Optical frequency scanning microscope to measure the step-height and the deformation of a small specimen.
| Project/Area Number |
20560030
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied optics/Quantum optical engineering
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| Research Institution | Hokkaido University |
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Principal Investigator |
KAKUMA Seiichi 北海道大学, 大学院・工学研究院, 助教 (90204338)
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| Project Period (FY) |
2008 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2009: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2008: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
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| Keywords | 光周波数走査 / 干渉計 / 半導体レーザ / 長さ変化 / 形状計測 / 光計測 / 波長走査 / 微小段差 / 波長連続走査 / 平渉計 |
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| Research Abstract |
A frequency scanning type interferometric laser microscope has been developed using a pair of vertical-cavity-surface-emitting-laser-diodes capable of frequency scanning with a broad scan range. The presented system can measure both the geometric height and the deformation of the test piece simultaneously. As a result of the experiments, the profile and the thermal expansion of the metal sample with a 200 micron-cube.
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Report
(4 results)
Research Products
(15 results)
