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Study of a novel field emitter with a built-in electrostatic lens.

Research Project

Project/Area Number 20360156
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionShizuoka University

Principal Investigator

MIMURA Hidenori  Shizuoka University, 電子工学研究所, 教授 (90144055)

Co-Investigator(Kenkyū-buntansha) AOKI Toru  静岡大学, 電子工学研究所, 准教授 (10283350)
NEO Yoichro  静岡大学, 電子工学研究所, 准教授 (50312674)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥18,980,000 (Direct Cost: ¥14,600,000、Indirect Cost: ¥4,380,000)
Fiscal Year 2010: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2009: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2008: ¥10,010,000 (Direct Cost: ¥7,700,000、Indirect Cost: ¥2,310,000)
Keywords電界放出電子源 / 集束 / ダブルゲート電子源 / 静電レンズ / 電子ビーム / 電界放出微小電子源 / 電子ビーム集束 / ナイフエッジ法 / 多段型電界放出微小電子源 / アインツェルレンズ / 焦点形成 / 電子ビーム露光法 / 多段方電界放出微小電子源 / 電界放射微小電子源 / ダブルゲート微小電子源 / エッチバック法
Research Abstract

We have proposed a novel field emitter with a built-in electrostatic lens. This field emitter is fabricated by the etch-back method. The focusing electrode is located around the extraction gate electrode and its height is easily controlled. We have fabricated the field emitter whose focusing electrode is located below the extraction gate electrode. Such the field emitter has an excellent focusing characteristic without significant decrease of the emission current, even under the strong focusing condition. The electron beam emitted from the developed field emitter shows good symmetry.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (33 results)

All 2011 2010 2009 2008 Other

All Journal Article (12 results) (of which Peer Reviewed: 12 results) Presentation (17 results) Book (2 results) Remarks (2 results)

  • [Journal Article] Emission and focusing characteristics of a quintuple-gated field emitter array2011

    • Author(s)
      A.Koike, T.Tagami, Y.Takagi, M.Nagao, T.Yoshida, T.Aoki, Y.Neo, H.Mimura
    • Journal Title

      Appl.Phys.Express Vol.4

    • NAID

      10027783732

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Emission and focusing characteristics of a quintuple-gated field emitter array2011

    • Author(s)
      A.Koike, T.Tagami, Y.Takagi, M.Nagao, T.Yoshida, T.Aoki Y.Neo, H.Mimura
    • Journal Title

      Applied Physics Express

      Volume: 4

    • NAID

      10027783732

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 真空ナノエレクトロニクスの現状と展望2009

    • Author(s)
      三村秀典
    • Journal Title

      応用物理 78巻

      Pages: 301-307

    • NAID

      10024751312

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of a field emitter array with a built-in einzel lens2009

    • Author(s)
      M.Nagao, T.Yoshida, S.Kanemaru, Y.Neo, H.Mimura
    • Journal Title

      Jpn.J.Appl.Phys. Vol.48

    • NAID

      210000066986

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Emission and focusing characteristics of volcano-structured double-gated field emitter arrays2009

    • Author(s)
      Y.Neo, M.Takeda, T.Soda, M.Nagao, T.Yoshida, S.Kanemaru, T.Sakai, K.Hagiwara, N.Saito, T.Aoki, H.Mimura
    • Journal Title

      J.Vac.Sci.& Technol.B Vol.27

      Pages: 701-704

    • NAID

      120001756786

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of a field emitter array with a built-in einzel lens2009

    • Author(s)
      M.Nagao, T.Yoshida, S.Kanemaru, Y.Neo, H.Mimura
    • Journal Title

      Japanese Journal Applied Physics 48

    • NAID

      210000066986

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 真空ナノエレクトロニクスの現状と展望2009

    • Author(s)
      三村秀典
    • Journal Title

      応用物理 78

      Pages: 301-307

    • NAID

      10024751312

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Emission and focusing characteristics of vocano-structured double-gatedfield emitter arrays2009

    • Author(s)
      Y. Neo, T. Aoki, H. Mimura
    • Journal Title

      Journal Vacuum Science & Technology B 27

      Pages: 701-704

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Focusing characteristics of double-gated field emitter arrays with a lower height of the focusing electrode2008

