Development of scanning nanopipette probe microscope for 0.1 atto little deposition

• Project/Area Number: 20560105
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Shizuoka University
• Principal Investigator: IWATA Futoshi Shizuoka University, 工学部, 教授 (30262794)
• Co-Investigator(Renkei-kenkyūsha): NAKAO Hidenobu 独立行政法人物質・材料研究機構, 主任研究員 (80421395) ; SASAKI Akira 静岡大学, 工学部, 教授 (80022309)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000); Fiscal Year 2010: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2009: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2008: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
• Keywords: ナノ・マイクロ加工 / ナノピペット / プローブ / SPM / マニピュレーション / 微細加工 / 堆積微細加工 / 滴下制御 / 顕微鏡 / 堆積加工 / マニピュレーター / 推積加工

Research Abstract

We developed a novel volume control technique for local metal-plating deposition using a scanning probe microscope with a nanopipette probe. The nanopipette probe was filled with CuSO_4 electrolyte solution. A Cu dot was electrochemically deposited on an Au surface by applying a dc bias voltage between the electrolyte solution and the surface. The volume of the deposited Cu dot was dependent on the electric charge during the electrochemical reaction. By controlling the electric charge during the deposition, it was possible to control the volume of the Cu dot.

Research Products

• [Journal Article] Probe type micro magnetic manipulator utilizing localized magnetic field with closed loop magnetic path (2011)
  • Author(s): S.Ito, K.Ito, F.Iwata
  • Journal Title: International Journal of Nanomanufacturing 掲載決定
  • Peer Reviewed
• [Journal Article] Nanometer-scale Deposition of Metal Plating Using a Nanopipette Probe in Liquid Condition (2011)
  • Author(s): 伊東聡, 岩田太
  • Journal Title: Jpn.J.Appl.Phys. 掲載決定
  • NAID: 210000139522
  • Peer Reviewed
• [Journal Article] Volume Control of Metal-Plating Deposition Using a Nanopipette Probe by Controlling Electric Charge (2010)
  • Author(s): S.Ito, T.Keino, F.Iwata
  • Journal Title: Jpn.J.Appl.Phys. 49
  • NAID: 210000069139
  • Peer Reviewed
• [Journal Article] Operation of Self-Sensitive Cantilever in Liquid for Multiprobe Manipulation (2010)
  • Author(s): F.Iwata, Y.Mizuguchi, K.Ozawa, T.Ushiki
  • Journal Title: Jpn.J.Appl.Phys. 49
  • NAID: 210000069137
  • Peer Reviewed
• [Journal Article] Production of ultrafine atmospheric pressure plasma jet with nano-capillary (2010)
  • Author(s): R.Kakei a, A.Ogino, F.Iwata, M.Nagatsu
  • Journal Title: Thin Solid Films 518 Pages: 3457-3460
  • Peer Reviewed
• [Journal Article] マイクロ磁気プローブで操作された磁性体微粒子による生体試料のマニピュレーション (2010)
  • Author(s): 伊東聡、岩田太、中尾秀信、七里元晴
  • Journal Title: 精密工学会誌 76 Pages: 64-68
  • NAID: 130000302339
  • Peer Reviewed
• [Journal Article] Volume Control of Metal-Plating Deposition Using a Nanopipette Probe by Controlling Electric Charge (2010)
  • Author(s): S.Ito, T.Keino, F.Iwata
  • Journal Title: Jpn.J.Appl.Phys Volume: 49
  • NAID: 210000069139
  • Peer Reviewed
• [Journal Article] Operation of Self-Sensitive Cantilever in Liquid for Multiprobe Manipulation (2010)
  • Author(s): F.Iwata, Y.Mizuguchi, K.Ozawa, T.Ushiki
