Studies on spectroscopic ellipsometry using GaP terahertz signal generator and its application for accurate measurement of film thickness

• Project/Area Number: 20560026
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Tokyo Metropolitan University
• Principal Investigator: SASAKI Tetsuo Tokyo Metropolitan University, 半導体研究所, 准教授 (20321630)
• Co-Investigator(Renkei-kenkyūsha): OYAMA Yutaka 東北大学, 工学研究科, 教授 (80169367) ; TANABE Tadao 東北大学, 工学研究科, 助教 (10333840)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000); Fiscal Year 2010: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2009: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2008: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
• Keywords: テラヘルツ / 反射分光 / 複屈折率 / 複素屈折率 / エリプソメトリー

Research Abstract

Terahertz spectroscopic ellipsometer was realized using GaP terahertz signal generator as a light source. We started to obtain complex indices of refraction for organic crystals and semiconductor crystals. Dynamic range for thickness measurement system was improved according to frequency resolution improvement of terahertz signal generator.

Research Products

• [Presentation] GaP結晶を用いた連続波テラヘルツ信号発生装置の周波数安定化 (2011)
  • Author(s): 佐々木哲朗、西澤潤一、田邉匡生
  • Organizer: 2011年春季第58回応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学,厚木
  • Year and Date: 2011-03-24
• [Presentation] GaP結晶を用いた連続波テラヘルツ信号発生装置の周波数安定化 (2011)
  • Author(s): 佐々木哲朗、西澤潤一、田邉匡生
  • Organizer: 2011年春季第58回応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学 厚木
  • Year and Date: 2011-03-24
• [Presentation] Wide-range high- esolution CW terahertz spectrometer using GaP crystal and its application (2010)
  • Author(s): T.Sasaki, J.Nishizawa, T.Tanabe
  • Organizer: International Symposium on Frontier of Terahertz Spectroscopy IV-Innovations in THz Spectroscopy and THz-Wave Wireless Communications-
  • Place of Presentation: Mastumoto, Nagano
  • Year and Date: 2010-10-21
• [Presentation] Wide-range high-resolution CW terahertz spectrometer using GaP crystal and its application (2010)
  • Author(s): Tetsuo Sasaki, Jun-ichi Nishizawa, Tadao Tanabe
  • Organizer: International Symposium on Frontier of Terahertz Spectroscopy IV-Innovations in THz Spectroscopy and THz-Wave Wireless Communications
  • Place of Presentation: Matsumoto, Nagano
  • Year and Date: 2010-10-21
• [Presentation] Wide frequency range high resolution THz spectroscopy with using continuous-wave GaP terahertz signal generator and its application to defect detection (2010)
  • Author(s): T.Sasaki, J.Nishizawa, T.Tanabe
  • Organizer: 35th International Conference on Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010
  • Place of Presentation: Rome, Italy
  • Year and Date: 2010-09-07
• [Presentation] GaP結晶を用いたCW-THz信号発生装置による広帯域テラヘルツ分光測定 (2010)
  • Author(s): 佐々木哲朗,西澤潤一,田邉匡生
  • Organizer: 2010年春季第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学,平塚
  • Year and Date: 2010-03-19
• [Presentation] GaP結晶を用いたCW-THz信号発生装置による広帯域テラヘルツ分光測定 (2010)
  • Author(s): 佐々木哲朗, 西澤潤一, 田邉匡生
  • Organizer: 2010年春季 第57回 応用物理学関係連合講演会
  • Place of Presentation: 東海大学, 平塚
  • Year and Date: 2010-03-19
• [Presentation] 有機分子中の欠陥検出法と医学・薬学への展開-テラヘルツ分光学の将来展望- (2010)
  • Author(s): 佐々木哲朗
  • Organizer: 第7回東京理科大学DDS研究センターシンポジウム
  • Place of Presentation: 東京理科大学,東京(招待講演)
  • Year and Date: 2010-02-03
• [Presentation] 有機分子中の欠陥検出法と医学・薬学への展開-テラヘルツ分光学の将来展望- (2010)
  • Author(s): 佐々木哲朗
  • Organizer: 第7回東京理科大学DDS研究センターシンポジウム
  • Place of Presentation: 東京理科大学, 東京
  • Year and Date: 2010-02-03
• [Presentation] Development of Laser and High Resolution Terahertz Signal Generator for Precise Terahertz Spectroscopy (2009)
  • Author(s): J.Nishizawa, T.Sasaki
  • Organizer: 12th International Symposium on Microwave and Optical Technology (ISMOT)
  • Place of Presentation: Delhi, India(Invited)
  • Year and Date: 2009-12-19
• [Presentation] (Invited)Development of Laser and High Resolution Terahertz Signal Generator for Precise Terahertz Spectroscopy (2009)
