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Studies on spectroscopic ellipsometry using GaP terahertz signal generator and its application for accurate measurement of film thickness

Research Project

Project/Area Number 20560026
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionTokyo Metropolitan University

Principal Investigator

SASAKI Tetsuo  Tokyo Metropolitan University, 半導体研究所, 准教授 (20321630)

Co-Investigator(Renkei-kenkyūsha) OYAMA Yutaka  東北大学, 工学研究科, 教授 (80169367)
TANABE Tadao  東北大学, 工学研究科, 助教 (10333840)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2010: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2009: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2008: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywordsテラヘルツ / 反射分光 / 複屈折率 / 複素屈折率 / エリプソメトリー
Research Abstract

Terahertz spectroscopic ellipsometer was realized using GaP terahertz signal generator as a light source. We started to obtain complex indices of refraction for organic crystals and semiconductor crystals. Dynamic range for thickness measurement system was improved according to frequency resolution improvement of terahertz signal generator.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (26 results)

All 2011 2010 2009 2008 Other

All Presentation (25 results) Remarks (1 results)

  • [Presentation] GaP結晶を用いた連続波テラヘルツ信号発生装置の周波数安定化2011

    • Author(s)
      佐々木哲朗、西澤潤一、田邉匡生
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学,厚木
    • Year and Date
      2011-03-24
    • Related Report
      2010 Final Research Report
  • [Presentation] GaP結晶を用いた連続波テラヘルツ信号発生装置の周波数安定化2011

    • Author(s)
      佐々木哲朗、西澤潤一、田邉匡生
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学 厚木
    • Year and Date
      2011-03-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] Wide-range high- esolution CW terahertz spectrometer using GaP crystal and its application2010

    • Author(s)
      T.Sasaki, J.Nishizawa, T.Tanabe
    • Organizer
      International Symposium on Frontier of Terahertz Spectroscopy IV-Innovations in THz Spectroscopy and THz-Wave Wireless Communications-
    • Place of Presentation
      Mastumoto, Nagano
    • Year and Date
      2010-10-21
    • Related Report
      2010 Final Research Report
  • [Presentation] Wide-range high-resolution CW terahertz spectrometer using GaP crystal and its application2010

    • Author(s)
      Tetsuo Sasaki, Jun-ichi Nishizawa, Tadao Tanabe
    • Organizer
      International Symposium on Frontier of Terahertz Spectroscopy IV-Innovations in THz Spectroscopy and THz-Wave Wireless Communications
    • Place of Presentation
      Matsumoto, Nagano
    • Year and Date
      2010-10-21
    • Related Report
      2010 Annual Research Report
  • [Presentation] Wide frequency range high resolution THz spectroscopy with using continuous-wave GaP terahertz signal generator and its application to defect detection2010

    • Author(s)
      T.Sasaki, J.Nishizawa, T.Tanabe
    • Organizer
      35th International Conference on Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010
    • Place of Presentation
      Rome, Italy
    • Year and Date
      2010-09-07
    • Related Report
      2010 Annual Research Report 2010 Final Research Report
  • [Presentation] GaP結晶を用いたCW-THz信号発生装置による広帯域テラヘルツ分光測定2010

    • Author(s)
      佐々木哲朗,西澤潤一,田邉匡生
    • Organizer
      2010年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学,平塚
    • Year and Date
      2010-03-19
    • Related Report
      2010 Final Research Report
  • [Presentation] GaP結晶を用いたCW-THz信号発生装置による広帯域テラヘルツ分光測定2010

    • Author(s)
      佐々木哲朗, 西澤潤一, 田邉匡生
    • Organizer
      2010年春季 第57回 応用物理学関係連合講演会
    • Place of Presentation
      東海大学, 平塚
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] 有機分子中の欠陥検出法と医学・薬学への展開-テラヘルツ分光学の将来展望-2010

    • Author(s)
      佐々木哲朗
    • Organizer
      第7回東京理科大学DDS研究センターシンポジウム
    • Place of Presentation
      東京理科大学,東京(招待講演)
    • Year and Date
      2010-02-03
    • Related Report
      2010 Final Research Report
  • [Presentation] 有機分子中の欠陥検出法と医学・薬学への展開-テラヘルツ分光学の将来展望-2010

    • Author(s)
      佐々木哲朗
    • Organizer
      第7回東京理科大学DDS研究センターシンポジウム
    • Place of Presentation
      東京理科大学, 東京
    • Year and Date
      2010-02-03
    • Related Report
      2009 Annual Research Report
  • [Presentation] Development of Laser and High Resolution Terahertz Signal Generator for Precise Terahertz Spectroscopy2009

    • Author(s)
      J.Nishizawa, T.Sasaki
    • Organizer
      12th International Symposium on Microwave and Optical Technology (ISMOT)
    • Place of Presentation
      Delhi, India(Invited)
    • Year and Date
      2009-12-19
    • Related Report
      2010 Final Research Report
  • [Presentation] (Invited)Development of Laser and High Resolution Terahertz Signal Generator for Precise Terahertz Spectroscopy2009

    • Author(s)
      西澤潤一, 佐々木哲朗
    • Organizer
      12th International Symposium on Microwave and Optical Technology(ISMOT)
    • Place of Presentation
      Delhi, India
    • Year and Date
      2009-12-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] High resolution terahertz spectroscopy for defect detection2009

