Preparation and application of crystalline template layers on no crystalline substrates by a quasi-nanoimprinting method

• Project/Area Number: 20560003
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Applied materials science/Crystal engineering
• Research Institution: Akita University
• Principal Investigator: SATO Yuichi 秋田大学, 大学院・工学資源学研究科, 准教授 (70215862)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000); Fiscal Year 2010: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2009: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2008: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
• Keywords: 薄膜 / 単結晶 / 非単結晶基板

Research Abstract

Materials and growth conditions for the crystalline template layers were investigated. Matching between materials of the template layers and semiconductors were also investigated. Heat-treatment atmosphere of In thin films was varied from inactive to oxygen included one in preparation of In_2O_3 template layers and their crystallization was controlled by it. Other crystalline metal films could be also obtained in narrow windows of their crystallization conditions. The In_2O_3 films were possible to be applied as template layers for several compound semiconductor films.

Research Products

• [Journal Article] A Dependence of Crystallinity of In_2O_3 Thin Films by a Two-Step Heat Treatment of Indium Films on the Heating Atmosphere (2010)
  • Author(s): Yuichi Sato, Fumito Otake, Hirotoshi Hatori
  • Journal Title: J. Mod. Phys Volume: Vol.1 Pages: 360-363
  • Peer Reviewed
• [Journal Article] Vacuum Evaporation of CdTe Thin Films on Ni, MoMo, Ti, TiN-Deposited Sapphire Single-Crystal Substrates (2010)
  • Author(s): Yuichi Sato, Hirotoshi Hatori, Suguru Igarashi, Manabu Arai, Kazuki Ito, Syota Kikuchi
  • Journal Title: Cur. Appl. Phys Volume: Vol.10
  • Peer Reviewed
• [Journal Article] Thin Film Depositions of CdTe Semiconductors on Amorphous and Single Crystal Substrates and Comparisons of Their Properties (2010)
  • Author(s): Yuichi Sato, Tat sushi Kodate, Manabu Arai
  • Journal Title: Materials Science Forum Volume: Vol.638-642 Pages: 2909-2914
  • Peer Reviewed
• [Journal Article] A Dependence of Crystallinity of In_2O_3 Thin Films by a Two-Step Heat Treatment of Indium Films on the Heating Atmosphere (2010)
  • Author(s): Yuichi Sato
  • Journal Title: Journal of Modern Physics Volume: 1 Pages: 360-363
  • Peer Reviewed
• [Journal Article] Vacuum Evaporation of CdTe Thin Films on Ni, Mo, Ti and TiN-Deposited Sapphire Single-Crystal Substrates (2010)
  • Author(s): Yuichi Sato
  • Journal Title: Current Applied Physics Volume: 10
  • Peer Reviewed
• [Journal Article] Thin Film Depositions of CdTe Semiconductors on Amorphous and Single Crystal Substrates and Comparisons of Their Properties (2010)
  • Author(s): Yuichi Sato
  • Journal Title: Materials Science Forum 638-642 Pages: 2909-2914
  • Peer Reviewed
• [Presentation] In_2O_3下地層を有するサファイア基板へのIII族窒化物薄膜の成長 (2011)
  • Author(s): 伊藤一樹, 原田康平, 船木昂介, 竹本皓樹, 岩城雅人, 佐藤祐一
  • Organizer: 2011年電子情報通信学会総合大会
  • Place of Presentation: 東京都市大学,東京都
  • Year and Date: 2011-03-14
• [Presentation] An Improvement of Crystal Quality of Group III-Nitride Thin Films on Sapphire by Using In_2O_3 Under Layer (2011)
