Study of a novel field emitter with a built-in electrostatic lens.
| Project/Area Number |
20360156
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Shizuoka University |
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Principal Investigator |
MIMURA Hidenori Shizuoka University, 電子工学研究所, 教授 (90144055)
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| Co-Investigator(Kenkyū-buntansha) |
AOKI Toru 静岡大学, 電子工学研究所, 准教授 (10283350)
NEO Yoichro 静岡大学, 電子工学研究所, 准教授 (50312674)
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| Project Period (FY) |
2008 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥18,980,000 (Direct Cost: ¥14,600,000、Indirect Cost: ¥4,380,000)
Fiscal Year 2010: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2009: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2008: ¥10,010,000 (Direct Cost: ¥7,700,000、Indirect Cost: ¥2,310,000)
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| Keywords | 電界放出電子源 / 集束 / ダブルゲート電子源 / 静電レンズ / 電子ビーム / 電界放出微小電子源 / 電子ビーム集束 / ナイフエッジ法 / 多段型電界放出微小電子源 / アインツェルレンズ / 焦点形成 / 電子ビーム露光法 / 多段方電界放出微小電子源 / 電界放射微小電子源 / ダブルゲート微小電子源 / エッチバック法 |
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| Research Abstract |
We have proposed a novel field emitter with a built-in electrostatic lens. This field emitter is fabricated by the etch-back method. The focusing electrode is located around the extraction gate electrode and its height is easily controlled. We have fabricated the field emitter whose focusing electrode is located below the extraction gate electrode. Such the field emitter has an excellent focusing characteristic without significant decrease of the emission current, even under the strong focusing condition. The electron beam emitted from the developed field emitter shows good symmetry.
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Report
(4 results)
Research Products
(33 results)
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[Journal Article] Emission and focusing characteristics of volcano-structured double-gated field emitter arrays2009
Author(s)
Y.Neo, M.Takeda, T.Soda, M.Nagao, T.Yoshida, S.Kanemaru, T.Sakai, K.Hagiwara, N.Saito, T.Aoki, H.Mimura
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Journal Title
J.Vac.Sci.& Technol.B Vol.27
Pages: 701-704
NAID
Related Report
Peer Reviewed
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[Journal Article] Focusing characteristics of double-gated field emitter arrays with a lower height of the focusing electrode2008
Author(s)
Y.Neo, T.Soda, M.Takeda, M.Nagao, t.Yoshida, C.Yasumuro, S.Kanemaru, T.Sakai, K.Hagiwara, N.Saito, T.Aoki, H.Mimura
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Journal Title
NAID
Related Report
Peer Reviewed
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[Presentation] 静電レンズ一体型FEAの試作と評価2009
Author(s)
田上智也, 小池昭文, 高木康男, 長尾昌善, 吉田知也, 金丸正剛, 根尾陽一郎, 青木徹, 三村秀典
Organizer
電子情報通信学会電子デバイス研究会
Place of Presentation
福井
Year and Date
2009-10-15
Related Report
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[Presentation] 高精細FED用ダブルゲートFEA2008
Author(s)
武田匡史, 長尾昌善, 吉田知也, 金丸正剛, 堺俊克, 萩原啓, 斉藤信雄, 根尾陽一郎, 青木徹, 三村秀典
Organizer
2008年映像情報メディア学会年次大会
Place of Presentation
福岡
Year and Date
2008-08-29
Related Report
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