    • Author(s)
      Y.Neo, T.Soda, M.Takeda, M.Nagao, t.Yoshida, C.Yasumuro, S.Kanemaru, T.Sakai, K.Hagiwara, N.Saito, T.Aoki, H.Mimura
    • Journal Title

      App.Phys.Express. Vol.1

    • NAID

      10025080448

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of volcano-structured double-gated field emitter array by etch-back technique2008

    • Author(s)
      T.Soda, M.Nagao, C.Yasumuro, S.Kanemaru, T.Sakai, N.Saito, Y.Neo, T.Aoki, H.Mimura
    • Journal Title

      Japanese Journal of Applied Physics Vol.47

      Pages: 5252-5255

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Focusing Characteristics of Double-Gated Field Emitter Arrays with a Lower Height of the Focusing Electrode2008

    • Author(s)
      Y. Neo, T. Aoki, H. Mimura
    • Journal Title

      Applied Physics Express 1

    • NAID

      10025080448

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Volcano-Structured Double-Gate FEA by Etch-Back Technique2008

    • Author(s)
      T. Soda. Y. Neo, T. Aoki, H. Mimura
    • Journal Title

      Japanese Journal of Applied Physics 47

      Pages: 5252-5255

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] Multi-gated field emitter for a micro-column2011

    • Author(s)
      H.Mimura, T.Aoki, Y.Neo, T.Yoshida, M.Nagao
    • Organizer
      28^<th> annual conference of the microscopy society of Tailand
    • Place of Presentation
      チェンライ(タイ)Mae Fah Luang University
    • Year and Date
      2011-01-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] 高収束電子ビームを目指した静電レンズ一体型フィールドエミッタの製作2010

    • Author(s)
      長尾昌善, 西孝, 神田信子, 吉田知也, 根尾陽一郎, 三村秀典, 清水貴思, 金丸正剛
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      京都
    • Year and Date
      2010-10-25
    • Related Report
      2010 Final Research Report
  • [Presentation] Light sources using field emitter technologies2010

    • Author(s)
      H.Mimura, Y.Neo, T.Aoki, T.Matsumoto
    • Organizer
      10^<th> International Meeting Information Display
    • Place of Presentation
      ソウル(韓国)Kintex
    • Year and Date
      2010-10-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] A multi-gated FEA for low energy acceleration micro-column microscopes2010

    • Author(s)
      A.Koike, Y.Neo, H.Mimura, M.Nagao, T.Yoshida, H.Murata, K.Sakai
    • Organizer
      23^<th> International Vacuum Nanoelectronics Conference
    • Place of Presentation
      Palo Alto、USA
    • Year and Date
      2010-07-28
    • Related Report
      2010 Final Research Report
  • [Presentation] Field emitter technologies for ultra fine image sensor2010

    • Author(s)
      H.Mimura, T.Aoki, Y.Neo, M.Nagao, T.Yoshida, S.Kanemaru
    • Organizer
      Sensors electronics and Microsystems technology
    • Place of Presentation
      オデッサ(ウクライナ)Mechnikov National University
    • Year and Date
      2010-06-29
    • Related Report
      2010 Annual Research Report
  • [Presentation] Field emitter technology for nanovision devices2010

    • Author(s)
      三村秀典, 青木徹, 根尾陽一郎, 長尾昌善, 吉田知也, 金丸正剛
    • Organizer
      34^<th> Workshop on Compound Semiconductor Devices and Integrated Circuits
    • Place of Presentation
      Darmstadt、Germany
    • Year and Date
      2010-05-17
    • Related Report
      2010 Final Research Report
  • [Presentation] Field emitter technology for nanovision devices2010

    • Author(s)
      H.Mimura, T.Aoki, Y.Neo, M.Nagao, T.Yoshida, S.Kanemaru
    • Organizer
      34^<th> Workshop on Compound Semiconductor Devices and Integrated Circuits
    • Place of Presentation
      ダルムシュタツト(ドイツ)ルフトハンザ会議センター
    • Year and Date
      2010-05-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] 静電レンズ一体型フィールドエミッタの作製2010

    • Author(s)
      長尾昌善, 田上智也, 高木康男, 神田信子, 吉田知也, 清水貴思, 小池昭史, 根尾陽一郎, 三村秀典
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      神奈川
    • Year and Date
      2010-03-17
    • Related Report
      2010 Final Research Report
  • [Presentation] 静電レンズ一体型FEAの試作と評価2009

