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Formation and new functions of three-dimensional Si structure in silicate glasses by local structural modification

Research Project

Project/Area Number 20360315
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Structural/Functional materials
Research InstitutionKyoto University

Principal Investigator

MIURA Kiyotaka  Kyoto University, 大学院・工学研究科, 教授 (60418762)

Co-Investigator(Kenkyū-buntansha) SHIMOTSUMA Yasuhiko  京都大学, 大学院・工学研究科, 准教授 (40378807)
KANEHIRA Shingo  京都大学, 学際融合教育研究推進センター, 上席高度専門技術職 (30437248)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥18,590,000 (Direct Cost: ¥14,300,000、Indirect Cost: ¥4,290,000)
Fiscal Year 2010: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2009: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2008: ¥9,750,000 (Direct Cost: ¥7,500,000、Indirect Cost: ¥2,250,000)
Keywords新機能材料 / レーザープロセッシング
Research Abstract

Mixing metallic Al into the starting material for silicate glass is proposed as a means of forming Si structures in glass. We confirmed that Si nanocrystals are space-selectively deposited in silicate glass via a thermite reaction triggered by femtosecond laser pulses. Small Si particles were transformed into larger, but still micrometer sized, Si particles by laser irradiation. These structures grew to micro-size particles due to the thermite reaction promoted by heat treatment. We discuss what effect the irradiation of the focused laser pulse had on the Si deposition process in the laser-irradiated region. Localized high temperatures and pressures and generation of shock waves appear to be very important in forming Si-rich structures that contribute to the growth of Si particles. The diffusion of calcium ions by the generation of shock waves and the presence of Al-rich structures is important for forming Si-rich structures such as Si clusters, which is achieved by continuously breaking Si-O bonds using localized high temperatures. These findings have opened up new possibilities in the field of Si-integrated devices and Si photonics.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (51 results)

All 2011 2010 2009 2008

All Journal Article (20 results) (of which Peer Reviewed: 16 results) Presentation (24 results) Book (3 results) Patent(Industrial Property Rights) (4 results)

  • [Journal Article] Selective growth of gold nanoparticles on FIB-induced amorphous phase of Si substrate2010

    • Author(s)
      T.Matsuoka, M.Nishi, Y.Shimotsuma, K.Miura, K.Hirao
    • Journal Title

      J.Ceram.Soc.Jpn. 118

      Pages: 575-578

    • NAID

      130000304592

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Space-selective phase separation inside a glass by controlling compositional distribution with femtosecond laser irradiation with femtosecond laser irradiation2010

    • Author(s)
      M.Shimizu, K.Miura, M.Sakakura, M.Nishi, Y.Shimotsuma, S.Kanehira, T.Nakaya, K.Hirao
    • Journal Title

      Appl.Phys.A 100

      Pages: 1001-1005

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Ultrafast Manipulation of Self-Assembled Form Birefringence in Glass2010

    • Author(s)
      Y.Shimotsuma, M.Sakakura, P.G.Kazansky, M.Beresna, J.Qiu, K.Miura, K.Hirao
    • Journal Title

      Adv.Mater. 108

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Simultaneous Tailoring of Phase Evolution and Dopant Distribution in the Glassy Phase for Controllable Luminescence2010

    • Author(s)
      S.Zhou, N.Jiang, K. Miura, S.Tanabe, M.Shimizu, M, Sakakura, Y.Shimotsuma, M.Nishi, J.g Qiu, K.Hirao
    • Journal Title

      J.Am.Chem.Soc. 132

      Pages: 17945-73952

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Mechanism of heat-modification inside a glass after irradiation with high-repetition rate femtosecond laser pulses2010

    • Author(s)
      M.Shimizu, M.Sakakura, M.Ohnishi, Y.Shimotsuma, T.Nakaya, K.Miura, K.Hirao
    • Journal Title