  • Journal Title: Jpn.J.Appl.Phys Volume: 49
  • NAID: 210000069137
  • Peer Reviewed
• [Journal Article] Production of ultrafine atmospheric pressure plasma jet with nano-capillary (2010)
  • Author(s): R.Kakei a, A.Ogino, F.Iwata, M.Nagatsu
  • Journal Title: Thin Solid Films Volume: 518 Pages: 3457-3460
  • Peer Reviewed
• [Journal Article] マイクロ磁気プローブで操作された磁性体微粒子による生体試料のマニピュレーション (2010)
  • Author(s): 伊東聡、岩田太、中尾秀信、七里元晴
  • Journal Title: 精密工学会誌 Volume: 76 Pages: 64-68
  • NAID: 130000302339
  • Peer Reviewed
• [Journal Article] マイクロ磁気プローブで操作された磁性体微粒子による生体試料のマニピュレーション (2010)
  • Author(s): 伊東聡, 岩田太, 中尾秀信, 七里元晴
  • Journal Title: 精密工学会誌 76 Pages: 64-68
  • NAID: 130000302339
  • Peer Reviewed
• [Journal Article] Local electrophoresis deposition ofnanomaterials assisted by a laser trappingtechnique (2009)
  • Author(s): F.Iwata, M.Kaji, A.Suzuki, S.Ito, H.Nakao
  • Journal Title: Nanotechnology 20 Pages: 235303-235308
  • Peer Reviewed
• [Journal Article] Nanometer-Scale Manipulation and Ultrasonic Cutting Using an Atomic Force Microscope Controlled by a Haptic Device as a Human Interface (2008)
  • Author(s): F.Iwata, K.Ohara, Y.Ishizu, A.Sasaki, H.Aoyama, T.Ushiki
  • Journal Title: Jpn.J.Appl.Phys. 47(2008)6 Pages: 181-618
  • Peer Reviewed
• [Journal Article] ナノピペットプローブ顕微鏡を用いた微細加工 (2008)
  • Author(s): 岩田太
  • Journal Title: 化学工業 59 Pages: 49-54
  • Peer Reviewed
• [Presentation] ナノピペットプローブを有する原子間力顕微鏡を用いた液中での金属めっきドット堆積法の開発 (2011)
  • Author(s): 伊東聡、山崎晃資、岩田太
  • Organizer: 2011年度春季第58会応用物理学会学関係連合講演会
  • Place of Presentation: 神奈川工科大学(神奈川県)
  • Year and Date: 2011-03-27
• [Presentation] ナノピペットプローブを有する原子間力顕微鏡を用いた液中での金属めっきドット堆積法の開発 (2011)
  • Author(s): 伊東聡、山崎晃資、岩田太
  • Organizer: 2011年度春季第58会応用物理学会学関係連合講演会
  • Place of Presentation: 神奈川工科大学
  • Year and Date: 2011-03-26
• [Presentation] Compact Manipulator Based on an Atomic Force Microscope for Multi-probe Operation (2010)
  • Author(s): F.Iwata
  • Organizer: The Twenty-fifty Annual Meeting of The American Society for Precision Engineering, Session V Design of Precision Machines I
  • Place of Presentation: Denver, USA
  • Year and Date: 2010-11-03
• [Presentation] レーザトラップを用いた局所的電気泳動堆積法による微細造形物の電気的および機械的物性評価 (2010)
  • Author(s): 中野隆彦、鈴木淳志、岩田太
  • Organizer: 2010年度精密工学会秋季大会
  • Place of Presentation: 名古屋大学(愛知県)
  • Year and Date: 2010-09-28
• [Presentation] ナノピペットプローブを用いた電気泳動による液中堆積加工法の開発 (2010)
  • Author(s): 伊東聡、山崎晃資、岩田太
  • Organizer: 2010年度精密工学会秋季大会
  • Place of Presentation: 名古屋大学(愛知県)
  • Year and Date: 2010-09-28
• [Presentation] ナノピペットプローブを用いた電気泳動による液中堆積加工法の開発 (2010)
  • Author(s): 伊東聡、山崎晃資、岩田太
  • Organizer: 2010年度精密工学会秋季大会
  • Place of Presentation: 名古屋大学
  • Year and Date: 2010-09-27
• [Presentation] ナノマニピュレーションを目指したプローブ顕微鏡技術開発 (2010)
  • Author(s): 岩田太
  • Organizer: 2010年度精密工学会秋季大会
  • Place of Presentation: 名古屋大学(愛知県)
  • Year and Date: 2010-09-27
• [Presentation] 電荷量制御によるナノピペットプローブを用いた金属めっきドットの堆積量制御法の開発 (2010)
  • Author(s): 伊東聡、岩田太
  • Organizer: 2010年第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学
  • Year and Date: 2010-09-16
• [Presentation] 電荷量制御によるナノピペットプローブをを用いた金属めっきドットの堆積量制御法の開発 (2010)
