Fabrication of opto-functional AR coating for the solar spectrum by green chemistry process with water

• Project/Area Number: 20360292
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Physical properties of metals
• Research Institution: Tokyo University of Science
• Principal Investigator: ISHIGURO Takashi Tokyo University of Science, 基礎工学部, 教授 (10183162)
• Co-Investigator(Renkei-kenkyūsha): YASUMORI Atsuo 東京理科大学, 基礎工学部, 教授 (40182349) ; HAMASAKI Katsuyoshi 長岡技術科学大学, 工学部, 教授 (40143820)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥19,370,000 (Direct Cost: ¥14,900,000、Indirect Cost: ¥4,470,000); Fiscal Year 2010: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000); Fiscal Year 2009: ¥7,800,000 (Direct Cost: ¥6,000,000、Indirect Cost: ¥1,800,000); Fiscal Year 2008: ¥9,230,000 (Direct Cost: ¥7,100,000、Indirect Cost: ¥2,130,000)
• Keywords: 太陽光エネルギー利用 / 高効率太陽光発電材料・素子 / 光物性 / 自己組織化 / 水熱反応 / グリーンケミストリー

Research Abstract

Antireflective coating with mesoscopic surface roughness can be realized by hydrothermal treatment of sputtered Al film. Characterization of this process has been performed. It was confirmed that hydrothermal-treated films were transformed from hydroxide into oxide by heating. Optical AR coating for the solar spectrum was demonstrated by the stacking of the layer having high refractive index on the hydrothermal treated Al substrate with the surface roughness. Generality of reforming by hydrothermal treatment was also verified for other metallic films.

