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Elementary processes of atmospheric-pressure molecular gas discharge plasmas in non-equilibrium state and their diagnostics with OES

Research Project

Project/Area Number 20540480
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionTokyo Institute of Technology

Principal Investigator

AKATSUKA Hiroshi  Tokyo Institute of Technology, 原子炉工学研究所, 准教授 (50231808)

Co-Investigator(Kenkyū-buntansha) MATSUURA Haruaki  東京工業大学, 原子炉工学研究所, 助教 (70262326)
Co-Investigator(Renkei-kenkyūsha) YUJI Toshifumi  宮崎大学, 教育文化学部, 講師 (80418988)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2009: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2008: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords大気圧プラズマ / 非平衡プラズマ / 発光分光計測 / 励起状態の生成消滅 / レート方程式 / 窒素プラズマ / アルゴンプラズマ / 酸素プラズマ / 反応速度係数 / 発光線の同定
Research Abstract

We review fundamentals of optical emission spectroscopy (OES) of plasmas of atmospheric pressure and, in particular, its applications to processing plasmas. Collisional radiative model is described to understand the excitation kinetics and population distributions of excited states in order to examine the electron temperature and density. It is shown that corona equilibrium is often adopted as justifiable assumption of excitation kinetics for general processing plasmas. Line intensity measurement methods are studied for atmospheric-pressure Ar plasma and low-pressure N2 plasma. Population densities of excited states of argon atoms are theoretically examined for ionizing argon plasma in a state of non-equilibrium under atmospheric pressure from the viewpoint of elementary processes with collisional radiative model. The dependence of excited state populations on the electron and gas temperatures is discussed.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (40 results)

All 2011 2010 2009 2008

All Journal Article (16 results) (of which Peer Reviewed: 15 results) Presentation (23 results) Book (1 results)

  • [Journal Article] 旧くて新しい非平衡プラズマ分光計測の新展開-大気圧アルゴンプラズマと減圧窒素プラズマー2011

    • Author(s)
      赤塚洋.
    • Journal Title

      電学論A 131

      Pages: 6-10

    • NAID

      10027636052

    • Related Report
      2010 Final Research Report
  • [Journal Article] Actinometry Measurement of Dissociation Degree of Nitrogen and Oxygen in N_2-O_2 Microwave Discharge Plasmas2010

    • Author(s)
      Y.Ichikawa, T.Sakamoto, A.Nezu, H.Matsuura, H.Akatsuka
    • Journal Title

      Jpn.J.Appl.Phys. 49

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] 発光分光計測を用いたプロセスプラズマの診断2010

    • Author(s)
      赤塚洋
    • Journal Title

      電気学会論文誌A(基礎・材料・共通部門誌) 130,[10]

      Pages: 892-898

    • NAID

      10026693330

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Basic Characteristics for PEN Film Surface Modification Using Atmospheric-Pressure Nonequilibrium Microwave Plasma Jet2010

    • Author(s)
      湯地敏史, 浦山卓也, 藤井修逸, 飯島善時, 須崎嘉文, 赤塚洋
    • Journal Title

      Electron.and Comm.Jpn. 93[5]

      Pages: 42-49

    • NAID

      10021130104

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of EEDF in Microwave Discharge Plasmas by Spectroscopic Diagnostics with Collisional Radiative Model2010

    • Author(s)
      J.Mizuochi, T.Sakamoto, H.Matsuura, H.Akatsuka
    • Journal Title

      Jpn.J.Appl.Phys. 49

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] 発光分光計測を用いたプロセスプラズマの診断2010

    • Author(s)
      赤塚洋
    • Journal Title

      電気学会論文誌A基礎・材料・共通部門誌

      Volume: 130 Pages: 892-898

    • NAID

      10026693330

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Actinometry Measurement of Dissociation Degrees of Nitrogen and Oxygen in N_2-O_2 Microwave Discharge Plasma2010

    • Author(s)
      Yosuke Ichikawa, Takeshi Sakamoto, Atsushi Nezu, Haruaki Matsuura, Hiroshi Akatsuka
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 49

