Low energy atom scattering spectroscopy for insulator surface atomic structure analysis
Project/Area Number |
20560023
|
Research Category |
Grant-in-Aid for Scientific Research (C)
|
Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Thin film/Surface and interfacial physical properties
|
Research Institution | Osaka Prefecture University |
Principal Investigator |
KENJI Umezawa Osaka Prefecture University, 総合教育研究機構・理学系研究科, 教授 (80213487)
|
Project Period (FY) |
2008 – 2010
|
Project Status |
Completed (Fiscal Year 2010)
|
Budget Amount *help |
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2010: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2009: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2008: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
|
Keywords | 原子散乱 / 表面構造解析 / 絶縁体 / 絶緑体 / 表面 / イオンビーム / 原子構造解析 / 飛行時間 |
Research Abstract |
We have been developing a low energy atom scattering system combined with a time-of-flight spectrometer for insulator surface structural analysis. Insulator surface structure is difficult to study because of charging effects during electron or ion beam bombardment. Structural analyses of insulator surfaces are very important in fundamental research as well as technology fields. In our system, charged ion beams of 2 keV-He^+/Ne^+ are converted into neutral beams by charge exchange with the same element gas after the primary beam passes through a chopper. Other features of this system are pulsed beams, time-of-flight measurements, and a micochannel plate (MCP) detector is coaxially mounted along the primary beam. This is a home made equipment. Surface atomic structure can be "seen".
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Report
(4 results)
Research Products
(23 results)