Fabrication and control of ultra-precision positioning mechanism over one-millimeter stroke by using flexure guide and electromagnetic actuator
| Project/Area Number |
20560103
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Shinshu University |
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Principal Investigator |
FUKADA Shigeo Shinshu University, 工学部, 教授 (70156743)
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| Project Period (FY) |
2008 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2009: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2008: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
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| Keywords | 精密位置決め / 精密機構 / 運動制御 / 弾性案内 / 精密計測 / 精密位置決あ |
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| Research Abstract |
In this study, an ultra-precision positioning mechanism with one-millimeter stroke, i.e. maximum stroke of 1×1 mm in X×Y, was fabricated by using an integrated monolithic flexure guide mechanism and electromagnetic linear motors, and its control system was constructed. Consequently, fine positioning resolution of 2 nm in PTP positioning motion and superior CP positioning performance with roundness error less than 10.5 nm and radial error of 2 nm (RMS value) in continuous circular motion with 1 mm diameter was achieved. Therefore, an ultra-precision positioning system with nanometer-level resolution and accuracy over one-millimeter stroke was realized.
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Report
(4 results)
Research Products
(12 results)