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of EEDF in Microwave Discharge Plasmas by Spectroscopic Diagnostics with Collisional Radiative Model2010

    • Author(s)
      J.Mizuochi, T.Sakamoto, H.Masuura, H.Akatsuka
    • Journal Title

      Jpn.J.Appl.Phys. 49

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optical Emission Characteristics of Atmospheric-Pressure Nonequilibrium Microwave Discharge and High-Frequency DC Pulse Discharge Plasma Jets2009

    • Author(s)
      T.Yuji, S.Fujii, N.Mungkung, H.Akatsuka
    • Journal Title

      IEEE Trans.Plasma Sci. 37,[6]

      Pages: 839-845

    • NAID

      120007123760

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Excited Level Population and Excitation Kinetics of Non-Equilibrium Ionizing Argon Discharge Plasma of Atmospheric Pressure2009

    • Author(s)
      赤塚洋
    • Journal Title

      Phys.Plasmas 16

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Excited Level Population and Excitation Kinetics of Non-Equilibrium Ionizing Argon Discharge Plasma of Atmospheric Pressure2009

    • Author(s)
      H.Akatsuka
    • Journal Title

      Phys.Plasmas 16

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optical Emission Characteristics of Atmospheric-Pressure Nonequilibrium Microwave Discharge and High Frequency DC Pulse Discharge Plasma Jets2009

    • Author(s)
      T.Yuji, S.Fujii, N.Mungkung, H.Akatsuka
    • Journal Title

      IEEE Trans.Plasma Sci. 37

      Pages: 839-845

    • NAID

      120007123760

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Excited level populations and excitation kinetics of nonequilibrium ionizing argon discharge plasma of atmospheric pressure2009

    • Author(s)
      Hiroshi Akatsuka
    • Journal Title

      Physics of Plasmas 16

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Temperature Behavior of Atmospheric-Pressure Non-Equilibrium Microwave Discharge Plasma Jets for Poly(ethylene naptharate)-Surface Processing2008

    • Author(s)
      T.Yuji, S.Fujii, N.Mungkung, H.Akatsuka
    • Journal Title

      Surface, Coatings Technology 202

      Pages: 5289-5292

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] 大気圧非平衡マイクロ波プラズマジェットを用いたPENフィルム表面処理における基礎特性2008

    • Author(s)
      湯地敏史、浦山卓也、藤井修逸、飯島善時、須崎嘉文、赤塚洋
    • Journal Title

      電気学会論文誌A(基礎・材料・共通部門誌) 128,[6]

      Pages: 449-455

    • NAID

      10021130104

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Temperature behavior of atmospheric-pressure non-equilibrium microwave discharge plasma jets for poly(ethylene naptharate)-surface processing2008

    • Author(s)
      T. Yuji, T. Urayama, S. Fujii, N. Mungkung, H. Akatsuka
    • Journal Title

      Surface & Coatings Technology 202

      Pages: 5289-5292

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] 窒素プラズマ中の窒素原子密度のアクチノメトリー法による測定と希ガス混入効果2010

    • Author(s)
      桑野慧, 根津篤, 松浦治明, 赤塚洋.
    • Organizer
      第27回プラズマ・核融合学会年会
    • Place of Presentation
      北大.
    • Year and Date
      2010-12-01
    • Related Report
      2010 Final Research Report
  • [Presentation] Measurement of Nitrogen Dissociation Degree of Nitrogen Discharge Plasma by Actinometry Method with Subtraction of First Positive Band Spectrum2010

    • Author(s)
      赤塚洋, 桑野慧, 根津篤, 松浦治明.
    • Organizer
      63rd Gaseous Electronics Conference, 7th International Conference on Reactive Plasmas
    • Place of Presentation
      Maison dela Chimie.Paris.
    • Year and Date
      2010-10-05
    • Related Report
      2010 Final Research Report
  • [Presentation] Measurement of Nitrogen Dissociation Degree of Nitrogen Discharge Plasma by Actinometry Method with Subtraction of First Positive Band Spectrum2010