  • Author(s): 伊東聡、岩田太
  • Organizer: 2010年第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学(長崎県)
  • Year and Date: 2010-09-16
• [Presentation] Counting of Electric Charge for Control of Local Metal Plating Using a Scanning Nanopipette Probe Microscope (2010)
  • Author(s): S.Ito, F.Iwata
  • Organizer: 10th International Symposium on Measurement and Quality Control
  • Place of Presentation: 大阪大学コンベンションセンター(大阪)
  • Year and Date: 2010-09-08
• [Presentation] Counting of Electric Charge for Control of Local Metal Plating Using a Scanning Nanopipette Probe Microscope. (2010)
  • Author(s): 伊東聡, 岩田太
  • Organizer: 10th International Symposium on Measurement and Quality Control
  • Place of Presentation: Osaka
  • Year and Date: 2010-09-06
• [Presentation] 電荷量制御による走査型ナノピペットプローブ顕微鏡を用いた金属めっきドットの堆積量制御法の開発 (2010)
  • Author(s): 伊東聡、岩田太
  • Organizer: 応用物理学会(M&BE分科会)有機バイオSPM研究会・2010
  • Place of Presentation: 幕張メッセ
  • Year and Date: 2010-09-03
• [Presentation] 走査型イオン伝導顕微鏡を用いた生体試料の高精度計測法の開発 (2010)
  • Author(s): 福田和弥、米谷雄作、牛木辰男、岩田太
  • Organizer: 応用物理学会(M&BE分科会)磯バイオSPM研究会・2010
  • Place of Presentation: 幕張メッセ(千葉県)
  • Year and Date: 2010-09-03
• [Presentation] MoP-31 Local Metal Deposition Using a Scanning Nanopipette Microscope by Constant Charge Control (2010)
  • Author(s): 伊東聡, 岩田太
  • Organizer: The 12th International Scanning Probe Microscopy Conference
  • Place of Presentation: Sapporo
  • Year and Date: 2010-05-10
• [Presentation] MoP-31 Local Metal Deposition Using a Scanning Nanopipette Microscope by Constant Charge Control (2010)
  • Author(s): S.Ito, F.Iwata
  • Organizer: The 12th International Scanning Probe Microscopy Conference
  • Place of Presentation: 京王プラザホテル(札幌)
  • Year and Date: 2010-05-10
• [Presentation] Compact Manipulator Based on an Atomic Force Microscope Coupled with a Haptic Device for Multi-probe Manipulation of Biological Samples (2010)
  • Author(s): F.Iwata, Y.Mizuguchi, T.Ushiki
  • Organizer: The 12th International Scanning Probe Microscopy Conference
  • Place of Presentation: 京王プラザホテル(札幌)
  • Year and Date: 2010-05-10
• [Presentation] ナノピペットプローブを用いた微細立体造形法の開発 (2010)
  • Author(s): 深田徹、岩田太
  • Organizer: 2010年度精密工学会春季大会H10(625-626)
  • Place of Presentation: 埼玉大学
  • Year and Date: 2010-03-16
• [Presentation] Development of Nanometer-scale Deposition Technique Using a Nanopipette Probe in Liquid Condition (2010)
  • Author(s): 伊東聡, 山崎晃資, 岩田太
  • Organizer: The 18th International Colloquium on Scanning Probe Microscopy
  • Place of Presentation: Atagawa
• [Presentation] Volume Control Technique of Nano Metal Plating Using a Precisely Positioned Nanopipette Probe (2010)
  • Author(s): 伊東聡, 岩田太
  • Organizer: The 4th International Conference on Positioning Technology
  • Place of Presentation: Paradise Hotel, Busan, Korea
• [Presentation] Development of Nanometer-scale Deposition Technique Using a Nanopipette Probe in Liquid Condition (2010)
  • Author(s): S Ito, K Yamazaki, F Iwata
  • Organizer: The 18th International Colloquium on Scanning Probe Microscopy
  • Place of Presentation: 熱川ハイツ(静岡県)