  • Author(s): Kazuki Ito, Kohei Harada, Kosuke Funaki, Hiroki Takemoto, Masato Iwaki, Yuichi Sato
  • Organizer: 3^<rd> Int. Sympo. On Advanced Plasma Sci. and its Application for Nitrides and Nan omaterials
  • Place of Presentation: 名古屋工業大学,名古屋市
  • Year and Date: 2011-03-06
• [Presentation] An Improvement of Crystal Quality of Group III-Nitride Thin Films on Sapphire by Using In_2O_3 Under Layer (2011)
  • Author(s): Kazuki Ito
  • Organizer: 3^<rd> Int.Sympo.On Advanced Plasma Sci.and its Application for Nitrides and Nanomaterials
  • Place of Presentation: 名古屋工業大学,名古屋市
  • Year and Date: 2011-03-06
• [Presentation] 下地導電層を有するサファイア基板へのCdS薄膜の作製 (2010)
  • Author(s): 荒井学, 伊藤一樹, 佐藤祐一
  • Organizer: 2010年電子情報通信学会エレクトロニクスソサイエティ大会
  • Place of Presentation: 大阪府立大学,堺市
  • Year and Date: 2010-09-14
• [Presentation] サファイア基板上Al薄膜の固相エピタキシャル成長 (2010)
  • Author(s): 五十嵐傑, 伊藤一樹, 羽鳥裕俊, 佐藤祐一
  • Organizer: 2010年電子情報通信学会エレクトロニクスソサイエティ大会
  • Place of Presentation: 大阪府立大学,堺市
  • Year and Date: 2010-09-14
• [Presentation] Properties of CdS and CdTe Thin Films Vacuum Evaporated on Several Epitaxially Grown Under Layers (2010)
  • Author(s): Manabu Arai, Kazuki Ito, Hirotoshi Hatori, Suguru Igarashi, Yuichi Sato
  • Organizer: 5^<th> World Conf. on Photovoltaic Energy Conversion
  • Place of Presentation: Valencia, Spain
  • Year and Date: 2010-09-07
• [Presentation] Properties of CdS and CdTe Thin Films Vacuum Evaporated on Several Epitaxially Grown Under Layers (2010)
  • Author(s): Manabu Arai
  • Organizer: 5^<th> World Conf.on Photovoltaic Energy Conversion
  • Place of Presentation: Valencia, Spain
  • Year and Date: 2010-09-07
• [Presentation] Crystallinity of In_2O_3 Thin Films on Sapphire Substrates Obtained by a Two-Step Heat Treatment of Metal Indium Thin Films (2010)
  • Author(s): Yuichi Sato, Fumito Otake, Hirotoshi Hatori
  • Organizer: 16th Int. Conf. on Crystal Growth
  • Place of Presentation: Beijing, China
  • Year and Date: 2010-08-09
• [Presentation] Crystallinity of In_2O_3 Thin Films on Sapphire Substrates Obtained by a Two-Step Heat Treatment of Metal Indium Thin Films (2010)
  • Author(s): Yuichi Sato
  • Organizer: 16^<th> Int.Conf.on Crystal Growth
  • Place of Presentation: Beijing, China
  • Year and Date: 2010-08-09
• [Presentation] 各種導電層を有するサファイア基板へのCdTe薄膜の作製 (2010)
  • Author(s): 羽鳥裕俊, 荒井学, 五十嵐傑, 伊藤一樹, 菊池翔太, 佐藤祐一
  • Organizer: 2010年電子情報通信学会総合大会
  • Place of Presentation: 東北大学,仙台市
  • Year and Date: 2010-03-16
• [Presentation] 各種導電層を有するサファイア基板へのCdTe薄膜の作製 (2010)
  • Author(s): 羽鳥裕俊
  • Organizer: 2010年電子情報通信学会総合大会
  • Place of Presentation: 東北大学, 仙台市
  • Year and Date: 2010-03-16
• [Presentation] Vacuum Evaporation of CdTe Thin Films on Ni-deposited Sapphire Single Crystal Substrates and Effects of the Cd/Te Ratio on Their Properties (2009)
  • Author(s): Hirotoshi Hatori, Suguru Igarashi, Manabu Arai, Yuichi Sato
  • Organizer: 19^<th> Int. Photovoltaic Sci. and Eng. Conf
  • Place of Presentation: Jeju, Korea.
  • Year and Date: 2009-11-09
• [Presentation] Vacuum Evaporation of CdTe Thin Films on Ni-deposited Sapphire Single Crystal Substrates and Effects of the Cd/Te Ratio on Their Properties (2009)
  • Author(s): 羽鳥裕俊
  • Organizer: 19^<th> Int.Photovoltaic Sci.and Eng.Conf.
