| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2009: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2008: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
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| Research Abstract |
In this study, an ultra-precision positioning mechanism with one-millimeter stroke, i.e. maximum stroke of 1×1 mm in X×Y, was fabricated by using an integrated monolithic flexure guide mechanism and electromagnetic linear motors, and its control system was constructed. Consequently, fine positioning resolution of 2 nm in PTP positioning motion and superior CP positioning performance with roundness error less than 10.5 nm and radial error of 2 nm (RMS value) in continuous circular motion with 1 mm diameter was achieved. Therefore, an ultra-precision positioning system with nanometer-level resolution and accuracy over one-millimeter stroke was realized.
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