      J.Appl.Phys. 108

    • NAID

      120002619611

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Elastic and thermal dynamics in femtosecond laser-induced structural change inside glasses studied by the transient lens method2010

    • Author(s)
      M.Sakakura, M.Terazima, Y.Shimotsuma, K.Miura, K.Hirao
    • Journal Title

      Laser Chem. 2010

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Phase control on iron silicieds using femtosecond laser irradiation2010

    • Author(s)
      S.Kanehira, M.Sakakura, Y.Shimotsuma, M.Eida, K.Miura, K.Hirao
    • Journal Title

      Appl.Phys.A 101

      Pages: 81-85

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of three-dimensional 1x4 splitter waveguides inside a glass substrate with spatially phase modulated laser beam2010

    • Author(s)
      M.Sakakura, T.Sawano, Y.Shimotsuma, K.Miura, K.Hirao
    • Journal Title

      Opt.Express 18

      Pages: 12136-12143

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of three-dimensional 1×4 splitter waveguides inside a glass substrate with spatially phase modulated laser beam2010

    • Author(s)
      M.Sakakura, T.Sawano, Y.Shimotsuma, K.Miura, K.Hirao
    • Journal Title

      Optics Express

      Volume: 18(12) Pages: 12136-12143

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Space-selective phase separation inside a glass by controlling compositional distribution with femtosecond laser irradiation2010

    • Author(s)
      M.Shimizu, K.Miura, M.Sakakura, M.Nishi, Y.Shimotsuma, S.Kanehira, T.Nakaya, K.Hirao
    • Journal Title

      Applied physics A

      Volume: 100(4) Pages: 1001-1005

    • NAID

      130006978427

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ultrafast manipulation of self-assembled form birefringence in glass2010

    • Author(s)
      Y.Shimotsuma, M.Sakakura, P.G.Kazansky, J.Qiu, K.Miura, K.Hirao
    • Journal Title

      Advanced Materials

      Volume: 108

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Parallel Drawing of Multiple Bent Optical Waveguides Using a Spatial Light Modulator2009

    • Author(s)
      M.Sakakura, T.Sawano, Y.Shimotsuma, K.Miura, K.Hirao
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • NAID

      40016890529

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Micromodification of element distribution in glass using femtosecond laser irradiation2009

    • Author(s)
      Y.Liu, M.Shimizu, B.Zhu, Y.Dai, B.Qian, J.Qiu, Y.Shimotsuma. K.Miura, K.Hirao
    • Journal Title

      Opt.Lett. 34

      Pages: 136-138

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Confocal Raman imaging of femtosecond laser induced microstructures in germanate glasses2009

    • Author(s)
      Y.Liu, M.Shimizu, X.Wang, B.Zhu, M.Sakakura, Y.Shimotsuma. J.Qiu, K.Miura, K.Hirao
    • Journal Title

      Chem.Phys.Lett. 477

      Pages: 122-125

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Parallel drawing of multiple bent optical waveguides using a spatial light modulator2009

    • Author(s)
      M.Sakakura, T.Sawano, Y.shimotsuma, K.Miura, K.Hirao
    • Journal Title

      Japanese Journal of Applied Physics 48

    • NAID

      40016890529

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] レーザー照射によるガラス内部からの半導体 (Si) 析出と乏その制御2009

    • Author(s)
      三浦清貴
    • Journal Title

      マテリアルインテグレーション 12

      Pages: 51-58

    • Related Report
      2009 Annual Research Report
  • [Journal Article] フェムト秒レーザープロセッシングの特徴と可能性2009

    • Author(s)
      三浦清貴
    • Journal Title

      機能材料 29

      Pages: 18-27

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Formation of Si structure in glass with a femtosecond laser2008

    • Author(s)
      K.Miura, K.Hirao, Y.Shimotsuma, M.Sakakura, S.Kanehira
    • Journal Title