    • Author(s)
      Hiroshi Akatsuka, Kei Kuwano, Atsushi Nezu, Haruaki Matsuura
    • Organizer
      63rd Gaseous Electronics Conference & 7th International Conference on Reactive Plasmas
    • Place of Presentation
      Maison de la Chimie, Paris
    • Year and Date
      2010-10-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] 第1正帯減算による窒素原子アクチノメトリー測定と窒素プラズマ解離度への希ガス混入効果2010

    • Author(s)
      桑野慧, 根津篤, 松浦治明, 赤塚洋.
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大.
    • Year and Date
      2010-09-15
    • Related Report
      2010 Final Research Report
  • [Presentation] アクチノメトリー法および第1正帯バンドスペクトルの減算による窒素プラズマ中の窒素解離度の測定2010

    • Author(s)
      赤塚洋, 市川陽亮, 桑野慧, 坂本武士, 根津篤, 松浦治明.
    • Organizer
      電気学会プラズマ研究会
    • Place of Presentation
      兵底県立大.
    • Year and Date
      2010-05-08
    • Related Report
      2010 Final Research Report
  • [Presentation] アクチノメトリー法および第1正帯バンドスペクトルの減算による 窒素プラズマ中の窒素解離度の測定2010

    • Author(s)
      赤塚洋, 市川陽亮, 桑野慧, 坂本武士, 根津篤, 松浦治明
    • Organizer
      電気学会プラズマ研究会
    • Place of Presentation
      兵庫県立大学 書写キャンパス
    • Year and Date
      2010-05-08
    • Related Report
      2010 Annual Research Report
  • [Presentation] 窒素プラズマ中の窒素解離度のアクチノメトリー法測定と希ガスの混入効果2010

    • Author(s)
      桑野慧, 根津篤, 松浦治明, 赤塚洋.
    • Organizer
      日本物理学会第65回年次大会
    • Place of Presentation
      岡山大.
    • Year and Date
      2010-03-20
    • Related Report
      2010 Final Research Report
  • [Presentation] マイクロ波放電酸素プラズマの解離度に対する希ガス混入効果のアクチノメトリー測定2010

    • Author(s)
      高井渉, 根津篤, 松浦治明, 赤塚洋.
    • Organizer
      平成22年電気学会全国大会
    • Place of Presentation
      明大駿河台キャンパス.
    • Year and Date
      2010-03-17
    • Related Report
      2010 Final Research Report
  • [Presentation] Fundamental Study on Discharge Characteristics of Nitrogen-Rare Gas Microwave Plasma2010

    • Author(s)
      桑野慧, 根津篤, 松浦治明, 赤塚洋.
    • Organizer
      The 27th Symposium on Plasma Processing
    • Place of Presentation
      横浜開港記念館
    • Year and Date
      2010-02-01
    • Related Report
      2010 Final Research Report
  • [Presentation] Diagnostics of oxygen-rare gas mixed plasmas excited by microwave discharge2010

    • Author(s)
      W.Takai, A.Nezu, H.Matsuura, H.Akatsuka
    • Organizer
      The 27th Symposium on Plasma Processing
    • Place of Presentation
      横浜開港記念館.
    • Year and Date
      2010-02-01
    • Related Report
      2010 Final Research Report
  • [Presentation] Diagnostics of Electron Temperature of Low-Pressure Discharge Nitrogen Plasma by Optical Emission Spectroscopy2010

    • Author(s)
      柴田智彦, 根津篤, 赤塚洋.
    • Organizer
      The 27th Symposium on Plasma Processing
    • Place of Presentation
      横浜開港記念館.
    • Year and Date
      2010-02-01
    • Related Report
      2010 Final Research Report
  • [Presentation] Diagnostics of Electron Temperature of Low-Pressure Discharge Nitrogen Plasma by Optical Emission Spectroscopy2010

    • Author(s)
      赤塚洋
    • Organizer
      第27回プラズマプロセシング研究会(SPP27)
    • Place of Presentation
      横浜開港記念館
    • Year and Date
      2010-02-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] Diagnostics of oxygen-rare gas mixed plasmas excited by microwave discharge2009