    • Author(s)
      T.Sasaki, J.Nishizawa, T.Tanabe
    • Organizer
      2nd International Symposium on Terahertz between Japan, Sweden.
    • Place of Presentation
      Chalmers University of Technology Yoteburg, Sweden(Invited)
    • Year and Date
      2009-11-19
    • Related Report
      2010 Final Research Report
  • [Presentation] GaP Terahertz signal generator and its applications for spectral monitoring of dynamic reaction2009

    • Author(s)
      T.Tanabe, T.Tanabe, J.Nishizawa, Y.Oyama
    • Organizer
      2nd International Symposium on Terahertz between Japan, Sweden.
    • Place of Presentation
      Chalmers University of Technology, Yoteburg, Sweden(Invited)
    • Year and Date
      2009-11-19
    • Related Report
      2010 Final Research Report
  • [Presentation] (Invited)High resolution terahertz spectroscopy for defect detection2009

    • Author(s)
      佐々木哲朗, 西澤潤一, 田邉匡生
    • Organizer
      2nd International Symposium on Terahertz between Japan, Sweden
    • Place of Presentation
      Chalmers University of Technology, Yoteburg, Sweden
    • Year and Date
      2009-11-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] (Invited)GaP Terahertz signal generator and its applications for spectral monitoring of dynamic reaction2009

    • Author(s)
      田邉匡生, 佐々木哲朗, 西澤潤一, 小山裕
    • Organizer
      2nd International Symposium on Terahertz between Japan, Sweden
    • Place of Presentation
      Chalmers University of Technology, Yoteburg, Sweden
    • Year and Date
      2009-11-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] GaPテラヘルツ分光測定装置を用いた有機材料欠陥検出と評価2009

    • Author(s)
      佐々木哲朗,西澤潤一,田邉匡生
    • Organizer
      2009年秋季応用物理学関係連合講演会
    • Place of Presentation
      富山大学,富山
    • Year and Date
      2009-09-10
    • Related Report
      2010 Final Research Report
  • [Presentation] 有機分子性伝導体結晶のテラヘルツ分光分析2009

    • Author(s)
      大橋隆宏,丹野剛紀,田邉匡生,佐々木哲朗,小山裕,西澤潤一
    • Organizer
      2009年秋季応用物理学関係連合講演会
    • Place of Presentation
      富山大学,富山
    • Year and Date
      2009-09-10
    • Related Report
      2010 Final Research Report
  • [Presentation] GaPテラヘルツ分光測定装置を用いた有機材料欠陥検出と評価2009

    • Author(s)
      佐々木哲朗, 西澤潤一, 田邉匡生
    • Organizer
      2009年秋季応用物理学関係連合講演会
    • Place of Presentation
      富山大学, 富山
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] 有機分子性伝導体結晶のテラヘルツ分光分析2009

    • Author(s)
      大橋隆宏, 丹野剛紀, 田邉匡生, 佐々木哲朗, 小山裕, 西澤潤一
    • Organizer
      2009年秋季応用物理学関係連合講演会
    • Place of Presentation
      富山大学, 富山
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] GaPテラヘルツ波導波路構造作製とテラヘルツ波出力特性評価2009

    • Author(s)
      斉藤恭介、田邉匡生、小山裕、佐々木哲朗、西澤潤一
    • Organizer
      第144回日本金属学会
    • Place of Presentation
      東京工業大学大岡山キャンパス
    • Year and Date
      2009-03-29
    • Related Report
      2010 Final Research Report 2008 Annual Research Report
  • [Presentation] Terahertz Signal Generator and its Application for Life Science and Material Science2008

    • Author(s)
      J.Nishizawa, T.Sasaki
    • Organizer
      APAM General assembly and Conference
    • Place of Presentation
      New Delhi, India(Invited)
    • Year and Date
      2008-11-18
    • Related Report
      2010 Final Research Report
  • [Presentation] Terahertz Signal Generator and its Application for Life Science and Material Science2008

    • Author(s)
      Jun-ichi Nishizawa, Tetsuo Sasaki
    • Organizer
      APAM General assembly and Conference
    • Place of Presentation
      New Delhi, India
    • Year and Date
      2008-11-18
    • Related Report
      2008 Annual Research Report
  • [Presentation] 導波路型GaP結晶を用いた楕円偏光テラヘルツ波発生2008

    • Author(s)
      斉藤恭介、田邉匡生、小山裕、木村智之、佐々木哲朗、西澤潤一
    • Organizer
      2008年秋季応用物理学関係連合講演会
    • Place of Presentation
      中部大学
    • Year and Date
      2008-09-03
    • Related Report
      2010 Final Research Report 2008 Annual Research Report
  • [Presentation] THz-wave generation from GaP rib waveguides by difference frequency mixing2008

    • Author(s)
      K.Saito, T.Tanabe, K.Nozawa, K.Suto, T.Sasaki, J.Nishizawa, Y.Oyama
    • Organizer
      ICO-21 2008 Congress
    • Place of Presentation
      Sydney, Australia
    • Year and Date
      2008-07-08
    • Related Report
      2010 Final Research Report
  • [Presentation] THZ-wave generation from GaP rib waveguides by difference frequency mixing2008

    • Author(s)
      K. Saito, T. Tanabe, K. Nozawa, K. Suto, T. Sasaki, J. Nishizawa, Y. Oyama
    • Organizer
      ICO-21 2008 Congress
    • Place of Presentation
      Sydney, Australia
    • Year and Date
      2008-07-08
    • Related Report
      2008 Annual Research Report
  • [Remarks] ホームページ等

    • URL

      http://hanken.cc.sophia.ac.jp/

    • Related Report
      2010 Final Research Report

URL: 

Published: 2008-04-01   Modified: 2016-04-21  

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