Study of a novel field emitter with a built-in electrostatic lens.

• Project/Area Number: 20360156
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: Shizuoka University
• Principal Investigator: MIMURA Hidenori Shizuoka University, 電子工学研究所, 教授 (90144055)
• Co-Investigator(Kenkyū-buntansha): AOKI Toru 静岡大学, 電子工学研究所, 准教授 (10283350) ; NEO Yoichro 静岡大学, 電子工学研究所, 准教授 (50312674)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥18,980,000 (Direct Cost: ¥14,600,000、Indirect Cost: ¥4,380,000); Fiscal Year 2010: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2009: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2008: ¥10,010,000 (Direct Cost: ¥7,700,000、Indirect Cost: ¥2,310,000)
• Keywords: 電界放出電子源 / 集束 / ダブルゲート電子源 / 静電レンズ / 電子ビーム / 電界放出微小電子源 / 電子ビーム集束 / ナイフエッジ法 / 多段型電界放出微小電子源 / アインツェルレンズ / 焦点形成 / 電子ビーム露光法 / 多段方電界放出微小電子源 / 電界放射微小電子源 / ダブルゲート微小電子源 / エッチバック法

Research Abstract

We have proposed a novel field emitter with a built-in electrostatic lens. This field emitter is fabricated by the etch-back method. The focusing electrode is located around the extraction gate electrode and its height is easily controlled. We have fabricated the field emitter whose focusing electrode is located below the extraction gate electrode. Such the field emitter has an excellent focusing characteristic without significant decrease of the emission current, even under the strong focusing condition. The electron beam emitted from the developed field emitter shows good symmetry.