      Appl.Phys.A 93

      Pages: 183-188

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] 京都大学における三次元光デバイスの現状2008

    • Author(s)
      三浦清貴
    • Journal Title

      NEW GLASS 89

      Pages: 42-45

    • Related Report
      2008 Annual Research Report
  • [Journal Article] 三次元光デバイス製造技術2008

    • Author(s)
      三浦清貴, 下間靖彦, 坂倉政明, 平尾一之
    • Journal Title

      未来材料 8

      Pages: 14-21

    • Related Report
      2008 Annual Research Report
  • [Presentation] Manipulating functionalized 2PP structures on the BioPhotonics Workstation2011

    • Author(s)
      松岡智代、 西正之、坂倉政明、三浦清貴、平尾一之、D.Palima、S.Tauro、A.Banas、J.Gluckstad.
    • Organizer
      Photonic West 2011
    • Place of Presentation
      米国・サンフランシスコ
    • Year and Date
      2011-01-27
    • Related Report
      2010 Final Research Report
  • [Presentation] Formation of Silicon and Silicon-based Semiconductor Materials via Photoinduced Reaction Using Femtosecond Laser2010

    • Author(s)
      西村将和、兼平真悟、坂倉政明 、下間靖彦、三浦清貴、平尾一之
    • Organizer
      2010 MRS Fall Meeting
    • Place of Presentation
      米国・ボストン
    • Year and Date
      2010-11-30
    • Related Report
      2010 Final Research Report
  • [Presentation] Selective Growth and SERS Property of Gold Nanoparticles on Amorphized Silicon Surface2010

    • Author(s)
      松岡智代、西正之、坂倉政明、下間靖彦、三浦清貴、平尾一之
    • Organizer
      3^<rd> International Congress on Ceramics
    • Place of Presentation
      大阪国際会議場
    • Year and Date
      2010-11-16
    • Related Report
      2010 Final Research Report
  • [Presentation] Fundamental studies of heat modification inside glasses by repeated irradiation with ultrashort laser pulses2010

    • Author(s)
      坂倉政明、清水雅弘、下間靖彦、三浦清貴、平尾一之
    • Organizer
      International Conference FLAMN-10
    • Place of Presentation
      ロシア・サンクトペテルブルグ
    • Year and Date
      2010-07-06
    • Related Report
      2010 Final Research Report
  • [Presentation] Formation Mechanism and applications of laser induced elemental distribution in glasses2010

    • Author(s)
      三浦清貴、清水雅弘、下間靖彦、坂倉政明、 兼平真悟、平尾一之
    • Organizer
      The 17^<th> International Symposium on Non-Oxide and New Optical Glasses
    • Place of Presentation
      中国・Ningbo
    • Year and Date
      2010-06-13
    • Related Report
      2010 Final Research Report
  • [Presentation] Formation Mechanism and applications of laser induced elemental distribution in glasses2010

    • Author(s)
      三浦清貴、清水雅弘、下間靖彦、坂倉政明、兼平真悟、平尾一之
    • Organizer
      The 17^<th> International Symposium on Non-Oxide and New Optical Glasses
    • Place of Presentation
      Ningbo(中国)
    • Year and Date
      2010-06-13
    • Related Report
      2010 Annual Research Report
  • [Presentation] フェムト秒レーザ材料加工の特徴とホログラフィック加工2009

    • Author(s)
      三浦清貴
    • Organizer
      第3回ガラス科学技術研究会
    • Place of Presentation
      日本・東京
    • Year and Date
      2009-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] フェムト秒レーザー材料加工の特徴とホログラフィック加工2009

    • Author(s)
      三浦清貴
    • Organizer
      第3回ガラス科学技術研究会
    • Place of Presentation
      東京
    • Year and Date
      2009-12-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Migrating element in glass with laser irradiation2009

