土屋昌弘, 中村有水
    • Organizer
      2010年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      17p-P3-6(東海大学湘南キャンパス)
    • Year and Date
      2010-03-17
    • Related Report
      2010 Final Research Report
  • [Presentation] エルビウム添加シリコン酸化膜を用いた光導波路の特性評価2010

    • Author(s)
      中良弘
    • Organizer
      2010年春季 第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] ミストCVD法による低コストなP型酸化亜鉛薄膜の形成2010

    • Author(s)
      須惠耕二
    • Organizer
      平成21年度琉球大学機器・分析技術研究会
    • Place of Presentation
      琉球大学
    • Year and Date
      2010-03-05
    • Related Report
      2009 Annual Research Report
  • [Presentation] 電流注入によるEr添加Si酸化膜からの1.5μm赤外発光2009

    • Author(s)
      中良弘, 曽根田真也, 中野誠一, 疋田創, 住吉猛, 土屋昌弘, 中村有水
    • Organizer
      電子情報通信学会技術研究報告
    • Place of Presentation
      OPE2009-168(41-45)(機械振興会館(東京都))
    • Year and Date
      2009-12-18
    • Related Report
      2010 Final Research Report
  • [Presentation] 電流注入によるEr添加Si酸化膜からの1.5μm赤外発光2009

    • Author(s)
      中良弘
    • Organizer
      光エレクトロニクス研究会
    • Place of Presentation
      機械振興会館
    • Year and Date
      2009-12-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] ミストCVD法による無添加酸化亜鉛薄膜の形成と光学的評価2009

    • Author(s)
      後藤雅典, 小野隆博, 須惠耕二, 中良弘, 中村有水
    • Organizer
      平成21年度応用物理学会九州支部学術講演会
    • Place of Presentation
      22Aa-8(熊本大学)
    • Year and Date
      2009-11-22
    • Related Report
      2010 Final Research Report
  • [Presentation] Er添加SiOx薄膜の赤外発光における内部量子効率測定と作製条件の最適化2009

    • Author(s)
      住吉猛, 疋田創, 中野誠一, 曽根田真也, 高武明真, 中良弘, 山本直克, 土屋昌弘, 中村有水
    • Organizer
      平成21年度応用物理学会九州支部学術講演会
    • Place of Presentation
      21Ca-1(熊本大学)
    • Year and Date
      2009-11-21
    • Related Report
      2010 Final Research Report
  • [Presentation] Er添加Si酸化膜への電流注入による赤外発光2009

    • Author(s)
      中野誠一, 曽根田真也, 高武明真, 中良弘, 土屋昌弘, 中村有水
    • Organizer
      平成21年度応用物理学会九州支部学術講演会
    • Place of Presentation
      21Ca-2(熊本大学)
    • Year and Date
      2009-11-21
    • Related Report
      2010 Final Research Report
  • [Presentation] Er添加SiOx薄膜の赤外発米における内部量子効率測定と作製条件の最適化2009

    • Author(s)
      住吉猛
    • Organizer
      2009年 応用物理学会 九州支部 学術講演会
    • Place of Presentation
      熊本大学
    • Year and Date
      2009-11-21
    • Related Report
      2009 Annual Research Report
  • [Presentation] Er添加Si酸化膜への電流注入による赤外発光2009

    • Author(s)
      中野誠一
    • Organizer
      2009年 応用物理学会 九州支部 学術講演会
    • Place of Presentation
      熊本大学
    • Year and Date
      2009-11-21
    • Related Report
      2009 Annual Research Report
  • [Presentation] ミストCVD法による無添加酸化亜鉛薄膜の形成と光学的評価2009

    • Author(s)
      後藤雅典
    • Organizer
      2009年 応用物理学会 九州支部 学術講演会
    • Place of Presentation
      熊本大学
    • Year and Date
      2009-11-21
    • Related Report
      2009 Annual Research Report
  • [Presentation] Infrared photo-luminescence properties of Er-doped SnO_22009

    • Author(s)
      K.Kisu, K.Koyama, S.Soneda, A.Kotake, Y.Naka, M.Tsuchiya, Y.Nakamura
    • Organizer
      The Proceedings of The Workshop of Impurity Based Electroluminescent Devices and Materials (IBEDM-2009)
    • Place of Presentation
      Abstr#50(The Hotel Golden Bahia de Tossa & Spa, Tossa de Mar, Spain.)
    • Year and Date
      2009-10-03
    • Related Report
      2010 Final Research Report
  • [Presentation] Infrared electro-luminescence at 1.5μm from Er-doped SiOx2009

    • Author(s)
      Y.Nakamura, S.Soneda, S.Nakano, T.Hikida, T.Sumiyoshi, K.Kisu, Y.Naka, M.Tsuchiya
    • Organizer
      The Proceedings of The Workshop of Impurity Based Electroluminescent Devices and Materials (IBEDM-2009)(Invited talk)
    • Place of Presentation
      Abstr#25(The Hotel Golden Bahia de Tossa & Spa, Tossa de Mar, Spain.)
    • Year and Date
      2009-10-02
    • Related Report
      2010 Final Research Report
  • [Presentation] Infrared photo-luminescence properties of Er-doped SnO_22009

