Analysis of micro fracture mechanism of mono-crystalline silicon by using extended analytical-solution-controlled molecular dynamics
| Project/Area Number |
20560106
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Nagoya Institute of Technology |
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Principal Investigator |
INAMURA Toyoshiro Nagoya Institute of Technology, 大学院・工学研究科, 教授 (60107539)
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| Co-Investigator(Kenkyū-buntansha) |
TAKEZAWA Nobuhiro 名古屋工業大学, 大学院・工学研究科, 助教 (50236452)
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| Project Period (FY) |
2008 – 2010
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| Project Status |
Completed (Fiscal Year 2010)
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| Budget Amount *help |
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2010: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2009: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2008: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
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| Keywords | 分子動力学 / 解析解 / 材料欠陥 / 破壊 / マイクロダイナミックス / ズーミング / モードIき裂先端場 / 粗視化 / 連続体 / 粒子間相互作用 / 繰り込み / 引張り破壊 / ヘルツ押し込み / クラック / シリコン / アモルファス / 欠陥 / 弾性波 / ヘルツ押込み / ミクロ |
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| Research Abstract |
In Hertz indentation of mono-crystalline silicon with no pre-existing defect, phase change from diamond to amorphous structures occurs beneath the indenter. Then the dynamic stress associating with the acoustic waves emitted from the amorphous area is combined with the static tensile stress around the indenter and causes local poly-crystallization so that voids are created when cross slips occur in the area. Three types of crack surfaces, mirror, mist and hackle appear depending on the amount of involved dynamic effect in crack propagation.
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Report
(4 results)
Research Products
(10 results)