    • Author(s)
      田上智也, 小池昭文, 高木康男, 長尾昌善, 吉田知也, 金丸正剛, 根尾陽一郎, 青木徹, 三村秀典
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      福井
    • Year and Date
      2009-10-15
    • Related Report
      2010 Final Research Report
  • [Presentation] Field emitter technologies for nanovision science2009

    • Author(s)
      H.Mimura, Y.Neo, T.Aoki, M.Nagao, T.Yoshida, S.Kanemaru
    • Organizer
      9^<th> International Conference "Correlation Optics 2009"
    • Place of Presentation
      ウクライナ
    • Year and Date
      2009-09-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] Field emitter array with a built-in multi-electrode lens2009

    • Author(s)
      長尾昌善, 吉田知也, 金丸正剛, 根尾陽一郎, 三村秀典
    • Organizer
      22^<th> International Vacuum Nanoelectronics Conference
    • Place of Presentation
      浜松
    • Year and Date
      2009-07-22
    • Related Report
      2010 Final Research Report 2009 Annual Research Report
  • [Presentation] Vacuum nanoelectronics for nanovision science2009

    • Author(s)
      三村秀典
    • Organizer
      22^<th> International Vacuum Nanoelectronics Conference
    • Place of Presentation
      浜松
    • Year and Date
      2009-07-21
    • Related Report
      2010 Final Research Report 2009 Annual Research Report
  • [Presentation] 高集束電子ビームを目指したレンズレンズ一体型FEAの検討と試作22009

    • Author(s)
      田上智也, 武田匡史, 堀江瞬, 長尾昌善, 吉田知也, 根尾陽一郎, 青木徹, 三村秀典, 金丸正剛
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波
    • Year and Date
      2009-04-01
    • Related Report
      2010 Final Research Report
  • [Presentation] Field Emitter Arrayの高機能化とその応用2009

    • Author(s)
      根尾陽一郎, 武田匡史, 田上智也, 堀江瞬, 青木徹, 三村秀典, 長尾昌善, 吉田知也, 金丸正剛
    • Organizer
      電子情報通信学会、シリコン材料・デバイス研究会
    • Place of Presentation
      札幌
    • Year and Date
      2009-02-26
    • Related Report
      2010 Final Research Report
  • [Presentation] 高集束電子ビームを目指したレンズ一体型FEAの検討と試作2008

    • Author(s)
      武田匡史, 堀江瞬, 長尾昌善, 吉田知也, 金丸正剛, 根尾陽一郎, 青木徹, 三村秀典
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      愛知
    • Year and Date
      2008-09-02
    • Related Report
      2010 Final Research Report
  • [Presentation] 高精細FED用ダブルゲートFEA2008

    • Author(s)
      武田匡史, 長尾昌善, 吉田知也, 金丸正剛, 堺俊克, 萩原啓, 斉藤信雄, 根尾陽一郎, 青木徹, 三村秀典
    • Organizer
      2008年映像情報メディア学会年次大会
    • Place of Presentation
      福岡
    • Year and Date
      2008-08-29
    • Related Report
      2010 Final Research Report
  • [Presentation] 高精細FED用ダブルゲートF E A2008

    • Author(s)
      武田, 根尾, 青木, 三村
    • Organizer
      映像情報メディア学会年次大会
    • Place of Presentation
      福岡
    • Related Report
      2008 Annual Research Report
  • [Book] ナノビジョンサイエンス-画像技術の新展開-2009

    • Author(s)
      三村秀典, 原和彦, 川人祥二, 青木徹, 廣本宣久
    • Total Pages
      245
    • Publisher
      コロナ社
    • Related Report
      2010 Final Research Report
  • [Book] ナノビジョンサイェンスー画像技術の新展開2009

    • Author(s)
      三村, 原, 川人, 青木, 廣本
    • Total Pages
      245
    • Publisher
      コロナ社
    • Related Report
      2008 Annual Research Report
  • [Remarks] ホームページ等

    • URL

      http://www.nvrc.rie.shizuoka.ac.jp/vision-i/

    • Related Report
      2010 Final Research Report
  • [Remarks]

    • URL

      http://www.nvrc.rie.shizuoka.ac.jp/vision-i/

    • Related Report
      2008 Annual Research Report

URL: 

Published: 2008-04-01   Modified: 2016-04-21  

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