Research Products

• [Journal Article] Emission and focusing characteristics of a quintuple-gated field emitter array (2011)
  • Author(s): A.Koike, T.Tagami, Y.Takagi, M.Nagao, T.Yoshida, T.Aoki, Y.Neo, H.Mimura
  • Journal Title: Appl.Phys.Express Vol.4
  • NAID: 10027783732
  • Peer Reviewed
• [Journal Article] Emission and focusing characteristics of a quintuple-gated field emitter array (2011)
  • Author(s): A.Koike, T.Tagami, Y.Takagi, M.Nagao, T.Yoshida, T.Aoki Y.Neo, H.Mimura
  • Journal Title: Applied Physics Express Volume: 4
  • NAID: 10027783732
  • Peer Reviewed
• [Journal Article] 真空ナノエレクトロニクスの現状と展望 (2009)
  • Author(s): 三村秀典
  • Journal Title: 応用物理 78巻 Pages: 301-307
  • NAID: 10024751312
  • Peer Reviewed
• [Journal Article] Fabrication of a field emitter array with a built-in einzel lens (2009)
  • Author(s): M.Nagao, T.Yoshida, S.Kanemaru, Y.Neo, H.Mimura
  • Journal Title: Jpn.J.Appl.Phys. Vol.48
  • NAID: 210000066986
  • Peer Reviewed
• [Journal Article] Emission and focusing characteristics of volcano-structured double-gated field emitter arrays (2009)
  • Author(s): Y.Neo, M.Takeda, T.Soda, M.Nagao, T.Yoshida, S.Kanemaru, T.Sakai, K.Hagiwara, N.Saito, T.Aoki, H.Mimura
  • Journal Title: J.Vac.Sci.& Technol.B Vol.27 Pages: 701-704
  • NAID: 120001756786
  • Peer Reviewed
• [Journal Article] Fabrication of a field emitter array with a built-in einzel lens (2009)
  • Author(s): M.Nagao, T.Yoshida, S.Kanemaru, Y.Neo, H.Mimura
  • Journal Title: Japanese Journal Applied Physics 48
  • NAID: 210000066986
  • Peer Reviewed
• [Journal Article] 真空ナノエレクトロニクスの現状と展望 (2009)
  • Author(s): 三村秀典
  • Journal Title: 応用物理 78 Pages: 301-307
  • NAID: 10024751312
  • Peer Reviewed
• [Journal Article] Emission and focusing characteristics of vocano-structured double-gatedfield emitter arrays (2009)
  • Author(s): Y. Neo, T. Aoki, H. Mimura
  • Journal Title: Journal Vacuum Science & Technology B 27 Pages: 701-704
  • Peer Reviewed
• [Journal Article] Focusing characteristics of double-gated field emitter arrays with a lower height of the focusing electrode (2008)
  • Author(s): Y.Neo, T.Soda, M.Takeda, M.Nagao, t.Yoshida, C.Yasumuro, S.Kanemaru, T.Sakai, K.Hagiwara, N.Saito, T.Aoki, H.Mimura
  • Journal Title: App.Phys.Express. Vol.1
  • NAID: 10025080448
  • Peer Reviewed
• [Journal Article] Fabrication of volcano-structured double-gated field emitter array by etch-back technique (2008)
  • Author(s): T.Soda, M.Nagao, C.Yasumuro, S.Kanemaru, T.Sakai, N.Saito, Y.Neo, T.Aoki, H.Mimura
  • Journal Title: Japanese Journal of Applied Physics Vol.47 Pages: 5252-5255
  • Peer Reviewed
• [Journal Article] Focusing Characteristics of Double-Gated Field Emitter Arrays with a Lower Height of the Focusing Electrode (2008)
  • Author(s): Y. Neo, T. Aoki, H. Mimura
  • Journal Title: Applied Physics Express 1
  • NAID: 10025080448
  • Peer Reviewed
• [Journal Article] Fabrication of Volcano-Structured Double-Gate FEA by Etch-Back Technique (2008)
  • Author(s): T. Soda. Y. Neo, T. Aoki, H. Mimura
  • Journal Title: Japanese Journal of Applied Physics 47 Pages: 5252-5255
  • Peer Reviewed
• [Presentation] Multi-gated field emitter for a micro-column (2011)
  • Author(s): H.Mimura, T.Aoki, Y.Neo, T.Yoshida, M.Nagao
  • Organizer: 28^<th> annual conference of the microscopy society of Tailand
  • Place of Presentation: チェンライ(タイ)Mae Fah Luang University
  • Year and Date: 2011-01-06
• [Presentation] 高収束電子ビームを目指した静電レンズ一体型フィールドエミッタの製作 (2010)
  • Author(s): 長尾昌善, 西孝, 神田信子, 吉田知也, 根尾陽一郎, 三村秀典, 清水貴思, 金丸正剛
  • Organizer: 電子情報通信学会電子デバイス研究会
  • Place of Presentation: 京都
  • Year and Date: 2010-10-25
• [Presentation] Light sources using field emitter technologies (2010)
  • Author(s): H.Mimura, Y.Neo, T.Aoki, T.Matsumoto
  • Organizer: 10^<th> International Meeting Information Display
