Studies on spectroscopic ellipsometry using GaP terahertz signal generator and its application for accurate measurement of film thickness
| Project/Area Number |
20560026
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (C)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Thin film/Surface and interfacial physical properties
|
|---|
| Research Institution | Tokyo Metropolitan University |
|---|
Principal Investigator |
SASAKI Tetsuo Tokyo Metropolitan University, 半導体研究所, 准教授 (20321630)
|
|---|
| Co-Investigator(Renkei-kenkyūsha) |
OYAMA Yutaka 東北大学, 工学研究科, 教授 (80169367)
TANABE Tadao 東北大学, 工学研究科, 助教 (10333840)
|
|---|
| Project Period (FY) |
2008 – 2010
|
| Project Status |
Completed (Fiscal Year 2010)
|
| Budget Amount *help |
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2010: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2009: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2008: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
|
|---|
| Keywords | テラヘルツ / 反射分光 / 複屈折率 / 複素屈折率 / エリプソメトリー |
|---|
| Research Abstract |
Terahertz spectroscopic ellipsometer was realized using GaP terahertz signal generator as a light source. We started to obtain complex indices of refraction for organic crystals and semiconductor crystals. Dynamic range for thickness measurement system was improved according to frequency resolution improvement of terahertz signal generator.
|
Report
(4 results)
Research Products
(26 results)