  • Author(s): 西澤潤一, 佐々木哲朗
  • Organizer: 12th International Symposium on Microwave and Optical Technology(ISMOT)
  • Place of Presentation: Delhi, India
  • Year and Date: 2009-12-19
• [Presentation] High resolution terahertz spectroscopy for defect detection (2009)
  • Author(s): T.Sasaki, J.Nishizawa, T.Tanabe
  • Organizer: 2nd International Symposium on Terahertz between Japan, Sweden.
  • Place of Presentation: Chalmers University of Technology Yoteburg, Sweden(Invited)
  • Year and Date: 2009-11-19
• [Presentation] GaP Terahertz signal generator and its applications for spectral monitoring of dynamic reaction (2009)
  • Author(s): T.Tanabe, T.Tanabe, J.Nishizawa, Y.Oyama
  • Organizer: 2nd International Symposium on Terahertz between Japan, Sweden.
  • Place of Presentation: Chalmers University of Technology, Yoteburg, Sweden(Invited)
  • Year and Date: 2009-11-19
• [Presentation] (Invited)High resolution terahertz spectroscopy for defect detection (2009)
  • Author(s): 佐々木哲朗, 西澤潤一, 田邉匡生
  • Organizer: 2nd International Symposium on Terahertz between Japan, Sweden
  • Place of Presentation: Chalmers University of Technology, Yoteburg, Sweden
  • Year and Date: 2009-11-19
• [Presentation] (Invited)GaP Terahertz signal generator and its applications for spectral monitoring of dynamic reaction (2009)
  • Author(s): 田邉匡生, 佐々木哲朗, 西澤潤一, 小山裕
  • Organizer: 2nd International Symposium on Terahertz between Japan, Sweden
  • Place of Presentation: Chalmers University of Technology, Yoteburg, Sweden
  • Year and Date: 2009-11-19
• [Presentation] GaPテラヘルツ分光測定装置を用いた有機材料欠陥検出と評価 (2009)
  • Author(s): 佐々木哲朗,西澤潤一,田邉匡生
  • Organizer: 2009年秋季応用物理学関係連合講演会
  • Place of Presentation: 富山大学,富山
  • Year and Date: 2009-09-10
• [Presentation] 有機分子性伝導体結晶のテラヘルツ分光分析 (2009)
  • Author(s): 大橋隆宏,丹野剛紀,田邉匡生,佐々木哲朗,小山裕,西澤潤一
  • Organizer: 2009年秋季応用物理学関係連合講演会
  • Place of Presentation: 富山大学,富山
  • Year and Date: 2009-09-10
• [Presentation] GaPテラヘルツ分光測定装置を用いた有機材料欠陥検出と評価 (2009)
  • Author(s): 佐々木哲朗, 西澤潤一, 田邉匡生
  • Organizer: 2009年秋季応用物理学関係連合講演会
  • Place of Presentation: 富山大学, 富山
  • Year and Date: 2009-09-10
• [Presentation] 有機分子性伝導体結晶のテラヘルツ分光分析 (2009)
  • Author(s): 大橋隆宏, 丹野剛紀, 田邉匡生, 佐々木哲朗, 小山裕, 西澤潤一
  • Organizer: 2009年秋季応用物理学関係連合講演会
  • Place of Presentation: 富山大学, 富山
  • Year and Date: 2009-09-10
• [Presentation] GaPテラヘルツ波導波路構造作製とテラヘルツ波出力特性評価 (2009)
  • Author(s): 斉藤恭介、田邉匡生、小山裕、佐々木哲朗、西澤潤一
  • Organizer: 第144回日本金属学会
  • Place of Presentation: 東京工業大学大岡山キャンパス
  • Year and Date: 2009-03-29
• [Presentation] Terahertz Signal Generator and its Application for Life Science and Material Science (2008)
  • Author(s): J.Nishizawa, T.Sasaki
  • Organizer: APAM General assembly and Conference
  • Place of Presentation: New Delhi, India(Invited)
  • Year and Date: 2008-11-18
• [Presentation] Terahertz Signal Generator and its Application for Life Science and Material Science (2008)
  • Author(s): Jun-ichi Nishizawa, Tetsuo Sasaki
  • Organizer: APAM General assembly and Conference
  • Place of Presentation: New Delhi, India
  • Year and Date: 2008-11-18
• [Presentation] 導波路型GaP結晶を用いた楕円偏光テラヘルツ波発生 (2008)
  • Author(s): 斉藤恭介、田邉匡生、小山裕、木村智之、佐々木哲朗、西澤潤一
  • Organizer: 2008年秋季応用物理学関係連合講演会
  • Place of Presentation: 中部大学
  • Year and Date: 2008-09-03
• [Presentation] THz-wave generation from GaP rib waveguides by difference frequency mixing (2008)
  • Author(s): K.Saito, T.Tanabe, K.Nozawa, K.Suto, T.Sasaki, J.Nishizawa, Y.Oyama
  • Organizer: ICO-21 2008 Congress
  • Place of Presentation: Sydney, Australia
  • Year and Date: 2008-07-08
• [Presentation] THZ-wave generation from GaP rib waveguides by difference frequency mixing (2008)
  • Author(s): K. Saito, T. Tanabe, K. Nozawa, K. Suto, T. Sasaki, J. Nishizawa, Y. Oyama
  • Organizer: ICO-21 2008 Congress
  • Place of Presentation: Sydney, Australia
  • Year and Date: 2008-07-08
• [Remarks] ホームページ等
  • URL: http://hanken.cc.sophia.ac.jp/