    • Author(s)
      W.Takai, A.Nezu, H.Matsuura, H.Akatsuka
    • Organizer
      The 6th Asia-Pacific International Symposium on the Basic and Application of Plasma Technology
    • Place of Presentation
      Minghsin University of Science and Technology, 台湾.
    • Year and Date
      2009-12-16
    • Related Report
      2010 Final Research Report
  • [Presentation] Population Distribution and Excitation Kinetics of Non-Equilibrium Argon Plasma of Atmospheric Pressure2009

    • Author(s)
      赤塚洋.
    • Organizer
      The 6th Asia-Pacific International Symposium on the Basic and Application of Plasma Technology
    • Place of Presentation
      Minghsin University of Science and Technology, 台湾.
    • Year and Date
      2009-12-15
    • Related Report
      2010 Final Research Report
  • [Presentation] Fundamental Study on Discharge Characteristics of Nitrogen-Rare Gas Microwave Plasma2009

    • Author(s)
      桑野慧, 根津篤, 松浦治明, 赤塚洋.
    • Organizer
      The 6th Asia-Pacific International Symposium on the Basic and Application of Plasma Technology
    • Place of Presentation
      Minghsin University of Science and Technology, 台湾.
    • Year and Date
      2009-12-14
    • Related Report
      2010 Final Research Report
  • [Presentation] 低温大気圧プラズマの励起状態密度分布の特徴2009

    • Author(s)
      赤塚洋.
    • Organizer
      プラズマ核融合学会第26回年会
    • Place of Presentation
      京都市国際交流会館.
    • Year and Date
      2009-12-01
    • Related Report
      2010 Final Research Report
  • [Presentation] 低温大気圧プラズマの励起状態密度分布の特徴2009

    • Author(s)
      赤塚洋
    • Organizer
      プラズマ・核融合学会年会
    • Place of Presentation
      京都市国際交流会館
    • Year and Date
      2009-12-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] 発光分光計測による低気圧窒素プラズマの電子温度診断の可能性2009

    • Author(s)
      柴田智彦, 根津篤, 松浦治明, 赤塚洋.
    • Organizer
      第56回応用物理学会連合講演会
    • Place of Presentation
      筑波大学.
    • Year and Date
      2009-03-30
    • Related Report
      2010 Final Research Report
  • [Presentation] 大気圧非平衡マイクロ波ミニタイププラズマジェットの分光計測2009

    • Author(s)
      湯地敏史, 釘宮彰宏, 川野泰和, 青木慎二, 藤井修逸, 赤塚洋.
    • Organizer
      第56回応用物理学会連合講演会
    • Year and Date
      2009-03-30
    • Related Report
      2010 Final Research Report
  • [Presentation] 発光分光計測による低気圧窒素プラズマの電子温度診断の可能性2009

    • Author(s)
      赤塚 洋
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] 放電窒素プラズマの励起状態数密度の素過程に基づく検討2009

    • Author(s)
      赤塚洋, 市川陽亮, 坂本武士.
    • Organizer
      日本物理学会第64回年次大会
    • Place of Presentation
      立教大学.
    • Year and Date
      2009-03-27
    • Related Report
      2010 Final Research Report
  • [Presentation] 放電窒素プラズマの励起状態密度の素過程に基づく検討2009

    • Author(s)
      赤塚 洋
    • Organizer
      日本物理学会第64回年次大会
    • Place of Presentation
      立教大学
    • Year and Date
      2009-03-27
    • Related Report
      2008 Annual Research Report
  • [Presentation] 衝突輻射モデルによる大気圧電離進行Arプラズマの励起状態数密度の検討2009

    • Author(s)
      赤塚 洋
    • Organizer
      平成21年電気学会全国大会
    • Place of Presentation
      北海道大学
    • Year and Date
      2009-03-17
    • Related Report
      2008 Annual Research Report
  • [Book] 発光分光,大気圧プラズマ基礎と応用(第4章診断法第4節ガス温度計測4.4.1)2009

    • Author(s)
      赤塚洋.
    • Publisher
      オーム社
    • Related Report
      2010 Final Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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