    • Author(s)
      清水雅弘、三浦清貴、保田直美、坂倉政明、兼平真悟、西正之、下間靖彦、平尾一之
    • Organizer
      MRS 2009 Fall Meeting
    • Place of Presentation
      米国・ボストン
    • Year and Date
      2009-12-02
    • Related Report
      2010 Final Research Report
  • [Presentation] Formation of elemental distribution in glass with a femtosecond laser2009

    • Author(s)
      三浦清貴
    • Organizer
      10th International Conference on Laser Ablation
    • Place of Presentation
      シンガポール
    • Year and Date
      2009-11-24
    • Related Report
      2010 Final Research Report 2009 Annual Research Report
  • [Presentation] フェムト秒レーザガラス材2009

    • Author(s)
      三浦清貴
    • Organizer
      第50回ガラスおよびフォトニクス材料討論会
    • Place of Presentation
      京都大学
    • Year and Date
      2009-10-30
    • Related Report
      2010 Final Research Report
  • [Presentation] フェムト秒レーザーガラス材料プロセッシングの特徴と可能性2009

    • Author(s)
      三浦清貴
    • Organizer
      第50回ガラスおよびフォトニクス材料討論会
    • Place of Presentation
      京都
    • Year and Date
      2009-10-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] 光誘起反応によるガラス界面へのSi結晶析出2009

    • Author(s)
      西村将和、兼平真悟、坂倉政明、下間靖彦、三浦清貴、平尾一之
    • Organizer
      第50回ガラスおよびフォトニクス材料討論会
    • Place of Presentation
      京都大学
    • Year and Date
      2009-10-29
    • Related Report
      2010 Final Research Report
  • [Presentation] 偏光依存酸素欠陥構造の超高速制御2009

    • Author(s)
      下間靖彦、坂倉政明、三浦清貴、平尾一之
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-08
    • Related Report
      2010 Final Research Report
  • [Presentation] FIBで加工した金ナノ粒子の自己組織的成長2009

    • Author(s)
      松岡智代、西正之、下間靖彦、三浦清貴、平尾一之
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-08
    • Related Report
      2010 Final Research Report
  • [Presentation] Ultrafast switching of nanostructure in fused silica2009

    • Author(s)
      下間靖彦、坂倉政明、三浦清貴、平尾一之、邱建栄、Peter G.Kazansky
    • Organizer
      Nanotech Insight 2009
    • Place of Presentation
      スペイン・バルセロナ
    • Year and Date
      2009-03-31
    • Related Report
      2010 Final Research Report 2008 Annual Research Report
  • [Presentation] フェムト秒レーザーによる熱蓄積効果を利用したガラス内部への元素分布形成(1)2009

    • Author(s)
      保田直美、清水雅弘、坂倉政明、下間靖彦、三浦清貴、平尾一之
    • Organizer
      日本セラミックス協会 2009年年会
    • Place of Presentation
      東京理科大学
    • Year and Date
      2009-03-18
    • Related Report
      2010 Final Research Report
  • [Presentation] フェムト秒レーザーによる熱蓄積効果を利用したガラス内部への元素分布形成(2)2009

    • Author(s)
      清水雅弘、坂倉政明、下間靖彦、三浦清貴、平尾一之
    • Organizer
      日本セラミックス協会 2009年年会
    • Place of Presentation
      東京理科大学
    • Year and Date
      2009-03-18
    • Related Report
      2010 Final Research Report
  • [Presentation] フェムト秒レーザづこよる熱蓄積効果を利用したガラス内部への素分有形成(1)2009

    • Author(s)
      保田直美, 清水雅弘, 坂倉政明, 下間靖彦, 三浦清貴, 平尾一之
    • Organizer
      日本セラミックス協会2009年年会
    • Place of Presentation
      東京理科大学
    • Year and Date
      2009-03-18
    • Related Report
      2008 Annual Research Report
  • [Presentation] フェムト秒レーザーによる熱蓄積効果を利用したガラス内部への素分布形成(2)2009