    • Author(s)
      木須光一郎
    • Organizer
      The Workshop of Impurity Based Electroluminescent Devices and Materials(IBEDM-2009)
    • Place of Presentation
      Spain, Tossa de Mar
    • Year and Date
      2009-10-02
    • Related Report
      2009 Annual Research Report
  • [Presentation] Infrared electro-luminescence at 1.5μm from Er-doped SiOx2009

    • Author(s)
      Y.Nakamura
    • Organizer
      The Workshop of Impurity Based Electroluminescent Devices and Materials(IBEDM-2009)
    • Place of Presentation
      Spain, Tossa de Mar
    • Year and Date
      2009-10-02
    • Related Report
      2009 Annual Research Report
  • [Presentation] Er添加SiOx薄膜の1.5μm発光における内部量子効率測定2009

    • Author(s)
      疋田創, 住吉猛, 中野誠一, 曽根田真也, 高武明真, 中良弘, 山本直克, 土屋昌弘, 中村有水
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      30a-TC-4(富山大学)
    • Year and Date
      2009-09-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Er添加SnO_2薄膜の赤外発光特性2009

    • Author(s)
      木須光一郎, 高山和也, 曽根田真也, 高武明真, 中良弘, 土屋昌弘, 中村有水
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      30a-TC-5(富山大学)
    • Year and Date
      2009-09-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Er添加SnO_2薄膜の赤外発光特性2009

    • Author(s)
      木須光一郎
    • Organizer
      2009年秋季 第70回応用物理学会 学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] Er添加SiOx薄膜の1.5μm発光における内部量子効率測定2009

    • Author(s)
      疋田創
    • Organizer
      2009年秋季 第70回応用物理学会 学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] Er添加Si酸化膜を用いた電流注入による1.5μm赤外発光2009

    • Author(s)
      中野誠一, 曽根田真也, 美並聖, 高武明真, 中良弘, 山本直克, 土屋昌弘, 中村有水
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      30a-P4-27(筑波大学筑波キャンパス)
    • Year and Date
      2009-03-30
    • Related Report
      2010 Final Research Report
  • [Presentation] Er添加Si酸化膜を用いた電流注入による1.5μm赤外発光2009

    • Author(s)
      中野誠一
    • Organizer
      2009年春季第56回応用物理学会関係連合講演会
    • Place of Presentation
      筑波、日本
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] 1.5μm Photoluminescence from Conductive Er-doped SnOx2008

    • Author(s)
      K.Kisu, S.Soneda, A.Kotake, Y.Naka, N.Yamamoto, M.Tsuchiya, Y.Nakamura
    • Organizer
      Extended Abstracts of the 2008 International Conference on Solid State Devices and Materials
    • Place of Presentation
      P-8-4(558-559)(Tsukuba International Congress Center, Ibaraki, Japan.)
    • Year and Date
      2008-09-25
    • Related Report
      2010 Final Research Report
  • [Presentation] 1.5μm Photoluminescence from Conductive Er-doped SnO_x2008

    • Author(s)
      K. Kisu
    • Organizer
      2009 International Conference on Solid Sate Devices and Materials (SSDM-2009)
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2008-09-25
    • Related Report
      2008 Annual Research Report
  • [Presentation] 1.5μm Light Emission from Er-doped SiOx with Widegap Carrier Injection Layers2008

    • Author(s)
      S.Soneda, T.Minami, K.Ito, A.Kotake, S.Nakano, Y.Naka, N.Yamamoto, M.Tsuchiya, Y.Nakamura
    • Organizer
      Proceedings of 5th International Conference on Group IV Photonics
    • Place of Presentation
      WP26(Hilton Sorrento Palace, Sorrento, Italy)
    • Year and Date
      2008-09-17
    • Related Report
      2010 Final Research Report
  • [Presentation] 1.5μm light emission from Er-doped low-x SiO_x with widegap semiconductor carrier injection layers2008

    • Author(s)
      S. Soneda
    • Organizer
      5th International Conference on Group IVPhotonics (GPF-2008)
    • Place of Presentation
      Sorrento, Italy
    • Year and Date
      2008-09-17
    • Related Report
      2008 Annual Research Report
  • [Patent(Industrial Property Rights)] 発光素子およびその製造方法、ならびに発光パネルおよび発光装置2009

    • Inventor(s)
      中村有水, 中良弘, 田中俊洋
    • Industrial Property Rights Holder
      熊本大学
    • Filing Date
      2009-02-25
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] 発光素子およびその製造方法、ならびに発光パネルおよび発光装置2009

    • Inventor(s)
      中村 有水, 中 良弘, 田中 俊洋
    • Industrial Property Rights Holder
      熊本大学
    • Industrial Property Number
      2009-042539
    • Filing Date
      2009-02-25
    • Related Report
      2008 Annual Research Report
  • [Patent(Industrial Property Rights)] 発光素子およびその製造方法2008

    • Inventor(s)
      中村有水, 中良弘, 木須光一郎
    • Industrial Property Rights Holder
      中村有水
    • Filing Date
      2008-09-11
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] 発光素子およびその製造方法2008

    • Inventor(s)
      中村 有水, 中 良弘, 木須 光一郎
    • Industrial Property Rights Holder
      中村 有水
    • Industrial Property Number
      2008-264614
    • Filing Date
      2008-09-11
    • Related Report
      2008 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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