Fabrication of p-type ZnO using hydroge co-doping

• Project/Area Number: 20560014
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Applied materials science/Crystal engineering
• Research Institution: Ishinomaki Senshu University
• Principal Investigator: YASUDA Takashi Ishinomaki Senshu University, 理工学部, 教授 (90182336)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000); Fiscal Year 2010: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2009: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2008: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
• Keywords: 酸化亜鉛 / ゾル / ゲル法 / 水素 / 電気伝導 / ドナー / アクセプター / ゾル・ゲル / MOCVD / 電荷補償

Research Abstract

Behavior of hydrogen in sol-gel ZnO thin layers has been investigated. Resistivity of ZnO decreases two orders of magnitude by thermal annealing in hydrogen gas atmosphere. This result indicates that diffused hydrogen acts as donor in ZnO. Subsequent annealing in air puts the resistivity back to the previous value, indicating successful control of hydrogen input and output into ZnO by thermal annealing.

Research Products

• [Presentation] Hydrogen Incorporation Effects into ZnO Thin Films Synthesized by Sol-Gel Method (2010)
  • Author(s): Takashi Yasuda
  • Organizer: Materials Research Society
  • Place of Presentation: Boston, USA
  • Year and Date: 2010-11-29
• [Presentation] Hydrogen Incorporation Effects into ZnO Thin Films Synthesized by Sol-Gel Method (2010)
  • Author(s): 安田隆, 内海武佐志, 鈴木裕真
  • Organizer: 2010 MRS Fall Meeting
  • Place of Presentation: Boston, USA
• [Presentation] 亜鉛アセチルアセトナートを用いたMOCVD法ZnOの結晶性 -VI/II比依存性- (2009)
  • Author(s): 安田隆
  • Organizer: 応用物理学会
  • Place of Presentation: 富山大学(富山)
  • Year and Date: 2009-09-09
• [Presentation] ゾル・ゲル法で作成したZnO薄膜の水素処理効果 (2009)
  • Author(s): 安田 隆
  • Organizer: 応用物理学会
  • Place of Presentation: 筑波大学
  • Year and Date: 2009-04-02
• [Presentation] 亜鉛アセチルアセトナートを用いたMOCVD法ZnOの結晶性VI/II比依存性 (2009)
  • Author(s): 高橋勇樹, 金野文彰, 安田隆
  • Organizer: 応用物理学会
  • Place of Presentation: 富山
• [Presentation] ゾル・ゲル法で作成したZnO薄膜の水素処理効果 (2009)
  • Author(s): 内海武佐志, 鈴木裕真, 安田隆
  • Organizer: 応用物理学会
  • Place of Presentation: 筑波