  • Place of Presentation: ソウル(韓国)Kintex
  • Year and Date: 2010-10-14
• [Presentation] A multi-gated FEA for low energy acceleration micro-column microscopes (2010)
  • Author(s): A.Koike, Y.Neo, H.Mimura, M.Nagao, T.Yoshida, H.Murata, K.Sakai
  • Organizer: 23^<th> International Vacuum Nanoelectronics Conference
  • Place of Presentation: Palo Alto、USA
  • Year and Date: 2010-07-28
• [Presentation] Field emitter technologies for ultra fine image sensor (2010)
  • Author(s): H.Mimura, T.Aoki, Y.Neo, M.Nagao, T.Yoshida, S.Kanemaru
  • Organizer: Sensors electronics and Microsystems technology
  • Place of Presentation: オデッサ(ウクライナ)Mechnikov National University
  • Year and Date: 2010-06-29
• [Presentation] Field emitter technology for nanovision devices (2010)
  • Author(s): 三村秀典, 青木徹, 根尾陽一郎, 長尾昌善, 吉田知也, 金丸正剛
  • Organizer: 34^<th> Workshop on Compound Semiconductor Devices and Integrated Circuits
  • Place of Presentation: Darmstadt、Germany
  • Year and Date: 2010-05-17
• [Presentation] Field emitter technology for nanovision devices (2010)
  • Author(s): H.Mimura, T.Aoki, Y.Neo, M.Nagao, T.Yoshida, S.Kanemaru
  • Organizer: 34^<th> Workshop on Compound Semiconductor Devices and Integrated Circuits
  • Place of Presentation: ダルムシュタツト(ドイツ)ルフトハンザ会議センター
  • Year and Date: 2010-05-17
• [Presentation] 静電レンズ一体型フィールドエミッタの作製 (2010)
  • Author(s): 長尾昌善, 田上智也, 高木康男, 神田信子, 吉田知也, 清水貴思, 小池昭史, 根尾陽一郎, 三村秀典
  • Organizer: 第57回応用物理学関係連合講演会
  • Place of Presentation: 神奈川
  • Year and Date: 2010-03-17
• [Presentation] 静電レンズ一体型FEAの試作と評価 (2009)
  • Author(s): 田上智也, 小池昭文, 高木康男, 長尾昌善, 吉田知也, 金丸正剛, 根尾陽一郎, 青木徹, 三村秀典
  • Organizer: 電子情報通信学会電子デバイス研究会
  • Place of Presentation: 福井
  • Year and Date: 2009-10-15
• [Presentation] Field emitter technologies for nanovision science (2009)
  • Author(s): H.Mimura, Y.Neo, T.Aoki, M.Nagao, T.Yoshida, S.Kanemaru
  • Organizer: 9^<th> International Conference "Correlation Optics 2009"
  • Place of Presentation: ウクライナ
  • Year and Date: 2009-09-20
• [Presentation] Field emitter array with a built-in multi-electrode lens (2009)
  • Author(s): 長尾昌善, 吉田知也, 金丸正剛, 根尾陽一郎, 三村秀典
  • Organizer: 22^<th> International Vacuum Nanoelectronics Conference
  • Place of Presentation: 浜松
  • Year and Date: 2009-07-22
• [Presentation] Vacuum nanoelectronics for nanovision science (2009)
  • Author(s): 三村秀典
  • Organizer: 22^<th> International Vacuum Nanoelectronics Conference
  • Place of Presentation: 浜松
  • Year and Date: 2009-07-21
• [Presentation] 高集束電子ビームを目指したレンズレンズ一体型FEAの検討と試作2 (2009)
  • Author(s): 田上智也, 武田匡史, 堀江瞬, 長尾昌善, 吉田知也, 根尾陽一郎, 青木徹, 三村秀典, 金丸正剛
  • Organizer: 第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波
  • Year and Date: 2009-04-01
• [Presentation] Field Emitter Arrayの高機能化とその応用 (2009)
  • Author(s): 根尾陽一郎, 武田匡史, 田上智也, 堀江瞬, 青木徹, 三村秀典, 長尾昌善, 吉田知也, 金丸正剛
  • Organizer: 電子情報通信学会、シリコン材料・デバイス研究会
  • Place of Presentation: 札幌
  • Year and Date: 2009-02-26
• [Presentation] 高集束電子ビームを目指したレンズ一体型FEAの検討と試作 (2008)
  • Author(s): 武田匡史, 堀江瞬, 長尾昌善, 吉田知也, 金丸正剛, 根尾陽一郎, 青木徹, 三村秀典
  • Organizer: 第69回応用物理学会学術講演会
  • Place of Presentation: 愛知
  • Year and Date: 2008-09-02
• [Presentation] 高精細FED用ダブルゲートFEA (2008)
  • Author(s): 武田匡史, 長尾昌善, 吉田知也, 金丸正剛, 堺俊克, 萩原啓, 斉藤信雄, 根尾陽一郎, 青木徹, 三村秀典
  • Organizer: 2008年映像情報メディア学会年次大会
  • Place of Presentation: 福岡
  • Year and Date: 2008-08-29
• [Presentation] 高精細FED用ダブルゲートF E A (2008)
  • Author(s): 武田, 根尾, 青木, 三村
  • Organizer: 映像情報メディア学会年次大会
  • Place of Presentation: 福岡
• [Book] ナノビジョンサイエンス-画像技術の新展開- (2009)
  • Author(s): 三村秀典, 原和彦, 川人祥二, 青木徹, 廣本宣久
  • Total Pages: 245
  • Publisher: コロナ社
• [Book] ナノビジョンサイェンスー画像技術の新展開 (2009)
  • Author(s): 三村, 原, 川人, 青木, 廣本
  • Total Pages: 245
  • Publisher: コロナ社
• [Remarks] ホームページ等
  • URL: http://www.nvrc.rie.shizuoka.ac.jp/vision-i/
• [Remarks]
  • URL: http://www.nvrc.rie.shizuoka.ac.jp/vision-i/