• [Presentation] Evaluation of Mechanical and Electrical Properties of Micro Structures Fabricated by Positioned Electrophoresis Deposition usin Laser Trapping (2010)
  • Author(s): T Nakano, A Suzuki, F Iwata
  • Organizer: The 4th International Conference on Positioning Technology
  • Place of Presentation: 韓国・釜山
• [Presentation] Volume COntrol Technique of Nano Metal Plating Using a Precisely Positioned Nanopipette Probe (2010)
  • Author(s): S Ito, F Iwata
  • Organizer: The 4th International Conference on Positioning Technology
  • Place of Presentation: 韓国・釜山
• [Presentation] Multi-Probe Manipulation of Biological Samples using Compact Atomic Force Microscopes (2010)
  • Author(s): F.Iwata, T.Ushiki
  • Organizer: XXI International Symposium on Morphological Sciences
  • Place of Presentation: Taormina/Italy
• [Presentation] Fabrication of Nano-Meter Scale Dots Using a Scanning Nanopipette Probe Microscope by Controlling Electric Charge. (2009)
  • Author(s): 伊東聡, 慶野拓也, 岩田太
  • Organizer: The 17th International Colloquium on Scanning Probe Microscopy (46)(講演番号S4-13)
  • Place of Presentation: Atagawa
  • Year and Date: 2009-12-10
• [Presentation] Fabrication of Nano-Meter Scale Dots Using a Scanning Nanopipette Probe Microscope by Controlling Electric Charge (2009)
  • Author(s): So Ito, Takuya Keino, Futoshi Iwata
  • Organizer: The 17th International Colloquium on Scanning Probe Microscopy
  • Place of Presentation: Atagawa
  • Year and Date: 2009-12-10
• [Presentation] 走査型ナノピペットプローブ顕微鏡を用いた微細金属ドット推積法の開発 (2009)
  • Author(s): 伊東聡, 岡田光希, 慶野拓也, 可児昌寛, 岩田太
  • Organizer: 2009年度精密工学会秋季大会
  • Place of Presentation: 神戸大学
  • Year and Date: 2009-09-12
• [Presentation] Fabrication of nanometer-scale metal dots using a scanning nano-pipette probe microscope with an electric charge control. (2009)
  • Author(s): 伊東聡, 慶野拓也, 可児昌寛, 岡田光希, 岩田太
  • Organizer: 3rd International Conference of Asian Society for Precision Engineering and Nanotechnology(講演番号2A2-3)
  • Place of Presentation: Kokura
• [Presentation] 走査型ナノピペットプローブ顕微鏡を用いた微細金属ドット推積法の開発 (2009)
  • Author(s): 伊東聡、岡田光希、慶野拓也、可児昌寛、岩田太
  • Organizer: 2009年度精密工学会秋季大会K62(811-812)
  • Place of Presentation: 神戸大学
• [Presentation] Fabrication of nanometer-scale metal dots using a scanning nano-pipette probe microscope with an electric charge control (2009)
  • Author(s): So Ito, Takuya Keino, Masahiro Kani, Koki Okada, Futoshi Iwata
  • Organizer: 3rd International Conference of Asian Society for Precision Engineering and Nanotechnology
  • Place of Presentation: Kokura
• [Presentation] プローブ顕微鏡を用いたナノクラフトテクノロジー (2008)
  • Author(s): 岩田太
  • Organizer: 応用物理学会・応用電子分科会研究例会
  • Place of Presentation: 機械振興会館
  • Year and Date: 2008-07-04
• [Presentation] ナノ微粒子のマニピュレーションおよび堆積加工法 (2008)
  • Author(s): 岩田太
  • Organizer: JST静岡大学連携による新技術説明会
• [Book] 実用精密位置決め技術事典(産業技術サービスセンター) (2008)
  • Author(s): 岩田太(分担)
• [Book] 実用 精密位置決め技術事典 (2008)
  • Author(s): 吉本成香(編集), 岩田太(分担執筆)
  • Total Pages: 754
  • Publisher: 産業技術サービスセンター
• [Patent(Industrial Property Rights)] ステージ装置 (2009)
  • Inventor(s): 岩田太
  • Industrial Property Rights Holder: 静岡大学
  • Industrial Property Number: 2009-100897
  • Filing Date: 2009-04-17