Research Products

• [Journal Article] Formation of zinc oxide film by boiling metallic zinc film in ultrapure water. (2010)
  • Author(s): Zhiyong Qiu, Yuichiro Nadamura, Takashi Ishiguro
  • Journal Title: Thin Solid Films 518 Pages: 5912-5915
• [Journal Article] Formation of Transparent Aluminum Hydroxide Film with Mesoscopic Surface Roughness by Hydrothermal Treatment of Incompletely-nitrided Sputtered Aluminum Film. (2010)
  • Author(s): Toshiyuki Hori, Zhiyong Qiu, Takashi Ishiguro
  • Journal Title: Journal of Physics : Conference series 232 Pages: 12004-12007
• [Journal Article] Transmission Electron Microscopy Observation on Hydrothermally-treated Aluminum Film in Ultrapure Water. (2010)
  • Author(s): Yusuke Hosoki, Junnichi Shimanuki, Zhiyoug Qiu, Takashi Ishiguro
  • Journal Title: Mater.Res.Soc.Symp.Proc. 1231
• [Journal Article] Transmission Electron Microscopy Observation on Hydrothermally-treated Aluminum Film in Ultrapure Water (2010)
  • Author(s): Yusuke Hosoki, Junnichi Shimanuki, Zhiyoug Qiu, Takashi Ishiguro
  • Journal Title: Mater.Res.Soc.Symp.Proc. Volume: 1231
  • Peer Reviewed
• [Journal Article] Formation of Transparent Aluminum Hydroxide Film with Mesoscopic Surface Roughness by Hydrothermal Treatment of Incompletely-nitrided Sputtered Aluminum Film (2010)
  • Author(s): Toshiyuki Hori, Zhiyong Qiu, Takashi Ishiguro
  • Journal Title: Journal of Physics : Conference series Volume: 232 Pages: 12004-12007
  • Peer Reviewed
• [Journal Article] Formation of zinc oxide film by boiling metallic zinc film in ultrapure water (2010)
  • Author(s): Zhiyong Qiu, Yuichiro Nadamura, Takashi Ishiguro
  • Journal Title: Thin Solid Films Volume: 518 Pages: 5912-5915
  • Peer Reviewed
• [Journal Article] Antireflective coating using aluminum hydroxide formed by hydrothermal treatment of sputtered aluminum films. (2009)
  • Author(s): Takashi Ishiguro, Toshiyuki Hori, Zhiyong Qiu
  • Journal Title: J.Appl.Phys. 106
• [Journal Article] Antireflective coating using aluminum hydroxide formed by hydrothermal treatment of sputtered aluminum films (2009)
  • Author(s): Takashi Ishiguro, Toshiyuki Hori, Zhiyong Qiu
  • Journal Title: J.Appl.Phys. 106
  • Peer Reviewed
• [Presentation] 金属アルミニウムの水熱反応による膜構造変化の電顕観察 (2009)
  • Author(s): 細木裕介,島貫純一,邱志勇,石黒孝
  • Organizer: 日本金属学会
  • Place of Presentation: 京都大学
  • Year and Date: 2009-09-17
• [Presentation] 表面凹凸を有するAl-N膜の水熱反応による透明化と光学特性評価 (2009)
  • Author(s): 堀俊之,邱志勇,石黒孝
  • Organizer: 日本金属学会
  • Place of Presentation: 京都大学
  • Year and Date: 2009-09-17
• [Presentation] 水熱反応による酸化亜鉛薄膜の作製と性能評価 (2009)
  • Author(s): 灘村裕一朗,邱志勇
  • Organizer: 石黒孝応用物理学会
  • Place of Presentation: 筑波大学
  • Year and Date: 2009-04-01
• [Presentation] 水熱反応による酸化亜鉛薄膜の作製と性能評価 (2009)
  • Author(s): 灘村裕一朗, 邱 志勇, 石黒 孝
  • Organizer: 応用物理学会
  • Place of Presentation: 筑波大学
  • Year and Date: 2009-04-01
• [Presentation] 金属Zn膜の水熱反応によるZnO膜形成と評価 (2009)
  • Author(s): 灘村裕一朗,邱志勇,石黒孝
  • Organizer: 日本金属学会
  • Place of Presentation: 東京工業大学
  • Year and Date: 2009-03-29
• [Presentation] Formation of Transparent Aluminum Hydroxide Film with Mesoscopic Surface Roughness by Hydrothermal Treatment of Incompletely-nitrided Sputtered Aluminum Film. (2009)
  • Author(s): Toshiyuki Hori, Zhiyong Qiu, Takashi Ishiguro
  • Organizer: The 4th International Symposium on Atomic Technology
  • Place of Presentation: Seaside Hotel MAIKO VILLA KOBE, (Kobe, JAPAN)
• [Presentation] Transmission Electron Microscopy Observation on Hydrothermally-treated Aluminum Film in Ultrapure Water. (2009)
  • Author(s): Yusuke Hosoki, Junnichi Shimanuki, Zhiyoug Qiu, Takashi Ishiguro
  • Organizer: 2009 MRS Fall Meeting
  • Place of Presentation: Hynes Convention Center(Boston, U. S. A.)
• [Presentation] Transmission Electron Microscopy Observation on Hydrothermally-treated Aluminum Film in Ultrapure Water (2009)
  • Author(s): 細木裕介, 島貫純一, 邸志勇, 石黒孝
  • Organizer: 2009 MRS Fall Meeting
  • Place of Presentation: Hynes Convention Center(Boston, U.S.A.)
• [Presentation] Formation of Transparent Aluminum Hydroxide Film with Mesoscopic Surface Roughness by Hydrothermal Treatment of Incompletely-nitrided Sputtered Aluminum Film (2009)
  • Author(s): 堀俊之, 邸志勇, 石黒孝
  • Organizer: The 4th International Symposium on Atomic Technology
  • Place of Presentation: Seaside Hotel MAIKO VILLA KOBE,(Kobe, JAPAN)
• [Presentation] 堀俊之,細木裕介,邱志勇,石黒孝 (2008)
  • Author(s): 水酸化アルミニウム膜の熱処理による構造変化と光学特性
  • Organizer: 日本金属学会
  • Place of Presentation: 日熊本大学
  • Year and Date: 2008-09-25
• [Presentation] 水酸化アルミニウム膜の熱処理による構造変化と光学特性 (2008)
  • Author(s): 堀 俊之, 細木裕介, 邱 志勇, 石黒 孝
  • Organizer: 日本金属学会
  • Place of Presentation: 熊本大学
  • Year and Date: 2008-09-25