    • Author(s)
      清水雅弘, 坂倉政明, 下間靖彦, 三浦清貴, 平尾一之
    • Organizer
      日本セラミックス協会2009年年会
    • Place of Presentation
      東京理科大学
    • Year and Date
      2009-03-18
    • Related Report
      2008 Annual Research Report
  • [Presentation] フェムト秒レーザーによるガラス内部の偏光依存ナノ構造制御2009

    • Author(s)
      下間靖彦、坂倉政明、三浦清貴、平尾一之
    • Organizer
      レーザー学会学術講演会 第29回年次大会
    • Place of Presentation
      徳島大学
    • Year and Date
      2009-01-12
    • Related Report
      2010 Final Research Report
  • [Presentation] フェムト秒レーザーによるガラス内部の偏光依存ナノ構造制御2009

    • Author(s)
      下間靖彦, 坂倉政明, 三浦清貴, 平尾一之
    • Organizer
      レーザー学会学術講演会第29回年次大会
    • Place of Presentation
      徳島大学
    • Year and Date
      2009-01-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] レーザーによるガラス内部への局所元素分布形成とSi析出2008

    • Author(s)
      三浦清貴, 下間靖彦, 坂倉政明, 兼平真悟, 西正之, 平尾一之
    • Organizer
      セラミックス総合研究会
    • Place of Presentation
      宮島商工会館
    • Year and Date
      2008-10-23
    • Related Report
      2008 Annual Research Report
  • [Presentation] レーザーによるガラス内部への元素分布形成2008

    • Author(s)
      三浦清貴, 下間靖彦, 坂倉政明, 兼平真悟, 西正之, 清水雅弘, 平尾一
    • Organizer
      日本セラミックス協会 第21回秋季シンポジウム
    • Place of Presentation
      北九州国際会議場
    • Year and Date
      2008-09-18
    • Related Report
      2008 Annual Research Report
  • [Book] セラミック機能化ハンドブック2010

    • Author(s)
      三浦清貴、下間靖彦、坂倉政明、平尾一之
    • Publisher
      (株)エヌ・ティース・エス
    • Related Report
      2010 Final Research Report
  • [Book] セラミックス機能化ハンドブック2010

    • Author(s)
      三浦清貴、下間靖彦、坂倉政明、平尾一之
    • Publisher
      (株)エヌ・ティー・エス
    • Related Report
      2010 Annual Research Report
  • [Book] 最先端高密度配線銅めっき技術2009

    • Author(s)
      下間靖彦、三浦清貴、平尾一之
    • Publisher
      シーエムシー出版
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] 配線導体の形成方法および配線基板2009

    • Inventor(s)
      福島俊彦、吉田幸治、山名毅、山名毅、渡辺静晴、川上章彦、平尾一之、三浦清貴、下間靖彦、坂倉政明、兼平真悟
    • Industrial Property Rights Holder
      株式会社村田製作所
    • Filing Date
      2009-02-20
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] レーザ光照射装置及び照射方法2009

    • Inventor(s)
      坂倉政明、平尾一之、三浦清貴、下間靖彦、福智昇央、伊藤晴康
    • Industrial Property Rights Holder
      浜松ホトニクス株式会社
    • Filing Date
      2009-02-12
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] 配線導体の形成方法および配線基板2009

    • Inventor(s)
      吉田幸治、福島俊彦、山名毅、渡辺静晴、川上章彦、平尾一之、三浦清貴、下間靖彦、坂倉政明、兼平真悟
    • Industrial Property Rights Holder
      株式会社村田製作所
    • Filing Date
      2009-02-12
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] 組成分布を生じる光学部品用透明材料及びこれを利用する光学部品2009

    • Inventor(s)
      三浦清貴、下間靖彦、平尾一之、富田礼子、田中修平、橋本智弘、山口勝彦
    • Industrial Property Rights Holder
      京都大学、田中修平、株式会社オハラ
    • Filing Date
      2009-09-16
    • Related Report
      2010 Final Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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