  • Place of Presentation: Jeju, Korea
  • Year and Date: 2009-11-09
• [Presentation] Thin Film Depositions of Several Compound Semiconductors on Amorphous and Single crystal Substrates and Comparisons of Their Properties (2009)
  • Author(s): Yuichi Sato
  • Organizer: Int. Conf. on Processing and Manufacturing of Advanced Materi
  • Place of Presentation: Berlin, Germany
  • Year and Date: 2009-08-25
• [Presentation] Thin Film Depositions of Several Compound Semiconductors on Amorphous and Single crystal Substrates and Comparisons of Their Properties (2009)
  • Author(s): Yuichi Sato
  • Organizer: Int.Conf.on Processing and Manufacturing of Advanced Materials
  • Place of Presentation: Berlin, Germany
  • Year and Date: 2009-08-25
• [Presentation] 真空蒸着法により作製したInドープCdTe薄膜のPL特性 (2009)
  • Author(s): 小舘達, 荒井学, 佐藤祐一
  • Organizer: 2009年電子情報通信学会総合大会
  • Place of Presentation: 愛媛大学
  • Year and Date: 2009-03-17
• [Presentation] サファイア単結晶基板を用いたCu薄膜の固相エピタキシャル成長 (2009)
  • Author(s): 羽鳥裕俊, 小坂井啓一, 五十嵐傑, 佐藤祐一
  • Organizer: 2009年電子情報通信学会総合大会
  • Place of Presentation: 愛媛大学
  • Year and Date: 2009-03-17
• [Presentation] Comparisons of Properties of CdTe Thin Films Deposited on Glass and Sapphire Substrates by a Vacuum Evaporation Method (2009)
  • Author(s): Tatsushi Kodate, Manabu Arai, Yuichi Sato
  • Organizer: 18^<th> Int. Photovoltaic Sci. and Eng. Conf
  • Place of Presentation: KOLKATA, INDIA.
  • Year and Date: 2009-01-19
• [Presentation] Keichi Kosakai, Yuichi Sato, Preparations of Indium Oxide Thin Films by an Oxidation and Recrystallization Method of Metal Indium Thin Films (2009)
  • Author(s): Fumito Otake, Hirotoshi Hatori, Koya Muyari
  • Organizer: 18^<th> Int. Photovoltaic Sci. and Eng. Conf
  • Place of Presentation: KOLKATA, INDIA
  • Year and Date: 2009-01-19
• [Presentation] Preparations of Indium Oxide Thin Films by an Oxidation and Recrystallization Method of Metal Indium Thin Films (2009)
  • Author(s): Yuichi Sato
  • Organizer: 18th Int. Photovoltaic Sci. and Eng. Conf.
  • Place of Presentation: KOLKATA, INDIA
  • Year and Date: 2009-01-19
• [Presentation] Comparisons of Properties of CdTe Thin Films Deposited on Glass and Sapphire Substrates by a Vacuum Evaporation Method (2009)
  • Author(s): Yuichi Sato
  • Organizer: 18^<th> Int. Photovoltaic Sci. and Eng. Conf
  • Place of Presentation: KOLKATA, INDIA
  • Year and Date: 2009-01-19
• [Presentation] 真空蒸着法によるサファイアおよびガラス基板上へのCdTe薄膜の作製とその諸特性 (2008)
  • Author(s): 小舘達, 荒井学, 佐藤祐一
  • Organizer: 2008年電子情報通信学会エレクトロニ7InN薄膜のInN(0002)X線ロッキングカーブクスソサイエティ大会
  • Place of Presentation: 明治大学生田キャンパス
  • Year and Date: 2008-09-16
• [Presentation] In薄膜の熱酸化・再結晶化によるIn_2O_3薄膜の作製 (2008)
  • Author(s): 大竹文人, 羽鳥裕俊, 小坂井啓一, 佐藤祐一
  • Organizer: 2008年電子情報通信学会エレクトロニクスソサイエティ大会
  • Place of Presentation: 明治大学生田キャンパス
  • Year and Date: 2008-09-16
• [Presentation] In薄膜の熱酸化・再結晶化によるIn203薄膜の作製 (2008)
  • Author(s): 大竹文人
  • Organizer: 2008年電子情報通信学会エレクトロニクスソサイエティ大会
  • Place of Presentation: 明治大学生田キャンパス
  • Year and Date: 2008-09-16
• [Presentation] 真空蒸着法によるサファイアおよびガラス基板上へのCdTe薄膜の作製とその諸特性 (2008)
  • Author(s): 小舘達
  • Organizer: 2008年電子情報通信学会エレクトロニクスソサイエティ大会
  • Place of Presentation: 明治大学生田キャンパス
  • Year and Date: 2008-09-16